JP5703621B2 - 回路部材接続用接着剤、回路部材接続用接着剤シート、半導体装置及び半導体装置の製造方法 - Google Patents

回路部材接続用接着剤、回路部材接続用接着剤シート、半導体装置及び半導体装置の製造方法 Download PDF

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Publication number
JP5703621B2
JP5703621B2 JP2010178935A JP2010178935A JP5703621B2 JP 5703621 B2 JP5703621 B2 JP 5703621B2 JP 2010178935 A JP2010178935 A JP 2010178935A JP 2010178935 A JP2010178935 A JP 2010178935A JP 5703621 B2 JP5703621 B2 JP 5703621B2
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Japan
Prior art keywords
adhesive
circuit member
circuit
heating
resin
Prior art date
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Active
Application number
JP2010178935A
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English (en)
Japanese (ja)
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JP2012038975A (ja
JP2012038975A5 (enExample
Inventor
永井　朗
朗 永井
榎本　哲也
哲也 榎本
大久保　恵介
恵介 大久保
一尊 本田
一尊 本田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd, Resonac Corp filed Critical Hitachi Chemical Co Ltd
Priority to JP2010178935A priority Critical patent/JP5703621B2/ja
Publication of JP2012038975A publication Critical patent/JP2012038975A/ja
Publication of JP2012038975A5 publication Critical patent/JP2012038975A5/ja
Application granted granted Critical
Publication of JP5703621B2 publication Critical patent/JP5703621B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/731—Location prior to the connecting process
    • H01L2224/73101—Location prior to the connecting process on the same surface
    • H01L2224/73103—Bump and layer connectors
    • H01L2224/73104—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/8119—Arrangement of the bump connectors prior to mounting
    • H01L2224/81193—Arrangement of the bump connectors prior to mounting wherein the bump connectors are disposed on both the semiconductor or solid-state body and another item or body to be connected to the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Wire Bonding (AREA)
JP2010178935A 2010-08-09 2010-08-09 回路部材接続用接着剤、回路部材接続用接着剤シート、半導体装置及び半導体装置の製造方法 Active JP5703621B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010178935A JP5703621B2 (ja) 2010-08-09 2010-08-09 回路部材接続用接着剤、回路部材接続用接着剤シート、半導体装置及び半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010178935A JP5703621B2 (ja) 2010-08-09 2010-08-09 回路部材接続用接着剤、回路部材接続用接着剤シート、半導体装置及び半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2012038975A JP2012038975A (ja) 2012-02-23
JP2012038975A5 JP2012038975A5 (enExample) 2013-08-29
JP5703621B2 true JP5703621B2 (ja) 2015-04-22

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5838903B2 (ja) * 2012-04-17 2016-01-06 住友ベークライト株式会社 積層体の製造方法
WO2014010258A1 (ja) * 2012-07-13 2014-01-16 パナソニック株式会社 半導体封止用アクリル樹脂組成物とそれを用いた半導体装置およびその製造方法
JP6094884B2 (ja) * 2013-06-13 2017-03-15 パナソニックＩｐマネジメント株式会社 半導体装置の製造方法とそれに使用される半導体封止用アクリル樹脂組成物
JP6094886B2 (ja) * 2013-07-12 2017-03-15 パナソニックＩｐマネジメント株式会社 半導体装置の製造方法とそれに使用される半導体封止用アクリル樹脂組成物
CN119343420A (zh) * 2022-09-05 2025-01-21 株式会社力森诺科 层叠膜及半导体装置的制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4815648B2 (ja) * 1999-09-01 2011-11-16 日立化成工業株式会社 回路接続用フィルム状接着剤
CN101437914B (zh) * 2006-05-09 2012-12-12 日立化成工业株式会社 粘接片、使用其的电路构件的连接结构及半导体器件
JP2009188063A (ja) * 2008-02-04 2009-08-20 Fujikura Kasei Co Ltd 端子間の接続方法、および半導体素子の実装方法
JP5417729B2 (ja) * 2008-03-28 2014-02-19 住友ベークライト株式会社 半導体用フィルム、半導体装置の製造方法および半導体装置
JP5837272B2 (ja) * 2008-05-21 2015-12-24 日立化成株式会社 半導体製造装置の製造方法

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