JP5560263B2 - 多段真空ポンプ - Google Patents

多段真空ポンプ Download PDF

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Publication number
JP5560263B2
JP5560263B2 JP2011509914A JP2011509914A JP5560263B2 JP 5560263 B2 JP5560263 B2 JP 5560263B2 JP 2011509914 A JP2011509914 A JP 2011509914A JP 2011509914 A JP2011509914 A JP 2011509914A JP 5560263 B2 JP5560263 B2 JP 5560263B2
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JP
Japan
Prior art keywords
vacuum pump
bearing
rotor
pump according
multistage vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011509914A
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English (en)
Japanese (ja)
Other versions
JP2011521161A5 (de
JP2011521161A (ja
Inventor
ヘンリー，マーカス
クラインガー，ペーター
Original Assignee
オーリコン レイボルド バキューム ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by オーリコン レイボルド バキューム ゲーエムベーハー filed Critical オーリコン レイボルド バキューム ゲーエムベーハー
Publication of JP2011521161A publication Critical patent/JP2011521161A/ja
Publication of JP2011521161A5 publication Critical patent/JP2011521161A5/ja
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Expired - Fee Related legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2011509914A 2008-05-23 2009-05-05 多段真空ポンプ Expired - Fee Related JP5560263B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008024764.2 2008-05-23
DE102008024764A DE102008024764A1 (de) 2008-05-23 2008-05-23 Mehrstufige Vakuumpumpe
PCT/EP2009/055397 WO2009141222A1 (de) 2008-05-23 2009-05-05 Mehrstufige vakuumpumpe

Publications (3)

Publication Number Publication Date
JP2011521161A JP2011521161A (ja) 2011-07-21
JP2011521161A5 JP2011521161A5 (de) 2012-06-07
JP5560263B2 true JP5560263B2 (ja) 2014-07-23

Family

ID=40873510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011509914A Expired - Fee Related JP5560263B2 (ja) 2008-05-23 2009-05-05 多段真空ポンプ

Country Status (5)

Country Link
US (1) US20110135506A1 (de)
EP (1) EP2288812A1 (de)
JP (1) JP5560263B2 (de)
DE (1) DE102008024764A1 (de)
WO (1) WO2009141222A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202009003880U1 (de) 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE102011105455A1 (de) * 2011-06-24 2013-01-10 Henkel Ag & Co. Kgaa Konversionsschichtfreie Bauteile von Vakuumpumpen
DE202012000611U1 (de) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014101257A1 (de) * 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3001039B1 (de) * 2015-09-11 2019-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2021055613A (ja) * 2019-09-30 2021-04-08 ダイキン工業株式会社 ターボ圧縮機
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump
JPH02136595A (ja) * 1988-11-16 1990-05-25 Anelva Corp 真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
US5618187A (en) * 1994-11-17 1997-04-08 The Whitaker Corporation Board mount bus bar contact
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
DE10003153A1 (de) * 2000-01-26 2001-08-02 Leybold Vakuum Gmbh Turboradialgebläse
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
JP2005240690A (ja) * 2004-02-26 2005-09-08 Kashiyama Kogyo Kk 真空ポンプ
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
DE102006037187A1 (de) * 2006-08-09 2008-02-21 Pfeiffer Vacuum Gmbh Anordnung zur Lagerung einer Welle einer Vakuumpumpe

Also Published As

Publication number Publication date
DE102008024764A1 (de) 2009-11-26
WO2009141222A1 (de) 2009-11-26
JP2011521161A (ja) 2011-07-21
EP2288812A1 (de) 2011-03-02
US20110135506A1 (en) 2011-06-09

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