JP5602784B2 - Pickup method and pickup device - Google Patents

Description

  The present invention relates to a pickup method and a pickup apparatus.

  In the manufacture of semiconductor devices, a chip bonding technique in which a wafer on which a large number of elements are fabricated is diced and separated into individual semiconductor chips, which are bonded one by one to a predetermined position such as a lead frame. Is adopted. A die bonder (pickup device) is used for this chip bonding (Patent Document 1).

  As shown in FIG. 5, such a die bonder includes a bonding arm (not shown) having a collet 3 for attracting the semiconductor chip 1 of the supply unit 2 and a confirmation camera (not shown) for observing the semiconductor chip 1 of the supply unit 2. And a confirmation camera (not shown) for observing the island portion 5 of the lead frame 4 at the bonding position.

  The supply unit 2 includes a semiconductor wafer 6 (see FIG. 6), and the semiconductor wafer 6 is divided into a large number of semiconductor chips 1. That is, the wafer 6 is attached to an adhesive sheet 7 (dicing sheet) (see FIG. 4), and the dicing sheet 7 is held by an annular frame. Then, the wafer 6 on the dicing sheet 7 is divided into pieces using a circular blade (dicing saw) or the like to form the chip 1. Further, the bonding arm holding the collet 3 can be moved between the pickup position and the bonding position via the conveying means.

  Further, the collet 3 is vacuum-sucked through the suction holes opened in the lower end surface thereof, and the chip 1 is adsorbed on the lower end surface of the collet 3. If this vacuum suction (evacuation) is released, the chip 1 is detached from the collet 3.

  Next, a die bonding method using this die bonder will be described. First, the chip 1 to be picked up is observed with a confirmation camera disposed above the supply unit 2, and the collet 3 is positioned above the chip 1 to be picked up, and then the collet 3 as indicated by an arrow A. Is lowered to pick up the chip 1. Thereafter, the collet 3 is raised as shown by the arrow B.

  Next, the island portion 5 of the lead frame 4 to be bonded is observed with a confirmation camera arranged above the bonding position, and the collet 3 is moved in the direction of arrow C, and above the island portion 5. After being positioned, the collet 3 is moved downward as indicated by an arrow D, and the chip 1 is supplied to the island portion 5. In addition, after the chip is supplied to the island portion 5, the collet 3 is raised as indicated by the arrow E and then returned to the standby position above the pip-up position as indicated by the arrow F.

  That is, by moving the collet 3 sequentially as indicated by arrows A, B, C, D, E, and F, the chip 1 positioned based on the observation of the pickup confirmation camera is picked up by the collet 3. The chip 1 is mounted on the island portion 5.

  By the way, in the pickup position, as shown in FIG. 4, there is one provided with a stage 8 for receiving the adhesive sheet 7 and a push-up pin 9 disposed in the stage 8.

  In such a case, as shown in FIG. 4 (a), the collet 3 is lowered from the upper position of the chip 1 and is brought into contact with the chip 1 as shown in FIGS. 4 (b) and 4 (c). The push-up pin 9 that has been retracted by a predetermined amount (m) from the upper surface 8a of the plate 8 rises, breaks through the adhesive sheet 7 with the push-up pin 9, and removes the chip 1 adsorbed by the collet 3 to the adhesive sheet 7. Will be peeled off.

  In order to prevent the tip 1 from rotating or slipping at the time of pushing up, in the state shown in FIG. 4B, the collet 3 is slightly below the target tip surface (for example, about 10 μm to 100 μm) below the collet 3. Position the end face. For this reason, as shown in FIG. 4B, when the collet 3 contacts the chip 1, a certain speed remains. Moreover, as shown in FIG. 4 (b), after the collet 3 contacts the chip 1, the collet 3 remains in this state for a predetermined time (t seconds) as shown in FIG. 4 (c). The chip 1 is pressed.

JP 2000-68296 A JP 2006-73631 A

  However, the pressure-sensitive adhesive sheet 7 is received by the stage 8 which is a rigid body, and when the collet 3 comes into contact with the chip 1, the chip 1 receives an impact, and the pressed state by the collet 3 is also present. Will continue. For this reason, the chip 1 is damaged or deformed.

  Therefore, it can be proposed to reduce the impact force at the time of contact by reducing the descending speed above the chip 1, for example, from 50 μm to 300 μm. However, if the lowering speed is reduced, the cycle time is delayed and the productivity is lowered.

