JP5551336B2 - Ｏｌｅｄの製造における有機材料の制御可能な供給 - Google Patents

Ｏｌｅｄの製造における有機材料の制御可能な供給 Download PDF

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JP5551336B2
JP5551336B2 JP2007554147A JP2007554147A JP5551336B2 JP 5551336 B2 JP5551336 B2 JP 5551336B2 JP 2007554147 A JP2007554147 A JP 2007554147A JP 2007554147 A JP2007554147 A JP 2007554147A JP 5551336 B2 JP5551336 B2 JP 5551336B2
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organic material
opening
screw
particulate
powder
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Japanese (ja)
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JP2008530733A5 (enExample
JP2008530733A (ja
Inventor
ロング，マイケル
ウィリアム パロン，トーマス
エドワード コッペ，ブルース
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グローバル オーエルイーディー テクノロジー リミティド ライアビリティ カンパニー
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Catching Or Destruction (AREA)
JP2007554147A 2005-02-04 2006-01-30 Ｏｌｅｄの製造における有機材料の制御可能な供給 Active JP5551336B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/050,924 US7625601B2 (en) 2005-02-04 2005-02-04 Controllably feeding organic material in making OLEDs
US11/050,924 2005-02-04
PCT/US2006/003040 WO2006083734A2 (en) 2005-02-04 2006-01-30 Controllably feeding organic material in making oleds

Publications (3)

Publication Number Publication Date
JP2008530733A JP2008530733A (ja) 2008-08-07
JP2008530733A5 JP2008530733A5 (enExample) 2009-03-12
JP5551336B2 true JP5551336B2 (ja) 2014-07-16

Family

ID=36587179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007554147A Active JP5551336B2 (ja) 2005-02-04 2006-01-30 Ｏｌｅｄの製造における有機材料の制御可能な供給

Country Status (5)

Country Link
US (1) US7625601B2 (enExample)
EP (1) EP1844177B1 (enExample)
JP (1) JP5551336B2 (enExample)
DE (1) DE602006005335D1 (enExample)
WO (1) WO2006083734A2 (enExample)

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US7213347B2 (en) * 2005-05-03 2007-05-08 Eastman Kodak Company Metering material to promote rapid vaporization
US20060286405A1 (en) 2005-06-17 2006-12-21 Eastman Kodak Company Organic element for low voltage electroluminescent devices
US20070257394A1 (en) * 2006-05-08 2007-11-08 Maxwell Technologies, Inc. Feeder for Agglomerating Particles
JP5179739B2 (ja) * 2006-09-27 2013-04-10 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
CN101622372B (zh) * 2007-02-28 2013-06-19 株式会社爱发科 蒸镀源、蒸镀装置、有机薄膜的成膜方法
KR101167547B1 (ko) * 2007-03-26 2012-07-20 가부시키가이샤 알박 증착원, 증착 장치, 성막 방법
JP4974832B2 (ja) * 2007-09-10 2012-07-11 株式会社アルバック 蒸着源、蒸着装置
JP5282038B2 (ja) * 2007-09-10 2013-09-04 株式会社アルバック 蒸着装置
EP2187708B1 (en) * 2007-09-10 2013-01-23 Ulvac, Inc. Film deposition apparatus with organic-material vapor generator
US8420229B2 (en) 2007-10-26 2013-04-16 Global OLED Technologies LLC OLED device with certain fluoranthene light-emitting dopants
US8431242B2 (en) 2007-10-26 2013-04-30 Global Oled Technology, Llc. OLED device with certain fluoranthene host
US8076009B2 (en) 2007-10-26 2011-12-13 Global Oled Technology, Llc. OLED device with fluoranthene electron transport materials
JP4974877B2 (ja) * 2007-12-28 2012-07-11 株式会社アルバック 成膜源、成膜装置
JP4996452B2 (ja) * 2007-12-28 2012-08-08 株式会社アルバック 成膜源、成膜装置
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US7947974B2 (en) * 2008-03-25 2011-05-24 Global Oled Technology Llc OLED device with hole-transport and electron-transport materials
KR20110050690A (ko) * 2008-09-24 2011-05-16 이데미쓰 고산 가부시키가이샤 복합 유기 전계 발광 재료
US7931975B2 (en) 2008-11-07 2011-04-26 Global Oled Technology Llc Electroluminescent device containing a flouranthene compound
US8088500B2 (en) 2008-11-12 2012-01-03 Global Oled Technology Llc OLED device with fluoranthene electron injection materials
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US7968215B2 (en) 2008-12-09 2011-06-28 Global Oled Technology Llc OLED device with cyclobutene electron injection materials
US20100206234A1 (en) * 2009-02-17 2010-08-19 Michael Long Simplified powder feeding and vaporization apparatus
US8147989B2 (en) * 2009-02-27 2012-04-03 Global Oled Technology Llc OLED device with stabilized green light-emitting layer
US8425801B2 (en) * 2009-04-10 2013-04-23 Idemitsu Kosan Co., Ltd. Composite organic electroluminescent material and production method thereof
JP4974036B2 (ja) 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
WO2011071064A1 (ja) * 2009-12-09 2011-06-16 株式会社アルバック 有機薄膜の成膜装置および有機材料成膜方法
US20120028393A1 (en) * 2010-12-20 2012-02-02 Primestar Solar, Inc. Vapor deposition apparatus and process for continuous deposition of a doped thin film layer on a substrate
DE102011051263B4 (de) 2011-06-22 2022-08-11 Aixtron Se Vorrichtung zur Aerosolerzeugung und Abscheiden einer lichtemittierenden Schicht
CN104789945B (zh) * 2015-04-01 2017-05-24 华东师范大学 一种太阳能电池吸收层的气相输运沉积装置
KR102344996B1 (ko) * 2017-08-18 2021-12-30 삼성전자주식회사 전구체 공급 유닛, 기판 처리 장치 및 그를 이용한 반도체 소자의 제조방법
EP4340969A1 (de) 2021-05-21 2024-03-27 Merck Patent GmbH Verfahren zur kontinuierlichen aufreinigung von mindestens einem funktionalen material und vorrichtung zur kontinuierlichen aufreinigung von mindestens einem funktionalen material

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SU779441A1 (ru) * 1978-07-31 1980-11-15 Институт Механики Металлополимерных Систем Ан Белорусской Сср Дозирующий питатель
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
US4885211A (en) 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
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JP2000248358A (ja) * 1999-03-01 2000-09-12 Casio Comput Co Ltd 蒸着装置および蒸着方法
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US20030168013A1 (en) * 2002-03-08 2003-09-11 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
JP2003293121A (ja) * 2002-04-05 2003-10-15 Cluster Ion Beam Technology Kk 蒸着材料供給手段を備えた蒸着用坩堝
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Also Published As

Publication number Publication date
WO2006083734A3 (en) 2006-10-19
WO2006083734A2 (en) 2006-08-10
DE602006005335D1 (de) 2009-04-09
US20060177576A1 (en) 2006-08-10
EP1844177B1 (en) 2009-02-25
US7625601B2 (en) 2009-12-01
EP1844177A2 (en) 2007-10-17
JP2008530733A (ja) 2008-08-07

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