JP5617621B2 - 波長可変干渉フィルター、光モジュール、及び光分析装置 - Google Patents
波長可変干渉フィルター、光モジュール、及び光分析装置 Download PDFInfo
- Publication number
- JP5617621B2 JP5617621B2 JP2010292056A JP2010292056A JP5617621B2 JP 5617621 B2 JP5617621 B2 JP 5617621B2 JP 2010292056 A JP2010292056 A JP 2010292056A JP 2010292056 A JP2010292056 A JP 2010292056A JP 5617621 B2 JP5617621 B2 JP 5617621B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- reflective film
- substrate
- interference filter
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 37
- 239000000758 substrate Substances 0.000 claims description 79
- 238000007689 inspection Methods 0.000 claims description 17
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 35
- 230000002093 peripheral effect Effects 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013075 data extraction Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optics & Photonics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010292056A JP5617621B2 (ja) | 2010-12-28 | 2010-12-28 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010292056A JP5617621B2 (ja) | 2010-12-28 | 2010-12-28 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012141348A JP2012141348A (ja) | 2012-07-26 |
| JP2012141348A5 JP2012141348A5 (enExample) | 2013-12-26 |
| JP5617621B2 true JP5617621B2 (ja) | 2014-11-05 |
Family
ID=46677731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010292056A Expired - Fee Related JP5617621B2 (ja) | 2010-12-28 | 2010-12-28 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5617621B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6098197B2 (ja) | 2013-02-05 | 2017-03-22 | セイコーエプソン株式会社 | 光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP6669509B2 (ja) * | 2016-01-28 | 2020-03-18 | パイオニア株式会社 | 駆動装置及び光フィルタ |
| JP2020101820A (ja) * | 2020-02-27 | 2020-07-02 | パイオニア株式会社 | 駆動装置及び光フィルタ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4852835B2 (ja) * | 2004-09-02 | 2012-01-11 | ソニー株式会社 | 回折格子−光変調装置集合体 |
| US7734131B2 (en) * | 2006-04-18 | 2010-06-08 | Xerox Corporation | Fabry-Perot tunable filter using a bonded pair of transparent substrates |
| US7623278B2 (en) * | 2006-09-26 | 2009-11-24 | Xerox Corporation | MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes |
| JP5798709B2 (ja) * | 2009-03-04 | 2015-10-21 | セイコーエプソン株式会社 | 光フィルター及びそれを備えた光モジュール |
| JP5316483B2 (ja) * | 2010-06-18 | 2013-10-16 | セイコーエプソン株式会社 | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP2012141347A (ja) * | 2010-12-28 | 2012-07-26 | Seiko Epson Corp | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
-
2010
- 2010-12-28 JP JP2010292056A patent/JP5617621B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012141348A (ja) | 2012-07-26 |
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