  It can also be proposed to place an impact relaxation member (cushion material) on the chip 1 side and / or the collet 3 side. If the impact mitigating member is used, the number of parts of the entire apparatus increases, and it is necessary to perform the operation of arranging the impact mitigating member when the apparatus is assembled, resulting in poor productivity.

  Therefore, in view of such circumstances, the present invention provides a pickup method and pickup device that can pick up a chip without adding an impact reducing member (cushion material) or the like and without delaying the cycle time. It is something to be offered.

The pick-up method of the present invention is a pick-up method in which the chip on the pressure-sensitive adhesive sheet is picked up by lowering the collet above the pip-up position and picking up with the collet, and the collet descends to reach the lowest point. when the, when the collet is in contact with the chip push means, collet is in a state of pushing up the chip side at small upward force than pushing force at the time of contact with the chip, contact the chip lowers the collet The collet pushes the push-up means down .

  According to the pickup method of the present invention, when the collet descends and reaches the lowest point, when the chip contacts the chip, the chip is pushed up with a pushing force smaller than the pressing force of the collet. The tip descends with the descent. Thereby, the impact of the chip due to the contact of the collet can be reduced. Moreover, since the tip is pushed up with a pushing force smaller than the pressing force of the collet, the closeness between the collet and the tip is maintained.

Further, when the pushing-up means pushes the tip side with a pushing force smaller than the pushing force when the collet contacts the tip, and the collet descends and reaches the lowest point, the collet is applied to the tip. When contacting, the collet is lowered and brought into contact with the chip while the collet pushes down the push-up means, and when the collet descends and reaches the lowest point , if there is a gap between the collet and the chip, the chip The side can be pushed up to eliminate the gap, and the chip can be adsorbed to the collet.

  The tip may be pushed up by a push-up pin through an adhesive sheet, and the push-up pin may be lowered to alleviate the impact from the collet to the tip. At this time, the push-up pin is preferably a chip push-up pin used when the chip is peeled off from the pressure-sensitive adhesive sheet.

  The adhesive sheet to which the chip is adhered may be received by a stage in a pushed-up state, and the stage may be lowered to reduce the impact of the collet on the chip.

The pickup device of the present invention is a pickup device for picking up the chip on the adhesive sheet by lowering the collet above the pip-up position and sucking it up with the collet, and includes a push-up means for pushing up the chip side. When the collet comes down and reaches the lowest point when the collet comes into contact with the chip, the push-up means pushes up the chip side with a pushing force smaller than the pressing force when the collet comes into contact with the chip. The collet is lowered and brought into contact with the chip while the collet pushes down the push-up means .

  In the pickup device of the present invention, when the collet comes down and reaches the lowest point, when the collet comes into contact with the chip, the chip is pushed up by the pushing-up means with a pushing force smaller than the pressing force of the collet. As the collet descends, the tip descends against the pushing force by the pushing-up means. Thereby, the impact of the chip due to the contact of the collet can be reduced. Moreover, since the tip is pushed up with a pushing force smaller than the pressing force of the collet, the closeness between the collet and the tip is maintained.

Further, the push-up means, collet is in a state of pushing up the chip side at small upward force than pushing force at the time of contact with the chip, when the collet has reached the lowest point is lowered, collet chip When the collet is lowered, the collet is brought into contact with the chip while the collet pushes down the pushing-up means, and when there is a gap between the collet and the chip, the chip side is pushed up to eliminate the gap. Can be adsorbed.

  By configuring the push-up means with a chip push-up pin used when the chip is peeled off from the adhesive sheet, it is not necessary to add another member to this type of conventional apparatus as a pickup apparatus.

  Since the push-up means is composed of a stage and a push-up mechanism that pushes up the stage, the chip can be pushed up while being maintained in a flat state. Further, when the chip is pushed down by lowering the collet, the chip can be pushed down while maintaining a flat state.

  In the present invention, the impact of the chip due to the contact of the collet can be mitigated, and cracking, damage, deformation, etc. of the chip during the pickup operation can be effectively performed without adding an impact mitigation member (cushion material) or the like. Can be prevented. In addition, it is not necessary to slow down the descending speed, and a reduction in cycle time can be prevented. Further, the closeness between the collet and the chip is maintained, and the adsorption of the chip by the collet is stabilized. Furthermore, even when a gap is generated between the collet and the chip when the collet descends to the lowest position, the chip can be brought into contact with the collet by the chip side ascending, and the chip is adsorbed by the collet. Thus, a stable pickup operation is possible. In addition, since the tip is raised, it is possible to prevent an impact when contacting the collet.

