JP5667827B2 - Substrate processing apparatus and transfer apparatus - Google Patents

Description

  The present invention relates to a substrate processing apparatus and a transfer apparatus that transfer a substrate while processing the substrate with a processing liquid.

  For example, a lithography process or the like is employed for a glass substrate used for a liquid crystal display panel, and a circuit pattern is formed on the surface thereof. The substrate sequentially passes through the processing apparatuses arranged side by side, thereby processing the substrate with the processing liquid, cleaning with the cleaning liquid after processing with the processing liquid, and drying by spraying air onto the substrate surface. A process of forming a circuit pattern such as a process is performed.

  Specifically, the processing apparatus that performs these steps includes a processing tank, processing means for performing processing in each step, and a substrate transfer device, and is arranged in parallel in the order of the steps. In addition, the processing apparatus has a substrate inlet / outlet on the wall surface of the processing tank, and an outlet and an inlet of an adjacent processing apparatus are adjacent to each other.

  The transfer device sequentially transfers the substrate into the processing tank through the carry-in port and the carry-out port, whereby the substrate is processed in each processing device. The transport device includes, for example, a plurality of transport shafts that rotate in the traveling direction, and a plurality of support rollers provided on each of the transport shafts. The support rollers support the lower surface of the substrate, and the transport shaft is driven to rotate. A transport roller mechanism for transporting the substrate.

  The substrate is processed by each processing means while being sequentially transferred into the processing tanks of a plurality of processing apparatuses provided in each step by the processing apparatus and the transfer apparatus having such a configuration. In this way, the substrate moves into the processing tank of the processing device of each process, and processing is performed by a plurality of processing devices by repeatedly moving to the next process while processing is performed in each process, thereby forming a circuit pattern. Will be.

  Recently, glass substrates used in liquid crystal display devices tend to be larger and thinner. For this reason, when the substrate is transported horizontally, the substrate may be bent more greatly due to the weight of the processing liquid supplied to the substrate, and the substrate may not be transported smoothly. Moreover, since the substrate is unloaded from the processing section with a large amount of processing liquid remaining on the upper surface of the substrate, when the processing liquid is recovered and reused, the consumption of the processing liquid increases and running This contributes to an increase in cost.

  In order to solve such a problem, a processing apparatus that conveys a substrate at a predetermined angle is recently known (see, for example, Patent Document 1). By using such a processing apparatus, it is possible to smoothly flow out the processing liquid supplied to the plate surface of the substrate and reduce the bending of the substrate.

  In addition, with the increase in size of the substrate, the driving force for transporting the substrate may be insufficient with only the transport roller mechanism that supports the lower surface of the substrate. Therefore, a technique is also known in which a so-called extra roller mechanism is provided on the upper surface of the substrate to reliably convey the substrate.

JP 2005-286001 A

  The substrate processing apparatus described above has the following problems. That is, in the processing apparatus that conveys the substrate at an angle, the upper roller mechanism is provided on the upper surface of the substrate. For this reason, the processing liquid sprayed on the substrate vigorously flows in the tilt direction and collides with a main surface that is tilted and positioned on the upper surface side of the roller of the addition roller mechanism. The impinging treatment liquid is scattered in the main surface direction of the roller, in other words, in the substrate transport direction. For this reason, a process liquid will mainly infiltrate into the processing tank of an adjacent processing apparatus.

  For example, in a processing apparatus that cleans a substrate with pure water (treatment liquid) as a cleaning process, the primary side is a processing apparatus that performs a brush process for cleaning the substrate with a brush and a detergent called a brush chamber on the substrate. Be placed. However, when the pure water used in the cleaning process enters the treatment tank in which the brush process is performed, the pure water is mixed with the detergent that is circulated and used in the treatment apparatus, and the concentration of the detergent is reduced. For this reason, the number of times of use of the detergent is reduced, the cleaning effect is reduced, and the production cost may be increased.

  On the other hand, when the additional roller mechanism is not used in order to prevent scattering of water, there are problems such as restrictions on the substrates that can be transported. Further, for example, if the arrangement of the upper roller mechanism or the processing means is changed in order to prevent water from scattering, the processing apparatus itself may be increased in size.

