JP5565158B2 - 振動片、振動子、発振器、および電子機器 - Google Patents
振動片、振動子、発振器、および電子機器 Download PDFInfo
- Publication number
- JP5565158B2 JP5565158B2 JP2010159503A JP2010159503A JP5565158B2 JP 5565158 B2 JP5565158 B2 JP 5565158B2 JP 2010159503 A JP2010159503 A JP 2010159503A JP 2010159503 A JP2010159503 A JP 2010159503A JP 5565158 B2 JP5565158 B2 JP 5565158B2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- vibrating
- vibrating arm
- base
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 claims description 132
- 239000010453 quartz Substances 0.000 claims description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 44
- 239000000463 material Substances 0.000 claims description 20
- 238000006073 displacement reaction Methods 0.000 claims description 19
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- 239000000758 substrate Substances 0.000 description 7
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- 238000010521 absorption reaction Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
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- 238000007667 floating Methods 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000002040 relaxant effect Effects 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
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- 238000005304 joining Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010159503A JP5565158B2 (ja) | 2009-09-18 | 2010-07-14 | 振動片、振動子、発振器、および電子機器 |
TW99131507A TW201131975A (en) | 2009-09-18 | 2010-09-16 | Vibrating reed, vibrator, oscillator, and electronic device |
US12/884,579 US8552624B2 (en) | 2009-09-18 | 2010-09-17 | Impact resistance vibrating reed, vibrator, oscillator, and electronic device |
CN201410659202.7A CN104410382B (zh) | 2009-09-18 | 2010-09-17 | 振动片、振子、振荡器、以及电子仪器 |
CN201010286678.2A CN102025342B (zh) | 2009-09-18 | 2010-09-17 | 振动片、振子、振荡器、以及电子仪器 |
KR1020100091554A KR101214318B1 (ko) | 2009-09-18 | 2010-09-17 | 진동편, 진동자, 발진기 및 전자기기 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009216634 | 2009-09-18 | ||
JP2009216634 | 2009-09-18 | ||
JP2010159503A JP5565158B2 (ja) | 2009-09-18 | 2010-07-14 | 振動片、振動子、発振器、および電子機器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011087279A JP2011087279A (ja) | 2011-04-28 |
JP2011087279A5 JP2011087279A5 (enrdf_load_stackoverflow) | 2013-08-15 |
JP5565158B2 true JP5565158B2 (ja) | 2014-08-06 |
Family
ID=44079870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010159503A Expired - Fee Related JP5565158B2 (ja) | 2009-09-18 | 2010-07-14 | 振動片、振動子、発振器、および電子機器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5565158B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5773384B2 (ja) * | 2011-05-06 | 2015-09-02 | 日本電波工業株式会社 | 圧電デバイス |
TWI634742B (zh) | 2013-11-16 | 2018-09-01 | 精工愛普生股份有限公司 | 振動片、振動子、振盪器、電子機器及移動體 |
JP6585450B2 (ja) * | 2015-09-30 | 2019-10-02 | 京セラ株式会社 | 音叉型水晶素子および水晶デバイス |
JP6690999B2 (ja) * | 2016-05-30 | 2020-04-28 | 京セラ株式会社 | 音叉型水晶片、音叉型水晶素子、水晶デバイスおよび音叉型水晶素子の製造方法 |
JP2017085345A (ja) * | 2015-10-28 | 2017-05-18 | 京セラクリスタルデバイス株式会社 | 音叉型水晶振動素子 |
JP6763190B2 (ja) * | 2016-04-22 | 2020-09-30 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP7300256B2 (ja) * | 2018-10-31 | 2023-06-29 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001007678A (ja) * | 1999-06-25 | 2001-01-12 | Seiko Epson Corp | 圧電振動子 |
JP2002185282A (ja) * | 2000-12-19 | 2002-06-28 | Seiko Epson Corp | 圧電デバイス |
JP2002319839A (ja) * | 2001-02-19 | 2002-10-31 | Seiko Epson Corp | 圧電デバイス |
JP3969131B2 (ja) * | 2001-03-27 | 2007-09-05 | セイコーエプソン株式会社 | 圧電振動子とその製造方法 |
JP2007081570A (ja) * | 2005-09-12 | 2007-03-29 | Seiko Epson Corp | 圧電デバイス |
JP5062413B2 (ja) * | 2007-11-08 | 2012-10-31 | セイコーエプソン株式会社 | 音叉型圧電振動片及び音叉型圧電振動子 |
-
2010
- 2010-07-14 JP JP2010159503A patent/JP5565158B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2011087279A (ja) | 2011-04-28 |
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