  In the case where the chip side push-up is constituted by a push-up pin, it is not necessary to form a separate push-up structure as a device, and the cost can be reduced. Further, in the case where the stage is moved up and down, the chip can be moved up and down while maintaining the flat state, and chip cracking, damage, deformation and the like can be more effectively prevented.

It is a simplified sectional view showing a pickup method showing an embodiment of the present invention. It is a simplified diagram showing the whole pickup method. It is a simplified sectional view showing a pick-up method showing another embodiment of the present invention. It is a simplified sectional view showing a conventional pickup method. It is a simplified diagram showing the entire conventional pickup method. It is a simplified perspective view which shows a chip | tip.

  Embodiments of the present invention will be described below with reference to FIGS.

  FIG. 2 shows a pickup device according to the present invention. The pickup device picks up a chip 11 cut out from a wafer with a collet 13 at (pickup position P) and sets it to a bonding position Q of a substrate 12 such as a lead frame. It is to be transferred (mounted). The wafer is adhered onto a wafer sheet (adhesive sheet 15) stretched on a metal ring (wafer ring), and is divided (divided) into a large number of chips 11 by a dicing process.

  The collet 13 is moved by a moving mechanism (not shown) in the direction of arrow A and lowered in the direction of arrow B on the pickup position P, and moved upward in the direction of arrow C and lowered in the direction of arrow D on the bonding position Q. The reciprocation between the pickup position P and the bonding position Q in the directions of arrows E and F is possible. The movement mechanism controls the movement of the arrows A, B, C, D, E, and F by control means (not shown). The moving mechanism can be constituted by various mechanisms such as a cylinder mechanism, a ball screw mechanism, and a motor linear mechanism, and an XYZθ axis stage, a robot arm that can move in the XYZθ directions, or the like can be used. . The control means is, for example, a microcomputer in which a ROM (Read Only Memory), a RAM (Random Access Memory), and the like are connected to each other via a bus with a central processing unit (CPU) as a center. The ROM stores programs executed by the CPU and data.

  The collet 13 is formed with a suction hole for suction that opens at a lower end surface (suction surface) 13a, and a vacuum generator (not shown) is connected to the suction hole. By driving the vacuum generator, air in the suction hole is sucked, the chip 11 is sucked by vacuum, and the chip 11 is sucked to the lower end surface of the collet 13. When this vacuum suction (evacuation) is released, the chip 11 is detached from the collet 13. As the vacuum generator, for example, an ejector type that controls the opening and closing of high-pressure air and discharges it from the nozzle to the diffuser to generate a negative pressure in the diffusion chamber can be adopted.

  At the pickup position P, as shown in FIG. 1, a push-up means M that pushes up the chip 11 is provided. That is, the pickup position P includes a stage 20 that receives the adhesive sheet 15 and a push-up pin 21 disposed on the stage 20. In this case, the stage 20 does not move up and down, and the push-up pin 21 moves up and down by a vertical movement mechanism 22 (not shown) and a control means 23 that controls the vertical movement mechanism 22. For this reason, the push-up means M can be configured with the push-up pins 21.

  The vertical movement mechanism 22 can be constituted by a bolt / nut mechanism having a screw shaft and a ball nut screwed to the screw shaft, a cylinder mechanism, a motor linear mechanism, or the like. The control means 23 can be constituted by the control means for controlling the collet 13, but may be constituted by a control means (microcomputer) different from the control means for controlling the collet 13.

  Next, a pickup method using the pickup device configured as described above will be described with reference to FIG. At this time, when the collet 13 reaches the lowest point, the lowering amount of the collet 13 is controlled so that the collet 13 and the chip 11 do not come into contact with each other. For example, a gap of about 5 μm to 20 μm is provided. For this reason, the push-up pin 21 is raised to bring the chip 11 to be picked up from the stage 20 into contact with the collet 13. As a result, the chip 11 can be adsorbed by the collet 13.

  However, even if the lowest point of the collet 13 is set, the collet 13 and the chip 11 may come into contact with each other due to the lowering of the set lowest point due to the lowering inertia of the collet 13 or the like. For this reason, when the collet 13 and the chip 11 come into contact with each other when the collet 13 reaches the actual lowest point, as shown in FIG. 1A, the push-up pin 21 is raised and the chip to be picked up. 11 is in a state where it floats from the stage 20 by a predetermined amount.

  At this time, the push-up force of the push-up pin 21 is a push-up force smaller than the push force when the collet 13 contacts the chip 11 as shown in FIG. That is, F1 <f1 when the pushing force of the pushing pin 21 is F1 and the pressing force when the collet 13 contacts the chip 11 is f1.

