JP5755460B2 - 単一ゲートの誘電体構造を有するエンハンスメントモードのiii族窒化物トランジスタ - Google Patents
単一ゲートの誘電体構造を有するエンハンスメントモードのiii族窒化物トランジスタ Download PDFInfo
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- JP5755460B2 JP5755460B2 JP2011022897A JP2011022897A JP5755460B2 JP 5755460 B2 JP5755460 B2 JP 5755460B2 JP 2011022897 A JP2011022897 A JP 2011022897A JP 2011022897 A JP2011022897 A JP 2011022897A JP 5755460 B2 JP5755460 B2 JP 5755460B2
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- 150000004767 nitrides Chemical class 0.000 claims description 54
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 17
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 4
- 229910002704 AlGaN Inorganic materials 0.000 claims description 3
- 150000002500 ions Chemical group 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 10
- 230000007704 transition Effects 0.000 description 10
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 fluorine ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
シリコン酸化物/シリコン窒化物;
シリコン酸化物/シリコン窒化物/シリコン酸化物;
シリコン酸化物/シリコン窒化物/シリコン酸化物/シリコン窒化物;
シリコン窒化物/シリコン酸化物;
シリコン窒化物/シリコン酸化物/シリコン窒化物;
シリコン窒化物/シリコン酸化物/シリコン窒化物/シリコン酸化物;
これらの何れかの組み合わせ。
Claims (18)
- 第1のIII族窒化物体と第2のIII族窒化物体との間に形成され、二次元電子ガスを有する伝導チャネルと、
二つ以上のゲート誘電体層であって、各ゲート誘電体層の内部に閉じ込められた電荷の総和に相当する集団的な電荷を有し、該集団的な電荷は前記伝導チャネルに中断領域を生ぜしめる二つ以上のゲート誘電体層と、
前記伝導チャネルの前記中断領域を復元するように作用しうるゲート電極とを具えるIII族窒化物トランジスタ。 - 請求項1に記載のIII族窒化物トランジスタにおいて、このIII族窒化物トランジスタがエンハンスメントモードのトランジスタであるIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記二つ以上のゲート誘電体層のうちの1つのゲート誘電体層がシリコン窒化物層であるIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記二つ以上のゲート誘電体層のうちの1つのゲート誘電体層がシリコン酸化物層であるIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記二つ以上のゲート誘電体層のうちの1つのゲート誘電体層に前記電荷がイオン注入されているIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記第1のIII族窒化物体がAlGaNを有しているIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記第2のIII族窒化物体がGaNを有しているIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記二つ以上のゲート誘電体層が前記第1のIII族窒化物体上で前記ゲート電極の下側にあるIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記電荷が負電荷であるIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、前記電荷が前記二つ以上のゲート誘電体層のうちの1つのゲート誘電体層の全体に亘って分散されているIII族窒化物トランジスタ。
- 請求項1に記載のIII族窒化物トランジスタにおいて、このIII族窒化物トランジスタが電力トランジスタであるIII族窒化物トランジスタ。
- 第1のIII族窒化物体と第2のIII族窒化物体との間に形成され、二次元電子ガスを有する伝導チャネルと、
この伝導チャネルに中断領域を生ぜしめるために電荷を内部に閉じ込めた単一のゲート誘電体層と、
前記伝導チャネルの前記中断領域を復元するように作用しうるゲート電極とを具えるIII族窒化物トランジスタ。 - 請求項12に記載のIII族窒化物トランジスタにおいて、このIII族窒化物トランジスタがエンハンスメントモードのトランジスタであるIII族窒化物トランジスタ。
- 請求項12に記載のIII族窒化物トランジスタにおいて、前記単一のゲート誘電体層がシリコン窒化物層であるIII族窒化物トランジスタ。
- 請求項12に記載のIII族窒化物トランジスタにおいて、前記単一のゲート誘電体層がシリコン酸化物層であるIII族窒化物トランジスタ。
- 請求項12に記載のIII族窒化物トランジスタにおいて、前記単一のゲート誘電体層に前記電荷がイオン注入されているIII族窒化物トランジスタ。
- 請求項12に記載のIII族窒化物トランジスタにおいて、前記電荷が負電荷であるIII族窒化物トランジスタ。
- 請求項12に記載のIII族窒化物トランジスタにおいて、前記電荷が前記単一のゲート誘電体層の全体に亘って分散されているIII族窒化物トランジスタ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US33792910P | 2010-02-12 | 2010-02-12 | |
US61/337,929 | 2010-02-12 | ||
US13/017,970 US8482035B2 (en) | 2005-07-29 | 2011-01-31 | Enhancement mode III-nitride transistors with single gate Dielectric structure |
US13/017,970 | 2011-01-31 |
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JP2011205071A JP2011205071A (ja) | 2011-10-13 |
JP5755460B2 true JP5755460B2 (ja) | 2015-07-29 |
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JP2011022897A Expired - Fee Related JP5755460B2 (ja) | 2010-02-12 | 2011-02-04 | 単一ゲートの誘電体構造を有するエンハンスメントモードのiii族窒化物トランジスタ |
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EP (1) | EP2360728B1 (ja) |
JP (1) | JP5755460B2 (ja) |
Families Citing this family (6)
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JP5990976B2 (ja) * | 2012-03-29 | 2016-09-14 | 富士通株式会社 | 半導体装置及び半導体装置の製造方法 |
US9029914B2 (en) * | 2012-11-26 | 2015-05-12 | Triquint Semiconductor, Inc. | Group III-nitride-based transistor with gate dielectric including a fluoride -or chloride- based compound |
DE102013211360A1 (de) * | 2013-06-18 | 2014-12-18 | Robert Bosch Gmbh | Halbleiter-Leistungsschalter und Verfahren zur Herstellung eines Halbleiter-Leistungsschalters |
DE102013211374A1 (de) * | 2013-06-18 | 2014-12-18 | Robert Bosch Gmbh | Transistor und Verfahren zur Herstellung eines Transistors |
JP6478752B2 (ja) | 2015-03-24 | 2019-03-06 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP6444789B2 (ja) | 2015-03-24 | 2018-12-26 | 株式会社東芝 | 半導体装置及びその製造方法 |
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US8183595B2 (en) * | 2005-07-29 | 2012-05-22 | International Rectifier Corporation | Normally off III-nitride semiconductor device having a programmable gate |
JP5192683B2 (ja) * | 2006-11-17 | 2013-05-08 | 古河電気工業株式会社 | 窒化物系半導体ヘテロ接合電界効果トランジスタ |
US20080179762A1 (en) * | 2007-01-25 | 2008-07-31 | Au Optronics Corporation | Layered structure with laser-induced aggregation silicon nano-dots in a silicon-rich dielectric layer, and applications of the same |
JP5554024B2 (ja) * | 2009-07-03 | 2014-07-23 | 古河電気工業株式会社 | 窒化物系半導体電界効果トランジスタ |
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- 2011-02-04 JP JP2011022897A patent/JP5755460B2/ja not_active Expired - Fee Related
- 2011-02-04 EP EP11000917.2A patent/EP2360728B1/en active Active
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EP2360728A2 (en) | 2011-08-24 |
EP2360728A3 (en) | 2013-03-13 |
JP2011205071A (ja) | 2011-10-13 |
EP2360728B1 (en) | 2020-04-29 |
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