JP2004340809A - Phased array probe and ultrasonic test equipment using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a phased array probe capable of converging ultrasonic beams on a point focus with a high convergence rate with a simple structure, and scanning the ultrasonic convergence position, and an ultrasonic test equipment using the probe, and capable of acquiring a high flaw detection effect. <P>SOLUTION: In this phased array probe B having a plurality of oscillators 1, each oscillator 1 is curved in the longitudinal direction with a prescribed curvature (radius of curvature r1), and arranged in the curved surface-shaped array curved in the different direction from the curve direction of the plurality of oscillators 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a phased array probe that emits ultrasonic waves and an ultrasonic inspection device that detects a defect inside a member using the phased array probe.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, ultrasonic testing (UT) is often used to investigate defects such as scratches and cracks inside an object or inside an inaccessible object. The ultrasonic flaw detection method uses an ultrasonic flaw detector to irradiate ultrasonic waves from the surface of the object toward the inside of the object or the inner surface of the object, and analyze the reflected ultrasonic waves to determine the size and type. This is a method for judging the state of a defect such as a position, a position, or the like.
[0003]
The ultrasonic flaw detector applies a pulse voltage to a transducer in a probe (probe) to generate an ultrasonic wave, and makes the ultrasonic wave incident on the inside or the inner surface of the subject at a certain angle as described above, This reflected wave is received by the probe, and the received signal is analyzed. Here, the vibrator is a piezoelectric element that vibrates when a voltage is applied.
[0004]
The ultrasonic flaw detector is often used as a phased array probe in which a plurality of transducers are arranged in the probe. The phased array probe includes a linear array probe in which rectangular oscillators are arranged side by side, an annular array probe in which a circular or ring-shaped oscillator having a hole in the center is arranged concentrically, and oscillators arranged vertically and horizontally. There are types such as matrix array probes arranged in a lattice.
[0005]
FIG. 11 shows a schematic layout of the linear array probe.
As shown in FIG. 11, the linear array probe 7 has a large number of vibrators 71 that vibrate when a voltage is applied and generate ultrasonic waves arranged in a line to form a probe.
[0006]
The linear array probe 71 can selectively excite these transducers at the time of transmitting ultrasonic waves, or synthesize the ultrasonic wavefront by controlling the excitation timing of each transducer. That is, if the transducers are excited with a predetermined delay time in order from the left, the wavefronts of the ultrasonic waves radiated from each transducer interfere with each other, and an ultrasonic beam traveling in an oblique direction according to the delay time is synthesized. Is done. When excited from the vibrators on both sides, the wavefront becomes concave and an ultrasonic beam converging at an arbitrary position is synthesized.
[0007]
The transmission direction and the focusing position 72 of the ultrasonic beam can be arbitrarily controlled by changing the setting of the delay time, and the linear array probe 7 is an oblique probe having various angles, and further has a linear angle having various focal lengths. Operate as an array probe. Further, it is possible to scan the ultrasonic beam by changing the transmission direction and the focusing position of the ultrasonic beam with time.
[0008]
The ultrasonic wave transmitted from the vibrator 71 is a position where the line extending from the ultrasonic wave transmitting surface of the vibrator 71 (main beam direction) can transmit the strongest ultrasonic wave, and the main beam direction is the ultrasonic focusing position 72. A plurality of transducers may be arranged in an arc shape so as to face. By arranging the vibrators 71 in an arc shape, the main beam direction of each vibrator 71 is directed to the ultrasonic focus position 72, so that stronger ultrasonic waves can be applied to the ultrasonic focus position 72.
[0009]
FIG. 12 shows a schematic layout of the annular array probe.
The annular array probe 8 shown in FIG. 12 has a circular vibrator 81 centered on the axis 8s, and a plurality of ring-shaped vibrators 82 arranged concentrically around the vibrator 81.
[0010]
The annular array probe 8 focuses the ultrasonic beam at an arbitrary focusing position (for example, a point 83) on the axis 8s by shifting the timing of transmitting the ultrasonic waves from the outer peripheral side to the inner side of the transducers 81 and 82. It is possible to do.
