JP5600871B2 - エキシマランプ装置 - Google Patents

エキシマランプ装置 Download PDF

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Publication number
JP5600871B2
JP5600871B2 JP2008324500A JP2008324500A JP5600871B2 JP 5600871 B2 JP5600871 B2 JP 5600871B2 JP 2008324500 A JP2008324500 A JP 2008324500A JP 2008324500 A JP2008324500 A JP 2008324500A JP 5600871 B2 JP5600871 B2 JP 5600871B2
Authority
JP
Japan
Prior art keywords
gas
inert gas
excimer lamp
workpiece
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008324500A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010144093A (ja
Inventor
真一 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP2008324500A priority Critical patent/JP5600871B2/ja
Priority to TW098133843A priority patent/TW201024852A/zh
Priority to KR1020090099771A priority patent/KR20100071897A/ko
Priority to CN200910262452A priority patent/CN101752195A/zh
Publication of JP2010144093A publication Critical patent/JP2010144093A/ja
Application granted granted Critical
Publication of JP5600871B2 publication Critical patent/JP5600871B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3033—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528—Polarisers

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mathematical Physics (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP2008324500A 2008-12-19 2008-12-19 エキシマランプ装置 Active JP5600871B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008324500A JP5600871B2 (ja) 2008-12-19 2008-12-19 エキシマランプ装置
TW098133843A TW201024852A (en) 2008-12-19 2009-10-06 Excimer lamp apparatus
KR1020090099771A KR20100071897A (ko) 2008-12-19 2009-10-20 엑시머 램프 장치
CN200910262452A CN101752195A (zh) 2008-12-19 2009-12-18 准分子灯装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008324500A JP5600871B2 (ja) 2008-12-19 2008-12-19 エキシマランプ装置

Publications (2)

Publication Number Publication Date
JP2010144093A JP2010144093A (ja) 2010-07-01
JP5600871B2 true JP5600871B2 (ja) 2014-10-08

Family

ID=42369304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008324500A Active JP5600871B2 (ja) 2008-12-19 2008-12-19 エキシマランプ装置

Country Status (4)

Country Link
JP (1) JP5600871B2 (zh)
KR (1) KR20100071897A (zh)
CN (1) CN101752195A (zh)
TW (1) TW201024852A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012224702A (ja) * 2011-04-18 2012-11-15 Tatsumo Kk 基板処理装置
JP7139700B2 (ja) * 2018-06-07 2022-09-21 コニカミノルタ株式会社 活性エネルギー線照射装置及びインクジェットプリンタ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57195755A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Continuous ultraviolet treatment apparatus
JPH08295749A (ja) * 1995-04-26 1996-11-12 Shinko Pantec Co Ltd フィルム表面改質装置および改質方法
JP4059782B2 (ja) * 2003-02-12 2008-03-12 富士フイルム株式会社 紫外線硬化型樹脂の硬化方法及びその装置
JP2005235869A (ja) * 2004-02-17 2005-09-02 Victor Co Of Japan Ltd 紫外線照射装置
JP2006326385A (ja) * 2005-05-23 2006-12-07 Gs Yuasa Corporation:Kk 紫外線照射処理装置
JP2008122921A (ja) * 2006-10-20 2008-05-29 Nitto Denko Corp 偏光子の表面改質方法、偏光子の製造方法、偏光子、偏光板、画像表示装置、液晶パネルおよび液晶表示装置

Also Published As

Publication number Publication date
TW201024852A (en) 2010-07-01
CN101752195A (zh) 2010-06-23
KR20100071897A (ko) 2010-06-29
JP2010144093A (ja) 2010-07-01

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