  For these reasons, substrate processing apparatuses are required to prevent an increase in size and to reduce manufacturing costs.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate processing apparatus and a transport apparatus that can prevent the processing liquid from being scattered even if an upper roller mechanism is provided in a transport apparatus that transports a substrate at an angle.

  In order to solve the above problems and achieve the object, a substrate processing apparatus and a transport apparatus configured as follows are provided.

As one aspect of the present invention, there is provided a substrate processing apparatus for processing a top surface of a substrate that is tilted at a predetermined angle and is transported in a direction perpendicular to the tilting direction with a processing liquid, A plurality of processing tanks having a carry-out port for carrying out the substrate; a plurality of transfer shafts that are provided from the carry-in port to the carry-out port, and that are inclined and rotated at the predetermined angle; A conveying roller mechanism having a supporting roller for supporting, a rotating shaft provided to face at least one of the plurality of conveying shafts, a roller provided on the rotating shaft and in contact with upper surfaces of both end portions of the substrate; A transport apparatus comprising an upper roller mechanism having a truncated cone shape or a conical rectifying member provided on an upper slope of the roller contacting the lower end of the inclined substrate; and The substrate processing apparatus, characterized in that it comprises a supply device for supplying to the substrate conveyed by the conveying device management solution is provided.

One aspect of the present invention, the substrate to be processed by the processing liquid supplied from the supply device, is inclined at a predetermined angle, a transfer device for transferring the substrate in the inclination direction perpendicular, the substrate multiple provided along the conveying direction of the conveying roller mechanism having a support roller for supporting the substrate provided with a plurality of each of the conveying shaft and these conveying shaft rotates inclined at said predetermined angle, said plurality A rotating shaft provided to face at least one of the conveying shafts, a roller provided on the rotating shaft and in contact with upper surfaces of both end portions of the substrate, and a lower end portion of the inclined substrate. And an upper roller mechanism having a truncated cone shape or a conical rectifying member provided on the upper slope of the roller in contact therewith.

  According to the present invention, it is possible to provide a substrate processing apparatus and a transport apparatus that can prevent the processing liquid from being scattered even if an additional roller is provided on the transport apparatus that transports the substrate at an inclination.

BRIEF DESCRIPTION OF THE DRAWINGS Explanatory drawing which shows typically the structure of the processing apparatus of the board | substrate which concerns on one embodiment of this invention. Sectional drawing which shows the structure of the processing apparatus typically. The top view which shows typically the principal part structure of the conveying apparatus used for the processing apparatus. The side view which shows the principal part structure of the conveying apparatus. The side view which shows a part of principal part structure of the same conveying apparatus. The side view which shows a part of principal part structure of the same conveying apparatus. The side view which shows a part of principal part structure of the same conveying apparatus. Explanatory drawing which shows typically the structure of the inclination roller of the processing apparatus of the board | substrate which concerns on the modification of this invention.

Hereinafter, a processing apparatus 1 for a substrate 100 according to an embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is an explanatory view schematically showing the configuration of a processing apparatus 1 for a substrate 100 according to an embodiment of the present invention. FIG. 2 is a front view showing the configuration of the processing apparatus 1, particularly the configuration of a transfer apparatus 4. 3 is a top view schematically showing the configuration of the main part of the upper roller mechanism 15 of the conveying device 4, FIG. 4 is a side view showing the cap 32 of the upper roller mechanism 15, and FIG. 5 is the configuration of the roller 31 of the upper roller mechanism 15. FIG. 6 is a side view showing the configuration of the cap 32 of the upper roller mechanism 15, and FIG. 7 is a side view showing the configuration of the spacer 34 of the upper roller mechanism 15. In FIG. 1, F indicates the transport direction of the substrate 100.

  As shown in FIG. 1, the processing apparatus 1 for a substrate 100 is used in a cleaning process that is one of the processing processes for the substrate 100 or a cleaning process for the substrate 100 using a cleaning liquid such as pure water. On the primary side of the processing apparatus 1, there is provided a processing apparatus 110 used in a cleaning process for cleaning the substrate 100 with a chemical solution such as a brush 113 and a detergent. Further, on the secondary side of the processing apparatus 1, a processing apparatus 120 used in a drying process for drying the cleaned substrate 100 is provided.

