JP5531832B2 - 光フィルター、光フィルターモジュール、分光測定器および光機器 - Google Patents

光フィルター、光フィルターモジュール、分光測定器および光機器 Download PDF

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Publication number
JP5531832B2
JP5531832B2 JP2010154158A JP2010154158A JP5531832B2 JP 5531832 B2 JP5531832 B2 JP 5531832B2 JP 2010154158 A JP2010154158 A JP 2010154158A JP 2010154158 A JP2010154158 A JP 2010154158A JP 5531832 B2 JP5531832 B2 JP 5531832B2
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JP
Japan
Prior art keywords
wavelength
band
filter
wavelength band
spectral
Prior art date
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Expired - Fee Related
Application number
JP2010154158A
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English (en)
Japanese (ja)
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JP2012018226A5 (enExample
JP2012018226A (ja
Inventor
友紀 松下
多二男 漆谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010154158A priority Critical patent/JP5531832B2/ja
Priority to US13/117,296 priority patent/US20120008141A1/en
Priority to KR1020110057238A priority patent/KR20120004325A/ko
Priority to TW100123400A priority patent/TWI553346B/zh
Priority to EP11172493.6A priority patent/EP2405294B1/en
Priority to CN201110189166.9A priority patent/CN102313984B/zh
Publication of JP2012018226A publication Critical patent/JP2012018226A/ja
Publication of JP2012018226A5 publication Critical patent/JP2012018226A5/ja
Application granted granted Critical
Publication of JP5531832B2 publication Critical patent/JP5531832B2/ja
Priority to US14/848,680 priority patent/US9995862B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
JP2010154158A 2010-07-06 2010-07-06 光フィルター、光フィルターモジュール、分光測定器および光機器 Expired - Fee Related JP5531832B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2010154158A JP5531832B2 (ja) 2010-07-06 2010-07-06 光フィルター、光フィルターモジュール、分光測定器および光機器
US13/117,296 US20120008141A1 (en) 2010-07-06 2011-05-27 Optical filter, optical filter module, spectrometric measurement apparatus, and optical apparatus
KR1020110057238A KR20120004325A (ko) 2010-07-06 2011-06-14 광 필터, 광 필터 모듈, 분광 측정기 및 광 기기
TW100123400A TWI553346B (zh) 2010-07-06 2011-07-01 濾光器、濾光器模組、分光測定器及光學機器
EP11172493.6A EP2405294B1 (en) 2010-07-06 2011-07-04 Optical filter, optical filter module, spectrometric measurement apparatus, and optical apparatus
CN201110189166.9A CN102313984B (zh) 2010-07-06 2011-07-06 滤光器、滤光器组件、分光测量仪以及光设备
US14/848,680 US9995862B2 (en) 2010-07-06 2015-09-09 Optical filter, optical filter module, spectrometric measurement apparatus, and optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010154158A JP5531832B2 (ja) 2010-07-06 2010-07-06 光フィルター、光フィルターモジュール、分光測定器および光機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014085258A Division JP5854080B2 (ja) 2014-04-17 2014-04-17 光フィルター、光フィルターモジュール、分光測定器および光機器

Publications (3)

Publication Number Publication Date
JP2012018226A JP2012018226A (ja) 2012-01-26
JP2012018226A5 JP2012018226A5 (enExample) 2013-08-22
JP5531832B2 true JP5531832B2 (ja) 2014-06-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010154158A Expired - Fee Related JP5531832B2 (ja) 2010-07-06 2010-07-06 光フィルター、光フィルターモジュール、分光測定器および光機器

Country Status (6)