  For this reason, as shown in FIG. 1 (b), when the collet 13 descends and comes into contact with the tip 11, this pressing force overcomes the pushing force of the pushing pin 21, as shown in FIG. The push-up pin 21 is pushed down as shown by the arrow A1. In this case, the push-down is performed until the tip of the push-up pin 21 becomes substantially the same height as the upper surface 20 a of the stage 20. For this reason, an impact is relieved at the time of chip contact by collet 13. That is, the shock absorption amount is Sa, and the absorption operation is performed until F1 ≧ f1 or the absorption amount = 0.

  In the embodiment described above, the impact is mitigated by making the push-up pin 21 apparently less rigid on the servo. In this case, by operating the push-up pin 21 downward, the amount of displacement with respect to the force can be increased, and the apparent rigidity can be reduced.

  In the state shown in FIG. 1 (c), the chip 11 is adsorbed by the collet 13, and then the push-up pin 21 is raised again to break through the adhesive sheet 15 with the push-up pin 21 and raise the collet 13. Thus, the chip 11 adsorbed by the collet 13 is separated from the adhesive sheet 15 and picked up. After the pickup, as shown in FIG. 2, the chip 11 is bonded to the bonding position Q.

  In the said embodiment, as shown in FIG.1 (b), when the collet 13 and the chip | tip 11 contact, even if the collet 13 side has stopped, it may raise or descend | fall. The speed on the collet 13 side at this time is arbitrary.

  According to the present invention, when the collet 13 descends and reaches the lowest point, when the tip 11 comes into contact with the tip 11, the tip 11 is pushed up with a pushing force smaller than the pressing force of the collet 13, As the collet 13 is lowered, the chip 11 is lowered. Thereby, the impact of the chip due to the contact of the collet 13 can be reduced. Without adding an impact relaxation member (cushion material) or the like, it is possible to effectively prevent cracking, damage, deformation, and the like of the chip 11 during the pickup operation. In addition, it is not necessary to slow down the descending speed, and a reduction in cycle time can be prevented. Further, since the tip 11 is pushed up with a pushing force smaller than the pressing force of the collet 13, the closeness between the collet 11 and the tip 13 is maintained, and the adsorption of the tip 11 by the collet 13 is stabilized. Furthermore, even when a gap is generated between the collet 13 and the chip 11 when the collet 13 descends and reaches the lowest position, the chip 11 can be brought into contact with the collet 13 by the rise on the chip side. The chip 11 can be adsorbed by the collet 13, and a stable pick-up operation is possible. In addition, since the tip side is raised, it is possible to prevent an impact when contacting the collet 13.

  The push-up means M on the chip side can be constituted by the push-up pins 21, so that it is not necessary to form a separate push-up structure as a device, and the cost can be reduced.

  In the pickup apparatus shown in FIG. 1, the push-up means M is configured by the push-up pin 21, but a stage 20 may be used as shown in FIG. In this case, the stage 20 can be moved up and down via a vertical movement mechanism (not shown). As the vertical movement mechanism, a bolt / nut mechanism having a screw shaft and a ball nut screwed to the screw shaft, a cylinder mechanism, a motor linear mechanism, or the like can be used. The vertical movement mechanism is controlled by control means (not shown). The control means in this case can be constituted by the control means for controlling the collet 13, but may be constituted by a control means (microcomputer) different from the control means for controlling the collet 13.

  Next, a pickup method using the pickup device shown in FIG. 3 will be described. Also in this case, when the collet 13 reaches the lowest point, the lowering amount of the collet 13 is controlled so that the collet 13 and the chip 11 do not come into contact with each other. For example, a gap of about 5 μm to 20 μm is provided. For this reason, the stage 20 is raised and the chip 11 is brought into contact with the collet 13. As a result, the chip 11 can be adsorbed by the collet 13.

  When the collet 13 and the chip 11 come into contact when the collet 13 reaches the actual lowest point, the collet 13 is positioned on the chip 11 to be picked up as shown in FIG. Then, the stage 20 is raised. In this case, as shown in FIG. 3B, the pushing force is smaller than the pressing force when the collet 13 contacts the chip 11. That is, when the thrusting force of the stage 20 is F2, and the pressing force when the collet 13 contacts the chip 11 is f2, F2 <f2.

  For this reason, as shown in FIG. 3B, when the collet 13 descends and comes into contact with the chip 11, this pressing force overcomes the pushing force of the stage 20, and as shown in FIG. 20 will be pushed down. For this reason, an impact is relieved at the time of chip contact by collet 13. That is, the amount of shock absorption is Sa.