[0011]
In addition, the linear array probe 7 can focus an ultrasonic beam only in the direction in which the transducers 71 are arranged. In other words, the linear array probe 7 cannot focus an ultrasonic beam in the longitudinal direction of the transducer 71, which is a so-called line focus. On the other hand, since the annular array probe 8 converges from the circumference, it is a so-called point focus, which converges the ultrasonic beam at one point. The point focus can transmit a stronger ultrasonic beam to the ultrasonic focus position than the line focus.
[0012]
As in a linear array probe 7 ′ shown in FIG. 13, an acoustic lens 73 is mounted in front of an ultrasonic transmission unit of the linear array probe 7 ′ to focus ultrasonic waves in the longitudinal direction of the vibrator 71, A method has been proposed in which the linear array probe is set to point focus by using the operation timing of the above and the acoustic lens 73.
[0013]
FIG. 14 shows a schematic layout of the matrix array probe.
The matrix array probe 9 shown in FIG. 14 has a shape in which a plurality of transducers 9 are arranged in a lattice. By arranging the transducers 9 in a lattice shape, it is possible to focus ultrasonic waves in both the vertical direction 9x and the horizontal direction 9y. That is, the ultrasonic focusing position 92 is point-focused. Scanning can be performed in any of the vertical direction 9x and the horizontal direction 9y, and also can be performed in a direction in which they are combined.
[0014]
FIG. 15 is a schematic layout diagram showing a conventional TOFD (Time of Flight Diffraction) method.
The ultrasonic flaw detector UT5 shown in FIG. 15 includes a transmitting probe PB1 and a receiving probe PB2 for receiving ultrasonic waves. The transmitting probe PB1 and the receiving probe PB2 mutually detect defects Ke inside the subject TB. It is attached to both sides sandwiched. The transmitting probe PB1 transmits an ultrasonic wave from a predetermined position toward the inside of the subject TB. The receiving probe PB2 receives the ultrasonic wave transmitted from the transmitting probe PB1 and propagating inside the subject TB. The transmitting probe PB1 and the receiving probe PB2 are linear array probes 7.
[0015]
FIG. 16 shows a graph in which the vertical axis represents the amplitude of the received wave and the horizontal axis represents time. As shown in FIG. 16, the ultrasonic wave received by the receiving probe PB2 is a surface wave W1 propagated on the surface of the subject TB, a reflected wave W2 reflected on the bottom surface of the subject TB, and an upper end of a defect inside the subject. Ultrasonic waves having four different amplitudes are roughly divided into a diffracted wave W3 diffracted at the portion and a diffracted wave W4 diffracted at the lower end. Further, a higher flaw detection effect can be obtained by scanning the transmission side probe PB1.
[0016]
[Patent Document 1]
JP-A-11-160294
[0017]
[Patent Document 2]
JP 2001-228126 A
[0018]
[Problems to be solved by the invention]
However, in the case of the linear array probe 7, it is possible to focus or scan the ultrasonic waves in the arrangement direction of the transducers 71 as described above, but to focus or scan in other directions. You can't let it. In addition, because of line focus, it is difficult to improve the accuracy of flaw detection even when focusing is performed at an ultrasonic focusing position.
[0019]
The annular array probe 8 can focus the ultrasonic beam at a point focus anywhere on the central axis 8s, but focuses the ultrasonic beam at a position off the central axis 8s. It is not possible to move the ultrasonic focusing position other than the direction of the axis 8s unless the annular array probe 8 itself is moved.
[0020]
In the case of the matrix array probe 9, the weak points of the linear array probe 7 and the annular array probe 8 are compensated for, and the selection range of the focusing position of the ultrasonic beam and the scanning direction are limited to the arrangement direction or the central axis. In addition, it is possible to set a wide range within a range where an ultrasonic wave can reach with a point focus. However, in the case of a matrix array probe, since the transducers are arranged in the vertical and horizontal directions, the number of transducers is much larger than that of a linear array probe or an annular array probe, and as a result, the structure is complicated, Control becomes difficult.
[0021]
Further, in the case of the linear array probe 7 ′ to which the acoustic lens 73 is attached, the structure is simpler than that of the matrix array probe 9, but it depends on the performance of the acoustic lens 73.
[0022]
In addition, when ultrasonic inspection is performed by the TOFD method using the linear array probe 7, the signal level of the diffracted wave tends to be low because the focus position of the ultrasonic beam is in line focus.
[0023]
In view of such a problem, the present invention provides a phased array probe having a simple structure, capable of focusing an ultrasonic beam at a high convergence rate and at a point focus, and further capable of scanning the ultrasonic focusing position. The purpose is to provide.
