JP5778363B1 - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
- Publication number
- JP5778363B1 JP5778363B1 JP2015009100A JP2015009100A JP5778363B1 JP 5778363 B1 JP5778363 B1 JP 5778363B1 JP 2015009100 A JP2015009100 A JP 2015009100A JP 2015009100 A JP2015009100 A JP 2015009100A JP 5778363 B1 JP5778363 B1 JP 5778363B1
- Authority
- JP
- Japan
- Prior art keywords
- heater
- graphite tube
- graphite
- heat treatment
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/08—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated through chamber walls
- F27B9/082—Muffle furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0001—Heating elements or systems
- F27D99/0006—Electric heating elements or system
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Carbon And Carbon Compounds (AREA)
- Furnace Details (AREA)
- Control Of Resistance Heating (AREA)
- Tunnel Furnaces (AREA)
- Resistance Heating (AREA)
Abstract
Description
以下、図面を参照し、本発明の実施の形態を詳しく説明する。図中同一又は相当部分には同一符号を付してその説明は繰り返さない。なお、説明を分かりやすくするために、以下で参照する図面においては、構成が簡略化又は模式化して示されたり、一部の構成部材が省略されたりしている。また、各図に示された構成部材間の寸法比は、必ずしも実際の寸法比を示すものではない。
図1は、本発明の一実施形態による熱処理装置1の概略構成を示す平面図である。図2は、図1のII−II線に沿った断面図である。熱処理装置1は、ヒータ20、トラフ30、40、炉壁50、及びチャンバ60、70を備えている。
図3は、ヒータ20の概略構成を示す分解斜視図である。図4は、図3のIV−IV線に沿った断面図である。図3及び図4では、黒鉛管21A、21B、・・・、21Fのそれぞれを区別せず、単に黒鉛管21と表記している。
ρC>ρB>ρA
ρC>ρD>ρE>ρF
ρC>ρD>ρB>ρE>ρF>ρA
熱処理装置1の温度制御方法の一例を説明する。ただし、熱処理装置1の温度制御方法は、これに限定されない。
図6は、熱処理装置1内の温度分布の一例である。図6の横軸はヒータ20の軸方向に沿った位置を表し、A、B、・・・、Fはそれぞれ、黒鉛管21A、21B、・・・、21Fが配置された位置であることを表わしている。
以上、本発明についての実施形態を説明したが、本発明は上述の実施形態のみに限定されず、発明の範囲内で種々の変更が可能である。
ρC>ρB>ρA
ρC>ρD>ρE>ρF
しかし、ρA、ρB、・・・、ρFは、次のような関係であっても良い。
ρC=ρD
ρC>ρB>ρA
ρD>ρE>ρF
10 ルツボ
11 容器
12 フタ
20 ヒータ
21A、21B、・・・、21F 黒鉛管
22 接続リング
30、40 トラフ
30a、40a ガス導入口
31、41 電極
50 炉壁
51 断熱材
52 測温筒
53 放射温度計
54 ガス排気筒
60、70 チャンバ
63 押込装置
80 温度制御装置
85 電源装置
Claims (4)
- 筒状のヒータと、
前記ヒータの両端に接続された黒鉛管からなるトラフと、
前記トラフに形成された電極とを備え、
前記ヒータは、
第1黒鉛管と、
一方の端面が前記第1黒鉛管の一方の端面に接するように配置され、前記第1黒鉛管の電気抵抗よりも高い電気抵抗を有する第2黒鉛管と、
一方の端面が前記第2黒鉛管の他方の端面に接するように配置され、前記第2黒鉛管の電気抵抗よりも低い電気抵抗を有する第3黒鉛管とを含む、熱処理装置。 - 請求項1に記載の熱処理装置であって、
前記ヒータの開口の一方に配置され、前記ヒータ内の他方の開口に向かって被処理材を押し込む押込装置と、
前記ヒータの内部に連通するように形成されたガス導入口と、
前記ヒータの内部に連通するように形成されたガス排気口とをさらに備え、
前記ガス導入口は、前記ヒータの軸方向において、前記第2黒鉛管よりも前記ヒータの開口の他方側に配置され、
前記ガス排気口は、前記ヒータの軸方向において、前記第2黒鉛管と前記押込装置との間に配置される、熱処理装置。 - 請求項2に記載の熱処理装置であって、
前記ヒータの周面を覆って配置された断熱材をさらに備え、
前記排気口は、前記断熱材に覆われた部分に配置される、熱処理装置。 - 請求項1〜3のいずれか一項に記載の熱処理装置であって、
前記ヒータの温度を測定する複数の温度センサをさらに備える、熱処理装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015009100A JP5778363B1 (ja) | 2015-01-21 | 2015-01-21 | 熱処理装置 |
PL16740224T PL3249329T3 (pl) | 2015-01-21 | 2016-01-20 | Aparat do obróbki cieplnej |
CN201680006717.4A CN107208976B (zh) | 2015-01-21 | 2016-01-20 | 热处理装置 |
EP16740224.7A EP3249329B1 (en) | 2015-01-21 | 2016-01-20 | Heat treatment apparatus |
PCT/JP2016/051604 WO2016117617A1 (ja) | 2015-01-21 | 2016-01-20 | 熱処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015009100A JP5778363B1 (ja) | 2015-01-21 | 2015-01-21 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5778363B1 true JP5778363B1 (ja) | 2015-09-16 |
JP2016133277A JP2016133277A (ja) | 2016-07-25 |
Family
ID=54192743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015009100A Active JP5778363B1 (ja) | 2015-01-21 | 2015-01-21 | 熱処理装置 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3249329B1 (ja) |
JP (1) | JP5778363B1 (ja) |
CN (1) | CN107208976B (ja) |
PL (1) | PL3249329T3 (ja) |
WO (1) | WO2016117617A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017145996A (ja) * | 2016-02-16 | 2017-08-24 | 邦廣 畠山 | カーボンヒーター構成体接続型超高温炉 |
