JP5668080B2 - 真空ポンプ用の保護網及びそれを備えた真空ポンプ - Google Patents
真空ポンプ用の保護網及びそれを備えた真空ポンプ Download PDFInfo
- Publication number
- JP5668080B2 JP5668080B2 JP2012545635A JP2012545635A JP5668080B2 JP 5668080 B2 JP5668080 B2 JP 5668080B2 JP 2012545635 A JP2012545635 A JP 2012545635A JP 2012545635 A JP2012545635 A JP 2012545635A JP 5668080 B2 JP5668080 B2 JP 5668080B2
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- Prior art keywords
- vacuum pump
- protective
- pump
- mesh
- fixing groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000001681 protective effect Effects 0.000 title claims description 99
- 230000002093 peripheral effect Effects 0.000 claims description 29
- 230000003014 reinforcing effect Effects 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 239000002131 composite material Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 230000002787 reinforcement Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
図1において、真空ポンプ100は、吸気口110と排気口120とを有する筐体130を備えている。該筐体130内には、上部にターボ分子ポンプ部140と、その下方に円筒形のネジ溝ポンプ部150が設けられているとともに、該ターボ分子ポンプ部140内と該ネジ溝ポンプ部150内を通って前記吸気口110と前記排気口120を連通してなる排気経路240が形成されている。
2 補強プレート
3 保護網(従来)
4 吸気口
5 ケーシング
6 フランジ部
7 固定用溝
8 止め輪
9 ロータ
10 回転翼
11 保護網(従来)
12 保護網
12a リム
12b 金網部
12c リブ部
12d 係止部
100 真空ポンプ
110 吸気口
120 排気口
130 筐体
140 ターボ分子ポンプ部
150 ネジ溝ポンプ部
160 回転軸
170 ロータ
180 回転翼
190 固定翼
210 円筒ロータ
220 ネジ溝
230 ステータ
240 排気通路
250 モータ筐体
260 高周波モータ
260a モータロータ
270 保護軸受
Claims (3)
- 真空ポンプにおける吸気口の内周部に凹設された固定用溝に保護網の周縁部に形成されたリムを嵌入し、さらに前記固定用溝に止め輪を押し込むことにより前記吸気口の部位に前記保護網を張設するようにした真空ポンプ用の保護網であって、
前記リムの所々に前記止め輪に係止される係止部を前記リムに対しほぼ直角に立設させたことを特徴とする真空ポンプ用の保護網。 - 上記保護網は、金網部と、上記リムの内側に架け渡された補強用のリブ部とを備えるとともに前記金網部と前記リブ部とは単一枚の部材で形成されていることを特徴とする請求項1記載の真空ポンプ用の保護網。
- 請求項1又は2記載の真空ポンプ用の保護網を備えたことを特徴とする真空ポンプ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012545635A JP5668080B2 (ja) | 2010-11-24 | 2011-07-28 | 真空ポンプ用の保護網及びそれを備えた真空ポンプ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010261624 | 2010-11-24 | ||
JP2010261624 | 2010-11-24 | ||
JP2012545635A JP5668080B2 (ja) | 2010-11-24 | 2011-07-28 | 真空ポンプ用の保護網及びそれを備えた真空ポンプ |
PCT/JP2011/067317 WO2012070282A1 (ja) | 2010-11-24 | 2011-07-28 | 真空ポンプ用の保護網及びそれを備えた真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012070282A1 JPWO2012070282A1 (ja) | 2014-05-19 |
JP5668080B2 true JP5668080B2 (ja) | 2015-02-12 |
Family
ID=46145643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012545635A Active JP5668080B2 (ja) | 2010-11-24 | 2011-07-28 | 真空ポンプ用の保護網及びそれを備えた真空ポンプ |
Country Status (6)
Country | Link |
---|---|
US (1) | US9816530B2 (ja) |
EP (1) | EP2644899B1 (ja) |
JP (1) | JP5668080B2 (ja) |
KR (1) | KR101868647B1 (ja) |
CN (1) | CN103201520B (ja) |
WO (1) | WO2012070282A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9976572B2 (en) | 2012-09-26 | 2018-05-22 | Shimadzu Corporation | Vacuum pump protection net, method for manufacturing the same, and vacuum pump |
CN103463823B (zh) * | 2013-09-18 | 2015-06-17 | 翟自景 | 一种仿自然蜂蜜浓缩机 |
DE102014100207B4 (de) * | 2014-01-09 | 2020-07-09 | Pfeiffer Vacuum Gmbh | Statorscheibe |
EP3105124B1 (en) * | 2014-02-14 | 2018-01-31 | Krones Ag | Wrapping apparatus employing stretching film with improved retaining device |
