JP5787059B2 - 圧電振動片、圧電振動子、電子デバイス - Google Patents

圧電振動片、圧電振動子、電子デバイス Download PDF

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Publication number
JP5787059B2
JP5787059B2 JP2011056388A JP2011056388A JP5787059B2 JP 5787059 B2 JP5787059 B2 JP 5787059B2 JP 2011056388 A JP2011056388 A JP 2011056388A JP 2011056388 A JP2011056388 A JP 2011056388A JP 5787059 B2 JP5787059 B2 JP 5787059B2
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Prior art keywords
axis
piezoelectric
vibrating piece
piezoelectric vibrating
electrode
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Japanese (ja)
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JP2012195652A (ja
JP2012195652A5 (enrdf_load_stackoverflow
Inventor
満広 西田
満広 西田
安池　亮一
亮一 安池
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Seiko Epson Corp
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Seiko Epson Corp
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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2011056388A 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス Active JP5787059B2 (ja)

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JP2011056388A JP5787059B2 (ja) 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス

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JP2011056388A JP5787059B2 (ja) 2011-03-15 2011-03-15 圧電振動片、圧電振動子、電子デバイス

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JP2012195652A JP2012195652A (ja) 2012-10-11
JP2012195652A5 JP2012195652A5 (enrdf_load_stackoverflow) 2014-05-01
JP5787059B2 true JP5787059B2 (ja) 2015-09-30

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6363328B2 (ja) * 2013-03-27 2018-07-25 京セラ株式会社 水晶デバイス
JP6729643B2 (ja) * 2018-07-31 2020-07-22 セイコーエプソン株式会社 発振器、電子機器および移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033640A (ja) * 2000-07-17 2002-01-31 Toyo Commun Equip Co Ltd 圧電デバイス
JP3888107B2 (ja) * 2001-08-31 2007-02-28 株式会社大真空 圧電振動デバイス用圧電振動板のエッチング方法
JP4039284B2 (ja) * 2003-03-17 2008-01-30 セイコーエプソン株式会社 質量測定用圧電振動子の製造方法および質量測定用圧電振動子並びに質量測定装置
JP2008109538A (ja) * 2006-10-27 2008-05-08 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2008252859A (ja) * 2007-03-06 2008-10-16 Epson Toyocom Corp 圧電デバイスおよび圧電デバイスの製造方法
JP2008219827A (ja) * 2007-03-08 2008-09-18 Epson Toyocom Corp 圧電振動片、および圧電デバイス
JP2009158999A (ja) * 2007-12-25 2009-07-16 Epson Toyocom Corp 圧電デバイス
JP2010219993A (ja) * 2009-03-18 2010-09-30 Seiko Epson Corp 圧電デバイス

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