JP5543174B2 - ケミカルメカニカル研磨組成物及びそれに関連する方法 - Google Patents
ケミカルメカニカル研磨組成物及びそれに関連する方法 Download PDFInfo
- Publication number
- JP5543174B2 JP5543174B2 JP2009252837A JP2009252837A JP5543174B2 JP 5543174 B2 JP5543174 B2 JP 5543174B2 JP 2009252837 A JP2009252837 A JP 2009252837A JP 2009252837 A JP2009252837 A JP 2009252837A JP 5543174 B2 JP5543174 B2 JP 5543174B2
- Authority
- JP
- Japan
- Prior art keywords
- hydroxide
- chemical mechanical
- mechanical polishing
- substrate
- polishing composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Patterning of the switching material
- H10N70/066—Patterning of the switching material by filling of openings, e.g. damascene method
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
Description
本発明のケミカルメカニカル研磨方法は、カルコゲニド相変態合金を含有する基材を研磨する上で有用である。本発明の方法において使用されるケミカルメカニカル研磨組成物は、基材上の追加的な材料に対して有利な選択性を有する、高いカルコゲニド相変態合金の除去速度を提供する。
ケミカルメカニカル研磨組成物
試験したケミカルメカニカル研磨組成物(CMPC)を表1に記載する。ケミカルメカニカル研磨組成物Aはクレームされた本発明の範囲ではない比較配合物である。
表1に記載されたケミカルメカニカル研磨組成物は、ダウンフォース1psi、ケミカルメカニカル研磨組成物流速200ml/分、プラテン速度60rpm及びキャリヤ速度56rpm下で、IC1010(商標)ポリウレタン研磨パッド(Rohm and Haas Electronic Materials CMP Inc.から市販)を用いるISRM検出システムを備えるApplied Materials, Inc. Mirra 200mm polishing machineを使用して試験した。SKW Associates Inc.からのゲルマニウム−アンチモン−テルル(GST)ブランケットウェハを、上記条件で研磨した。表2に報告されているGST除去速度データは、断面透過電子顕微鏡(TEM)観察により測定した。ATDFからのSi3N4及びTEOSブランケットウェハを、上記条件で研磨した。表2に報告されているSi3N4及びTEOSの除去速度は、ThermWave Optiprobe(登録商標)2600フィルム厚測定システムを使用して測定した。
Claims (4)
- 基材のケミカルメカニカル研磨方法であって、
カルコゲニド相変態合金を含む基材を用意し、前記カルコゲニド相変態合金が、ゲルマニウム−アンチモン−テルル相変態合金であり;
水;50nm以下の平均粒径を有する砥粒1〜40重量%;第四級アンモニウム化合物0.01〜2重量%を含み(ここで、第四級アンモニウム化合物は、テトラメチルアンモニウムヒドロキシド、テトラエチルアンモニウムヒドロキシド、テトラプロピルアンモニウムヒドロキシド、テトライソプロピルアンモニウムヒドロキシド、テトラシクロプロピルアンモニウムヒドロキシド、テトラブチルアンモニウムヒドロキシド、テトライソブチルアンモニウムヒドロキシド、テトラtertブチルアンモニウムヒドロキシド、テトラsecブチルアンモニウムヒドロキシド、テトラシクロブチルアンモニウムヒドロキシド、テトラペンチルアンモニウムヒドロキシド、テトラシクロペンチルアンモニウムヒドロキシド、テトラヘキシルアンモニウムヒドロキシド、テトラシクロヘキシルアンモニウムヒドロキシド及びその混合物から選択される);酸化剤とキレート剤を含まず;pH6を超え12以下であるケミカルメカニカル研磨組成物を用意し;
ケミカルメカニカル研磨パッドを用意し;
ケミカルメカニカル研磨パッドと基材との界面に動的接触を作り出し;次いで
ケミカルメカニカル研磨組成物を、ケミカルメカニカル研磨パッド上で、ケミカルメカニカル研磨パッドと基材との間の界面又は界面近くに計量分配することを含み、
少なくとも幾つかのカルコゲニド相変態合金が基材から除去される、方法。 - 基材が更にSi3N4を含む、請求項1記載の方法。
- 基材が更にオルトケイ酸テトラエチル(TEOS)を含む、請求項1記載の方法。
- ゲルマニウム−アンチモン−テルル相変態合金であるカルコゲニド相変態合金を含む基材をケミカルメカニカル研磨するためのケミカルメカニカル研磨組成物であって、
水;50nm以下の平均粒径を有する砥粒1〜40重量%;第四級アンモニウム化合物0.01〜2重量%を含み(ここで、第四級アンモニウム化合物は、テトラメチルアンモニウムヒドロキシド、テトラエチルアンモニウムヒドロキシド、テトラプロピルアンモニウムヒドロキシド、テトライソプロピルアンモニウムヒドロキシド、テトラシクロプロピルアンモニウムヒドロキシド、テトラブチルアンモニウムヒドロキシド、テトライソブチルアンモニウムヒドロキシド、テトラtertブチルアンモニウムヒドロキシド、テトラsecブチルアンモニウムヒドロキシド、テトラシクロブチルアンモニウムヒドロキシド、テトラペンチルアンモニウムヒドロキシド、テトラシクロペンチルアンモニウムヒドロキシド、テトラヘキシルアンモニウムヒドロキシド、テトラシクロヘキシルアンモニウムヒドロキシド及びその混合物から選択される);酸化剤とキレート剤を含まず;pH6を超え12以下である、組成物。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/264,928 | 2008-11-05 | ||
US12/264,928 US8735293B2 (en) | 2008-11-05 | 2008-11-05 | Chemical mechanical polishing composition and methods relating thereto |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010114446A JP2010114446A (ja) | 2010-05-20 |
JP2010114446A5 JP2010114446A5 (ja) | 2012-12-13 |
JP5543174B2 true JP5543174B2 (ja) | 2014-07-09 |
Family
