JP5742222B2 - エッチング方法及び薄膜デバイス - Google Patents
エッチング方法及び薄膜デバイス Download PDFInfo
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- JP5742222B2 JP5742222B2 JP2010535740A JP2010535740A JP5742222B2 JP 5742222 B2 JP5742222 B2 JP 5742222B2 JP 2010535740 A JP2010535740 A JP 2010535740A JP 2010535740 A JP2010535740 A JP 2010535740A JP 5742222 B2 JP5742222 B2 JP 5742222B2
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- 238000005530 etching Methods 0.000 title claims description 104
- 238000000034 method Methods 0.000 title claims description 67
- 239000010409 thin film Substances 0.000 title claims description 67
- 239000000463 material Substances 0.000 claims description 113
- 239000007789 gas Substances 0.000 claims description 49
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 15
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 239000010408 film Substances 0.000 claims description 11
- 229910052715 tantalum Inorganic materials 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 10
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- 239000010936 titanium Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 8
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 8
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 239000002210 silicon-based material Substances 0.000 claims description 6
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 6
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 5
- 150000001282 organosilanes Chemical class 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
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- 239000010703 silicon Substances 0.000 claims description 5
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- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 4
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- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 239000011777 magnesium Substances 0.000 claims description 3
- 125000005375 organosiloxane group Chemical group 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
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- 239000011701 zinc Substances 0.000 claims description 3
- 229910026551 ZrC Inorganic materials 0.000 claims description 2
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 2
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- 239000011572 manganese Substances 0.000 claims 1
- 230000000873 masking effect Effects 0.000 claims 1
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- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000002585 base Substances 0.000 description 3
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- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 3
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- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 3
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- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
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- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
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Description
実施例1として、図1のドライエッチング装置を使用して、薄膜磁気デバイスを製造した。実施例1では、下地基板11上に形成した被加工材である薄膜磁気デバイスの構成材料12上に、マスク材料13を成膜した。続いて、フォトレジストパターン14をマスク材料13上に形成した。この状態を図4に示す。次いで、フォトレジストパターン14をマスクとして、マスク材料13のドライエッチングを行う。このエッチングに、図1のドライエッチング装置を用いた。このステップでは、薄膜磁気デバイスの構成材料12をエッチングする必要はない。つまり、フォトレジストパターン14をマスク材料13に転写し、マスクパターン15を薄膜磁気デバイスの構成材料12上に形成したのち、必要に応じて、フォトレジストパターン14の残りをアッシングや溶媒を用いた溶解により除去する。このときの被加工材の状態を図4に示している。
[エッチング条件]
プラズマ源-----ICP型プラズマ源
原料ガスHMDS流量-----20sccm(standard cubic centimeter)
ガス圧-----1.0 Pa (Pascal)
投入電力----500 W (watt)
基板バイアス電力-----1200 W
上記実施例1では、マスク材料13としてSiO2、及び、ZrNを用いた。本実施例2では、マスク材料13として、シリコン炭化物(SiC)、金属ジルコニウム(Zr)、及び、特許文献1で用いているTaやTiN、SiNを用いた。この場合にも、高い選択比が得られた。さらに、これらいくつかのマスク材料の積層構造や混合物を用いた。このようなマスク材料と原料ガス16との組み合わせにより、マスク材料13に関して特許文献1で得られるよりも広い選択肢が実現できる。なお、本実施例2では、SiC、Zr、Ta、TiN、SiNなどのエッチングレートも、上記表1に示されるSiO2やZrNと同様に、薄膜磁気デバイスの構成材料12よりも十分に低い値であった。
Claims (7)
- 原料ガスとして有機シロキサン、有機シラザン及び有機シランの少なくとも1つを含み、ハロゲン元素を含まない材料を気化して真空チャンバーに導入するステップと、
前記真空チャンバー内で前記原料ガスを含むプラズマを生成し、基板上に形成された被加工材に前記プラズマを照射し、該被加工材を選択的に除去するステップと、を有し、
前記原料ガスは、酸素、水、メタノールから成る群から選択される少なくとも1種類の気体を含む、エッチング方法。 - 前記被加工材をマスクするマスクパターンが、シリコン炭化物、シリコン酸化物、シリコン窒化物、シリコン及びシリコンを主成分とする材料、チタン炭化物、チタン酸化物、チタン窒化物、チタン及びチタンを主成分とする合金、タンタル炭化物、タンタル酸化物、タンタル窒化物、タンタル及びタンタルを主成分とする合金、ジルコニウム炭化物、ジルコニウム酸化物、ジルコニウム窒化物、ジルコニウム及びジルコニウムを主成分とする合金から成る群から選択される1つ以上の材料を含む、請求項1記載のエッチング方法。
- 前記被加工材が、ルテニウム、ニッケル、鉄、コバルト、白金、及び、マンガンから成る群から選択される少なくとも1種類の金属を含む、請求項1又は2記載のエッチング方法。
- 原料ガスとして有機シロキサン、有機シラザン及び有機シランの少なくとも1つを含む材料を気化して真空チャンバーに導入するステップと、
前記真空チャンバー内で前記原料ガスを含むプラズマを生成し、基板上に形成された被加工材に前記プラズマを照射し、該被加工材を選択的に除去するステップと、を有するエッチング方法であって、
前記原料ガスは、酸素、水、メタノールから成る群から選択される少なくとも1種類の気体を含む、エッチング方法。 - 前記被加工材が、コバルト、ニッケル、鉄、ホウ素、白金、イリジウム、マグネシウム、アルミニウム、鉛、亜鉛、チタン、タングステン、銅、ガドリニウム、タンタル、シリコン、マンガン、及び、ルテニウムから成る群から選択される少なくとも1種類の金属を含む、請求項1又は2に記載のエッチング方法。
- 基板と、
パターニングされた膜状の被加工材と、
前記被加工材の表面上に形成されたマスクパターンと、を有し、
請求項1から4の何れか1項に記載のエッチング方法により製造されることを特徴とする薄膜デバイス。 - 前記被加工材は、コバルト、ニッケル、鉄、ホウ素、白金、イリジウム、マグネシウム、アルミニウム、鉛、亜鉛、チタン、タングステン、銅、ガドリニウム、タンタル、シリコン、マンガン、及び、ルテニウムから成る群から選択される少なくとも1種類の金属を含む、請求項6に記載の薄膜デバイス。
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JPS6347383A (ja) * | 1986-08-15 | 1988-02-29 | Oki Electric Ind Co Ltd | ドライエツチング方法 |
JPH0831797A (ja) * | 1994-07-11 | 1996-02-02 | Sony Corp | 選択エッチング方法 |
JPH11111680A (ja) * | 1997-09-30 | 1999-04-23 | Yasuhiro Horiike | エッチング方法 |
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JPS6347383A (ja) * | 1986-08-15 | 1988-02-29 | Oki Electric Ind Co Ltd | ドライエツチング方法 |
JPH0831797A (ja) * | 1994-07-11 | 1996-02-02 | Sony Corp | 選択エッチング方法 |
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