JP5593399B2 - 計測装置 - Google Patents
計測装置 Download PDFInfo
- Publication number
- JP5593399B2 JP5593399B2 JP2012550689A JP2012550689A JP5593399B2 JP 5593399 B2 JP5593399 B2 JP 5593399B2 JP 2012550689 A JP2012550689 A JP 2012550689A JP 2012550689 A JP2012550689 A JP 2012550689A JP 5593399 B2 JP5593399 B2 JP 5593399B2
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- JP
- Japan
- Prior art keywords
- detection
- roughness
- defect
- surface roughness
- sampling
- Prior art date
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- 0 CC1CC(*)CCC1 Chemical compound CC1CC(*)CCC1 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
(1)AFMによる粒径のデータとその粒径のデータに対応した検出器の理想的な強度比
(2)光学的シミュレーションにより得られたある粒径に対応する検出器の理想的な強度比
101 チャック
102 被検査物体移動ステージ
103 回転ステージ
104 並進ステージ
105 Zステージ
106 検査座標検出機構
107 上位CPU
108 異物・欠陥判定機構
109 異物・欠陥座標検出機構
110 照明・検出光学系
111 増幅器
112 A/D変換器
114 可変フィルタ
115 減算器
116 演算器
117 粒径算出機構
118 入力手段
120 測定データメモリー
121 3D解析機構
122 テーブル
123 表面粗さ判定機構
200 光源
201 照射ビーム
202 照射レンズ
203 照明スポット
204 長軸方向の幅
205 短軸方向の幅
206 異物・欠陥
207 光検出器
208 θ走査
209 エキスパンダ
210 集光レンズ
220 サンプリング間隔ΔT
221 ΔSout
250 図5の状態
251 図6の状態
252 図8の状態
300 方位性欠陥
301 照明光
302,303 検出器
Claims (4)
- 基板に光を照射する照射部と、
前記基板からの光を検出する検出部と、
前記検出部の検出結果を特定の周波数でサンプリングするサンプリング部と、
処理部と、を有し、
前記処理部は、前記サンプリング部によるサンプリング結果を前記検出結果の信号強度、検出間隔、及び検出頻度に基づいて三次元化し、前記三次元化結果を用いて前記基板の表面の形状を得ることを特徴とする計測装置。 - 請求項1に記載の計測装置において、
前記処理部は、前記三次元化結果を用いて表面粗さの有無、システムノイズの有無、欠陥の有無の少なくとも1つを判定することを特徴とする計測装置。 - 請求項1に記載の計測装置において、
原子間力顕微鏡による表面粗さの測定結果を用いて前記表面粗さを算出することを特徴とする計測装置。 - 請求項1に記載の計測装置において、
前記処理部は、前記基板の領域に応じて、計測条件を変えることを特徴とする計測装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012550689A JP5593399B2 (ja) | 2010-12-27 | 2011-11-30 | 計測装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010289103 | 2010-12-27 | ||
JP2010289103 | 2010-12-27 | ||
PCT/JP2011/006671 WO2012090392A1 (ja) | 2010-12-27 | 2011-11-30 | 計測装置 |
JP2012550689A JP5593399B2 (ja) | 2010-12-27 | 2011-11-30 | 計測装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012090392A1 JPWO2012090392A1 (ja) | 2014-06-05 |
JP5593399B2 true JP5593399B2 (ja) | 2014-09-24 |
Family
ID=46382536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012550689A Expired - Fee Related JP5593399B2 (ja) | 2010-12-27 | 2011-11-30 | 計測装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8958076B2 (ja) |
JP (1) | JP5593399B2 (ja) |
WO (1) | WO2012090392A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012090392A1 (ja) * | 2010-12-27 | 2012-07-05 | 株式会社 日立ハイテクノロジーズ | 計測装置 |
JP6043813B2 (ja) * | 2013-01-23 | 2016-12-14 | 株式会社日立ハイテクノロジーズ | 表面計測装置 |
CN105937886B (zh) * | 2015-03-04 | 2020-01-10 | 住友重机械工业株式会社 | 形状测量装置、加工装置及形状测量装置的校正方法 |
CN104880161B (zh) * | 2015-06-18 | 2017-07-28 | 哈尔滨工业大学 | 一种利用椭偏参数测量固体材料表面粗糙度的方法 |
CN106501280B (zh) * | 2016-12-05 | 2019-10-18 | 南京工程学院 | 基于激光测距的风机叶片在线检测装置及其检测方法 |
KR102491575B1 (ko) * | 2017-09-28 | 2023-01-25 | 삼성전자주식회사 | 반도체 기판을 검사하는 방법 및 이를 이용하여 반도체 소자를 제조 하는 방법 |
WO2019198201A1 (ja) * | 2018-04-12 | 2019-10-17 | 株式会社日立ハイテクノロジーズ | 検査装置 |
CN110517970B (zh) * | 2019-08-29 | 2022-10-21 | 上海华力集成电路制造有限公司 | 晶背缺陷的检测方法 |
CN113066736B (zh) * | 2021-03-25 | 2022-10-28 | 广东工业大学 | 一种高精度、大幅面和高通量六维度晶圆检测系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04194738A (ja) * | 1990-11-28 | 1992-07-14 | Hitachi Electron Eng Co Ltd | ヘイズと連続異物群の判別方法 |
JP2003240723A (ja) * | 2002-02-19 | 2003-08-27 | Mitsubishi Electric Corp | 欠陥検査方法及び欠陥検査装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63143830A (ja) | 1986-12-08 | 1988-06-16 | Hitachi Electronics Eng Co Ltd | ヘイズ欠陥検出方法 |
US5428442A (en) | 1993-09-30 | 1995-06-27 | Optical Specialties, Inc. | Inspection system with in-lens, off-axis illuminator |
JPH07243977A (ja) | 1994-03-07 | 1995-09-19 | Hitachi Electron Eng Co Ltd | 異物検出用の浮動閾値算定方法 |
JP4078043B2 (ja) | 2001-06-25 | 2008-04-23 | 株式会社ルネサステクノロジ | プラズマ処理装置内の浮遊異物検出方法及びその装置並びに半導体デバイスの処理装置 |
JP2004061447A (ja) | 2002-07-31 | 2004-02-26 | Applied Materials Inc | 基板検査方法及び基板検査方法の選択方法 |
JP2006064496A (ja) | 2004-08-26 | 2006-03-09 | Hitachi Ltd | 磁気ディスク基板の表面粗さ測定方法および測定装置並びに磁気ディスクの製造方法 |
US7605913B2 (en) | 2004-12-19 | 2009-10-20 | Kla-Tencor Corporation | System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece |
TWI278598B (en) * | 2004-12-22 | 2007-04-11 | Univ Electro Communications | 3D shape measurement device |
US8265375B2 (en) * | 2006-06-16 | 2012-09-11 | Shirley Lyle G | Method and apparatus for remote sensing of objects utilizing radiation speckle |
JP4741986B2 (ja) | 2006-06-30 | 2011-08-10 | 株式会社日立ハイテクノロジーズ | 光学式検査方法および光学式検査装置 |
JP2009133778A (ja) | 2007-11-30 | 2009-06-18 | Hitachi High-Technologies Corp | 検査装置及び検査方法 |
JP4898713B2 (ja) | 2008-01-17 | 2012-03-21 | 株式会社日立ハイテクノロジーズ | 表面検査装置および表面検査方法 |
JP2010197352A (ja) | 2009-02-27 | 2010-09-09 | Hitachi High-Technologies Corp | 欠陥検査方法及び欠陥検査装置 |
WO2012090392A1 (ja) * | 2010-12-27 | 2012-07-05 | 株式会社 日立ハイテクノロジーズ | 計測装置 |
-
2011
- 2011-11-30 WO PCT/JP2011/006671 patent/WO2012090392A1/ja active Application Filing
- 2011-11-30 JP JP2012550689A patent/JP5593399B2/ja not_active Expired - Fee Related
- 2011-11-30 US US13/993,630 patent/US8958076B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04194738A (ja) * | 1990-11-28 | 1992-07-14 | Hitachi Electron Eng Co Ltd | ヘイズと連続異物群の判別方法 |
JP2003240723A (ja) * | 2002-02-19 | 2003-08-27 | Mitsubishi Electric Corp | 欠陥検査方法及び欠陥検査装置 |
Also Published As
Publication number | Publication date |
---|---|
US20130278926A1 (en) | 2013-10-24 |
US8958076B2 (en) | 2015-02-17 |
JPWO2012090392A1 (ja) | 2014-06-05 |
WO2012090392A1 (ja) | 2012-07-05 |
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