Country Link
US (2) US20120008141A1 (enExample)
EP (1) EP2405294B1 (enExample)
JP (1) JP5531832B2 (enExample)
KR (1) KR20120004325A (enExample)
CN (1) CN102313984B (enExample)
TW (1) TWI553346B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6035768B2 (ja) * 2012-02-16 2016-11-30 セイコーエプソン株式会社 干渉フィルター、光学モジュール、および電子機器
JP6015090B2 (ja) * 2012-04-18 2016-10-26 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
JP6019863B2 (ja) * 2012-07-18 2016-11-02 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、および電子機器、並びに波長可変干渉フィルターの製造方法
JP6260076B2 (ja) * 2012-09-19 2018-01-17 セイコーエプソン株式会社 分光装置
JP6225423B2 (ja) * 2013-01-07 2017-11-08 セイコーエプソン株式会社 分光測定装置、カラーマネージメントシステム、及びプロファイル作成方法
FR3005750B1 (fr) * 2013-05-14 2016-09-16 Cie Ind Des Lasers - Cilas Dispositif optique d'obturation rapide.
US9652827B2 (en) 2013-06-24 2017-05-16 Technology Innovation Momentum Fund (Israel) Limited Partnership System and method for color image acquisition
TWI493157B (zh) * 2013-12-27 2015-07-21 Nat Applied Res Laboratories 無溫控光纖光源設備應用於光通訊及光纖感測器
JP6311307B2 (ja) * 2013-12-27 2018-04-18 セイコーエプソン株式会社 光学モジュール、電子機器、及び光学モジュールの駆動方法
CN106461462B (zh) * 2014-03-21 2019-03-26 海佩尔梅德影像有限公司 紧凑型光传感器
JP6467801B2 (ja) * 2014-07-31 2019-02-13 セイコーエプソン株式会社 分光画像取得装置、及び受光波長取得方法
JP2016161802A (ja) * 2015-03-03 2016-09-05 富士通株式会社 可変光減衰器及び光モジュール
KR20170133347A (ko) * 2015-03-30 2017-12-05 소니 세미컨덕터 솔루션즈 가부시키가이샤 발광 소자, 발광 유닛, 발광 패널 장치, 및 발광 패널 장치의 구동 방법
JP6671860B2 (ja) * 2015-04-28 2020-03-25 浜松ホトニクス株式会社 光検出装置
CN104916036A (zh) * 2015-06-19 2015-09-16 广州广电运通金融电子股份有限公司 一种钞票的多光谱识别装置及方法
CN107850771B (zh) 2015-07-15 2020-08-28 科技创新动量基金（以色列）有限责任合伙公司 可调微机电标准具
JP6623685B2 (ja) * 2015-10-29 2019-12-25 セイコーエプソン株式会社 測定装置及び印刷装置
JP6341959B2 (ja) * 2016-05-27 2018-06-13 浜松ホトニクス株式会社 ファブリペロー干渉フィルタの製造方法
MY193492A (en) * 2017-02-24 2022-10-17 Panasonic Ip Man Co Ltd Dryness sensor
WO2021176492A1 (ja) * 2020-03-02 2021-09-10 三菱電機株式会社 光送受信器、送信信号決定方法及び光通信システム
CN111426640A (zh) * 2020-05-18 2020-07-17 中国工程物理研究院流体物理研究所 一种可切换式连续工作光谱相机及探测方法
KR102643832B1 (ko) * 2021-05-27 2024-03-06 (주)제이앤씨테크 간섭 필터, 이를 구비한 광각 분광 이미징 장치 및 이를 구비한 깊이 이미징 장치

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
TW245772B (enExample) * 1992-05-19 1995-04-21 Akzo Nv
JPH11142752A (ja) 1997-11-05 1999-05-28 Yokogawa Electric Corp 透過波長可変干渉フィルタ及びこれを用いた分光器
JP2000028931A (ja) * 1998-07-09 2000-01-28 Tdk Corp 多波長フィルタアレイ
JP3187777B2 (ja) * 1998-10-30 2001-07-11 日本電信電話株式会社 可変光フィルタ
JP4158076B2 (ja) * 2000-02-18 2008-10-01 横河電機株式会社 波長選択型赤外線検出素子及び赤外線ガス分析計
US6590710B2 (en) 2000-02-18 2003-07-08 Yokogawa Electric Corporation Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
JP2001264646A (ja) * 2000-03-21 2001-09-26 Sun Tec Kk 干渉光フィルタモジュール装置
US20030012250A1 (en) * 2001-06-25 2003-01-16 Masataka Shirasaki Tunable filter for laser wavelength selection
GB0125996D0 (en) * 2001-10-30 2001-12-19 Qinetiq Ltd Tunable filter
US6822798B2 (en) * 2002-08-09 2004-11-23 Optron Systems, Inc. Tunable optical filter
TWI226504B (en) * 2003-04-21 2005-01-11 Prime View Int Co Ltd A structure of an interference display cell
JP2005099206A (ja) * 2003-09-22 2005-04-14 Seiko Epson Corp 波長可変フィルタおよび波長可変フィルタの製造方法
JP4210245B2 (ja) * 2004-07-09 2009-01-14 セイコーエプソン株式会社 波長可変フィルタ及び検出装置
US20070242358A1 (en) * 2006-04-18 2007-10-18 Xerox Corporation Fabry-perot tunable filter
JP5151944B2 (ja) * 2008-12-09 2013-02-27 セイコーエプソン株式会社 光フィルタ及びそれを備えた光モジュール
FR2960654B1 (fr) * 2010-05-27 2012-06-15 Commissariat Energie Atomique Filtre optique propre a traiter un rayonnement d'incidence variable et detecteur comprenant un tel filtre

Also Published As

Publication number Publication date
EP2405294A1 (en) 2012-01-11
US20160003993A1 (en) 2016-01-07
CN102313984A (zh) 2012-01-11
TWI553346B (zh) 2016-10-11
JP2012018226A (ja) 2012-01-26
TW201300836A (zh) 2013-01-01
US20120008141A1 (en) 2012-01-12
KR20120004325A (ko) 2012-01-12
EP2405294B1 (en) 2016-09-21
CN102313984B (zh) 2016-02-10
US9995862B2 (en) 2018-06-12

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