JP5673005B2 - 超音波センサー、および電子機器 - Google Patents
超音波センサー、および電子機器 Download PDFInfo
- Publication number
- JP5673005B2 JP5673005B2 JP2010257052A JP2010257052A JP5673005B2 JP 5673005 B2 JP5673005 B2 JP 5673005B2 JP 2010257052 A JP2010257052 A JP 2010257052A JP 2010257052 A JP2010257052 A JP 2010257052A JP 5673005 B2 JP5673005 B2 JP 5673005B2
- Authority
- JP
- Japan
- Prior art keywords
- array
- receiving
- transmission
- reception
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 claims description 136
- 238000003491 array Methods 0.000 claims description 40
- 238000001514 detection method Methods 0.000 claims description 34
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000011159 matrix material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 16
- 230000035945 sensitivity Effects 0.000 description 14
- 230000005484 gravity Effects 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Landscapes
- Position Input By Displaying (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010257052A JP5673005B2 (ja) | 2010-11-17 | 2010-11-17 | 超音波センサー、および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010257052A JP5673005B2 (ja) | 2010-11-17 | 2010-11-17 | 超音波センサー、および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012109800A JP2012109800A (ja) | 2012-06-07 |
| JP2012109800A5 JP2012109800A5 (cg-RX-API-DMAC7.html) | 2014-01-09 |
| JP5673005B2 true JP5673005B2 (ja) | 2015-02-18 |
Family
ID=46494950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010257052A Expired - Fee Related JP5673005B2 (ja) | 2010-11-17 | 2010-11-17 | 超音波センサー、および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5673005B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6221582B2 (ja) | 2013-09-30 | 2017-11-01 | セイコーエプソン株式会社 | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 |
| WO2016002206A1 (ja) * | 2014-06-30 | 2016-01-07 | セイコーエプソン株式会社 | 超音波センサー及びその製造方法 |
| EP3786631A1 (en) | 2019-08-28 | 2021-03-03 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Optimization of an acoustic membrane array |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4052711B2 (ja) * | 1998-02-12 | 2008-02-27 | 東京エレクトロン株式会社 | 超音波探触子 |
| JP4287183B2 (ja) * | 2003-04-16 | 2009-07-01 | アロカ株式会社 | 超音波探触子 |
| JP4715236B2 (ja) * | 2005-03-01 | 2011-07-06 | 株式会社デンソー | 超音波センサ装置 |
| JP2007088805A (ja) * | 2005-09-22 | 2007-04-05 | Sanyo Electric Co Ltd | 超音波レーダ |
| JP5228602B2 (ja) * | 2008-04-24 | 2013-07-03 | 株式会社日本自動車部品総合研究所 | 物体検出装置 |
-
2010
- 2010-11-17 JP JP2010257052A patent/JP5673005B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012109800A (ja) | 2012-06-07 |
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