[0024]
Another object of the present invention is to provide an ultrasonic flaw detector which has a simple structure and can obtain a high flaw detection effect.
[0025]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a phased array probe having a plurality of transducers, wherein each of the transducers is curved at a predetermined curvature in a longitudinal direction, and is directed in a direction perpendicular to the bending direction. A phased array probe is provided, which is arranged in a linear array.
[0026]
According to this configuration, the ultrasonic beam can be focused on the vibrator alone in the longitudinal direction of the vibrator, more specifically, on the center of curvature. At the same time, a plurality of the vibrators capable of converging the ultrasonic beam at the center of curvature are arranged in a straight line, and by controlling the ultrasonic wave transmission timing of each vibrator, the vibrator can be arranged in the arrangement direction. The ultrasonic beam can be focused, and as a result, point focus can be achieved despite the linear array structure in which transducers are linearly arranged. As a result, it is possible to obtain a high ultrasonic beam focusing efficiency with a simple structure.
[0027]
Also, by controlling the ultrasonic transmission timing of each of the transducers, the ultrasonic focusing position of the ultrasonic beam can be shifted in the arrangement direction of the transducers, so that it is possible to perform scanning with a point focus. Ultrasonic beams can be transmitted and received over a wide range. In addition, since the ultrasonic wave focus position can be moved, the angle of refraction when transmitting the ultrasonic wave to the inside of the object can be arbitrarily set.
[0028]
According to another aspect of the present invention, there is provided a phased array probe having a plurality of transducers, wherein each of the transducers is curved at a predetermined curvature in a longitudinal direction, and A phased array probe characterized by being arranged in a curved array that curves in a direction perpendicular to the direction.
[0029]
According to this configuration, the ultrasonic beam can be focused on the vibrator alone in the longitudinal direction of the vibrator, more specifically, on the center of curvature. At the same time, since each vibrator is arranged on a predetermined curved surface, it is focused around a predetermined point or around that point, and a higher focusing effect is obtained by controlling the operation timing of each vibrator. Can be expected. Since the main beam direction of the ultrasonic beam of each transducer is directed to the one point or substantially one point, it is possible to increase the focusing efficiency with less diffusion. Further, it is possible to transmit a strong ultrasonic beam. In addition, it is possible to obtain a high ultrasonic beam focusing efficiency with a simple structure.
[0030]
Also, by controlling the ultrasonic transmission timing of each of the transducers, the ultrasonic focusing position of the ultrasonic beam can be shifted in the arrangement direction of the transducers, so that it is possible to perform scanning with a point focus. Ultrasonic beams can be transmitted and received over a wide range. In addition, since the ultrasonic wave focus position can be moved, the angle of refraction when transmitting the ultrasonic wave to the inside of the object can be arbitrarily set.
[0031]
In the above configuration, the curved surface on which the transducers are arranged may be spherical. In this case, the ultrasonic beam transmitted from each transducer is always focused on the center of curvature.
[0032]
Further, among the plurality of vibrators having the above configuration, those having the same curvature in the longitudinal direction can be exemplified.
[0033]
According to this configuration, since all the vibrators have the same curvature, it is easy to manufacture, and accordingly, the time and cost required for manufacturing can be reduced.
[0034]
Further, among the plurality of vibrators having the above configuration, at least one of the plurality of vibrators may have a different curvature in a longitudinal direction from other vibrators.
[0035]
According to this configuration, when the distance from each transducer of the point-focused phased array probe to the ultrasonic focus position is not uniform, the curvature of the ultrasonic beam is set by considering the distance to the ultrasonic focus position. It is possible to increase efficiency.
[0036]
Further, as the vibrator having the above configuration, a vibrator whose longitudinal curvature can be arbitrarily changed can be exemplified.
[0037]
According to this configuration, the distance to the ultrasonic focus position of the ultrasonic beam and the distance to the probe can be arbitrarily set.
[0038]
Further, in order to achieve the above object, the present invention provides an ultrasonic flaw detector which performs oblique flaw detection using a phased array probe in which a plurality of curved transducers are arranged.
[0039]
According to this configuration, the detectivity (S / N ratio) of the reflected wave at the end having a small signal level can be improved by the point focus. Further, since the scanning can be performed, it is possible to widen the applicable range in the depth direction of the subject. In addition, since the phased array probe can arbitrarily change the angle of refraction, it can be widely used for any object.
