JP5670356B2 - 角速度の微小機械センサ - Google Patents

角速度の微小機械センサ Download PDF

Info

Publication number
JP5670356B2
JP5670356B2 JP2011552480A JP2011552480A JP5670356B2 JP 5670356 B2 JP5670356 B2 JP 5670356B2 JP 2011552480 A JP2011552480 A JP 2011552480A JP 2011552480 A JP2011552480 A JP 2011552480A JP 5670356 B2 JP5670356 B2 JP 5670356B2
Authority
JP
Japan
Prior art keywords
bar
mass
spring
common axis
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011552480A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012519294A (ja
Inventor
ブロムクヴィスト，アンッシ
Original Assignee
ムラタ エレクトロニクス オサケユキチュア
ムラタ エレクトロニクス オサケユキチュア
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ムラタ エレクトロニクス オサケユキチュア, ムラタ エレクトロニクス オサケユキチュア filed Critical ムラタ エレクトロニクス オサケユキチュア
Publication of JP2012519294A publication Critical patent/JP2012519294A/ja
Application granted granted Critical
Publication of JP5670356B2 publication Critical patent/JP5670356B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02—Devices characterised by the use of mechanical means
    • G01P3/14—Devices characterised by the use of mechanical means by exciting one or more mechanical resonance systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gyroscopes (AREA)
JP2011552480A 2009-03-02 2010-03-01 角速度の微小機械センサ Active JP5670356B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095201 2009-03-02
FI20095903 2009-09-02
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi
PCT/FI2010/050159 WO2010100333A1 (en) 2009-03-02 2010-03-01 Micro-mechanical sensor of angular velocity

Publications (2)

Publication Number Publication Date
JP2012519294A JP2012519294A (ja) 2012-08-23
JP5670356B2 true JP5670356B2 (ja) 2015-02-18

Family

ID=40510201

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011552480A Active JP5670356B2 (ja) 2009-03-02 2010-03-01 角速度の微小機械センサ
JP2011552481A Active JP5670357B2 (ja) 2009-03-02 2010-03-01 角速度の振動微小機械センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011552481A Active JP5670357B2 (ja) 2009-03-02 2010-03-01 角速度の振動微小機械センサ

Country Status (9)

Country Link
US (2) US8997565B2 (cg-RX-API-DMAC10.html)
EP (2) EP2404138B1 (cg-RX-API-DMAC10.html)
JP (2) JP5670356B2 (cg-RX-API-DMAC10.html)
KR (2) KR101673887B1 (cg-RX-API-DMAC10.html)
CN (2) CN102365524B (cg-RX-API-DMAC10.html)
FI (2) FI20095201A0 (cg-RX-API-DMAC10.html)
IL (2) IL214925A0 (cg-RX-API-DMAC10.html)
TW (2) TWI481817B (cg-RX-API-DMAC10.html)
WO (2) WO2010100333A1 (cg-RX-API-DMAC10.html)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119895B (fi) * 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor
FI124020B (fi) * 2011-03-04 2014-02-14 Murata Electronics Oy Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
US9170107B2 (en) 2011-09-16 2015-10-27 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9714842B2 (en) 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
US9863769B2 (en) 2011-09-16 2018-01-09 Invensense, Inc. MEMS sensor with decoupled drive system
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US8833162B2 (en) 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
TWI416070B (zh) 2011-12-26 2013-11-21 Ind Tech Res Inst 陀螺儀的讀取電路
DE102012200132B4 (de) * 2012-01-05 2025-12-24 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
WO2013104828A1 (en) 2012-01-12 2013-07-18 Murata Electronics Oy A vibration tolerant accelaration sensor structure
EP3059595B1 (en) * 2012-01-12 2018-07-04 Murata Electronics Oy Acceleration sensor structure and use thereof
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
DE102013206414A1 (de) * 2013-04-11 2014-10-16 Robert Bosch Gmbh Drehratensensor
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (en) * 2014-01-28 2016-06-15 Murata Manufacturing Co Improved gyroscope design and gyroscope
TWI580632B (zh) 2014-03-14 2017-05-01 財團法人工業技術研究院 具用於旋轉元件之摺疊彈簧的微機電裝置
DE102015213447A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit minimierten Störbewegungen in der Antriebsmode
CN106871885A (zh) * 2015-12-10 2017-06-20 上海矽睿科技有限公司 用于mems传感器的折叠弹簧组以及mems传感器
KR101844595B1 (ko) 2016-12-09 2018-04-03 한국철도기술연구원 철도차량용 공기압축기의 진동 테스트 장치와 이를 이용하여 균형추를 설계하는 방법
TWI669267B (zh) 2017-04-04 2019-08-21 日商村田製作所股份有限公司 用於角速度的微機械感測器元件
US10466053B2 (en) * 2017-04-04 2019-11-05 Invensense, Inc. Out-of-plane sensing gyroscope robust to external acceleration and rotation
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
CN108731659A (zh) * 2018-05-25 2018-11-02 中国电子科技集团公司第二十九研究所 一种多检测振动单元微惯性导航陀螺仪
JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
US10823569B1 (en) * 2019-08-22 2020-11-03 Nxp Usa, Inc. Multiple axis sensing device based on frequency modulation and method of operation
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
EP4162282A4 (en) 2020-06-08 2024-11-13 Analog Devices, Inc. TRAINING STRESS RELEASE AND DETECTION APPARATUS
WO2022046799A1 (en) * 2020-08-24 2022-03-03 Analog Devices, Inc. Isotropic attenuated motion gyroscope
US11624613B2 (en) 2020-12-03 2023-04-11 Murata Manufacturing Co., Ltd. Synchronized four mass gyroscope
CN114623814B (zh) * 2022-01-19 2025-07-18 瑞声开泰科技(武汉)有限公司 一种mems陀螺仪