  The processing device 110 includes a processing tank 111, a transport device 112, a brush 113, an air knife 114, and a chemical solution supply device (not shown) as processing means. The processing tank 111 includes a carry-in port (not shown) for the substrate 100 and a carry-out port 116. The transport apparatus 112 includes a plurality of transport roller mechanisms 117 that transport the substrate 100 from the transport inlet to the transport outlet 116.

  The brush 113 is a processing means for the substrate 100, and is formed so that the upper and lower surfaces of the substrate 100 can be cleaned together with the chemical solution supplied by the supply device. The air knife 114 is formed such that air is sprayed onto the upper and lower surfaces of the substrate 100 processed by the processing apparatus 110 so that the chemical solution attached to the substrate 100 can be scattered.

  The air knife 114 is disposed in the vicinity of the carry-out port 116. Note that the chemical solution used in the processing apparatus 110 is a detergent that cleans the substrate 100. Such a detergent is repeatedly used a predetermined number of times in a circulation device provided in the processing apparatus 110.

  The processing device 120 includes a processing tank 121, a transport device 122, and a drying device (not shown) as processing means. The processing tank 121 includes a carry-in port 123 for the substrate 100 and a carry-out port.

  As shown in FIG. 1, the transport device 122 includes a plurality of transport rollers 124 and an upper roller mechanism 125. The drying device is, for example, a plurality of air knives, and is formed such that air is sprayed onto the upper and lower surfaces of the substrate 100 so that the surface of the substrate 100 can be dried.

  In addition, these processing apparatuses 110 and 120 are an example, Comprising: The apparatus which performs another process may be sufficient.

  The processing apparatus 1 tilts the substrate 100 at a predetermined angle, conveys the substrate 100 in a direction crossing the tilting direction, and ejects a fluid (processing liquid) such as pure water onto the substrate 100 to thereby clean the substrate 100. The cleaning process is possible. If it demonstrates concretely, the processing apparatus 1 is provided with the processing tank 3, the conveying apparatus 4, the processing means 5, and the air knife 6. FIG.

  The processing tank 3 is formed in a box shape, and is formed so that the transfer device 4, the processing means 5, and the air knife 6 can be disposed therein. The processing tank 3 is a side surface, and a carry-in port 10 is formed on one end surface in a predetermined direction, and a carry-out port 11 is formed on the other end surface. Note that the predetermined direction is a direction in which the substrate 100 is transported, and is indicated by an arrow F in FIG. The carry-in port 10 and the carry-out port 11 are formed in a shape that allows the substrate 100 to be carried into and out of the processing tank 3.

  The conveyance device 4 includes a plurality of conveyance roller mechanisms 13 arranged at regular intervals along a predetermined direction indicated by an arrow F in FIG. 1, a drive unit 14 that drives the conveyance roller mechanism 13, and one of the conveyance roller mechanisms 13. And an additional roller mechanism 15 provided to face the portion. The transport device 4 is formed so that the substrate 100 on the transport roller mechanism 13 can be transported by the rotation of the transport roller mechanism 13 driven by the driving unit 14.

  Moreover, the conveying apparatus 4 has the frame 16 of a rectangular frame shape as shown in FIG. The frame 16 is supported by receiving members 17 provided at one end and the other end in the width direction in the processing tank 3. One receiving member 17 is provided with a height adjusting member 18. Thereby, the frame 16 is inclined at a predetermined angle, for example, an angle of 5 degrees with respect to the width direction of the processing tank 3.

  The transport roller mechanism 13 is provided on the frame 16 and includes a plurality of transport shafts 21 whose axes are aligned in the width direction of the processing tank 3 and a plurality of support rollers 22. The transport roller mechanism 13 includes a plurality of transport shafts 21 that can transport the substrate 100 from the transport inlet 10 to the transport outlet 11. A plurality of transport shafts 21 are provided at predetermined intervals with respect to the longitudinal direction of the processing tank 3. Further, the conveyance shaft 21 is provided on the frame 16 that is inclined by the receiving member 17 and the adjusting member 18, so that the conveyance shaft 21 is inclined at a predetermined angle similarly to the frame 16.

  A plurality of support rollers 22 are provided on the transport shaft 21 at predetermined intervals along the longitudinal direction thereof. The support roller 22 is formed in a disk shape, and has an O-ring (not shown in FIG. 2) on the outer peripheral surface thereof. The O-ring comes into contact with the substrate 100 so that the substrate 100 can be supported. Is formed.

