JP5676850B2 - 回転エンコーダー装置、および、方法 - Google Patents
回転エンコーダー装置、および、方法 Download PDFInfo
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- JP5676850B2 JP5676850B2 JP2008550840A JP2008550840A JP5676850B2 JP 5676850 B2 JP5676850 B2 JP 5676850B2 JP 2008550840 A JP2008550840 A JP 2008550840A JP 2008550840 A JP2008550840 A JP 2008550840A JP 5676850 B2 JP5676850 B2 JP 5676850B2
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- 238000000034 method Methods 0.000 title description 11
- 238000012937 correction Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 description 26
- 230000000694 effects Effects 0.000 description 22
- 230000003287 optical effect Effects 0.000 description 12
- 238000005259 measurement Methods 0.000 description 10
- 230000015654 memory Effects 0.000 description 6
- 230000006870 function Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000001994 activation Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000004886 head movement Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/001—Calibrating encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24476—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2449—Error correction using hard-stored calibration data
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Description
Cu=(Ca+Cb)/2 (1)
Cε=(Ct−Cs)/2 (2)
C=(Ca+Cb−Ct+Cs)/2 (3)
C=(Ca+Cb−Ct+Cs+Ch+Cr)/2 (4)
Claims (18)
- 回転エンコーダー装置において、
インクリメンタルスケール、および1つ以上の基準マークを含むエンコーダースケールと、
少なくとも第1および第2の読取りヘッドを含むエンコーダースケールリーダーであって、該第1および第2の読取りヘッドが、それぞれ、前記エンコーダースケールと該エンコーダースケールリーダーとの間の相対移動量を示す増分信号を生成するための増分センサを含み、該エンコーダースケールリーダーに対し前記エンコーダースケールの回転中、前記エンコーダースケールの基準マークを通過した場合、基準マーク信号をそれぞれ生成するための基準マーク検出器を含むエンコーダースケールリーダーとを含み、
前記第1の読取りヘッドと前記インクリメンタルスケールとの間の相対移動を示すように一連の第1のインクリメンタルパルスが生成され、
前記第2の読取りヘッドと前記インクリメンタルスケールとの間の相対移動を示すように一連の第2のインクリメンタルパルスが生成され、
第1のカウンタが、前記第1のインクリメンタルパルスを計数するように設けられ、
第2のカウンタが、前記第2のインクリメンタルパルスを計数するように設けられ、
前記装置は、前記エンコーダースケールリーダーが前記エンコーダースケールに対して回転せしめられるとき、前記第1のカウンタおよび第2のカウンタの計数の組み合わせから生成された結果として得られた増分計数から前記エンコーダースケールリーダーに対する前記エンコーダースケールの少なくとも1つの反復可能な角度基準位置を決定するための基準位置設定器を含み、
前記反復可能な角度基準位置が、それぞれ、前記第1の読取りヘッドによって生成された第1の基準マーク信号を使用し前記第1のカウンタおよび第2のカウンタをリセットし、前記第2の読取りヘッドによって続いて生成された第2の基準マーク信号を使用し、前記第2のカウンタをリセットすることにより、決定され、
前記エンコーダースケールが、前記第1の基準マーク信号の生成とその後の第2の基準マーク信号の生成との間で前記エンコーダースケールリーダーに対し回転されることを特徴とする回転エンコーダー装置。 - 増分信号ブレンダーを備え、前記増分信号ブレンダーが、前記第1および第2のカウンタの計数を加算して、結果の増分計数を提供する加算器を含む請求項1に記載の装置。
- 前記増分信号ブレンダーが、前記結果の増分計数を記憶する第3のカウンタを含む請求項2に記載の装置。
- 前記基準位置設定器が、前記結果の増分計数が前記角度反復可能な基準位置に直接関連するように構成される請求項2または請求項3に記載の装置。
- 前記基準位置設定器が計数補正値を決定するように構成され、決定された前記計数補正値が、前記結果の増分計数と前記角度反復可能な基準位置の間の関係を提供する請求項2または請求項3に記載の装置。
- 前記基準位置設定器が、設定期間の間のみ、前記角度反復可能な基準位置を確立するように構成される請求項1乃至請求項5のうちのいずれかに記載の装置。
- 前記設定期間が、前記装置の電源が入れられたときに始まり、前記第1および第2の読取りヘッドが両方とも基準マーク信号を生成したときに終わる請求項6に記載の装置。
- 前記エンコーダースケールリーダーが、前記エンコーダースケールに対して予め定められた絶対角度にあるとき、合成された基準マークパルスを出力する手段を備える請求項1乃至請求項7のうちのいずれかに記載の装置。
- 前記予め定められた絶対角度が、ユーザ定義可能である請求項8に記載の装置。
- 前記エンコーダースケールが、1つの基準マークのみを含む請求項1乃至請求項9のうちのいずれかに記載の装置。
- 前記エンコーダースケールが、少なくとも2つの基準マークを含む請求項1乃至請求項9のうちのいずれかに記載の装置。
- リングが前記エンコーダースケールを保持する請求項1乃至請求項11のうちのいずれかに記載の装置。
- 前記第1および第2の読取りヘッドが、ほぼ正反対に向かい合う請求項1乃至請求項12のうちのいずれかに記載の装置。
