JP5774099B2 - 誘導結合圧力センサ - Google Patents

誘導結合圧力センサ Download PDF

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Publication number
JP5774099B2
JP5774099B2 JP2013516623A JP2013516623A JP5774099B2 JP 5774099 B2 JP5774099 B2 JP 5774099B2 JP 2013516623 A JP2013516623 A JP 2013516623A JP 2013516623 A JP2013516623 A JP 2013516623A JP 5774099 B2 JP5774099 B2 JP 5774099B2
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Japan
Prior art keywords
capacitor
gvota
sensor
frequency
assembly
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JP2013516623A
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English (en)
Japanese (ja)
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JP2013529783A (ja
JP2013529783A5 (enExample
Inventor
ロチュニク，マルコ
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Robert Bosch GmbH
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Robert Bosch GmbH
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Publication of JP2013529783A publication Critical patent/JP2013529783A/ja
Publication of JP2013529783A5 publication Critical patent/JP2013529783A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/141—Monolithic housings, e.g. molded or one-piece housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2013516623A 2010-06-21 2011-06-16 誘導結合圧力センサ Active JP5774099B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/819,573 US8499639B2 (en) 2010-06-21 2010-06-21 Inductively coupled pressure sensor
US12/819,573 2010-06-21
PCT/US2011/040661 WO2011163049A1 (en) 2010-06-21 2011-06-16 Inductively coupled pressure sensor

Publications (3)

Publication Number Publication Date
JP2013529783A JP2013529783A (ja) 2013-07-22
JP2013529783A5 JP2013529783A5 (enExample) 2014-07-03
JP5774099B2 true JP5774099B2 (ja) 2015-09-02

Family

ID=44627798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013516623A Active JP5774099B2 (ja) 2010-06-21 2011-06-16 誘導結合圧力センサ

Country Status (4)

Country Link
US (1) US8499639B2 (enExample)
EP (1) EP2583073B1 (enExample)
JP (1) JP5774099B2 (enExample)
WO (1) WO2011163049A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8400209B2 (en) 2010-10-22 2013-03-19 Atmel Corporation Proximity detection
US9310269B2 (en) 2012-11-30 2016-04-12 Sensata Technologies, Inc. Analog front-end compensation
DE102013209060A1 (de) 2013-05-16 2014-11-20 Robert Bosch Gmbh Vorrichtung zur Erfassung eines Drucks und einer Temperatur eines in einem Kanal strömenden fluiden Mediums
DE102013114734A1 (de) 2013-12-20 2015-07-09 Endress + Hauser Gmbh + Co. Kg Kapazitive Druckmesszelle mit mindestens einem Temperatursensor und Druckmessverfahren
GB2533833B (en) * 2015-06-22 2016-12-14 Univ Bristol Wireless ultrasound sensor with two induction coils
US10458872B2 (en) * 2016-03-09 2019-10-29 Flo Technologies, Inc. Electronic pressure sensor for measurement of pressure in a fluid media
US11047756B2 (en) 2016-03-09 2021-06-29 Flo Technologies, Inc. Electronic pressure sensor for measurement of pressure in a fluid media
KR102025253B1 (ko) * 2018-12-14 2019-11-04 노바센(주) 온도 외란에 강인한 압력 검출 시스템 및 방법
WO2020198318A1 (en) 2019-03-25 2020-10-01 Flo Technologies, Inc. Thin film thermal mass flow sensors in fluid applications
US11624636B2 (en) 2019-05-07 2023-04-11 Fortune Brands Water Innovations LLC Turbine design for flow meter

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3962921A (en) * 1972-02-04 1976-06-15 The Garrett Corporation Compensated pressure transducer
US4186749A (en) * 1977-05-12 1980-02-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Induction powered biological radiosonde
US4490773A (en) * 1983-12-19 1984-12-25 United Technologies Corporation Capacitive pressure transducer
US4852443A (en) * 1986-03-24 1989-08-01 Key Concepts, Inc. Capacitive pressure-sensing method and apparatus
US5760577A (en) * 1995-04-20 1998-06-02 Techno Excel Kabushiki Kaisha LC resonance circuit displacement sensor
US6016707A (en) * 1998-04-29 2000-01-25 Lin; Chih-Lung Non-intrusive pressure variation monitoring device adapted to monitor abdominal pressure in pregnant women
US6442812B1 (en) * 2000-03-02 2002-09-03 Eaton Corporation Method of manufacturing a piezoelectric torque sensor
JP2001281070A (ja) * 2000-03-28 2001-10-10 Ryowa Denshi Kk 物理量センサ
US6532822B1 (en) * 2000-09-26 2003-03-18 Clark Davis Boyd Resonant torsion pendulum pressure sensor
DE10323297A1 (de) 2002-05-24 2003-12-04 Continental Teves Ag & Co Ohg Verfahren und Vorrichtung zur Messung von Drücken und deren Verwendung in Kraftfahrzeugen
US7059195B1 (en) 2004-12-02 2006-06-13 Honeywell International Inc. Disposable and trimmable wireless pressure sensor for medical applications
US20070074579A1 (en) * 2005-10-03 2007-04-05 Honeywell International Inc. Wireless pressure sensor and method of forming same
US7784344B2 (en) 2007-11-29 2010-08-31 Honeywell International Inc. Integrated MEMS 3D multi-sensor
DE102008040820A1 (de) 2008-03-12 2009-09-17 Robert Bosch Gmbh Druckmessvorrichtung und Verfahren zum Messen eines Drucks
DE102008001102A1 (de) 2008-04-10 2009-10-15 Robert Bosch Gmbh Druckmessvorrichtung und Herstellungsverfahren für eine Druckmessvorrichtung

Also Published As

Publication number Publication date
US20110308320A1 (en) 2011-12-22
JP2013529783A (ja) 2013-07-22
US8499639B2 (en) 2013-08-06
WO2011163049A1 (en) 2011-12-29
EP2583073A1 (en) 2013-04-24
EP2583073B1 (en) 2019-03-27

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