JP5709357B2 - Ultrasonic flaw detection apparatus and ultrasonic flaw detection method - Google Patents

Ultrasonic flaw detection apparatus and ultrasonic flaw detection method Download PDF

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JP5709357B2
JP5709357B2 JP2009044901A JP2009044901A JP5709357B2 JP 5709357 B2 JP5709357 B2 JP 5709357B2 JP 2009044901 A JP2009044901 A JP 2009044901A JP 2009044901 A JP2009044901 A JP 2009044901A JP 5709357 B2 JP5709357 B2 JP 5709357B2
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川浪 精一
精一 川浪
是 木村
是 木村
正義 中井
正義 中井
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Mitsubishi Heavy Industries Ltd
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Description

本発明は、超音波探傷、例えば、ステンレスの溶接部等を対象として行う超音波探傷に用いて好適な超音波探傷装置および超音波探傷方法に関するものである。   The present invention relates to an ultrasonic flaw detection apparatus and an ultrasonic flaw detection method suitable for ultrasonic flaw detection, for example, ultrasonic flaw detection performed on stainless steel welds.

例えば、金属の溶接部分等の内部に生じた亀裂等の欠陥を非破壊で検査する方法として超音波探傷(Ultrasonic Testing: UT)が知られている。このような超音波探傷法の1手法として、フェーズドアレイ法がある。これは、例えば、一方向またはマトリクス状に配置された複数の振動子を個別に制御し、各振動子を振動させるタイミングをずらすことによって、各振動子から発せられる超音波ビームの合成波を生成し、この合成波を検査対象物の任意の検査対象位置に当てたときの反射波または回折波を受信して解析することで、検査対象位置における亀裂等の欠陥の有無や欠陥のサイズ等を検査する方法である。また、特に、溶接部中の検査を行う場合は材料中のノイズを低減するために、送信と受信を別々の振動子で行う2探触子型の探傷装置がよく用いられる。   For example, ultrasonic testing (UT) is known as a method for nondestructively inspecting defects such as cracks generated inside a welded portion of metal. One method of such an ultrasonic flaw detection method is a phased array method. For example, a plurality of transducers arranged in one direction or in a matrix are individually controlled, and the timing of oscillating each transducer is shifted to generate a composite wave of ultrasonic beams emitted from each transducer. By receiving and analyzing the reflected wave or diffracted wave when this synthesized wave is applied to any inspection target position of the inspection target, the presence or absence of defects such as cracks at the inspection target position, the size of the defect, etc. It is a method of inspection. In particular, in the case of inspecting a welded portion, a two-probe type flaw detection apparatus that performs transmission and reception with separate vibrators is often used in order to reduce noise in the material.

特開2007−322350号公報JP 2007-322350 A

しかしながら、例えば、従来の2探触子型のフェーズドアレイ法では、送信用探触子と受信用探触子とを一方向に配列された複数の振動子でそれぞれ構成した場合、任意の位置に超音波を集束させることができないという問題があり、このため、送信用探触子と受信用探触子とを構成する振動子をマトリクス状に配置したものが使用されていた。従って、探触子が大型化する傾向にあり、さらに、各振動子に対して駆動装置をそれぞれ設ける必要があることから、駆動装置の大型化、処理の煩雑さを招いていた。   However, for example, in the conventional two-probe type phased array method, when each of the transmitting probe and the receiving probe is composed of a plurality of transducers arranged in one direction, it can be placed at an arbitrary position. There is a problem that the ultrasonic waves cannot be focused. For this reason, a transducer in which the transducers constituting the transmission probe and the reception probe are arranged in a matrix has been used. Therefore, the size of the probe tends to increase, and it is necessary to provide a driving device for each transducer. This increases the size of the driving device and the complexity of processing.

本発明は、上記問題を解決するためになされたもので、装置の小型化及び制御内容の簡便化を図ることのできる超音波探傷装置および超音波探傷方法を提供することを目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an ultrasonic flaw detection apparatus and an ultrasonic flaw detection method capable of downsizing the apparatus and simplifying control contents.