- 前記エンコーダースケールリーダーが、1つまたは複数の追加の読取りヘッド対を含む請求項1乃至請求項13のうちのいずれかに記載の装置。
- 前記エンコーダースケールリーダーの前記読取りヘッドが、固定の間隔を空けた関係で維持される請求項1乃至請求項14のうちのいずれかに記載の装置。
- 前記エンコーダースケールが、180°超過の角度にわたって、前記エンコーダースケールリーダーに対して回転可能である請求項1乃至請求項15のうちのいずれかに記載の装置。
- 前記エンコーダースケールが、180°未満の角度にわたって、前記エンコーダースケールリーダーに対して回転可能である請求項1乃至請求項15のうちのいずれかに記載の装置。
- 前記エンコーダースケールリーダーが、機械の台板に対して固定の間隔を空けた関係を有する請求項1乃至請求項17のうちのいずれかに記載の回転エンコーダー装置を備えた機械。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0601174.6A GB0601174D0 (en) | 2006-01-20 | 2006-01-20 | Multiple readhead apparatus |
GB0601174.6 | 2006-01-20 | ||
GB0604104.0 | 2006-03-01 | ||
GBGB0604104.0A GB0604104D0 (en) | 2006-01-20 | 2006-03-01 | Rotary encoder apparatus and method |
PCT/GB2007/000145 WO2007083118A1 (en) | 2006-01-20 | 2007-01-17 | Rotary encoder apparatus and method |
Publications (2)
Publication Number | Publication Date |
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JP2009524039A JP2009524039A (ja) | 2009-06-25 |
JP5676850B2 true JP5676850B2 (ja) | 2015-02-25 |
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JP2008550840A Active JP5676850B2 (ja) | 2006-01-20 | 2007-01-17 | 回転エンコーダー装置、および、方法 |
Country Status (6)
Country | Link |
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US (1) | US8017904B2 (ja) |
EP (1) | EP1974186B1 (ja) |
JP (1) | JP5676850B2 (ja) |
CN (1) | CN101371105B (ja) |
GB (2) | GB0601174D0 (ja) |
WO (1) | WO2007083118A1 (ja) |
Families Citing this family (25)
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US7965393B2 (en) * | 2007-07-24 | 2011-06-21 | Mitutoyo Corporation | Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels |
US7973941B2 (en) * | 2007-07-24 | 2011-07-05 | Mitutoyo Corporation | Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels |
DE102007036271A1 (de) * | 2007-07-31 | 2009-02-05 | Baumer Hübner GmbH | Drehgeber mit Überwachung des Lagerverschleißes sowie Verfahren hierzu |
GB0819767D0 (en) | 2008-10-28 | 2008-12-03 | Renishaw Plc | Absolute encoder setup indication |
JP4984269B2 (ja) | 2009-11-09 | 2012-07-25 | 独立行政法人産業技術総合研究所 | 複合自己校正機能付き角度検出器 |
PL2369313T3 (pl) * | 2010-03-23 | 2015-06-30 | Mettler Toledo Gmbh | Zestaw do kalibracji wagi elektronicznej |
EP2554950B1 (en) | 2010-04-02 | 2016-01-20 | Kabushiki Kaisha Yaskawa Denki | Encoder, drive device, absolute position calculation method, and encoder manufacturing method |
DE102010063521B4 (de) * | 2010-12-20 | 2013-07-18 | Siemens Aktiengesellschaft | Verfahren zum Ermitteln einer Lageänderung der Rotationsachse eines rotierenden Körpers innerhalb der Rotationsebene |
JP5798824B2 (ja) * | 2011-07-22 | 2015-10-21 | 株式会社ミツトヨ | 目盛誤差算出装置、目盛誤差校正装置、及び目盛誤差算出方法 |
DE102011079961A1 (de) * | 2011-07-28 | 2013-01-31 | Dr. Johannes Heidenhain Gmbh | Vorrichtung und Verfahren zur Winkelmessung |
CN102494711B (zh) * | 2011-12-12 | 2013-09-25 | 中国科学院长春光学精密机械与物理研究所 | 光电编码器绝对角位移测量装置 |
US8922144B2 (en) | 2012-06-25 | 2014-12-30 | Chrysler Group Llc | Method of processing sensor signals for determining motion of a motor shaft |
DE102012222997A1 (de) * | 2012-12-13 | 2014-07-03 | Siemens Aktiengesellschaft | Nichtdispersiver Infrarot-Gasanalysator |