ID=41581914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009252837A Expired - Fee Related JP5543174B2 (ja) | 2008-11-05 | 2009-11-04 | ケミカルメカニカル研磨組成物及びそれに関連する方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8735293B2 (ja) |
EP (1) | EP2184330B1 (ja) |
JP (1) | JP5543174B2 (ja) |
KR (1) | KR101655790B1 (ja) |
CN (1) | CN101736344B (ja) |
TW (1) | TWI460262B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101341875B1 (ko) * | 2008-04-30 | 2013-12-16 | 한양대학교 산학협력단 | 상변환 물질 연마용 슬러리 및 이를 이용한 상변환 물질의 패터닝 방법 |
US8232208B2 (en) * | 2010-06-15 | 2012-07-31 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Stabilized chemical mechanical polishing composition and method of polishing a substrate |
US20120001118A1 (en) * | 2010-07-01 | 2012-01-05 | Koo Ja-Ho | Polishing slurry for chalcogenide alloy |
US8790160B2 (en) * | 2011-04-28 | 2014-07-29 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and method for polishing phase change alloys |
US8309468B1 (en) * | 2011-04-28 | 2012-11-13 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloys |
JP2013084876A (ja) * | 2011-09-30 | 2013-05-09 | Fujimi Inc | 研磨用組成物 |
JP2013080751A (ja) * | 2011-09-30 | 2013-05-02 | Fujimi Inc | 研磨用組成物 |
JP6035346B2 (ja) * | 2011-12-21 | 2016-11-30 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | 半導体装置の製造方法及びcmp組成物の使用方法 |
JP2013247341A (ja) | 2012-05-29 | 2013-12-09 | Fujimi Inc | 研磨用組成物並びにそれを用いた研磨方法及びデバイス製造方法 |
KR20140000496A (ko) * | 2012-06-22 | 2014-01-03 | 에스케이하이닉스 주식회사 | 연마 조성물, 이의 제조 방법 및 이를 이용한 화학적 기계적 연마 방법 |
JP6139975B2 (ja) * | 2013-05-15 | 2017-05-31 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
JP6482234B2 (ja) * | 2014-10-22 | 2019-03-13 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
US9293339B1 (en) * | 2015-09-24 | 2016-03-22 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of polishing semiconductor substrate |
CN108624234A (zh) * | 2017-03-21 | 2018-10-09 | 安集微电子科技(上海)股份有限公司 | 一种化学机械抛光液 |
JP6775453B2 (ja) * | 2017-03-23 | 2020-10-28 | 山口精研工業株式会社 | 磁気ディスク基板用研磨剤組成物 |
TWI787564B (zh) * | 2018-12-10 | 2022-12-21 | 美商Cmc材料股份有限公司 | 無氧化劑化學機械拋光(cmp)漿料及釕化學機械拋光 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6757971B2 (en) | 2001-08-30 | 2004-07-06 | Micron Technology, Inc. | Filling plugs through chemical mechanical polish |
US6884144B2 (en) | 2002-08-16 | 2005-04-26 | Micron Technology, Inc. | Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers |
WO2004053456A2 (en) | 2002-12-09 | 2004-06-24 | Corning Incorporated | Method using multi-component colloidal abrasives for cmp processing of semiconductor and optical materials |
KR100681266B1 (ko) | 2005-07-25 | 2007-02-09 | 삼성전자주식회사 | 가변 저항 구조물의 제조 방법 및 이를 이용한 상변화메모리 장치의 제조 방법 |
US7741636B2 (en) | 2006-01-09 | 2010-06-22 | Macronix International Co., Ltd. | Programmable resistive RAM and manufacturing method |
US7897061B2 (en) * | 2006-02-01 | 2011-03-01 | Cabot Microelectronics Corporation | Compositions and methods for CMP of phase change alloys |
US7297633B1 (en) * | 2006-06-05 | 2007-11-20 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Compositions for chemical mechanical polishing silica and silicon nitride having improved endpoint detection |
