JP5536136B2 - 恒温装置 - Google Patents
恒温装置 Download PDFInfo
- Publication number
- JP5536136B2 JP5536136B2 JP2012095817A JP2012095817A JP5536136B2 JP 5536136 B2 JP5536136 B2 JP 5536136B2 JP 2012095817 A JP2012095817 A JP 2012095817A JP 2012095817 A JP2012095817 A JP 2012095817A JP 5536136 B2 JP5536136 B2 JP 5536136B2
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- JP
- Japan
- Prior art keywords
- plate
- constant temperature
- specimen mounting
- temperature
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000007788 liquid Substances 0.000 claims description 45
- 238000010438 heat treatment Methods 0.000 claims description 23
- 238000005192 partition Methods 0.000 claims description 19
- 239000002826 coolant Substances 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 10
- 238000012360 testing method Methods 0.000 description 22
- 238000002791 soaking Methods 0.000 description 9
- 239000000110 cooling liquid Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Sampling And Sample Adjustment (AREA)
Description
前記恒温プレートの冷却手段として、冷却液が流動可能な通液孔を前記恒温プレートに設けたことを特徴とする。
10b,43b 背面
10c,43c 右側面
10d,43d 左側面
10f 正面
10t 下面
10u 上面
11,44,56 電気ヒータ
12 通液孔
12c,12d,41,44c,44d 連結部
13 ヒータ収容孔
14 コネクタ
15c,15d 排液パイプ
16c,16d 集液部材
17 合流部材
20 均熱プレート
21 溝
30 供試体搭載ステージ
40 予熱プレート
42,42c,42d 通液経路
43 プレート本体
45c,45d 冷却液パイプ
50 蓋部材
51 隔壁部材
51a 開口部
51b 隔壁
51c 切欠き部
52 天井部材
53 蝶番
54 把持具
55 ロック部材
70 供試体加熱部
80 ケージング
81 流量計
82 流量調整ダイアル
83 非常ボタン
84 支持脚
85 給液管
86 排液管
90 カバー
91 パンチングメタル
91a 貫通孔
92 監視窓
93 蓋体
100 恒温装置
V 前後方向
W 左右方向
Claims (4)
- 加熱手段及び冷却手段を有する恒温プレートと、前記恒温プレート上に配列された複数の供試体搭載ステージと、前記供試体搭載ステージを覆うように配置され前記供試体搭載ステージの周囲を包囲する隔壁部材及び前記隔壁部材で包囲された前記供試体搭載ステージの上方を閉塞する透光性の天井部材を有する蓋部材と、を備え、
前記恒温プレートの冷却手段として、冷却液が流動可能な通液孔を前記恒温プレートに設けたことを特徴とする恒温装置。 - 前記通液孔に供給する冷却液を昇温若しくは降温させる液温調整手段を設けた請求項1記載の恒温装置。
- 前記隔壁部材に副加熱手段を設けた請求項1または2記載の恒温装置。
- 前記恒温プレート、前記供試体搭載ステージ及び前記蓋部材を覆うカバーを設けた請求項1〜3のいずれかに記載の恒温装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012095817A JP5536136B2 (ja) | 2012-04-19 | 2012-04-19 | 恒温装置 |
CN201310104064.1A CN103499781B (zh) | 2012-04-19 | 2013-03-28 | 恒温装置 |
TW102113597A TWI601964B (zh) | 2012-04-19 | 2013-04-17 | Thermostat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012095817A JP5536136B2 (ja) | 2012-04-19 | 2012-04-19 | 恒温装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013221928A JP2013221928A (ja) | 2013-10-28 |
JP5536136B2 true JP5536136B2 (ja) | 2014-07-02 |
Family
ID=49592977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012095817A Expired - Fee Related JP5536136B2 (ja) | 2012-04-19 | 2012-04-19 | 恒温装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5536136B2 (ja) |
CN (1) | CN103499781B (ja) |
TW (1) | TWI601964B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103728546B (zh) * | 2014-01-14 | 2016-06-01 | 北京工业大学 | 晶体管加速寿命试验及工作点稳定的系统 |
CN105425173A (zh) * | 2015-12-25 | 2016-03-23 | 中国电子科技集团公司第十三研究所 | 符合lm80要求的高温箱用led器件老炼装置 |
JP7161854B2 (ja) * | 2018-03-05 | 2022-10-27 | 東京エレクトロン株式会社 | 検査装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003337156A (ja) * | 2002-05-20 | 2003-11-28 | Nec Tokin Corp | 温度試験装置 |
US7196295B2 (en) * | 2003-11-21 | 2007-03-27 | Watlow Electric Manufacturing Company | Two-wire layered heater system |
JP2007066923A (ja) * | 2005-08-29 | 2007-03-15 | Matsushita Electric Ind Co Ltd | ウェーハレベルバーンイン方法およびウェーハレベルバーンイン装置 |
US8359906B2 (en) * | 2008-07-22 | 2013-01-29 | Espec Corp. | Environment testing apparatus capable of controlling condensation amount, and control method therefor |
TWI387752B (zh) * | 2008-12-19 | 2013-03-01 | King Yuan Electronics Co Ltd | Ic元件燒機設備及其所使用的ic加熱裝置 |
TWI384237B (zh) * | 2009-04-02 | 2013-02-01 | King Yuan Electronics Co Ltd | 可群組化測試之晶片預燒機台 |
CN201607524U (zh) * | 2009-12-31 | 2010-10-13 | 重庆四联启蓝半导体照明有限公司 | Led灯具寿命测试系统 |
JP5596372B2 (ja) * | 2010-03-01 | 2014-09-24 | 株式会社平山製作所 | Led寿命試験方法及び装置 |
-
2012
- 2012-04-19 JP JP2012095817A patent/JP5536136B2/ja not_active Expired - Fee Related
-
2013
- 2013-03-28 CN CN201310104064.1A patent/CN103499781B/zh not_active Expired - Fee Related
- 2013-04-17 TW TW102113597A patent/TWI601964B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201403092A (zh) | 2014-01-16 |
JP2013221928A (ja) | 2013-10-28 |
TWI601964B (zh) | 2017-10-11 |
CN103499781B (zh) | 2018-04-10 |
CN103499781A (zh) | 2014-01-08 |
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