EP3051145B1 (de) * | 2015-01-28 | 2020-01-01 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB2556913B (en) | 2016-11-25 | 2019-09-25 | Edwards Ltd | Vacuum pump bearing holders |
GB201808912D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808932D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
EP3561306B1 (de) * | 2018-07-20 | 2021-06-09 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP7289627B2 (ja) * | 2018-10-31 | 2023-06-12 | エドワーズ株式会社 | 真空ポンプ、保護網及び接触部品 |
Citations (3)
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JP2006299968A (ja) * | 2005-04-21 | 2006-11-02 | Shimadzu Corp | 異物侵入防止板、回転真空ポンプおよび真空システム |
WO2008019614A1 (fr) * | 2006-08-09 | 2008-02-21 | Huawei Technologies Co., Ltd. | Procédé et système pour le transfert de données entre plusieurs réseaux ethernet de fournisseurs |
JP4250353B2 (ja) * | 2001-06-22 | 2009-04-08 | エドワーズ株式会社 | 真空ポンプ |
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US4443897A (en) * | 1982-07-15 | 1984-04-24 | Anderson Austin | Anti-clog sink device |
US4535889A (en) * | 1984-02-08 | 1985-08-20 | The Stouffer Corporation | Frozen food package and cover lid |
CN2084507U (zh) * | 1990-12-22 | 1991-09-11 | 池小波 | 简易纱窗 |
WO1994007033A1 (en) * | 1992-09-23 | 1994-03-31 | United States Of America As Represented By The Secretary Of The Air Force | Turbo-molecular blower |
US5406754A (en) * | 1993-02-03 | 1995-04-18 | Cosby; Lloyd N. | Drain gutter debris guard and method of making |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
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JP3804721B2 (ja) * | 1998-02-18 | 2006-08-02 | 株式会社荏原製作所 | フィルタ付きシール部材及びそれを用いたターボ分子ポンプ |
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CN100499975C (zh) | 2005-09-12 | 2009-06-10 | 富准精密工业(深圳)有限公司 | 散热装置 |
KR101157319B1 (ko) * | 2007-05-14 | 2012-06-15 | 가부시키가이샤 시마즈세이사쿠쇼 | 진공 펌프 |
JP5064264B2 (ja) * | 2008-03-05 | 2012-10-31 | 株式会社アルバック | 真空ポンプ、及び真空ポンプの製造方法 |
JP4892621B2 (ja) * | 2010-03-03 | 2012-03-07 | 株式会社大阪真空機器製作所 | 分子ポンプ |
-
2011
- 2011-07-28 KR KR1020137004256A patent/KR101868647B1/ko active IP Right Grant
- 2011-07-28 WO PCT/JP2011/067317 patent/WO2012070282A1/ja active Application Filing
- 2011-07-28 JP JP2012545635A patent/JP5668080B2/ja active Active
- 2011-07-28 CN CN201180055012.9A patent/CN103201520B/zh active Active
- 2011-07-28 US US13/884,740 patent/US9816530B2/en active Active
- 2011-07-28 EP EP11843290.5A patent/EP2644899B1/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4250353B2 (ja) * | 2001-06-22 | 2009-04-08 | エドワーズ株式会社 | 真空ポンプ |
JP2006299968A (ja) * | 2005-04-21 | 2006-11-02 | Shimadzu Corp | 異物侵入防止板、回転真空ポンプおよび真空システム |
WO2008019614A1 (fr) * | 2006-08-09 | 2008-02-21 | Huawei Technologies Co., Ltd. | Procédé et système pour le transfert de données entre plusieurs réseaux ethernet de fournisseurs |
Also Published As
Publication number | Publication date |
---|---|
US9816530B2 (en) | 2017-11-14 |
KR101868647B1 (ko) | 2018-06-18 |
CN103201520B (zh) | 2017-02-08 |
US20130230384A1 (en) | 2013-09-05 |
CN103201520A (zh) | 2013-07-10 |
KR20130139232A (ko) | 2013-12-20 |
EP2644899A4 (en) | 2014-04-23 |
EP2644899A1 (en) | 2013-10-02 |
WO2012070282A1 (ja) | 2012-05-31 |
EP2644899B1 (en) | 2021-04-07 |
JPWO2012070282A1 (ja) | 2014-05-19 |
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