上記課題を解決するために、本発明は以下の手段を採用する。
本発明は、複数の振動子が一方向に配列された送信用探触子と、複数の振動子が一方向に配列された受信用探触子とを備える二探触子法による超音波探傷装置であって、前記送信用探触子及び前記受信用探触子は、これらを構成する前記振動子の配列方向に並んで配置されているとともに、該配列方向に傾斜する配置面上に配置され、前記送信用探触子は、前記配列方向に沿うように、検査対象内部に向けて超音波を射出し、前記配置面は、前記検査対象と接触する底面に対して傾斜する斜面とされている超音波探傷装置を提供する。
In order to solve the above problems, the present invention employs the following means.
The present invention relates to an ultrasonic flaw detection by a two-probe method comprising a transmission probe in which a plurality of transducers are arranged in one direction and a reception probe in which a plurality of transducers are arranged in one direction. The transmission probe and the reception probe are arranged side by side in the arrangement direction of the transducers constituting them, and are arranged on an arrangement surface inclined in the arrangement direction. The transmitting probe emits ultrasonic waves toward the inside of the inspection object along the arrangement direction, and the arrangement surface is inclined with respect to a bottom surface that contacts the inspection object; to provide an ultrasonic flaw detector that is.

本発明によれば、複数の振動子が一方向に配列された送信用探触子と、複数の振動子が一方向に配列された受信用探触子とが、これらを構成する振動子の配列方向に並んで配置されている。
このように、送信用探触子と受信用探触子とを構成する振動子を振動子の配列方向に一列に並んで配置させることで、振動子がマトリクス状に配置されている従来のフェーズドアレイの超音波探傷装置に比べて、振動子の数を低減させることが可能となり、各振動子を駆動する駆動回路についても数の低減を図ることが可能となる。これにより、制御の簡便化、装置の小型化を図ることができる。
According to the present invention, a transmission probe in which a plurality of transducers are arranged in one direction and a reception probe in which a plurality of transducers are arranged in one direction are included in the transducers constituting the transducers. They are arranged side by side in the arrangement direction.
In this way, by arranging the transducers constituting the transmission probe and the reception probe in a row in the transducer arrangement direction, the conventional phased transducers arranged in a matrix are arranged. Compared to an array ultrasonic flaw detector, the number of transducers can be reduced, and the number of drive circuits that drive each transducer can be reduced. Thereby, simplification of control and size reduction of the apparatus can be achieved.

ところで、マトリクス状に配置された振動子の数を減らそうと考えた場合、例えば、マトリクスの列、行の数を少なくすることが考えられる。しかしながら、どのように減らせばいいのか、また、送信用探触子と受信用探触子とを別個に設けて配置するのか、更に、送信用探触子と受信用探触子とを別個に設ける場合には、これらをどのような配置にすればよいのか等、様々な条件を決定しなければならない。また、このような配置等を考慮する場合には、できるだけ少ない振動子の数で、より効果の高い探傷結果が得られるような配置にすることが望ましい。また、特に、従来の2探触子型の探傷装置では、送信用探触子及び受信用探触子を一方向に配列された振動子でそれぞれ構成してしまうと、一定の焦点深さで探傷が行えないという問題が生じるため、この問題を解消するような振動子の配置並びに探触子の配置を考えることが重要となる。   By the way, when it is considered to reduce the number of vibrators arranged in a matrix, for example, it is conceivable to reduce the number of columns and rows of the matrix. However, how to reduce the number, whether to arrange the transmission probe and the reception probe separately, and further separate the transmission probe and the reception probe. In the case of providing, it is necessary to determine various conditions such as how to arrange them. Further, when such an arrangement is taken into consideration, it is desirable that the arrangement be such that a more effective flaw detection result can be obtained with as few vibrators as possible. In particular, in the conventional two-probe type flaw detection apparatus, if each of the transmitting probe and the receiving probe is composed of transducers arranged in one direction, the focal depth is constant. Since there arises a problem that flaw detection cannot be performed, it is important to consider the arrangement of transducers and the arrangement of probes so as to solve this problem.