  The driving means 14 includes bearings 23 provided at both ends in the width direction of the frame 16 that rotatably supports both ends of the transport shaft 21 and a rotation shaft 27 described later, and a drive source 24 that rotationally drives the transport shaft 21 and the rotation shaft 27. And a transmission means 25 such as a gear mechanism for transmitting the driving force of the driving source 24 to the conveying shaft 21. The driving unit 14 can be set as appropriate as long as the conveying shaft 21 and the rotating shaft 27 are driven to rotate.

  The upper roller mechanism 15 is provided on the frame 16 and has a rotation shaft 27 whose axis is aligned with the width direction of the processing tank 3 and a plurality of, for example, two pressure rollers 28 provided on both ends of the rotation shaft 27. It has. The rotating shaft 27 is rotationally driven by the driving means 14. The rotating shaft 27 is provided so as to face the transport shaft 21 disposed in the vicinity of the carry-in port 10.

  As shown in FIGS. 3 to 7, the pressing roller 28 includes rollers 31 that are in contact with the upper surfaces of both end portions of the substrate 100 and press the substrate 100. The pressing roller 28 located on the lower end side of the inclined rotating shaft 27 further includes a cap 32 provided on the roller 31.

  As shown in FIG. 5, the roller 31 is formed in a disk shape and is fixed to the rotating shaft 27. Further, the roller 31 includes an O-ring 31a, a part of which is in contact with the substrate 100, an insertion groove 31b into which the O-ring 31a is inserted, and a groove portion 31c provided on the side surface. The roller 31 is formed such that when the O-ring 31 a contacts the substrate 100, the substrate 100 can be pressed against the transport roller mechanism 13 with a predetermined force, and a driving force can be transmitted to the upper surface of the substrate 100.

  The cap 32 is a rectifying member formed in a truncated cone shape provided on at least one main surface of the roller 31. Specifically, the cap 32 is provided on the upper slope of the roller 31 that contacts the lower end of the tilted substrate 100. The upper slope is a main surface of the roller 31 that is inclined upward.

  For example, as shown in FIGS. 4 and 6, the cap 32 includes a semi-conical truncated conical member 33 in which the cap 32 is divided in half, and a pair of spacers 34 interposed between the assembling members 33. I have.

  The assembly member 33 has a groove 33a into which the rotary shaft 27 is inserted at the center thereof. The assembly member 33 is formed by dividing a cylindrical material into a truncated cone shape by cutting or the like, for example.

  The spacer 34 is formed in substantially the same shape as one of the cross sections of the assembly member 33. The spacer 34 is interposed in a gap between the assembly members 33 when the assembly member 33 is assembled to the rotating shaft 27, which is generated by dividing the assembly member 33. In addition, when the assembly member 33 is fixed to the rotating shaft 27, if no gap is generated between the assembly members 33, the spacer 34 may not be used.

  The assembly member 33 and the spacer 34 include a protrusion 35 that is inserted into the groove 31c and aligned. The assembly member 33 and the spacer 34 are fixed to the rotating shaft 27 and the roller 31 with an adhesive or the like.

  The transport shaft 21 is provided with a cover 36 that prevents the processing liquid from entering the bearing 23 of the transport means 14.

  The processing means 5 is a processing liquid supply device that is provided in the processing tank 3 and is formed so that a processing liquid such as pure water can be ejected (supplied) onto the substrate 100 transported by the transport roller mechanism 13. Such a processing means 5 is a shower that can inject a processing liquid onto the substrate 100 at a high pressure, a knife that mixes the processing liquid or the processing liquid and gas, and injects the processing liquid onto the substrate 100. 1 and 2, the processing means 5 is only shown above the transfer device 4 and is shown by a schematic diagram partially omitted, but further includes a processing device for injecting a processing liquid onto the lower surface of the substrate 100. May be.

  The air knife 6 is provided adjacent to the carry-in port 10 and is formed so as to prevent the treatment liquid sprayed from the treatment means 5 in the treatment tank 3 from flowing into the treatment tank 111 of the treatment apparatus 110 from the carry-in port 10. Has been.