[0040]
Further, in order to achieve the above configuration, the present invention provides a transmission-side ultrasonic probe using a phased array probe in which a plurality of curved transducers are arranged as a transmission-side ultrasonic probe and a reception-side ultrasonic probe. The present invention provides an ultrasonic flaw detector which sequentially focuses and scans an ultrasonic beam transmitted from a transmission-side ultrasonic probe by sequentially delaying the transmission timing of ultrasonic waves output from each transducer.
[0041]
According to this configuration, the phased array probe is a point focus, which can improve the signal level (S / N ratio) of the diffracted wave at the defect edge, and can detect a defect in the depth direction because scanning is possible. Can be widely used. In addition, since the convergence is superior to that of the conventional TOFD method, the SN ratio of the diffracted wave can be improved in this respect as well.
[0042]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described with reference to the drawings.
[0043]
(Example 1)
FIG. 1 is a schematic perspective view of the phased array probe according to the present invention, FIG. 2 is a side view of the phased array probe shown in FIG. 1, and FIG. 3 is a sectional view of the phased array probe shown in FIG.
[0044]
The phased array probe A shown in FIG. 1 has, but is not limited to, a linear phased array structure in which twelve transducers 1 are linearly arranged.
The vibrator 1 has a curved shape having a curvature having a radius of curvature r1, and has a structure in which a vibrating element 13 is disposed between the electrodes 11 and 12 (see FIGS. 2 and 3).
The vibration element 13 is a piezoelectric element that undergoes minute deformation when a predetermined voltage is applied between the electrodes 11 and 12.
As can be seen from FIG. 2, since the vibrator 1 is formed in a shape having a curvature, the ultrasonic waves transmitted from the vibrator 1 are focused at the center P1 of the curvature.
[0045]
As shown in FIG. 3, the phased array probe A has a linear array structure. For example, each of the transducers 1 is driven in order from the left transducer to the right transducer with a predetermined delay time. The wavefronts of the ultrasonic waves transmitted from each other interfere with each other, and it is possible to transmit an ultrasonic beam directed to the right side according to the delay time. The direction of the ultrasonic beam can be determined by controlling the delay time.
[0046]
Further, by sequentially driving the inner vibrator with a predetermined delay time from both the left and right outer sides, the ultrasonic beam can be focused on one point PS1. The distance between the ultrasonic beam focusing position PS1 of the ultrasonic beam and the probe A can be shortened or lengthened by changing the delay time.
[0047]
Also, by properly combining the above-described method of tilting the transmission direction of the ultrasonic beam and the method of focusing the ultrasonic beam, the ultrasonic focusing position PS1 of the ultrasonic beam is shifted to a position deviated from the center line of the phased array probe A. It is possible to set. Further, by moving the ultrasonic wave focusing position of the beam for a predetermined time, it is possible to perform a so-called scanning in which the ultrasonic wave irradiation position is changed (see FIG. 3).
[0048]
In the case of the phased array probe A, even when the transducer 1 emits an ultrasonic wave alone, it converges at the center of curvature P 1, but the convergence is the focusing in the longitudinal direction of the transducer 1. Further, since the phased array probe A has a linear array structure in which the transducers 1 are arranged linearly, it is possible to focus the ultrasonic beam also in the direction in which the transducers 1 are arranged. The ultrasonic focusing position in the longitudinal direction is determined by the shape of the transducer, but the ultrasonic focusing position in the direction in which the transducers are arranged can be adjusted by controlling the drive delay time of each transducer. By controlling the delay time so as to overlap with the ultrasonic focus position, point focus at which the ultrasonic focus position becomes a point is possible. In addition, scanning can be performed with point focus. Further, the curvature of the vibrator 1 may be changed in consideration of an object to which an ultrasonic beam is transmitted, an object depth, and the like.
[0049]
In the present embodiment, all the vibrators 1 are described as having the same curvature (curvature radius r1). However, the present invention is not limited to this, and the curvatures are individually set according to the locations of the vibrators. For example, a vibrator having a different curvature may be arranged as a phased array probe.
[0050]
Further, a vibrator having flexibility and capable of arbitrarily changing the curvature may be used.
[0051]
(Example 2)
FIG. 4 shows a perspective view of another example of a phased array probe according to the present invention. FIG. 5 shows a cross-sectional view of the phased array probe shown in FIG.
The phased array probe B shown in FIG. 5 has a shape in which the vibrators 1 curving at the radius of curvature r1 are arranged like the phased array probe A shown in the first embodiment. In the phased array probe B, as shown in FIG. 5, the vibrators 1 are arranged on a circular arc Cir having a radius of curvature r2 at equal center angular intervals.
[0052]
The phased array probe A in FIG. 3 has a linear array structure, and as described above, the phased array probe A can set the ultrasonic focusing position as long as the ultrasonic waves transmitted from the transducer 1 can reach. it can. The ultrasonic beam is the one that is strongest in the front (main beam direction) of the vibrator 1 and diffuses around as shown by the arrow ar1 in FIG. That is, the ultrasonic beam can be focused at the ultrasonic focusing position, but if it is desired to transmit a stronger ultrasonic beam to the ultrasonic focusing position, it is necessary to strengthen the ultrasonic waves transmitted from the transducer 1. .
[0053]
In the case of the phased array probe B arranged in an arc shape shown in FIG. 5, the vibrator 1 roughly determines the focus position in advance (O in the figure), and places it on an arc having a center of curvature P2 at the center or substantially the center. Arrange the vibrator. As a result, the ultrasonic beam is focused on the center of curvature P2 even when the transducers 1 are simultaneously driven. Since all the transducers 1 are arranged with the center of curvature P2, that is, the main beam direction ar2 facing the ultrasonic focusing position PS2, the ultrasonic beam at the ultrasonic focusing position is stronger than the linear array probe. In addition, by controlling the operation timing of each transducer, the ultrasonic focusing position can be changed, and scanning can be performed by moving the ultrasonic focusing position. Also in the case of scanning, a stronger ultrasonic beam can be transmitted than a linear array probe.
[0054]
At this time, even if the vibrator 1 is arranged on an arc, both end portions of the vibrator 1 may be formed thinner than the central portion so as not to interfere with each other.
[0055]
In the present embodiment, all the vibrators 1 are described as having the same curvature (curvature radius r1). However, the present invention is not limited to this, and the curvatures are individually set according to the locations of the vibrators. For example, a vibrator having a different curvature may be arranged as a phased array probe.
[0056]
Further, a vibrator having flexibility and capable of arbitrarily changing the curvature may be used. In addition, a device that can arbitrarily change the arrangement curved surface of the vibrator may be used.
[0057]
(Example 3)
FIG. 6 shows an example in which an ultrasonic test for an object is performed by using the ultrasonic test apparatus provided with the phased array probe A shown in the first embodiment.
The ultrasonic flaw detector UT1 shown in FIG. 6 includes a phased array probe A, is installed on the surface of the subject T, and is installed at an angle θ with respect to the surface of the subject T. The ultrasonic beam is transmitted to the subject T to detect the defect M1.
[0058]
FIG. 7 is a block diagram showing a schematic arrangement of the ultrasonic flaw detector shown in FIG.
As shown in FIG. 7, the ultrasonic flaw detector UT1 has a phased array probe A having twelve transducers 1, and each transducer 1 is provided with a pulsar receiver PR. Each pulsar receiver PR is connected to the control unit CONT.
[0059]
The control device CONT outputs an operation signal to the pulser receiver PR in accordance with the operation timing of each transducer 1. The pulsar receiver PR applies a drive voltage to the electrodes of the vibrator 1 based on the operation signals sent. Thereby, an ultrasonic wave is transmitted from each transducer 1. When the transducer 1 receives the reflected ultrasonic waves, a voltage is generated between the electrodes sandwiching the vibration element. The voltage is received by the pulser receiver PR, and the received signal is transmitted to the control device CONT. The control device CONT performs arithmetic processing, calculates the amplitude of the reflected wave, and determines the size and position of the defect M1 based on the amplitude.
[0060]
As shown in FIG. 6, the ultrasonic flaw detector UT1 can scan the ultrasonic focus position PS3 of the ultrasonic beam BEM in the arrangement direction of the transducers 1, and can also cope with the depth direction. That is, even if there is no defect M1 near the initial ultrasonic focus position, scanning can detect the defect, and when the defect extends in the arrangement direction of the vibrator 1, the position of the defect M1 is obviously determined. It is also possible to detect the length of the defect.
[0061]
(Example 4)
FIG. 8 shows an example in which an ultrasonic test for an object is performed using the ultrasonic test equipment provided with the phased array probe shown in the second embodiment.
The ultrasonic flaw detector UT2 shown in FIG. 8 detects a defect N1 using a phased array probe B, and is otherwise the same as the ultrasonic flaw detector UT1 shown in the third embodiment. Substantially the same members are denoted by the same reference numerals.
[0062]
The phased array probe B of the ultrasonic flaw detector UT2 has the transducers 1 arranged in a curved surface. The curved surface on which the vibrator 1 is arranged is determined by the refraction angle when the ultrasonic wave enters the subject.
[0063]
Since the phased array probe B of the ultrasonic flaw detector UT2 has a higher ultrasonic wave focusing efficiency than the phased array probe A of the ultrasonic flaw detector UT1 shown in the third embodiment, the detectability of the reflected wave at the small end is improved. However, smaller defects can be found earlier. Further, since the scanning can be performed by swinging the ultrasonic focus position PS4 of the ultrasonic beam BEM, it is possible to cope with the depth direction of the subject T similarly to the ultrasonic test equipment UT1.
[0064]
(Example 5)
FIG. 9 is a schematic diagram for detecting a defect by the TOFD method using the ultrasonic flaw detector having the phased array probe shown in the first embodiment.
The ultrasonic flaw detector UT3 shown in FIG. 6 has a transmitting-side ultrasonic probe 3 for transmitting ultrasonic waves and a receiving-side ultrasonic probe 4 for receiving ultrasonic waves reflected or diffracted inside the subject T2. are doing.
[0065]
The transmission-side ultrasonic probe 3 has one phased array probe A1. The phased array probe A1 is fixed to the shoe 31 and is directed toward the inside of the subject T2 at a predetermined incident angle. Is sent.
[0066]
The receiving-side ultrasonic probe 4 has one phased-array probe A2 like the transmitting-side ultrasonic probe 3, and the phased-array probe A2 is fixed to the shoe 41, and the subject T2 To receive the ultrasonic wave propagating in the inside.
[0067]
The transmission-side ultrasonic probe 3 focuses and scans the ultrasonic beam transmitted by the ultrasonic probe by sequentially delaying the transmission timing of the ultrasonic wave output from each transducer 1. That is, focusing is performed as shown by BEM1, BEM2, and BEM3 in FIG. 9, and scanning is performed in the direction from BEM1 to BEM3, and conversely, in the direction from BEM3 to BEM1.
[0068]
On the other hand, the receiving-side ultrasonic probe 4 sequentially delays the reception timing of the ultrasonic beam by each of the transducers in synchronization with the phased array probe A1 on the transmitting side. The transmitted ultrasonic beam is effectively focused and scanned for reception.
[0069]
Thus, the diffracted waves Ks1 and Ks2 based on the focused ultrasonic beam are obtained from the middle and bottom of the defect M2. Although the diffracted waves Ks1 and Ks2 are diffused, the receiving-side ultrasonic probe 4 can effectively focus and scan the ultrasonic beam at this time and receive it. Each transducer 1 is synchronized with the corresponding phased array probe A1 on the transmitting side, and receives the ultrasonic beam by the transducers 1 while sequentially delaying the reception timing.
[0070]
In the ultrasonic flaw detector UT3, the phased array probes A1 and A2 of the transmission-side ultrasonic probe 3 and the reception-side ultrasonic probe 4 are point-focused, and diffracted waves at the front ends Ma and Mb of the defect M2. It is possible to improve the signal level (SN ratio).
[0071]
(Example 6)
FIG. 10 is a schematic diagram for detecting a defect by the TOFD method using the ultrasonic flaw detector having the phased array probe shown in the second embodiment.
The ultrasonic flaw detector UT4 using the TOFD method shown in FIG. 10 is the same as the ultrasonic flaw detector shown in Example 5 except that the transmitting ultrasonic probe 5 and the receiving ultrasonic probe 6 use the phased array probes B1 and B2. The configuration is the same as that of the ultrasonic testing device UT3, and substantially the same members are denoted by the same reference numerals.
[0072]
The phased array probes B1 and B2 used for the transmission-side ultrasonic probe 5 and the reception-side ultrasonic probe 6 are phased array probes in which the vibrator 1 is arranged along a predetermined curved surface described in the second embodiment. B and point focus. Since the main beam direction of the ultrasonic beam of each transducer 1 is arranged toward the ultrasonic focusing position of the ultrasonic beam, the ultrasonic beam focusing efficiency is high, and diffraction at both ends Na and Nb of the defect N2 is performed. The signal level (SN ratio) of the wave can be increased. As a result, a high flaw detection effect can be obtained.
[0073]
【The invention's effect】
According to the present invention, it is possible to provide a phased array probe which has a simple structure, can focus an ultrasonic beam at a high convergence rate and at a point focus, and can scan the ultrasonic focus position. .
[0074]
Further, according to the present invention, it is possible to provide an ultrasonic flaw detector capable of obtaining a high flaw detection effect with a simple structure.
[Brief description of the drawings]
FIG. 1 is a perspective view of an example of a phased array probe according to the present invention.
FIG. 2 is a front view of the phased array probe shown in FIG.
FIG. 3 is a side view of the phased array probe shown in FIG.
FIG. 4 is a perspective view of another example of the phased array probe according to the present invention.
5 is a cross-sectional view of the phased array probe shown in FIG.
FIG. 6 is a schematic layout diagram for performing ultrasonic flaw detection using an example of the ultrasonic flaw detection apparatus according to the present invention.
FIG. 7 is a block diagram showing a schematic arrangement of the ultrasonic flaw detector used in FIG. 6; .
FIG. 8 is a schematic layout diagram for performing ultrasonic inspection using another example of the ultrasonic inspection apparatus according to the present invention.
FIG. 9 is a schematic layout diagram for performing ultrasonic flaw detection by TOFD using another example of the ultrasonic flaw detection apparatus according to the present invention.
FIG. 10 is a schematic layout diagram of performing ultrasonic flaw detection by TOFD method using still another example of the ultrasonic flaw detection apparatus according to the present invention.
FIG. 11 is a perspective view of a conventional linear array probe.
FIG. 12 is a perspective view of a conventional annular array probe.
FIG. 13 is a perspective view of a conventional linear array probe using an acoustic lens.
FIG. 14 is a perspective view of a matrix array probe.
FIG. 15 is a schematic layout diagram showing an example of a conventional apparatus for performing ultrasonic inspection by the TOFD method.
FIG. 16 is a schematic diagram showing a waveform of a reflected or diffracted wave in ultrasonic testing.
[Explanation of symbols]
A, B Phased array probe
1 vibrator
11, 12 electrodes
13 Piezoelectric element
3, 5 Transmitting ultrasonic probe
4, 6 Receiver ultrasonic probe
7 Linear array probe
8 Annular array probe
9 Matrix array probe
UT1, UT2 Bevel ultrasonic flaw detector
UT3, UT4 Ultrasonic flaw detector for TOFD method

Claims (8)

A phased array probe having a plurality of transducers,
A phased array probe, wherein each of the vibrators is curved at a predetermined curvature in a longitudinal direction, and is arranged in a linear array in a direction perpendicular to the curved direction. A phased array probe having a plurality of transducers,
A phased array probe, wherein each of the vibrators is curved at a predetermined curvature in a longitudinal direction, and is arranged in a curved array that bends in a direction different from a bending direction of the plurality of vibrators. The phased array probe according to claim 2, wherein the curved array is a spherical surface having a predetermined curvature. 4. The phased array probe according to claim 1, wherein the plurality of transducers all have the same curvature in the longitudinal direction. 5. 4. The phased array probe according to claim 1, wherein at least one of the plurality of transducers has a different curvature in a longitudinal direction from other transducers. 5. The phased array probe according to claim 1, wherein the vibrator is capable of arbitrarily changing a curvature in a longitudinal direction. An ultrasonic flaw detector which performs oblique flaw detection using the phased array probe according to any one of claims 1 to 5. The phased array probe according to any one of claims 1 to 5 as a transmission-side ultrasonic probe and a reception-side ultrasonic probe,
The ultrasonic wave transmitted from the transmission-side ultrasonic probe is focused and scanned by sequentially delaying the transmission timing of the ultrasonic wave output from each transducer of the transmission-side ultrasonic probe. Sonic flaw detector.

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