本願発明者らは、上記の点について考察したところ、送信用と受信用の探触子がそれぞれ一方向に配列された複数の振動子で構成されている従来の2探触子型の探傷装置は、送信用探触子と受信用探触子とがそれらの振動子の配列方向が交差するように配置されていることが原因で、一定の焦点深さで探傷が行えないという問題が生じていることに気づき、送信用探触子と受信用探触子とをそれらの振動子の配列に沿って一列に並べて配置するという本発明を発案するに至った。このような配置とすることで、送信用と受信用の振動子が個別に設けられている2探触子型の探傷装置であっても、超音波の屈折角と焦点深さとを任意に変えることができる。このように、本発明は、探傷において不都合な点を解消して探傷を効果的に行うことのできる配置及び構成に着目してされたものであり、屈折角及び焦点深さの両方を自由に調整できるという効果を奏する。   The inventors of the present application have considered the above points, and as a result, a conventional two-probe type flaw detection apparatus including a plurality of transducers each having a transmission probe and a reception probe arranged in one direction. Causes a problem that flaw detection cannot be performed at a certain depth of focus because the transmitting probe and the receiving probe are arranged so that the arrangement directions of the transducers intersect each other. As a result, the present inventors have come up with the present invention in which the transmitting probe and the receiving probe are arranged in a line along the arrangement of the transducers. By adopting such an arrangement, even in a two-probe type flaw detection device in which transducers for transmission and reception are separately provided, the refraction angle and depth of focus of the ultrasonic wave are arbitrarily changed. be able to. As described above, the present invention focuses on an arrangement and a configuration that can effectively perform flaw detection by eliminating disadvantages in flaw detection, and can freely adjust both the refraction angle and the focal depth. There is an effect that it can be adjusted.

上記超音波探傷装置において、前記底面と、前記配置面とを有する支持部材を備え、前記送信用探触子と前記受信用探触子とは、共通の前記支持部材に固定配置されていてもよい。 In the ultrasonic flaw detection apparatus, and the bottom surface, comprises a support member having a said arrangement surface, wherein the transmission for probe and probe for the reception, also be fixedly arranged on a common said support member Good.

このように、送信用探触子と受信用探触子とを共通の支持部材に固定配置することで、送信用探触子と受信用探触子との位置関係を一定に保つことができる。これにより、支持部材を走査することにより、送信用探触子と受信用探触子とを互いの位置関係を一定に維持したまま容易に移動させることができ、また、超音波ビームの屈折角や焦点深さに関する制御を簡便化することができる。
本発明は、複数の振動子が一方向に配列された送信用探触子と、複数の振動子が一方向に配列された受信用探触子と、支持部材とを備え、前記支持部材は、検査対象と接触する底面と、前記送信用探触子及び前記受信用探触子が配置されるとともに、前記底面に対して傾斜する斜面とされた配置面とを備え、前記送信用探触子及び前記受信用探触子は、これらを構成する前記振動子の配列方向に並んで配置されているとともに、前記配置面の傾斜方向に沿うように配置され、前記送信用探触子は、前記配列方向に沿うように、前記検査対象の内部に向けて超音波を射出する超音波探傷装置を提供する。
As described above, the positional relationship between the transmission probe and the reception probe can be kept constant by fixing and arranging the transmission probe and the reception probe on the common support member. . Thus, by scanning the support member, the transmitting probe and the receiving probe can be easily moved while maintaining a constant positional relationship with each other, and the refraction angle of the ultrasonic beam is also increased. And control regarding the depth of focus can be simplified.
The present invention includes a transmission probe in which a plurality of transducers are arranged in one direction, a reception probe in which a plurality of transducers are arranged in one direction, and a support member, and the support member includes The transmission probe comprising: a bottom surface in contact with an inspection object; and an arrangement surface on which the transmission probe and the reception probe are arranged, and an inclined surface inclined with respect to the bottom surface. The transmitter and the receiving probe are arranged side by side in the arrangement direction of the transducers constituting them, and are arranged along the inclination direction of the arrangement surface, and the transmitting probe is Provided is an ultrasonic flaw detector that emits ultrasonic waves toward the inside of the inspection object along the arrangement direction.

上記超音波探傷装置において、前記送信用探触子及び前記受信用探触子が備える各振動子は、前記配列方向と直交する方向に所定の曲率で湾曲していてもよい。   In the ultrasonic flaw detection apparatus, each transducer included in the transmission probe and the reception probe may be curved with a predetermined curvature in a direction orthogonal to the arrangement direction.

このように曲率を加えることで、超音波を焦点位置において、線状から点状のビーム形状にして超音波ビームの高い集束効果を得ることが出来る。   By adding the curvature in this way, it is possible to obtain a high focusing effect of the ultrasonic beam by changing the ultrasonic wave from a linear shape to a point-shaped beam shape at the focal position.

上記超音波探傷装置において、前記送信用探触子の振動子の曲率と前記受信用探触子の振動子の曲率とは異なっていてもよい。   In the ultrasonic flaw detector, the curvature of the transducer of the transmitting probe may be different from the curvature of the transducer of the receiving probe.

例えば、曲率はビームを集束させたい領域と振動子の位置関係から決まる。本発明では、送信用探触子の振動子と受信用探触子の振動子とがその配列方向に沿って並んで配置されているため、送信用探触子の振動子から集束位置までの距離と、受信用探触子の振動子から集束位置までの距離とは異なることとなる。従って、この距離に応じてそれぞれの曲率を変えることにより、所望の位置にビームを集束させることができる。   For example, the curvature is determined by the positional relationship between the region where the beam is to be focused and the transducer. In the present invention, the transducer of the transmitter probe and the transducer of the receiver probe are arranged side by side along the arrangement direction thereof, so that the transducer from the transducer of the transmitter to the focusing position is arranged. The distance is different from the distance from the transducer of the receiving probe to the focusing position. Therefore, the beam can be focused at a desired position by changing the respective curvatures according to this distance.

本発明は、複数の振動子を一方向に配列させた送信用探触子と、複数の振動子を一方向に配列させた受信用触子とを、これらを構成する前記振動子の配列方向に傾斜する配置面に、該配列方向に沿うように並べて配置し、且つ、前記送信用探触子からこれら振動子の配列方向に沿うように検査対象内部に向けて超音波を射出させ、前記配置面は、前記検査対象と接触する底面に対して傾斜する斜面とされている二探触子法による超音波探傷方法を提供する。 The present invention relates to a transmitting probe in which a plurality of transducers are arranged in one direction and a receiving probe in which a plurality of transducers are arranged in one direction. The ultrasonic waves are emitted from the transmitting probe toward the inside of the inspection target along the arrangement direction of these transducers, arranged side by side along the arrangement direction on the arrangement surface inclined in the direction. The ultrasonic inspection method by the two-probe method in which the arrangement surface is an inclined surface inclined with respect to the bottom surface in contact with the inspection object is provided.

本発明によれば、装置の小型化及び制御内容の簡便化を図ることができるという効果を奏する。   According to the present invention, it is possible to reduce the size of the apparatus and simplify the contents of control.

本発明の一実施形態に係る超音波探傷装置の概略構成を示したブロック図である。1 is a block diagram showing a schematic configuration of an ultrasonic flaw detector according to an embodiment of the present invention. 本発明の一実施形態に係るプローブの構成を示した図である。It is the figure which showed the structure of the probe which concerns on one Embodiment of this invention. 本発明の位置実施形態に係る超音波探傷装置による探傷の手順を示したフローチャートである。It is the flowchart which showed the procedure of the flaw detection by the ultrasonic flaw detector which concerns on the position embodiment of this invention. 探傷検査中における超音波ビームの様子を示した図である。It is the figure which showed the mode of the ultrasonic beam during a flaw detection inspection. 送信用探触子の振動子と受信用探触子の振動子とが同じ曲率で湾曲している場合を示した図である。It is the figure which showed the case where the transducer | vibrator of a transmission probe and the transducer | vibrator of a reception probe are curving with the same curvature.

以下に、本発明に係る超音波探傷装置および超音波探傷方法の一実施形態について、図面を参照して説明する。
図1は、本発明の一実施形態に係る超音波探傷装置の概略構成を示したブロック図である。図1に示すように、超音波探傷装置10は、複数の振動子を備えたプローブ11と、このプローブ11を制御する制御装置20とを備えている。
Hereinafter, an embodiment of an ultrasonic flaw detection apparatus and an ultrasonic flaw detection method according to the present invention will be described with reference to the drawings.
FIG. 1 is a block diagram showing a schematic configuration of an ultrasonic flaw detector according to an embodiment of the present invention. As shown in FIG. 1, the ultrasonic flaw detector 10 includes a probe 11 having a plurality of transducers and a controller 20 that controls the probe 11.

プローブ11は、図2に示すように、複数の振動子13が一方向に配列された送信用探触子14と、複数の振動子15が一方向に配列された受信用探触子16と、送信用探触子14及び受信用探触子16を支持する支持部材17とを備えている。
送信用探触子14及び受信用探触子16は、これらを構成する振動子13,15の配列方向に並んで配置されている。ここで、送信用探触子14及び受信用探触子16は、共に、支持部材17の斜面上に配置されている。ただし、振動子13の配列方向と振動子15の配列方向が、XY平面(支持部材17の底面に相当)を平面視したときに、同一方向となっていればよく、本実施形態のように送信用探触子14及び受信用探触子16が同一平面上に配置されている必要はない。例えば、送信用探触子14を含む平面と、受信用探触子16を含む平面とが所定角度を有して交差する関係となっていてもよい。
また、これら振動子13,15は、超音波ビームの射出方向に沿って配置されている。換言すると、送信用探触子14は振動子13の配列方向に沿うように、検査対象内部に向けて超音波を射出させる。
As shown in FIG. 2, the probe 11 includes a transmitting probe 14 in which a plurality of transducers 13 are arranged in one direction, and a receiving probe 16 in which a plurality of transducers 15 are arranged in one direction. And a support member 17 that supports the transmission probe 14 and the reception probe 16.
The transmission probe 14 and the reception probe 16 are arranged side by side in the arrangement direction of the transducers 13 and 15 constituting them. Here, both the transmission probe 14 and the reception probe 16 are arranged on the slope of the support member 17. However, the arrangement direction of the vibrator 13 and the arrangement direction of the vibrator 15 need only be the same when viewed in plan on the XY plane (corresponding to the bottom surface of the support member 17), as in this embodiment. The transmitting probe 14 and the receiving probe 16 do not have to be arranged on the same plane. For example, the plane including the transmission probe 14 and the plane including the reception probe 16 may intersect at a predetermined angle.
The vibrators 13 and 15 are arranged along the emission direction of the ultrasonic beam. In other words, the transmission probe 14 emits ultrasonic waves toward the inside of the inspection target so as to follow the arrangement direction of the transducers 13.

上記振動子13,15は、圧電素子からなり、電気信号に応じた振動を発するとともに、外部から受けた振動に応じた電気信号を発する。これら振動子13,15は、超音波を送信するときの入射角度、反射波を受信するときの屈折角度がいずれも可変とされており、いわゆるフェーズドアレイとされている。各振動子13,15の入射角度、屈折角度は、制御装置20によってそれぞれ調整される。   The vibrators 13 and 15 are composed of piezoelectric elements, and generate vibrations according to electrical signals, and also generate electrical signals according to vibrations received from the outside. Each of the vibrators 13 and 15 is a so-called phased array, in which an incident angle when transmitting an ultrasonic wave and a refraction angle when receiving a reflected wave are both variable. The incident angle and the refraction angle of each of the vibrators 13 and 15 are adjusted by the control device 20, respectively.

制御装置20は、図1に示すように、送信用探触子の各振動子を振動させるための駆動用電気信号を生成する信号生成部21と、受信用探触子の各振動子で検出される振動に応じた電気信号を受信する反射信号受信部22と、受信した電気信号を解析する解析部23とを備えている。また、制御装置20には表示装置30が接続されており、解析部23による解析結果が表示されるようになっている。   As shown in FIG. 1, the control device 20 detects the signal by a signal generator 21 that generates a driving electric signal for vibrating each transducer of the transmission probe and each transducer of the reception probe. The apparatus includes a reflected signal receiving unit 22 that receives an electrical signal corresponding to the vibration that is generated, and an analysis unit 23 that analyzes the received electrical signal. In addition, a display device 30 is connected to the control device 20, and an analysis result by the analysis unit 23 is displayed.

次に、超音波探傷装置の作用について図3を参照して説明する。
まず、図4に示すように、検査対象物の適切な位置にプローブ11がセットされ(図3のステップSA1)、続いて、検査対象物において欠陥が生じていると推定される位置が検査対象位置として設定される(図3のステップSA2)。
Next, the operation of the ultrasonic flaw detector will be described with reference to FIG.
First, as shown in FIG. 4, the probe 11 is set at an appropriate position of the inspection object (step SA1 in FIG. 3), and then the position estimated to be defective in the inspection object is the inspection object. The position is set (step SA2 in FIG. 3).

次に、送信用探触子14から射出させたいビーム形状に応じた遅延パターンが信号生成部21により生成され、この遅延パターンに基づく駆動用電気信号が送信用探触子14の各振動子13に与えられる。   Next, a delay pattern corresponding to the beam shape desired to be emitted from the transmission probe 14 is generated by the signal generation unit 21, and an electric drive signal based on this delay pattern is generated by each transducer 13 of the transmission probe 14. Given to.

これにより、各振動子13からは、各遅延時間に応じたタイミングでそれぞれ超音波が射出され、その合成波である超音波ビームが検査対象位置として設定した位置に向けて伝播する(図3のステップSA3)。この位置に傷等が発生していた場合には、この傷によって反射された反射波が受信用探触子16の各振動子15により受信される(図3のステップSA4)。各振動子15では、反射波に対応する電気信号が生成され、この電気信号が反射波受信部22を介して解析部23に与えられる。
解析部23は、反射受信部22から受信した電気信号を解析することにより、検査対象物に発生している亀裂等の欠陥のサイジング、例えば、位置検出、大きさ検出等を行う(図3のステップSA5)。
As a result, ultrasonic waves are emitted from each transducer 13 at a timing corresponding to each delay time, and an ultrasonic beam that is a composite wave propagates toward the position set as the inspection target position (FIG. 3). Step SA3). If a flaw or the like has occurred at this position, the reflected wave reflected by this flaw is received by each transducer 15 of the receiving probe 16 (step SA4 in FIG. 3). In each transducer 15, an electrical signal corresponding to the reflected wave is generated, and this electrical signal is given to the analysis unit 23 via the reflected wave receiving unit 22.
The analysis unit 23 analyzes the electrical signal received from the reflected wave reception unit 22 to perform sizing of defects such as cracks occurring in the inspection target, for example, position detection, size detection, and the like (FIG. 3). Step SA5).

そして、所定の範囲においてスキャンが終了するまで、ステップSA2において検査対象位置が随時更新され、各位置における探傷が行われる(ステップSA2〜SA5)。そして、所定の範囲においてスキャンが終了すると(図3のステップSA6において「YES」)、解析部23は解析結果を表示装置30に出力する。これにより、表示装置30の画面には、探傷結果が表示される(図3のステップSA7)。   Then, until the scan is completed within a predetermined range, the inspection target position is updated as needed in step SA2, and flaw detection is performed at each position (steps SA2 to SA5). When the scan is completed within the predetermined range (“YES” in step SA6 in FIG. 3), the analysis unit 23 outputs the analysis result to the display device 30. Thereby, the flaw detection result is displayed on the screen of the display device 30 (step SA7 in FIG. 3).

以上説明してきたように、本実施形態に係る超音波探傷装置及び超音波探傷方法によれば、複数の振動子13が一方向に配列された送信用探触子14と、複数の振動子15が一方向に配列された受信用探触子16とをこれらを構成する振動子13,15の配列方向に沿って並べて配置したので、マトリクス状に振動子が配置されているフェーズドアレイの超音波探傷装置に比べて、振動子の数を大幅に低減させることができ、また、各振動子を駆動する駆動回路についても数の低減を図ることが可能となる。これにより、制御の簡便化、装置の小型化、探触子及び制御装置のコスト低減を図ることができる。   As described above, according to the ultrasonic flaw detection apparatus and the ultrasonic flaw detection method according to the present embodiment, the transmission probe 14 in which the plurality of transducers 13 are arranged in one direction, and the plurality of transducers 15. Are arranged side by side along the direction in which the transducers 13 and 15 constituting them are arranged, so that the ultrasonic waves of the phased array in which the transducers are arranged in a matrix form are arranged. Compared to the flaw detector, the number of transducers can be greatly reduced, and the number of drive circuits that drive each transducer can be reduced. Thereby, simplification of control, size reduction of the device, and cost reduction of the probe and the control device can be achieved.

また、上述のように送信用探触子14と受信用探触子16とを配置することで、リニア型の探触子であっても、換言すると、マトリクス状に振動子を配置しなくても、超音波の屈折角と焦点深さとを任意に変えることが可能となる。   In addition, by arranging the transmitting probe 14 and the receiving probe 16 as described above, even in the case of a linear probe, in other words, transducers need not be arranged in a matrix. In addition, it is possible to arbitrarily change the refraction angle and the focal depth of the ultrasonic wave.

なお、本実施形態では、送信用探触子14と受信用探触子16とを共通の支持部材17に固定していたが、この態様に限られない。例えば、送信用探触子14と受信用探触子16とは、別個の支持部材に取り付けられていても良い。また、支持部材を介することなく、直接的に検査対象の表面に配置されてもよい。   In the present embodiment, the transmission probe 14 and the reception probe 16 are fixed to the common support member 17, but the present invention is not limited to this mode. For example, the transmission probe 14 and the reception probe 16 may be attached to separate support members. Moreover, you may arrange | position directly on the surface of a test object, without passing through a supporting member.

また、本実施形態において、送信用探触子14及び受信用探触子16が備える各振動子13,15は、それらの配列方向と直交する方向に所定の曲率で湾曲していてもよい。この場合、図5に示すように、送信用探触子14の振動子13と受信用探触子16の振動子15とが同じ曲率で湾曲していてもよいし、送信用探触子14の振動子13の曲率と受信用探触子16の振動子15の曲率とは異なっていてもよい。
このように、振動子13,15を所定の曲率で湾曲させることで、超音波の集束効果を高めることが可能となる。
In the present embodiment, the transducers 13 and 15 included in the transmission probe 14 and the reception probe 16 may be curved with a predetermined curvature in a direction orthogonal to the arrangement direction thereof. In this case, as shown in FIG. 5, the transducer 13 of the transmission probe 14 and the transducer 15 of the reception probe 16 may be curved with the same curvature, or the transmission probe 14. The curvature of the transducer 13 may be different from the curvature of the transducer 15 of the receiving probe 16.
In this way, the ultrasonic focusing effect can be enhanced by bending the vibrators 13 and 15 with a predetermined curvature.

また、本実施形態において、送信用探触子14は受信用探触子として機能することができ、また、受信用探触子16は送信用探触子として機能することは可能である。この送受信の切替えについては、制御装置20からどの振動子に対して駆動信号が出力されるのかによる。   In the present embodiment, the transmission probe 14 can function as a reception probe, and the reception probe 16 can function as a transmission probe. This transmission / reception switching depends on to which transducer the drive signal is output from the control device 20.

10 超音波探傷装置
11 プローブ
13,15 振動子
14 送信用探触子
16 受信用探触子
20 制御装置
21 信号生成部
22 反射信号受信部
23 解析部
30 表示装置
DESCRIPTION OF SYMBOLS 10 Ultrasonic flaw detector 11 Probe 13, 15 Transducer 14 Transmitting probe 16 Receiving probe 20 Control apparatus 21 Signal generation part 22 Reflected signal receiving part 23 Analysis part 30 Display

Claims (6)

複数の振動子が一方向に配列された送信用探触子と、複数の振動子が一方向に配列された受信用探触子とを備える二探触子法による超音波探傷装置であって、
前記送信用探触子及び前記受信用探触子は、これらを構成する前記振動子の配列方向に並んで配置されているとともに、該配列方向に傾斜する配置面上に配置され、
前記送信用探触子は、前記配列方向に沿うように、検査対象内部に向けて超音波を射出し、
前記配置面は、前記検査対象と接触する底面に対して傾斜する斜面とされている超音波探傷装置。
An ultrasonic flaw detector using a two-probe method, comprising: a transmitting probe in which a plurality of transducers are arranged in one direction; and a receiving probe in which a plurality of transducers are arranged in one direction. ,
The transmitting probe and the receiving probe are arranged side by side in the arrangement direction of the transducers constituting them, and are arranged on an arrangement surface inclined in the arrangement direction ,
The transmission probe emits ultrasonic waves toward the inside of the inspection target along the arrangement direction ,
The ultrasonic flaw detection apparatus in which the arrangement surface is an inclined surface that is inclined with respect to a bottom surface in contact with the inspection object .
前記底面と、前記配置面とを有する支持部材を備え、
前記送信用探触子と前記受信用探触子とは、共通の前記支持部材に固定配置されている請求項1に記載の超音波探傷装置。
A support member having the bottom surface and the arrangement surface;
The ultrasonic flaw detector according to claim 1, wherein the transmitting probe and the receiving probe are fixedly disposed on a common support member.
複数の振動子が一方向に配列された送信用探触子と、  A transmission probe in which a plurality of transducers are arranged in one direction;
複数の振動子が一方向に配列された受信用探触子と、  A receiving probe in which a plurality of transducers are arranged in one direction;
支持部材と  With support members
を備え、With
前記支持部材は、  The support member is
検査対象と接触する底面と、  A bottom surface in contact with the object to be inspected;
前記送信用探触子及び前記受信用探触子が配置されるとともに、前記底面に対して傾斜する斜面とされた配置面と  An arrangement surface in which the transmitting probe and the receiving probe are arranged, and an inclined surface inclined with respect to the bottom surface;
を備え、With
前記送信用探触子及び前記受信用探触子は、これらを構成する前記振動子の配列方向に並んで配置されているとともに、前記配置面の傾斜方向に沿うように配置され、  The transmitting probe and the receiving probe are arranged side by side in the arrangement direction of the transducers constituting them, and are arranged along the inclination direction of the arrangement surface,
前記送信用探触子は、前記配列方向に沿うように、前記検査対象の内部に向けて超音波を射出する超音波探傷装置。  The transmission probe is an ultrasonic flaw detector that emits ultrasonic waves toward the inside of the inspection target along the arrangement direction.
前記送信用探触子及び前記受信用探触子が備える各振動子は、前記配列方向と直交する方向に所定の曲率で湾曲している請求項1から請求項3のいずれかに記載の超音波探傷装置。 Each resonator the transmission probe and the probe for the receiving comprises the according to claims 1, is curved at a predetermined curvature in a direction orthogonal to the array direction to claim 3 Super Sonic flaw detector. 前記送信用探触子の振動子の曲率と前記受信用探触子の振動子の曲率とが異なっている請求項に記載の超音波探傷装置。 The ultrasonic flaw detector according to claim 4 , wherein a curvature of the transducer of the transmission probe is different from a curvature of the transducer of the reception probe. 複数の振動子を一方向に配列させた送信用探触子と、複数の振動子を一方向に配列させた受信用触子とを、これらを構成する前記振動子の配列方向に傾斜する配置面に、該配列方向に沿うように並べて配置し、且つ、前記送信用探触子からこれら振動子の配列方向に沿うように検査対象内部に向けて超音波を射出させ
前記配置面は、前記検査対象と接触する底面に対して傾斜する斜面とされている二探触子法による超音波探傷方法。
A transmitting probe in which a plurality of transducers are arranged in one direction and a receiving probe in which a plurality of transducers are arranged in one direction are tilted in the arrangement direction of the transducers constituting them. On the arrangement surface , arranged side by side along the arrangement direction, and emitting ultrasonic waves from the transmission probe toward the inside of the inspection target along the arrangement direction of these transducers ,
The ultrasonic flaw detection method by a two-probe method in which the arrangement surface is an inclined surface inclined with respect to a bottom surface in contact with the inspection object .
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