Family Cites Families (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4025A (en) * 1845-05-01 Feinting press
US8028A (en) * 1851-04-08 Hokse-poweb
US3016A (en) * 1843-03-21 Burning bricks
US10021A (en) * 1853-09-13 Screw-eastemtito- for boots and shoes
US3015A (en) * 1843-03-21 Improvement in gilding, silvering
US5002A (en) * 1847-03-06 Godlove k
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US6250156B1 (en) * 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US5920012A (en) * 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
JP3106395B2 (ja) * 1998-07-10 2000-11-06 株式会社村田製作所 角速度センサ
JP2000131071A (ja) * 1998-10-22 2000-05-12 Hitachi Ltd 回転角速度センサ
FR2798993B1 (fr) * 1999-09-28 2001-12-07 Thomson Csf Sextant Gyrometre de type diapason
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
FR2809174B1 (fr) * 2000-05-16 2002-07-12 Commissariat Energie Atomique Structure vibrante a deux oscillateurs couples, notamment pour un gyrometre
JP3531918B2 (ja) * 2000-07-12 2004-05-31 キヤノン株式会社 光ジャイロ、及びその駆動方法並びに信号処理方法
DE10108197A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
EP1478902B1 (de) * 2002-01-12 2017-05-24 Robert Bosch Gmbh Drehratensensor
JP4698221B2 (ja) * 2002-08-12 2011-06-08 ザ・ボーイング・カンパニー 内部径方向検知およびアクチュエーションを備える分離型平面ジャイロスコープ
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6867543B2 (en) * 2003-03-31 2005-03-15 Motorola, Inc. Microdevice assembly having a fine grain getter layer for maintaining vacuum
US6843127B1 (en) 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
JP4433747B2 (ja) * 2003-09-29 2010-03-17 株式会社村田製作所 角速度検出装置
FR2860865B1 (fr) * 2003-10-10 2006-01-20 Thales Sa Gyrometre micromecanique infertiel a diapason
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
DE10360963B4 (de) * 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
JP4512636B2 (ja) * 2004-04-14 2010-07-28 アナログ デバイシス， インコーポレイテッド 直線的にアレイされたセンサエレメントを有する慣性センサ
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
FR2874257B1 (fr) * 2004-08-13 2006-10-13 Commissariat Energie Atomique Micro gyrometre a detection frenquentielle
JP2006105698A (ja) * 2004-10-01 2006-04-20 Star Micronics Co Ltd 加速度角速度複合センサ
FR2876180B1 (fr) * 2004-10-06 2006-12-08 Commissariat Energie Atomique Resonateur a masses oscillantes.
KR100616641B1 (ko) * 2004-12-03 2006-08-28 삼성전기주식회사 튜닝포크형 진동식 ｍｅｍｓ 자이로스코프
FI116543B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
CN101180516B (zh) * 2005-05-24 2011-09-14 独立行政法人宇宙航空研究开发机构 陀螺仪
US7228738B2 (en) * 2005-06-06 2007-06-12 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7617728B2 (en) * 2006-05-17 2009-11-17 Donato Cardarelli Tuning fork gyroscope
FR2888318B1 (fr) * 2005-07-05 2007-09-14 Thales Sa Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
FR2894661B1 (fr) * 2005-12-13 2008-01-18 Thales Sa Gyrometre vibrant equilibre par un dispositif electrostatique
FR2895501B1 (fr) * 2005-12-23 2008-02-29 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement
US8342022B2 (en) * 2006-03-10 2013-01-01 Conti Temic Microelectronic Gmbh Micromechanical rotational speed sensor
US8261614B2 (en) 2006-03-10 2012-09-11 Continental Teves Ag & Co. Ohg Rotational speed sensor having a coupling bar
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
FR2905457B1 (fr) * 2006-09-01 2008-10-17 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives.
JP4859649B2 (ja) * 2006-12-12 2012-01-25 日立オートモティブシステムズ株式会社 角速度センサ
TWI317812B (en) * 2006-12-22 2009-12-01 Delta Electronics Inc Capacitance acceleration sensing structure
FI120921B (fi) * 2007-06-01 2010-04-30 Vti Technologies Oy Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
US8061201B2 (en) * 2007-07-13 2011-11-22 Georgia Tech Research Corporation Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
WO2009119470A1 (ja) * 2008-03-24 2009-10-01 アルプス電気株式会社 角速度センサ
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
US8146424B2 (en) * 2008-12-16 2012-04-03 Honeywell International Inc. Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor

Also Published As

Publication number Publication date
TW201040534A (en) 2010-11-16
US20100222998A1 (en) 2010-09-02
JP2012519295A (ja) 2012-08-23
WO2010100334A1 (en) 2010-09-10
WO2010100333A1 (en) 2010-09-10
EP2404138A4 (en) 2016-05-11
FI20095201A0 (fi) 2009-03-02
EP2404139A4 (en) 2016-05-11
US8904865B2 (en) 2014-12-09
IL214925A0 (en) 2011-11-30
FI20095903A0 (fi) 2009-09-02
CN102369414A (zh) 2012-03-07
FI122232B (fi) 2011-10-31
EP2404139B1 (en) 2018-01-10
CN102365524A (zh) 2012-02-29
JP5670357B2 (ja) 2015-02-18
US8997565B2 (en) 2015-04-07
TWI481817B (zh) 2015-04-21
EP2404139A1 (en) 2012-01-11
TWI481872B (zh) 2015-04-21
KR101676264B1 (ko) 2016-11-15
KR101673887B1 (ko) 2016-11-08
KR20110125661A (ko) 2011-11-21
CN102365524B (zh) 2015-01-21
IL214926A (en) 2016-05-31
EP2404138B1 (en) 2018-01-10
FI20095903L (fi) 2010-09-03
US20100218605A1 (en) 2010-09-02
KR20110130452A (ko) 2011-12-05
CN102369414B (zh) 2014-12-31
JP2012519294A (ja) 2012-08-23
IL214926A0 (en) 2011-11-30
EP2404138A1 (en) 2012-01-11
TW201104216A (en) 2011-02-01

Similar Documents

Publication Publication Date Title
JP2012519294A (ja) 角速度の微小機械センサ
CN110617809B (zh) 具有同相驱动和感测运动抑制的mems角速度传感器
KR100374431B1 (ko) 진동식자이로미터의마이크로미케니칼리조네이터
JP6027029B2 (ja) ばね構造、共振器、共振器アレイおよびセンサ
JP6350664B2 (ja) 改良されたジャイロスコープ構造体およびジャイロスコープ
US10330476B2 (en) Angular rate sensor with in-phase motion suppression structure
US9551577B2 (en) Gyroscope structure and gyroscope
JP2006215016A (ja) ジャイロスコープと加速度計との両方の機能を有するセンサ
JP2020091280A (ja) 回転運動検出用微小電気機械デバイス
JP2009520970A (ja) 少なくとも２つの機械的に結合された振動質量体を備えるマイクロシステム、より詳細にはマイクロジャイロ
CN107923751A (zh) 用于汽车应用的双轴超稳健转速传感器
EP3270106B1 (en) Vibration and shock robust gyroscope
CN108603760B (zh) 可移动块体悬挂系统
US6807858B2 (en) Vibrating structure comprising two coupled oscillators, in particular for a gyro
JP4816273B2 (ja) ジャイロセンサ

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130227

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130508

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20131211

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20131217

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20140218

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140310

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20140311

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140317

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140516

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140523

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140617

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141125

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141217

R150 Certificate of patent or registration of utility model

Ref document number: 5670356

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350