  A pair of air knives 6 are provided to face each other, and by facing the upper and lower surfaces of the substrate 100 to be transported, air (gas) can be sprayed to both sides of the substrate 100 toward the inside of the processing tank 3. Is formed.

  In the processing apparatus 1 configured as described above, in the step of cleaning the substrate 100, first, air is injected by the air knife 6 onto the substrate 100 transported into the processing apparatus 1.

  Next, while the substrate 100 is being transported by the transport device 4, a large amount of high-pressure processing liquid (pure water) is sprayed from the processing means 5 to remove the previous processing liquid adhering to the surface of the substrate 100. Such cleaning of the substrate 100 is performed while the substrate 100 is transported in the processing tank 3, and then the substrate 100 is transported from the carry-out port 11 to the processing tank 121 of the next process.

  According to the processing apparatus 1 configured as described above, the substrate 100 is transported while being tilted by the transport apparatus 4. For this reason, a large amount of the processing liquid sprayed on the substrate 100 flows vigorously in a direction intersecting the transport direction of the substrate 100 along the inclination direction of the substrate 100.

At this time, the processing liquid flowing along the inclination direction on the substrate 100 collides with the addition roller mechanism 15. It collided treatment solution, as the flow M of the treatment liquid shown by a solid line in FIG. 3, moves along the inclined surface, along the outer surface of the cap 32, and be moved.

  That is, as shown by a two-dot chain line N in FIG. 3, when the cap 32 is not provided, the processing liquid collides with the side surface of the roller 31 and scatters in a direction intersecting the rotation shaft 27. . However, since the loading roller mechanism 15 is provided in the vicinity of the carry-in port 10, the scattered processing liquid enters the treatment tank 111 from the carry-in port 10 through the carry-out port 116 of the adjacent processing apparatus 110. . For this reason, the processing liquid that has entered the processing apparatus 110 is mixed with the processing liquid in the processing apparatus 110.

  Increasing the flow rate of the air knife 6 in order to prevent the processing liquid from entering the processing apparatus 110 not only increases the amount of air used, but also increases the exhaust flow rate, which increases the manufacturing cost. .

  However, the upper roller mechanism 15 is provided with the cap 32 so as to cover the side surface of the roller 31, so that the processing liquid flowing toward the roller 31 collides with the cap 32, but the cap 32 has a truncated cone-shaped inclination. The surface makes it possible to prevent the colliding processing liquid from scattering. In other words, the cap 32 rectifies the flow of the processing liquid that has moved along the inclination of the substrate 100, thereby preventing the processing liquid from scattering and preventing the processing liquid from entering the adjacent processing apparatus 110. It becomes possible.

  In addition, the processing apparatus 1 can prevent the processing liquid from entering the processing apparatus 110 without increasing the flow rate of the air knife 6 by providing the additional roller mechanism 15, thereby reducing the manufacturing cost of the substrate 100. It becomes possible.

  As described above, the processing apparatus 1 is provided with the truncated cone-shaped cap 32 that covers the side surface of the roller 31 in the addition roller mechanism 15 that presses the substrate while facing a part of the inclined transport roller mechanism 13. The inclined surface (side surface) can rectify the flow of the processing liquid. As a result, it is possible to prevent the processing liquid that has moved toward the addition roller mechanism 15 from scattering.

  The present invention is not limited to the above embodiment. For example, in the above-described example, the roller 31 includes the groove 31c, and the assembly member 33 and the spacer 34 include the protrusion 35 that is inserted into the groove 31c. However, the configuration is not limited thereto. For example, the grooves 31c and the protrusions 35 may not be provided.

  Moreover, although the cap 32 demonstrated the structure which assembles the assembly member 33 and the spacer 34 in the example mentioned above, it is not limited to this. The cap 32 may be integrally formed. However, when the cap 32 is detachable in a state where the roller 31 is provided on the rotating shaft 27, it is desirable to have a structure that can be disassembled, such as the assembly member 33 and the spacer 34. Alternatively, the roller 31 and the cap 32 may be integrally formed.

  Further, in the above-described example, as illustrated in FIG. 2, the rotation shaft 27 of the addition roller mechanism 15 is configured to be used along the width direction of the substrate 100. However, the configuration is not limited thereto. For example, the addition roller mechanism 15A will be described with reference to a side view showing the addition roller mechanism 15A according to a modification of the processing apparatus 1 shown in FIG.

  In FIG. 8, the same components as those of the processing apparatus 1 according to the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted. 8 shows an O-ring provided on the outer peripheral surface of the support roller 22 not shown in FIG.

  As shown in FIG. 8, the addition roller mechanism 15A used in the processing apparatus 1 according to the modification includes a rotating shaft 27A and a pressing roller 28A fixed to the rotating shaft 27A. The pressing roller 28 </ b> A includes a roller 31 and a cap 32 </ b> A provided on the roller 31.

  The rotation shaft 27A is formed, for example, to a length up to the roller 31 adjacent to the cover 36. The cap 32A is formed integrally with the roller 31, and the tip of the cap 32A is formed in a truncated cone shape having a curved surface.

  The processing apparatus 1 using the upper roller mechanism 15A configured as described above can obtain the same effects as the processing apparatus 1 according to the above-described embodiment. The cap 32A may be provided separately from the roller 31. Further, the cap 32A may be formed in a conical shape instead of a truncated cone shape. In addition, various modifications can be made without departing from the scope of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Processing apparatus, 3 ... Processing tank, 4 ... Conveyance apparatus, 5 ... Processing means (supply apparatus), 6 ... Air knife, 10 ... Carry-in inlet, 11 ... Carry-out outlet, 13 ... Conveyance roller mechanism, 14 ... Drive means, DESCRIPTION OF SYMBOLS 15 ... Add-on roller mechanism, 16 ... Frame, 17 ... Receiving member, 18 ... Adjustment member, 21 ... Conveyance shaft, 22 ... Support roller, 23 ... Bearing, 24 ... Drive source, 25 ... Transmission means, 27 ... Rotating shaft, 28 ... Pressing roller, 31 ... Roller, 31a ... O-ring, 31b ... Insertion groove, 31c ... Groove, 32 ... Cap (rectifying member), 33 ... Assembly member, 33a ... Groove, 34 ... Spacer, 35 ... Protrusion, 36 ... Cover, 100 ... substrate.

Claims (7)

A substrate processing apparatus for processing a top surface of a substrate that is inclined at a predetermined angle and is transported in a direction perpendicular to the inclination direction with a processing liquid,
A treatment tank having a carry-in port for carrying in the substrate and a carry-out port for carrying out the substrate;
A plurality of conveyance rollers provided from the carry-in port to the carry-out port, and a conveyance roller mechanism having a conveyance roller that is inclined and rotated at the predetermined angle, and a support roller that supports the plurality of substrates provided on the respective conveyance shafts; and A rotating shaft provided to face at least one of the plurality of transport shafts, a roller provided on the rotating shaft and in contact with the upper surface of both end portions of the substrate, and a lower end portion of the inclined substrate A transport device comprising an upper roller mechanism having a truncated cone shape or a conical rectifying member provided on the upper slope of the roller;
A supply device for supplying the processing liquid to the substrate transported by the transport device;
A substrate processing apparatus comprising: The substrate processing apparatus according to claim 1, wherein the rotation shaft of the addition roller mechanism is provided to face the conveyance shaft provided in the vicinity of the carry-in entrance.   The substrate processing apparatus according to claim 1, wherein the rectifying member is detachably attached to the roller.   The substrate processing apparatus according to claim 1, wherein the rectifying member is formed integrally with the roller. The substrate to be processed by the processing liquid supplied from the supply device, is inclined at a predetermined angle, a transfer device for transferring the substrate in the inclination direction perpendicular,
Multiple provided along the conveying direction of the substrate, and the conveying roller mechanism having a support roller for supporting the substrate provided with a plurality of each of the conveying shaft and these conveying shaft rotates inclined at said predetermined angle,
A rotating shaft provided to face at least one of the plurality of transport shafts, a roller provided on the rotating shaft and in contact with the upper surfaces of both end portions of the substrate, and a lower end portion of the inclined substrate An upper roller mechanism having a truncated cone shape or a conical rectifying member provided on the upper slope of the roller in contact with
A conveying device comprising:   The conveying device according to claim 5, wherein the rectifying member is detachably formed with the roller.   The conveying device according to claim 5, wherein the rectifying member is formed integrally with the roller.

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