  In the state shown in FIG. 3C, the chip 11 is adsorbed to the collet 13, and then the push-up pin 21 is lifted to break through the adhesive sheet 15 with the push-up pin 21 and raise the collet 13. Thus, the chip 11 adsorbed by the collet 13 is separated from the adhesive sheet 15 and picked up. After the pickup, as shown in FIG. 2, the chip 11 is bonded to the bonding position Q.

  Thus, even if the stage 20 is moved up and down, the impact of the chip 11 due to the contact of the collet 13 can be reduced. That is, even the hip-up method using the pickup device shown in FIG. 3 has the same effects as the hip-up method using the pickup device shown in FIG.

  Further, in the case where the stage 20 is moved up and down, the chip 11 can be moved up and down while maintaining the flat state, and cracking, damage, deformation, and the like of the chip 11 can be more effectively prevented.

  As described above, the embodiment of the present invention has been described, but various modifications are possible without being limited to the above-described embodiment. For example, the push-up amount of the push-up pin 21 shown in FIG. Therefore, when the push-up pin 21 is pushed down as shown in FIG. 1C, the chip 11 is effectively cracked, damaged, deformed, and the like. Anything that can be prevented is acceptable. Further, even if the push-up amount and the push-up force are constant, the push-up amount and push-up force may be variously changed according to the type of the chip 11 to be picked up, the material of the adhesive sheet, the thickness dimension, and the like.

  Further, when the collet 13 contacts the chip 11, the push-up pin 21 is pushed down in the pickup device shown in FIG. 1, and the stage 20 is pushed down in the pickup device shown in FIG. The stage 20 may be pushed down. Further, in the above-described embodiment, one push-up pin 21 is provided for one chip 11, but two or more push-up pins 21 may be provided for one chip 11. Further, a plurality of collets 13 may be provided.

11 Chip 13 Collet 15 Adhesive sheet 20 Stage 21 Pin M Pushing means

Claims (9)

The chip on the adhesive sheet is a pick-up method in which the collet above the pip-up position is lowered and sucked with this collet to pip-up,
When the collet comes down and reaches the lowest point, when the collet comes into contact with the chip, the push-up means pushes up the chip side with a pushing force smaller than the pushing force when the collet comes into contact with the chip. And
A pick-up method, wherein the collet is lowered and brought into contact with the chip while the collet pushes the push-up means down . The push-up means pushes the tip side with a pushing force smaller than the pushing force when the collet contacts the chip, and the collet contacts the chip when the collet descends and reaches the lowest point. When the collet is lowered and brought into contact with the chip, the collet pushes down the push-up means, and when the collet descends and reaches the lowest point, if there is a gap between the collet and the chip, the chip side is 2. The pickup method according to claim 1, wherein the gap is eliminated by pushing up. 3. The pick-up method according to claim 1, wherein the tip is pushed up by a push-up pin through an adhesive sheet, and the impact from the collet to the tip is mitigated by lowering the push-up pin. .  The pick-up method according to claim 3, wherein the push-up pin is a chip push-up pin used when peeling the chip from the adhesive sheet. 3. An adhesive sheet to which a chip is adhered is received by a stage in a pushed-up state, and the stage is lowered to mitigate an impact on the chip from the collet. The pickup method described in 1. A pick-up device that lowers the collet above the pip-up position and sucks the chip on the adhesive sheet with this collet to pip-up,
A push-up means for pushing up the tip side is provided, and this push-up means is smaller than the pressing force when the collet contacts the chip when the collet contacts the chip when the collet descends and reaches the lowest point. a state which pushed up the chip side at the push-up force,
A pick-up device characterized in that the collet pushes down the push-up means while lowering the collet to contact the chip. Said push-up means, collet is in a state of pushing up the chip side at small upward force than pushing force at the time of contact with the chip, when the collet has reached the lowest point is lowered, the collet is in contact with the tip When the collet is lowered and brought into contact with the chip, the collet pushes down the push-up means, and when there is a gap between the collet and the chip, the chip side is pushed up to eliminate the gap. 6. The pickup device according to 6.  7. The push-up means is constituted by a chip push-up pin used when the chip is peeled off from the adhesive sheet, and the push-up pin is lowered to mitigate an impact on the chip from the collet. Or the pick-up apparatus of Claim 7.  The push-up means is composed of a stage that receives an adhesive sheet to which the chip is adhered, and a push-up mechanism that pushes up the stage with a push force smaller than the pressing force when the collet contacts the chip. The pickup device according to claim 6 or 7, wherein the impact from the collet to the chip is reduced.

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