US9759583B2 (en) * | 2014-05-12 | 2017-09-12 | Faro Technologies, Inc. | Method of obtaining a reference correction value for an index mark of an angular encoder |
US9436003B2 (en) | 2014-05-12 | 2016-09-06 | Faro Technologies, Inc. | Robust index correction of an angular encoder in a three-dimensional coordinate measurement device |
US9689986B2 (en) | 2014-05-12 | 2017-06-27 | Faro Technologies, Inc. | Robust index correction of an angular encoder based on read head runout |
EP2995910B1 (de) * | 2014-09-11 | 2016-11-16 | Baumüller Nürnberg GmbH | Absolutlage-Messsystem und -Verfahren |
JP6595755B2 (ja) * | 2014-12-02 | 2019-10-23 | 日本電産サンキョー株式会社 | 補正テーブル作成装置、エンコーダ、及び補正テーブル作成方法 |
CN105450101A (zh) * | 2015-12-29 | 2016-03-30 | 西安中科光电精密工程有限公司 | 一种永磁同步电机驱动方法及电路 |
US10462542B2 (en) | 2016-02-09 | 2019-10-29 | Balluff Gmbh | Method for data transmission by means of an absolute position measurement system, absolute position measurement system and computing device |
WO2019096923A2 (en) | 2017-11-15 | 2019-05-23 | Universal Robots A/S | Strain wave gear with output flange and integrated encoder |
JP7240387B2 (ja) * | 2018-05-11 | 2023-03-15 | 株式会社三共製作所 | 角度検出器 |
JP6601587B1 (ja) * | 2019-07-26 | 2019-11-06 | フジテック株式会社 | エレベーターのエンコーダー診断システム及び診断方法 |
DK180930B1 (en) | 2021-03-25 | 2022-06-29 | Universal Robots As | Strain wave gear with encoder integration |
EP4116038A1 (de) * | 2021-07-07 | 2023-01-11 | Kistler Holding AG | Simulationseinrichtung für die schraubfallsimulation eines drehschraubers |
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GB0103582D0 (en) | 2001-02-14 | 2001-03-28 | Renishaw Plc | Position determination system |
GB0201101D0 (en) | 2002-01-18 | 2002-03-06 | Renishaw Plc | Laser marking |
JP2003269475A (ja) * | 2002-03-15 | 2003-09-25 | Ntn Corp | 原点検出可能回転センサ付軸受 |
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JP4908764B2 (ja) * | 2005-02-04 | 2012-04-04 | キヤノン株式会社 | 光学式エンコーダ |
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2006
- 2006-01-20 GB GBGB0601174.6A patent/GB0601174D0/en active Pending
- 2006-03-01 GB GBGB0604104.0A patent/GB0604104D0/en not_active Ceased
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2007
- 2007-01-17 US US12/087,494 patent/US8017904B2/en active Active
- 2007-01-17 WO PCT/GB2007/000145 patent/WO2007083118A1/en active Application Filing
- 2007-01-17 CN CN2007800026616A patent/CN101371105B/zh active Active
- 2007-01-17 EP EP07704927.8A patent/EP1974186B1/en active Active
- 2007-01-17 JP JP2008550840A patent/JP5676850B2/ja active Active
Also Published As
Publication number | Publication date |
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GB0601174D0 (en) | 2006-03-01 |
US20090072130A1 (en) | 2009-03-19 |
WO2007083118A1 (en) | 2007-07-26 |
CN101371105B (zh) | 2011-11-23 |
EP1974186A1 (en) | 2008-10-01 |
CN101371105A (zh) | 2009-02-18 |
GB0604104D0 (en) | 2006-04-12 |
JP2009524039A (ja) | 2009-06-25 |
US8017904B2 (en) | 2011-09-13 |
EP1974186B1 (en) | 2020-01-08 |
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