CN101990630B - 具有设计用于高压操作的操作参数和几何形状的电离计 - Google Patents

具有设计用于高压操作的操作参数和几何形状的电离计 Download PDF

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Publication number
CN101990630B
CN101990630B CN2009801125552A CN200980112555A CN101990630B CN 101990630 B CN101990630 B CN 101990630B CN 2009801125552 A CN2009801125552 A CN 2009801125552A CN 200980112555 A CN200980112555 A CN 200980112555A CN 101990630 B CN101990630 B CN 101990630B
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Prior art keywords
anode
bias voltage
ionization gauge
collector electrode
pressure
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CN2009801125552A
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Chinese (zh)
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CN101990630A (zh
Inventor
葛拉多·A··布鲁克尔
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MKS Instruments Inc
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Brooks Automation Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Physical Vapour Deposition (AREA)
CN2009801125552A 2008-02-21 2009-02-19 具有设计用于高压操作的操作参数和几何形状的电离计 Active CN101990630B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US6663108P 2008-02-21 2008-02-21
US61/066,631 2008-02-21
PCT/US2009/034460 WO2009105506A1 (en) 2008-02-21 2009-02-19 Ionization gauge with operational parameters and geometry designed for high pressure operation

Publications (2)

Publication Number Publication Date
CN101990630A CN101990630A (zh) 2011-03-23
CN101990630B true CN101990630B (zh) 2013-08-14

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CN2009801125552A Active CN101990630B (zh) 2008-02-21 2009-02-19 具有设计用于高压操作的操作参数和几何形状的电离计

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US (2) US8648604B2 (cg-RX-API-DMAC7.html)
EP (1) EP2252869B1 (cg-RX-API-DMAC7.html)
JP (1) JP5728728B2 (cg-RX-API-DMAC7.html)
CN (1) CN101990630B (cg-RX-API-DMAC7.html)
WO (1) WO2009105506A1 (cg-RX-API-DMAC7.html)

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CN101990630B (zh) 2008-02-21 2013-08-14 布鲁克机械公司 具有设计用于高压操作的操作参数和几何形状的电离计
WO2012078403A1 (en) * 2010-12-07 2012-06-14 3M Innovative Properties Company Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments
KR102082168B1 (ko) * 2012-02-08 2020-02-27 엠케이에스 인스트루먼츠, 인코포레이티드 압력을 측정하는 이온화 게이지 및 이를 이용한 압력 측정 방법
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
DE102014205695B4 (de) * 2014-03-27 2016-01-28 Christof-Herbert Diener Niederdruckplasmaanlage mit sequentieller Steuerung
US9588004B2 (en) 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
JP6227836B2 (ja) * 2015-03-23 2017-11-08 株式会社アルバック 三極管型電離真空計
US9927317B2 (en) * 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
US10969290B2 (en) * 2016-12-13 2021-04-06 Mks Instruments, Inc. Anode electrode shield for inverted magnetron cold cathode ionization gauge
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN107993908B (zh) * 2017-11-27 2019-11-15 温州大学 一种基于场发射阴极电子源的电离真空计及其应用方法
US10928265B2 (en) * 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
US10566168B1 (en) * 2018-08-10 2020-02-18 John Bennett Low voltage electron transparent pellicle
CN110082420B (zh) * 2019-04-23 2021-06-11 上海交通大学 基于正弦宽频电场下空间电荷测量的电介质陷阱检测系统
US11187827B1 (en) * 2019-07-26 2021-11-30 Board Of Regents, The University Of Texas System Spinning aperture neutral drift sensor (SANDS)

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US5278510A (en) * 1991-07-23 1994-01-11 Commissariat A L'energie Atomique Ionization vacuum gauge using a cold micropoint cathode
CN1403791A (zh) * 2002-10-17 2003-03-19 上海交通大学 屏蔽罩静电荷灭弧室真空度检测方法及其装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128617A (en) * 1990-04-11 1992-07-07 Granville-Phillips Company Ionization vacuum gauge with emission of electrons in parallel paths
US5278510A (en) * 1991-07-23 1994-01-11 Commissariat A L'energie Atomique Ionization vacuum gauge using a cold micropoint cathode
CN1403791A (zh) * 2002-10-17 2003-03-19 上海交通大学 屏蔽罩静电荷灭弧室真空度检测方法及其装置

Also Published As

Publication number Publication date
EP2252869A1 (en) 2010-11-24
US8648604B2 (en) 2014-02-11
JP2011513709A (ja) 2011-04-28
EP2252869B1 (en) 2018-12-12
EP2252869A4 (en) 2017-05-10
WO2009105506A1 (en) 2009-08-27
US20110062961A1 (en) 2011-03-17
JP5728728B2 (ja) 2015-06-03
US20140152320A1 (en) 2014-06-05
CN101990630A (zh) 2011-03-23
US9404827B2 (en) 2016-08-02

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Patentee before: Brooks Automation Inc.