KR100807223B1 (ko) | 2006-07-12 | 2008-02-28 | 삼성전자주식회사 | 상변화 물질층, 상변화 물질층 형성 방법 및 이를 이용한상변화 메모리 장치의 제조 방법 |
US8518296B2 (en) * | 2007-02-14 | 2013-08-27 | Micron Technology, Inc. | Slurries and methods for polishing phase change materials |
US20090001339A1 (en) * | 2007-06-29 | 2009-01-01 | Tae Young Lee | Chemical Mechanical Polishing Slurry Composition for Polishing Phase-Change Memory Device and Method for Polishing Phase-Change Memory Device Using the Same |
EP2183333B1 (en) * | 2007-07-26 | 2016-09-07 | Cabot Microelectronics Corporation | Compositions and methods for chemical-mechanical polishing of phase change materials |
US7678605B2 (en) * | 2007-08-30 | 2010-03-16 | Dupont Air Products Nanomaterials Llc | Method for chemical mechanical planarization of chalcogenide materials |
KR101198100B1 (ko) * | 2007-12-11 | 2012-11-09 | 삼성전자주식회사 | 상변화 물질층 패턴의 형성 방법, 상변화 메모리 장치의제조 방법 및 이에 사용되는 상변화 물질층 연마용 슬러리조성물 |
-
2008
- 2008-11-05 US US12/264,928 patent/US8735293B2/en not_active Expired - Fee Related
-
2009
- 2009-03-13 EP EP09155072A patent/EP2184330B1/en not_active Expired - Fee Related
- 2009-11-03 KR KR1020090105468A patent/KR101655790B1/ko active IP Right Grant
- 2009-11-04 TW TW098137364A patent/TWI460262B/zh not_active IP Right Cessation
- 2009-11-04 JP JP2009252837A patent/JP5543174B2/ja not_active Expired - Fee Related
- 2009-11-05 CN CN2009102083436A patent/CN101736344B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101736344A (zh) | 2010-06-16 |
CN101736344B (zh) | 2012-01-18 |
KR20100050415A (ko) | 2010-05-13 |
TWI460262B (zh) | 2014-11-11 |
KR101655790B1 (ko) | 2016-09-08 |
US20100112906A1 (en) | 2010-05-06 |
US8735293B2 (en) | 2014-05-27 |
EP2184330B1 (en) | 2011-05-11 |
JP2010114446A (ja) | 2010-05-20 |
EP2184330A1 (en) | 2010-05-12 |
TW201022424A (en) | 2010-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5543174B2 (ja) | ケミカルメカニカル研磨組成物及びそれに関連する方法 | |
JP6128161B2 (ja) | 基板をケミカルメカニカルポリッシングする方法 | |
JP5960489B2 (ja) | ケミカルメカニカルポリッシング組成物及び相変化合金を研磨する方法 | |
JP6137793B2 (ja) | タングステンをケミカルメカニカルポリッシングするための方法 | |
JP6595227B2 (ja) | ケミカルメカニカルポリッシング組成物及びタングステン研磨法 | |
JP5861906B2 (ja) | 酸化ケイ素除去を増大させるように適合した研磨組成物で基体を化学機械研磨する方法 | |
TWI532830B (zh) | 用於研磨鍺-銻-碲合金之化學機械研磨組成物及方法 | |
KR20120002931A (ko) | 칼코게나이드 합금 연마방법 | |
US20020106900A1 (en) | Polishing slurry for the chemical-mechanical polishing of metal and dielectric structures | |
JP2012015520A (ja) | カルコゲナイド合金のための研磨スラリー | |
KR20120122934A (ko) | 화학 기계적 연마 조성물 및 게르마늄-안티모니-텔루륨 합금의 연마 방법 | |
TW202330818A (zh) | 提高多晶矽的移除速率之方法 | |
KR20120123644A (ko) | 화학 기계적 연마 조성물 및 상 변화 합금의 연마 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121025 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20121025 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131126 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140224 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140227 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140324 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140422 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140508 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5543174 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |