JP5628044B2 - 光センサ - Google Patents

光センサ Download PDF

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Publication number
JP5628044B2
JP5628044B2 JP2010537513A JP2010537513A JP5628044B2 JP 5628044 B2 JP5628044 B2 JP 5628044B2 JP 2010537513 A JP2010537513 A JP 2010537513A JP 2010537513 A JP2010537513 A JP 2010537513A JP 5628044 B2 JP5628044 B2 JP 5628044B2
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JP
Japan
Prior art keywords
optical sensor
optical
sensor according
light
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010537513A
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English (en)
Japanese (ja)
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JP2011506949A5 (enExample
JP2011506949A (ja
Inventor
ハーピン、アーノルド、ピーター、ロスコー
ドレイク、ジョン、ポール
タイラー、スティーブン、ジェフリー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Science and Technology Facilities Council
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Science and Technology Facilities Council
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Publication date
Application filed by Science and Technology Facilities Council filed Critical Science and Technology Facilities Council
Publication of JP2011506949A publication Critical patent/JP2011506949A/ja
Publication of JP2011506949A5 publication Critical patent/JP2011506949A5/ja
Application granted granted Critical
Publication of JP5628044B2 publication Critical patent/JP5628044B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35329—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using interferometer with two arms in transmission, e.g. Mach-Zender interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/16—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206—Optical features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2205/00—Application of thermometers in motors, e.g. of a vehicle

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Optics & Photonics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measuring Fluid Pressure (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
JP2010537513A 2007-12-14 2008-12-12 光センサ Expired - Fee Related JP5628044B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0724411.4A GB0724411D0 (en) 2007-12-14 2007-12-14 Optical sensor
GB0724411.4 2007-12-14
PCT/GB2008/004104 WO2009077727A2 (en) 2007-12-14 2008-12-12 Optical, sensor

Publications (3)

Publication Number Publication Date
JP2011506949A JP2011506949A (ja) 2011-03-03
JP2011506949A5 JP2011506949A5 (enExample) 2011-12-15
JP5628044B2 true JP5628044B2 (ja) 2014-11-19

Family

ID=39048103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010537513A Expired - Fee Related JP5628044B2 (ja) 2007-12-14 2008-12-12 光センサ

Country Status (6)

Country Link
US (3) US8705045B2 (enExample)
EP (2) EP3073227B1 (enExample)
JP (1) JP5628044B2 (enExample)
CA (1) CA2708859A1 (enExample)
GB (1) GB0724411D0 (enExample)
WO (1) WO2009077727A2 (enExample)

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GB0724411D0 (en) 2007-12-14 2008-01-30 Stfc Science & Technology Optical sensor
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GB2481039A (en) * 2010-06-09 2011-12-14 Rolls Royce Plc Temperature, Pressure and Neutron Fluence Measurment
GB201106204D0 (en) 2011-04-12 2011-05-25 Oxsensis Ltd Optical sensor
GB2543984B (en) * 2011-08-18 2017-07-19 Oxsensis Ltd Pressure sensor element with cap
GB2495518B (en) 2011-10-12 2016-08-31 Oxsensis Ltd Optical sensor for sensing temperature of an adjacent gas
US8896661B2 (en) * 2012-01-31 2014-11-25 Siemens Energy, Inc. System and method for online inspection of turbines including aspheric lens
US9217852B2 (en) 2012-01-31 2015-12-22 Siemens Energy, Inc. System and method for online inspection of turbines using an optical tube with broadspectrum mirrors
CN104204885B (zh) * 2012-01-31 2017-09-29 西门子能量股份有限公司 用于在线检测涡轮机的包括温度和振动补偿透镜支座的系统和方法
US9366855B2 (en) * 2012-01-31 2016-06-14 Siemens Energy, Inc. System and method for online inspection of turbines including temperature and vibration compensating lens mount
GB2500255B (en) * 2012-03-16 2020-04-15 Oxsensis Ltd Optical sensor
GB2542284B (en) 2012-03-16 2017-07-26 Oxsensis Ltd Optical pressure sensor
GB2544923B (en) 2012-06-27 2017-09-20 Oxsensis Ltd Optical sensor
GB2509105B (en) * 2012-12-20 2017-02-22 Oxsensis Ltd Mechanical resonator sensor
CA2909947C (en) * 2013-04-25 2020-06-30 Sentek Instrument LLC Sapphire sensor for measuring pressure and temperature
JP6469845B2 (ja) 2014-08-26 2019-02-13 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ ガスタービンエンジン内の光センサ用のシーリングシステム
US10156476B2 (en) * 2014-11-13 2018-12-18 Bae Systems Information And Electronic Systems Integration Inc. Solid state wideband fourier transform infrared spectrometer
JP6729908B2 (ja) * 2015-02-23 2020-07-29 ザ・ボード・オブ・トラスティーズ・オブ・ザ・リーランド・スタンフォード・ジュニア・ユニバーシティ 位相面変調センサと、製造方法
WO2016185050A1 (en) * 2015-05-21 2016-11-24 University Of Limerick A temperature sensor
NL2017595A (en) * 2015-11-10 2017-05-26 Asml Netherlands Bv Proximity sensor, lithographic apparatus and device manufacturing method
JP6789514B2 (ja) * 2016-08-05 2020-11-25 サンテック株式会社 検出装置
TWI612281B (zh) 2016-09-26 2018-01-21 財團法人工業技術研究院 干涉分光元件封裝裝置
CN108663160B (zh) * 2018-05-15 2020-07-03 哈尔滨工业大学 一种光学复合传感器探头
CN110146203A (zh) * 2018-12-11 2019-08-20 中国航空工业集团公司北京长城计量测试技术研究所 一种耐高温的光纤压力传感器的封装结构及封装方法
US20210164853A1 (en) * 2019-11-29 2021-06-03 Meggitt Sa Optical sensor for the measurement of physical parameters in harsh environments and methods of making and using the same
EP4249856A4 (en) * 2020-12-23 2024-09-25 Nagano Keiki Co., Ltd. Optical sensor and physical quantity measurement device
US11753999B2 (en) 2021-06-17 2023-09-12 General Electric Company Gas turbine sensor assembly and associated shutter mechanism
GB2615737A (en) * 2021-12-23 2023-08-23 Oxsensis Ltd Optical sensor
WO2024138217A1 (en) * 2022-12-23 2024-06-27 The University Of Massachusetts Photoacoustic devices and methods of manufacture thereof

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Also Published As

Publication number Publication date
EP2235480A2 (en) 2010-10-06
US20170131122A1 (en) 2017-05-11
US20140246610A1 (en) 2014-09-04
EP3073227B1 (en) 2020-02-05
GB0724411D0 (en) 2008-01-30
EP2235480B1 (en) 2016-06-08
CA2708859A1 (en) 2009-06-25
US9995604B2 (en) 2018-06-12
JP2011506949A (ja) 2011-03-03
US8705045B2 (en) 2014-04-22
WO2009077727A2 (en) 2009-06-25
US9404771B2 (en) 2016-08-02
WO2009077727A3 (en) 2009-10-22
US20100321703A1 (en) 2010-12-23
EP3073227A1 (en) 2016-09-28

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