JP5750293B2 - 表面濡れ性改質を行った非晶質炭素膜構造体、およびその製造方法 - Google Patents
表面濡れ性改質を行った非晶質炭素膜構造体、およびその製造方法 Download PDFInfo
- Publication number
- JP5750293B2 JP5750293B2 JP2011087816A JP2011087816A JP5750293B2 JP 5750293 B2 JP5750293 B2 JP 5750293B2 JP 2011087816 A JP2011087816 A JP 2011087816A JP 2011087816 A JP2011087816 A JP 2011087816A JP 5750293 B2 JP5750293 B2 JP 5750293B2
- Authority
- JP
- Japan
- Prior art keywords
- amorphous carbon
- carbon film
- film
- oxygen
- wettability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011087816A JP5750293B2 (ja) | 2010-04-09 | 2011-04-11 | 表面濡れ性改質を行った非晶質炭素膜構造体、およびその製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010090052 | 2010-04-09 | ||
| JP2010090052 | 2010-04-09 | ||
| JP2011087816A JP5750293B2 (ja) | 2010-04-09 | 2011-04-11 | 表面濡れ性改質を行った非晶質炭素膜構造体、およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011230505A JP2011230505A (ja) | 2011-11-17 |
| JP2011230505A5 JP2011230505A5 (https=) | 2014-09-04 |
| JP5750293B2 true JP5750293B2 (ja) | 2015-07-15 |
Family
ID=45320303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011087816A Active JP5750293B2 (ja) | 2010-04-09 | 2011-04-11 | 表面濡れ性改質を行った非晶質炭素膜構造体、およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5750293B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101468666B1 (ko) * | 2011-06-06 | 2014-12-04 | 다이요 가가쿠 고교 가부시키가이샤 | 비정질 탄소막층에의 발수 발유층을 고정시키는 방법 및 해당 방법에 의해 형성된 적층체 |
| KR102018241B1 (ko) * | 2012-03-26 | 2019-09-04 | 실코텍 코포레이션 | 코팅된 물품 및 화학적 기상증착방법 |
| JP6125210B2 (ja) * | 2012-09-11 | 2017-05-10 | 太陽誘電ケミカルテクノロジー株式会社 | 工作物を収容可能なメッシュ構造体 |
| JP7205742B2 (ja) * | 2018-08-07 | 2023-01-17 | 大日本印刷株式会社 | 積層フィルムおよびシリコーン樹脂成型体 |
| JP6595062B2 (ja) * | 2018-09-04 | 2019-10-23 | 太陽誘電株式会社 | 構造体及び構造体の製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4357912B2 (ja) * | 2003-09-18 | 2009-11-04 | 大日本印刷株式会社 | バリア性フィルム |
| JP4402412B2 (ja) * | 2003-09-25 | 2010-01-20 | 大日本印刷株式会社 | 積層材およびそれを使用した包装用袋 |
| JP2009107314A (ja) * | 2007-11-01 | 2009-05-21 | Seiko Epson Corp | ノズルプレート、液滴吐出ヘッド及び液滴吐出装置並びにノズルプレートの製造方法 |
| JP2009113351A (ja) * | 2007-11-07 | 2009-05-28 | Seiko Epson Corp | シリコン製ノズル基板、シリコン製ノズル基板を備えた液滴吐出ヘッド、液滴吐出ヘッドを搭載した液滴吐出装置、及びシリコン製ノズル基板の製造方法 |
| JP5532555B2 (ja) * | 2008-07-04 | 2014-06-25 | 株式会社リコー | 撥液層被覆部材の作製方法 |
| JP2010067637A (ja) * | 2008-09-08 | 2010-03-25 | Toyota Industries Corp | 放熱部材並びにそれを用いた半導体装置及びそれらの製造方法 |
| JP5420877B2 (ja) * | 2008-10-07 | 2014-02-19 | テイカ製薬株式会社 | 眼科用剤 |
| CN102892706B (zh) * | 2010-03-03 | 2015-08-12 | 太阳化学工业株式会社 | 在由非晶质碳膜构成的层的固定化方法及层叠体 |
-
2011
- 2011-04-11 JP JP2011087816A patent/JP5750293B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011230505A (ja) | 2011-11-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5750293B2 (ja) | 表面濡れ性改質を行った非晶質炭素膜構造体、およびその製造方法 | |
| EP2578413B1 (en) | Screen-printing stencil having amorphous carbon films and manufacturing method therefor | |
| KR101468666B1 (ko) | 비정질 탄소막층에의 발수 발유층을 고정시키는 방법 및 해당 방법에 의해 형성된 적층체 | |
| TWI534113B (zh) | 具有抗污跡表面之玻璃物品及其製造方法 | |
| JP6121326B2 (ja) | プライマー薄膜を含む印刷用孔版及び該印刷用孔版の製造方法 | |
| JP7471054B2 (ja) | 耐プラズマ皮膜塗布のために表面を選択的にパターニングする方法 | |
| Verding et al. | The influence of UV–ozone, O2 plasma, and CF4 plasma treatment on the droplet-based deposition of diamond nanoparticles | |
| Bayiati et al. | Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics | |
| JP2011230505A5 (https=) | ||
| JP2009066798A (ja) | 撥液層の形成方法及びノズルプレートの製造方法 | |
| JPH04239633A (ja) | 撥水撥油性被膜及びその製造方法 | |
| Brown et al. | Impact of picoliter droplets on superhydrophobic surfaces with ultralow spreading ratios | |
| JP2007106024A (ja) | ノズルプレート、インクジェットヘッド、及びインクジェット装置 | |
| Holder et al. | Tunable, permanent and instantly available super-wettability states on metal surfaces by laser texturing and plasma coating | |
| WO2020144850A1 (ja) | インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録方法 | |
| JP2007253485A (ja) | 撥液膜被覆部材、液体噴出装置の構成部材、液体噴出ヘッドのノズルプレート、液体噴出ヘッドおよび液体噴出装置 | |
| JPH05201005A (ja) | インクジェット記録装置用吐出ノズル板およびその製造 方法 | |
| Li et al. | Airflow-assisted acoustic spray coating for suppressing pinhole defects on photoresist film | |
| CN113454466A (zh) | 探针的制造方法、表面观察方法 | |
| JP2012041629A (ja) | 耐食性摺動部材 | |
| TWI868718B (zh) | 經雷射表面處理之防沉積物件及其製造方法 | |
| JP2011526536A (ja) | ワークピースを静電的に被覆するための装置及びそのコンタミネイションを減らす方法 | |
| CN119681442B (zh) | 一种雾化硅油辅助激光构筑高黏超疏水表面方法及应用 | |
| JP2000233500A (ja) | ノズルの撥水処理方法 | |
| US20240337016A1 (en) | Laser-treated anti-deposition object and manufacturing method of the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110728 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140411 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140702 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140708 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140723 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150109 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A132 Effective date: 20150209 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150409 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150507 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150518 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5750293 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |