JPH10327498A - Manufacture of ultrasonic wave probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the reliability of a probe by simplifying and ensuring connection between an ultrasonic wave element and a signal input output line member (printed circuit board or the like) being components of the ultrasonic wave probe. SOLUTION: A signal input output line member (flexible cable) 2 is directly connected as connection parts A1, A2 shown to each channel of an ultrasonic wave element 12 of the ultrasonic probe where an ultrasonic wave element 12 is placed on a base 14 via an attenuation material 13 and matching layers 11A, 11B are formed on the element 12 (conventionally connected via a metallic wire) so as to facilitate wiring and to reduce wiring time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic diagnostic apparatus used for diagnosing a living body or the like, and more particularly to a method for manufacturing an ultrasonic probe for transmitting and receiving ultrasonic waves.

[0002]

2. Description of the Related Art Conventionally, when an ultrasonic element constituting an ultrasonic probe is connected to a signal input / output line member (often formed as a flexible printed circuit board), a predetermined metal having a small electric resistance is used. Thin wire (metal wire)
Is generally performed by soldering. At this time, if a metal foil is connected to the ultrasonic element in advance, this is soldered to the signal input / output line member via a metal wire.

[0003]

However, when trying to reduce the size of the ultrasonic element and increase the number of channels,
Finer work than before is required for the work of connecting the ultrasonic element and the signal input / output line member, and there is a possibility that the skill of the operator may not be able to keep up. In addition, the time required for manufacturing increases as the number of channels increases. In addition, due to the miniaturization of the ultrasonic element and the increase in the number of channels, the metal wires become thinner and broken, and the increase in the number increases the number of defective products due to short-circuit due to contact between the channels. There is a problem. Therefore, an object of the present invention is to simply and reliably connect the ultrasonic element and the signal input / output line member,
It is to improve the reliability by reducing defective products.

[0004]

According to the first aspect of the present invention, an ultrasonic element having a plurality of channels is arranged on a base with an attenuating material interposed therebetween. A signal input / output line member is directly connected to a portion corresponding to each channel of the ultrasonic element of an ultrasonic probe having a matching layer formed thereon. This claim 1
In the present invention, the portion corresponding to each channel of the ultrasonic element and the signal input / output line member can be connected via a metal foil of a predetermined metal (the invention of claim 2).

According to the first aspect of the present invention, when each of the channels of the ultrasonic element is further subdivided, the ultrasonic element is not cut between deep grooves for channel division. At least one shallow groove is formed to increase the area of the channel-corresponding portion, thereby facilitating connection between each channel-corresponding portion of the ultrasonic element and the signal input / output line member (claim 3). Alternatively, when the ultrasonic element is curved, a plurality of types of bending jigs are prepared in advance, and the curvature of the ultrasonic element is adjusted in advance, and then connected to the signal input / output line member. (Invention of claim 4).

[0006]

FIG. 1 is an explanatory diagram showing a first embodiment of the present invention. FIG. 1A is a cross-sectional view showing an ultrasonic probe, and FIG. 2B is an enlarged view of a connection portion of FIG. In FIG. 2A, reference numeral 12 denotes an ultrasonic element;
A and 11B are acoustic matching layers (matching layers) for matching the characteristics of the specimen such as the strength of the ultrasonic waves emitted from the ultrasonic element 12, and 13 is an ultrasonic wave emitted from the ultrasonic element 12 below the figure. A damping material 14 such as rubber for damping so as not to bounce upwards, and 14 is a base for supporting these components. Note that a piezoelectric element made of a polymer material or a ceramic material is used as the ultrasonic element.

In the above configuration, the ultrasonic element 1
Reference numeral 2 denotes a signal input / output line member (hereinafter, also simply referred to as a flexible cable) 2 such as a flexible printed wiring board for transmitting / receiving (input / output) an electric signal. Conventionally, the connection is made via a metal wire as described above. However, the connection is directly made as shown in the figure, so that the connection can be simplified and accidents such as short circuit and disconnection can be prevented as much as possible. Is what you do. The connection is made mainly by conductive soldering as in the prior art. The connection portion is shown as A1 and A2 in FIG. 1A, and the enlarged view of the A2 portion is shown in FIG.

FIG. 2 is an explanatory view showing a second embodiment of the present invention. FIG. 1A is a cross-sectional view showing an ultrasonic probe, and FIG. 2B is an enlarged view of a connection portion of FIG.
That is, in FIG. 1, the ultrasonic element 12 and the flexible cable 2
Are connected directly, but here, the ultrasonic element 1
It is characterized in that the flexible cable 2 is connected via a metal foil 15 having a spring property, such as phosphor bronze, which is connected to the flexible cable 2 in advance, and the other points are the same as those in FIG.

FIG. 3 is an explanatory view showing a third embodiment of the present invention. FIG. 1A is a perspective view showing an ultrasonic probe, and FIG. 2B is an enlarged view of a connection portion of FIG.
Ultrasonic element 12 constituting flat ultrasonic probe 1
When a dicing groove is formed and divided into a plurality of channels as shown in FIG. 2A, a process for further subdividing one channel is performed in order to suppress lateral vibration of the ultrasonic element. In other words, at least one (two in FIG. 10A) shallow grooves 16B are provided between the deep grooves 16A as dicing grooves.
To form At this time, if grooves are formed until the damping material 13 is reached as in the related art, the number of steps and time required to combine the grooves into one channel increases.

Therefore, in the example of FIG. 3, the depth of the shallow groove 16B is adjusted so as not to reach the depth at which the ultrasonic element 12 is completely cut, that is, the depth of the attenuation material 13, so that 1 The area of the connection portion per channel is increased to facilitate connection between the corresponding portion of each ultrasonic element and the flexible cable 2 (in FIG. 2B, connection via the pad 21 of the flexible cable 2). is there. By doing so, the number of steps and time for soldering can be greatly reduced.

FIG. 4 is an explanatory diagram showing a fourth embodiment of the present invention. 2A is a cross-sectional view showing the ultrasonic probe, FIG. 2B is a front view thereof, FIG. 2C is a bending jig thereof, and FIG. 2D is a partially enlarged view thereof. That is, when the ultrasonic probe 1 configured as shown in FIG. 2A is curved as shown in FIG. 2B, the flat ultrasonic probe 1 is subjected to dicing as described above. After being divided into a plurality of channels, the channels are bent using a plurality of types of bending jigs 31, 32, 33, etc. prepared in advance as shown in FIG.

To connect the flexible cable 2 to the curved ultrasonic probe 1, a plurality of types of bending jigs 31 and 3 as shown in FIG.
After adjustment using the cable 2, 33 or the like, the cable is connected to the flexible cable 2. By doing so, an appropriate curvature is given to the ultrasonic element, and a reliable connection that absorbs the dimensional error of the flexible cable becomes possible.

[0013]

According to the present invention, the ultrasonic element is directly connected by a flexible cable (signal input / output line member) or the like, so that the ultrasonic probe can be shortened by up to about 20 minutes per ultrasonic probe. Has been confirmed. In addition, since it is wireless, it is possible to eliminate a wire breakage accident, minimize a short circuit accident between channels as much as possible, and expect a significant improvement in quality. Further, since wireless is used, it is possible to provide an ultrasonic probe with high reliability as well as to be able to immediately adapt to a device having a small curvature or a device having a large number of channels.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a second embodiment of the present invention.

FIG. 3 is an explanatory diagram showing a third embodiment of the present invention.

FIG. 4 is an explanatory diagram showing a fourth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Ultrasonic probe, 11A, 11B ... Acoustic matching layer (matching layer), 12 ... Ultrasonic element, 13 ... Attenuation material, 14
... Base, 15 ... Metal foil, 16A, 16B ... Dicing groove, 2 ... Flexible cable (flexible printed wiring board), 21 ... Pad, 31, 32, 33 ... Jig.

Claims (4)

[Claims] An ultrasonic probe comprising a plurality of channels arranged on a base with an attenuating material interposed therebetween, and a matching layer formed thereon further, wherein each channel of the ultrasonic elements is provided. A method for manufacturing an ultrasonic probe, wherein a signal input / output line member is directly connected to a corresponding portion. 2. The ultrasonic probe according to claim 1, wherein a portion corresponding to each channel of the ultrasonic element and a signal input / output line member are connected via a metal foil of a predetermined metal. Production method. 3. When subdividing each channel of the ultrasonic element, at least one shallow groove is formed between deep grooves for channel division so as not to cut the ultrasonic element. The method for manufacturing an ultrasonic probe according to claim 1, wherein the area of the channel corresponding portion is increased to facilitate connection between each channel corresponding portion of the ultrasonic element and the signal input / output line member. 4. When the ultrasonic element is curved,
2. The ultrasonic probe according to claim 1, wherein a plurality of types of bending jigs are prepared in advance, and the curvature of the ultrasonic element is adjusted in advance, and then connected to the signal input / output line member. Child manufacturing method.