CN110799797A (zh) * | 2017-06-19 | 2020-02-14 | 艾森曼欧洲公司 | 炉 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101826174B1 (ko) * | 2016-10-20 | 2018-03-22 | (주)써모니크 | 복수개의 그라파이트 히터를 이용하는 연속식 초고온 열처리로 |
JP6074540B1 (ja) * | 2016-11-01 | 2017-02-01 | Basf戸田バッテリーマテリアルズ合同会社 | 水酸化リチウム無水和物の製造方法及びこれに用いるロータリーキルン |
CN107941844A (zh) * | 2017-11-30 | 2018-04-20 | 宁波新天阳新材料科技有限公司 | 一种覆膜砂熔点仪 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3941465A1 (de) * | 1989-12-15 | 1991-06-20 | Feist Horst Julius | Verfahren zum brennen von rohlingen im durchlauf |
JPH08198612A (ja) * | 1995-01-20 | 1996-08-06 | S Ii C:Kk | 黒鉛粉末製造装置 |
JP3787241B2 (ja) * | 1999-01-22 | 2006-06-21 | 株式会社エスイーシー | 黒鉛製造装置 |
US6042370A (en) * | 1999-08-20 | 2000-03-28 | Haper International Corp. | Graphite rotary tube furnace |
CN2690373Y (zh) * | 2004-04-26 | 2005-04-06 | 朱兴发 | 真空高温连续式微晶石墨提纯生产设备 |
CN201522187U (zh) * | 2009-05-22 | 2010-07-07 | 林鹏 | 中频感应卧式转动加热炉 |
KR101617255B1 (ko) * | 2010-09-30 | 2016-05-02 | 가부시키가이샤 아이에이치아이 | 흑연화 노 및 흑연을 제조하는 방법 |
JP5778364B1 (ja) * | 2015-01-21 | 2015-09-16 | Secカーボン株式会社 | ルツボ及びこれを用いた炭素材料の製造方法 |
-
2015
- 2015-01-21 JP JP2015009100A patent/JP5778363B1/ja active Active
-
2016
- 2016-01-20 PL PL16740224T patent/PL3249329T3/pl unknown
- 2016-01-20 WO PCT/JP2016/051604 patent/WO2016117617A1/ja active Application Filing
- 2016-01-20 EP EP16740224.7A patent/EP3249329B1/en active Active
- 2016-01-20 CN CN201680006717.4A patent/CN107208976B/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017145996A (ja) * | 2016-02-16 | 2017-08-24 | 邦廣 畠山 | カーボンヒーター構成体接続型超高温炉 |
CN110799797A (zh) * | 2017-06-19 | 2020-02-14 | 艾森曼欧洲公司 | 炉 |
US11603607B2 (en) | 2017-06-19 | 2023-03-14 | Eisenmann Se | Furnace |
CN110799797B (zh) * | 2017-06-19 | 2023-03-31 | 元峻有限公司 | 炉 |
Also Published As
Publication number | Publication date |
---|---|
CN107208976B (zh) | 2019-04-23 |
WO2016117617A1 (ja) | 2016-07-28 |
CN107208976A (zh) | 2017-09-26 |
JP2016133277A (ja) | 2016-07-25 |
PL3249329T3 (pl) | 2020-06-01 |
EP3249329B1 (en) | 2019-12-18 |
EP3249329A4 (en) | 2018-04-04 |
EP3249329A1 (en) | 2017-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5778363B1 (ja) | 熱処理装置 | |
KR102193401B1 (ko) | 입체 형상의 세라믹스 히터 | |
US9618267B2 (en) | Graphitization furnace and method for producing graphite | |
CN103597308B (zh) | 热处理炉及其加热器更换方法 | |
JP5778364B1 (ja) | ルツボ及びこれを用いた炭素材料の製造方法 | |
US20170003076A1 (en) | Graphitization furnace | |
JP4511186B2 (ja) | 光起電装置用ベーキングオーブン | |
US20150345868A1 (en) | Thermal shielding system | |
JPH07296955A (ja) | カーボンヒーター | |
US7692122B2 (en) | Heat conductor support disc | |
KR100650988B1 (ko) | 챔버 내에 열전도성 장벽이 구비된 저온 전기로 | |
CN113574015A (zh) | 加热炉、以及石墨的制造方法 | |
CN213811679U (zh) | 连续加热炉 | |
JP2012233649A (ja) | 連続熱処理炉 | |
US20210048249A1 (en) | Furnace | |
JPH0383809A (ja) | 黒鉛粉末製造装置 | |
CN221028784U (zh) | 晶体生长装置 | |
CN114370762A (zh) | 连续加热炉 | |
KR20230107676A (ko) | 실리콘 단결정 제조 장치의 가열부, 실리콘 융액의 대류 패턴 제어 방법, 실리콘 단결정의 제조 방법, 실리콘 웨이퍼의 제조 방법, 실리콘 단결정 제조 장치 및 실리콘 융액의 대류 패턴 제어 시스템 | |
JPH0454225Y2 (ja) | ||
JP2017077998A (ja) | 耐熱構造部材 | |
SU1199451A1 (ru) | Высокотемпературна электропечь газостата | |
JP2016171940A (ja) | 焼き芋製造装置 | |
JP2005132691A (ja) | セラミックス製トレイ | |
JPS6291411A (ja) | 炭素焼成体の黒鉛化方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150616 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150708 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5778363 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |