JP5691004B2 - レーザ加工装置およびレーザ加工方法 - Google Patents

レーザ加工装置およびレーザ加工方法 Download PDF

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Publication number
JP5691004B2
JP5691004B2 JP2012513394A JP2012513394A JP5691004B2 JP 5691004 B2 JP5691004 B2 JP 5691004B2 JP 2012513394 A JP2012513394 A JP 2012513394A JP 2012513394 A JP2012513394 A JP 2012513394A JP 5691004 B2 JP5691004 B2 JP 5691004B2
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Japan
Prior art keywords
workpiece
laser processing
laser
suction
processing
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Active
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JP2012513394A
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Japanese (ja)
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JPWO2012035721A1 (ja
Inventor
一知 小寺
一知 小寺
杉山　勤
勤 杉山
学 西原
学 西原
義典 佐々木
義典 佐々木
櫻井　通雄
通雄 櫻井
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Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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Priority to JP2012513394A priority Critical patent/JP5691004B2/ja
Publication of JPWO2012035721A1 publication Critical patent/JPWO2012035721A1/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2012513394A 2010-09-16 2011-09-06 レーザ加工装置およびレーザ加工方法 Active JP5691004B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012513394A JP5691004B2 (ja) 2010-09-16 2011-09-06 レーザ加工装置およびレーザ加工方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2010207513 2010-09-16
JP2010207513 2010-09-16
PCT/JP2011/004977 WO2012035721A1 (ja) 2010-09-16 2011-09-06 レーザ加工装置およびレーザ加工方法
JP2012513394A JP5691004B2 (ja) 2010-09-16 2011-09-06 レーザ加工装置およびレーザ加工方法

Publications (2)

Publication Number Publication Date
JPWO2012035721A1 JPWO2012035721A1 (ja) 2014-01-20
JP5691004B2 true JP5691004B2 (ja) 2015-04-01

Family

ID=45831216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012513394A Active JP5691004B2 (ja) 2010-09-16 2011-09-06 レーザ加工装置およびレーザ加工方法

Country Status (4)

Country Link
JP (1) JP5691004B2 (zh)
CN (1) CN102639282B (zh)
TW (1) TWI495531B (zh)
WO (1) WO2012035721A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8815747B2 (en) 2010-06-03 2014-08-26 Micron Technology, Inc. Methods of forming patterns on substrates
CN104096979B (zh) * 2014-06-20 2016-01-20 西安交通大学 一种基于静电场辅助的激光加工工艺及其加工装置
DE102017213364A1 (de) * 2017-08-02 2019-02-07 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Funktionseinheit für einen Bearbeitungskopf, Bearbeitungskopf und Funktionselement

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224893A (ja) * 1987-03-16 1988-09-19 Yamazaki Mazak Corp レ−ザ加工機
JPS6427792A (en) * 1987-07-22 1989-01-30 Fujitsu Ltd Laser beam machining method and machine
JPH02160192A (ja) * 1988-12-12 1990-06-20 Amada Co Ltd 熱切断加工装置
JPH11254166A (ja) * 1997-12-25 1999-09-21 Matsushita Electric Ind Co Ltd 加工装置及び方法
JP2005019529A (ja) * 2003-06-24 2005-01-20 Sumitomo Heavy Ind Ltd 吸着テーブルの静電気除去システム及びレーザ加工機
JP2007160375A (ja) * 2005-12-15 2007-06-28 Nippei Toyama Corp レーザ加工機のワーク搬送装置
WO2008084642A1 (ja) * 2006-12-22 2008-07-17 Panasonic Corporation レーザ加工装置及びそれを用いたレーザ加工方法
JP2008212941A (ja) * 2007-02-28 2008-09-18 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工装置の制御方法
JP2009166930A (ja) * 2008-01-15 2009-07-30 Murata Mach Ltd 板材搬送装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US303902A (en) * 1884-08-19 Harrow
US6090330A (en) * 1997-02-06 2000-07-18 Matsushita Electric Industrial Co., Ltd. Laser processing method
GB2332637B (en) * 1997-12-25 2000-03-08 Matsushita Electric Ind Co Ltd Apparatus and method for processing
WO2009001497A1 (ja) * 2007-06-28 2008-12-31 Panasonic Corporation レーザ加工装置
WO2009084489A1 (ja) * 2007-12-28 2009-07-09 Mitsuboshi Diamond Industrial Co., Ltd. レーザ加工装置およびレーザ加工方法
JP2010162586A (ja) * 2009-01-19 2010-07-29 Toray Eng Co Ltd レーザ加工方法及びレーザ加工装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224893A (ja) * 1987-03-16 1988-09-19 Yamazaki Mazak Corp レ−ザ加工機
JPS6427792A (en) * 1987-07-22 1989-01-30 Fujitsu Ltd Laser beam machining method and machine
JPH02160192A (ja) * 1988-12-12 1990-06-20 Amada Co Ltd 熱切断加工装置
JPH11254166A (ja) * 1997-12-25 1999-09-21 Matsushita Electric Ind Co Ltd 加工装置及び方法
JP2005019529A (ja) * 2003-06-24 2005-01-20 Sumitomo Heavy Ind Ltd 吸着テーブルの静電気除去システム及びレーザ加工機
JP2007160375A (ja) * 2005-12-15 2007-06-28 Nippei Toyama Corp レーザ加工機のワーク搬送装置
WO2008084642A1 (ja) * 2006-12-22 2008-07-17 Panasonic Corporation レーザ加工装置及びそれを用いたレーザ加工方法
JP2008212941A (ja) * 2007-02-28 2008-09-18 Sumitomo Heavy Ind Ltd レーザ加工装置及びレーザ加工装置の制御方法
JP2009166930A (ja) * 2008-01-15 2009-07-30 Murata Mach Ltd 板材搬送装置

Also Published As

Publication number Publication date
CN102639282B (zh) 2015-01-07
JPWO2012035721A1 (ja) 2014-01-20
CN102639282A (zh) 2012-08-15
TWI495531B (zh) 2015-08-11
WO2012035721A1 (ja) 2012-03-22
TW201223678A (en) 2012-06-16

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