JP5728728B2 - 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計 - Google Patents

高圧力動作用に設計された動作パラメータと形状とを有する電離真空計 Download PDF

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JP5728728B2
JP5728728B2 JP2010547736A JP2010547736A JP5728728B2 JP 5728728 B2 JP5728728 B2 JP 5728728B2 JP 2010547736 A JP2010547736 A JP 2010547736A JP 2010547736 A JP2010547736 A JP 2010547736A JP 5728728 B2 JP5728728 B2 JP 5728728B2
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anode
bias voltage
ionization
pressure
initial
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JP2011513709A (ja
JP2011513709A5 (cg-RX-API-DMAC7.html
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ブルッカー・ジェラルド・エー
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MKS Instruments Inc
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MKS Instruments Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Physical Vapour Deposition (AREA)
JP2010547736A 2008-02-21 2009-02-19 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計 Active JP5728728B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US6663108P 2008-02-21 2008-02-21
US61/066,631 2008-02-21
PCT/US2009/034460 WO2009105506A1 (en) 2008-02-21 2009-02-19 Ionization gauge with operational parameters and geometry designed for high pressure operation

Publications (3)

Publication Number Publication Date
JP2011513709A JP2011513709A (ja) 2011-04-28
JP2011513709A5 JP2011513709A5 (cg-RX-API-DMAC7.html) 2012-03-29
JP5728728B2 true JP5728728B2 (ja) 2015-06-03

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JP2010547736A Active JP5728728B2 (ja) 2008-02-21 2009-02-19 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計

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US (2) US8648604B2 (cg-RX-API-DMAC7.html)
EP (1) EP2252869B1 (cg-RX-API-DMAC7.html)
JP (1) JP5728728B2 (cg-RX-API-DMAC7.html)
CN (1) CN101990630B (cg-RX-API-DMAC7.html)
WO (1) WO2009105506A1 (cg-RX-API-DMAC7.html)

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JP2015507203A (ja) * 2012-02-08 2015-03-05 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧力で作動する電離真空計

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US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
DE102014205695B4 (de) * 2014-03-27 2016-01-28 Christof-Herbert Diener Niederdruckplasmaanlage mit sequentieller Steuerung
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
JP6227836B2 (ja) * 2015-03-23 2017-11-08 株式会社アルバック 三極管型電離真空計
US9927317B2 (en) * 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
US10969290B2 (en) * 2016-12-13 2021-04-06 Mks Instruments, Inc. Anode electrode shield for inverted magnetron cold cathode ionization gauge
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN107993908B (zh) * 2017-11-27 2019-11-15 温州大学 一种基于场发射阴极电子源的电离真空计及其应用方法
US10928265B2 (en) * 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
US10566168B1 (en) * 2018-08-10 2020-02-18 John Bennett Low voltage electron transparent pellicle
CN110082420B (zh) * 2019-04-23 2021-06-11 上海交通大学 基于正弦宽频电场下空间电荷测量的电介质陷阱检测系统
US11187827B1 (en) * 2019-07-26 2021-11-30 Board Of Regents, The University Of Texas System Spinning aperture neutral drift sensor (SANDS)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015507203A (ja) * 2012-02-08 2015-03-05 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧力で作動する電離真空計

Also Published As

Publication number Publication date
EP2252869A1 (en) 2010-11-24
US8648604B2 (en) 2014-02-11
JP2011513709A (ja) 2011-04-28
EP2252869B1 (en) 2018-12-12
EP2252869A4 (en) 2017-05-10
WO2009105506A1 (en) 2009-08-27
US20110062961A1 (en) 2011-03-17
CN101990630B (zh) 2013-08-14
US20140152320A1 (en) 2014-06-05
CN101990630A (zh) 2011-03-23
US9404827B2 (en) 2016-08-02

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