JP5675892B2 - 高い開口数を有する反射屈折光学系 - Google Patents

高い開口数を有する反射屈折光学系 Download PDF

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Publication number
JP5675892B2
JP5675892B2 JP2013106595A JP2013106595A JP5675892B2 JP 5675892 B2 JP5675892 B2 JP 5675892B2 JP 2013106595 A JP2013106595 A JP 2013106595A JP 2013106595 A JP2013106595 A JP 2013106595A JP 5675892 B2 JP5675892 B2 JP 5675892B2
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JP
Japan
Prior art keywords
optical
optical system
light
lens
group
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2013106595A
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English (en)
Japanese (ja)
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JP2013242565A5 (OSRAM
JP2013242565A (ja
Inventor
中野　正嗣
正嗣 中野
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Canon Inc
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Canon Inc
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Publication of JP2013242565A publication Critical patent/JP2013242565A/ja
Publication of JP2013242565A5 publication Critical patent/JP2013242565A5/ja
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/082—Catadioptric systems using three curved mirrors
    • G02B17/0824—Catadioptric systems using three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
JP2013106595A 2012-05-18 2013-05-20 高い開口数を有する反射屈折光学系 Expired - Fee Related JP5675892B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/475,481 US8908294B2 (en) 2012-05-18 2012-05-18 Catadioptric optical system with high numerical aperture
US13/475,481 2012-05-18

Publications (3)

Publication Number Publication Date
JP2013242565A JP2013242565A (ja) 2013-12-05
JP2013242565A5 JP2013242565A5 (OSRAM) 2014-04-03
JP5675892B2 true JP5675892B2 (ja) 2015-02-25

Family

ID=49581093

Family Applications (1)

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JP2013106595A Expired - Fee Related JP5675892B2 (ja) 2012-05-18 2013-05-20 高い開口数を有する反射屈折光学系

Country Status (2)

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US (1) US8908294B2 (OSRAM)
JP (1) JP5675892B2 (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150141820A (ko) * 2014-06-10 2015-12-21 삼성전자주식회사 카타디옵트릭 그룹을 포함하는 대물 렌즈 조립체
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备
BR112021005488A2 (pt) * 2018-10-09 2021-06-22 Eardley Holding Ag conjunto óptico, instrumento óptico, e, método para imageamento óptico por um instrumento óptico.
CN110045492B (zh) * 2019-04-26 2024-03-15 中国科学院长春光学精密机械与物理研究所 宽谱段大数值孔径超高通量的显微物镜光学系统
TWI736246B (zh) * 2020-05-04 2021-08-11 大立光電股份有限公司 成像用光學鏡頭組、取像裝置及電子裝置
WO2022133964A1 (zh) * 2020-12-24 2022-06-30 苏州大学 一种基于两曼金镜的折反光学镜头
CN112630948A (zh) * 2020-12-24 2021-04-09 苏州大学 一种基于两曼金镜的折反光学镜头
CN115598818B (zh) * 2022-10-17 2023-04-25 佛山迈奥光学科技有限公司 一种工业检测干式显微物镜
CN118732248B (zh) * 2024-08-08 2025-12-12 苏州大学 一种显微物镜光学系统
CN119620341B (zh) * 2024-12-13 2025-11-25 合肥市纳诺半导体有限公司 一种晶圆检测散射光采集物镜及晶圆检测设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6600608B1 (en) 1999-11-05 2003-07-29 Carl-Zeiss-Stiftung Catadioptric objective comprising two intermediate images
JP4066079B2 (ja) * 2001-11-26 2008-03-26 株式会社ニコン 対物レンズ及びそれを用いた光学装置
US7646533B2 (en) * 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US8675276B2 (en) * 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy
US7884998B2 (en) 2003-02-21 2011-02-08 Kla - Tencor Corporation Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
US8208198B2 (en) * 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
WO2006107527A2 (en) * 2005-03-31 2006-10-12 Kla-Tencor Technologies Corporation Small ultra-high na catadioptric objective using aspheric surfaces
WO2009046137A1 (en) 2007-10-02 2009-04-09 Kla-Tencor Corporation Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths
JP5479206B2 (ja) * 2010-04-28 2014-04-23 キヤノン株式会社 反射屈折光学系及びそれを有する撮像装置

Also Published As

Publication number Publication date
JP2013242565A (ja) 2013-12-05
US20130308181A1 (en) 2013-11-21
US8908294B2 (en) 2014-12-09

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