JP5517753B2 - 干渉計測装置 - Google Patents

干渉計測装置 Download PDF

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Publication number
JP5517753B2
JP5517753B2 JP2010128276A JP2010128276A JP5517753B2 JP 5517753 B2 JP5517753 B2 JP 5517753B2 JP 2010128276 A JP2010128276 A JP 2010128276A JP 2010128276 A JP2010128276 A JP 2010128276A JP 5517753 B2 JP5517753 B2 JP 5517753B2
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JP
Japan
Prior art keywords
interference
light
light receiving
index
partial
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010128276A
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English (en)
Japanese (ja)
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JP2011252862A (ja
JP2011252862A5 (https=
Inventor
公 石塚
亮 佐々木
孝一 柵木
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010128276A priority Critical patent/JP5517753B2/ja
Priority to EP11164038.9A priority patent/EP2392900A3/en
Priority to US13/150,825 priority patent/US8860949B2/en
Publication of JP2011252862A publication Critical patent/JP2011252862A/ja
Publication of JP2011252862A5 publication Critical patent/JP2011252862A5/ja
Application granted granted Critical
Publication of JP5517753B2 publication Critical patent/JP5517753B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010128276A 2010-06-03 2010-06-03 干渉計測装置 Expired - Fee Related JP5517753B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010128276A JP5517753B2 (ja) 2010-06-03 2010-06-03 干渉計測装置
EP11164038.9A EP2392900A3 (en) 2010-06-03 2011-04-28 Interferometer
US13/150,825 US8860949B2 (en) 2010-06-03 2011-06-01 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010128276A JP5517753B2 (ja) 2010-06-03 2010-06-03 干渉計測装置

Publications (3)

Publication Number Publication Date
JP2011252862A JP2011252862A (ja) 2011-12-15
JP2011252862A5 JP2011252862A5 (https=) 2013-07-04
JP5517753B2 true JP5517753B2 (ja) 2014-06-11

Family

ID=44562680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010128276A Expired - Fee Related JP5517753B2 (ja) 2010-06-03 2010-06-03 干渉計測装置

Country Status (3)

Country Link
US (1) US8860949B2 (https=)
EP (1) EP2392900A3 (https=)
JP (1) JP5517753B2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013222383A1 (de) * 2013-02-06 2014-08-07 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP6215572B2 (ja) * 2013-05-24 2017-10-18 太陽誘電株式会社 変位計測装置
JP6230358B2 (ja) * 2013-10-07 2017-11-15 アストロデザイン株式会社 光学的距離計測装置
JP6154676B2 (ja) * 2013-06-24 2017-06-28 アストロデザイン株式会社 空間周波数再現装置
DE102014211004A1 (de) * 2014-06-10 2015-12-17 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN104515482B (zh) * 2014-12-17 2017-06-09 中国科学院长春光学精密机械与物理研究所 白光干涉仪干涉条纹展宽方法
JP6664211B2 (ja) * 2015-12-22 2020-03-13 株式会社ミツトヨ エンコーダ
JP6705649B2 (ja) * 2015-12-22 2020-06-03 株式会社ミツトヨ エンコーダ
US10591826B2 (en) * 2016-04-11 2020-03-17 Nikon Corporation Encoder head with a birefringent lens element and exposure system utilizing the same
US10483107B2 (en) * 2016-04-11 2019-11-19 Nikon Corporation Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same
JP2018066629A (ja) * 2016-10-19 2018-04-26 太陽誘電株式会社 ロードセル
US11598628B1 (en) 2017-06-15 2023-03-07 Ball Aerospace & Technologies Corp. High dynamic range picometer metrology systems and methods

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4360730A (en) * 1980-10-16 1982-11-23 Itek Corporation Encoder alignment method and apparatus
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
US5064290A (en) * 1987-12-12 1991-11-12 Renishaw Plc Opto-electronic scale-reading apparatus wherein phase-separated secondary orders of diffraction are generated
GB9110598D0 (en) 1991-05-16 1991-07-03 Renishaw Transducer Syst Setting up of quadrature signals
JP3005131B2 (ja) * 1992-12-28 2000-01-31 キヤノン株式会社 変位検出装置
US5555039A (en) * 1993-02-10 1996-09-10 Nikon Corporation Eye measuring apparatus having an automatic fogging producing mechanism and method thereof
US6075603A (en) * 1997-05-01 2000-06-13 Hughes Electronics Corporation Contactless acoustic sensing system with detector array scanning and self-calibrating
US7009718B2 (en) * 2000-06-07 2006-03-07 Citizen Watch Co., Ltd. Grating pattern projection apparatus using liquid crystal grating
JP2003254784A (ja) * 2002-02-28 2003-09-10 Mitsutoyo Corp 変位校正方法及び装置
JP3977126B2 (ja) * 2002-04-12 2007-09-19 キヤノン株式会社 変位情報検出装置
JP4357361B2 (ja) * 2004-05-18 2009-11-04 富士通株式会社 低コヒーレンス干渉法を用いた微小高さ測定装置
JP5159663B2 (ja) * 2009-02-13 2013-03-06 キヤノン株式会社 原点検出装置、変位測定装置および電子機器

Also Published As

Publication number Publication date
US20110299093A1 (en) 2011-12-08
EP2392900A2 (en) 2011-12-07
EP2392900A3 (en) 2014-04-09
US8860949B2 (en) 2014-10-14
JP2011252862A (ja) 2011-12-15

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