JP5509414B2 - Solar cell evaluation apparatus and solar cell evaluation method - Google Patents

Description

  The present invention relates to a solar cell evaluation apparatus for evaluating the quality of a thin film solar cell.

  In recent years, solar cells using clean sunlight have been developed due to increasing attention to global environmental problems. As the solar cell, for example, a silicon crystal type, a silicon thin film type, a compound semiconductor type, and a dye sensitized type are realized. In particular, a silicon thin film type solar cell capable of increasing the area and reducing the cost is the next generation solar cell. It is attracting attention as a battery.

  Also, with the development of solar cells, various methods for measuring the electrical characteristics of solar cells have been proposed. For example, the solar cell evaluation apparatus disclosed in Patent Document 1 measures a total illumination light source that irradiates light on the entire surface of the solar cell, a partial illumination light source that irradiates spot-like light, and a current generated in the solar cell. A current measuring device is provided. When the solar cell evaluation apparatus is driven, the entire illumination light source irradiates the entire solar cell, and the irradiation position of the light spot by the partial illumination light source scans on the solar cell. In the current measuring device, the current output value of the solar cell is sequentially measured in parallel with the light irradiation by the partial illumination light source. If there is a defective portion on the solar cell module, the current output value decreases when the defective portion becomes the irradiation position, so that the position of the defective portion can be detected.

  The solar cell performance evaluation apparatus disclosed in Patent Document 2 irradiates the solar cell with light and includes a light source combined measurement electrode and a counter measurement electrode. When the performance evaluation apparatus is driven, the light source / measuring electrode contacts the surface of the solar cell while irradiating the solar cell with light, and the counter measuring electrode contacts the back surface of the solar cell. Thereby, the circuit short circuit current, the circuit open voltage, etc. in the electrode contact part of a solar cell are measured.

  In the solar cell module characteristic measuring apparatus disclosed in Patent Document 3, pulsed light is irradiated from a xenon lamp toward the solar cell, and a voltage is measured by a voltmeter while changing the current of the current source in synchronization with the irradiation of the pulsed light. Is measured. Thereby, IV characteristic (current voltage characteristic) of a solar cell module is acquired. In the solar cell characteristics evaluation method disclosed in Patent Document 4, first, long pulse light generated by a solar simulator is irradiated to one unit cell of the solar cells. A measurement terminal is connected to the back electrode of the solar cell, and the voltage and current are measured multiple times by adjusting the load of the measurement terminal multiple times while the long pulse light is irradiated, and characteristic parameters are obtained. .

JP 2009-11115 A JP 2004-241449 A JP 2001-102609 A JP 2005-197432 A

  By the way, the electrical characteristics of the solar cell are complicatedly affected by the optical characteristics such as the film thickness of the semiconductor layer and the transparent electrode, the light absorption characteristics, and the optical band gap. Even if the voltage is measured, the cause of the deterioration of the electrical characteristics is not specified. For this reason, the yield in manufacture of a solar cell cannot be improved efficiently.

  This invention is made | formed in view of the said subject, and it aims at estimating the cause of the fall of the electrical property of the solar cell in a manufacturing process, and improving a yield.

Invention of Claim 1 is a solar cell evaluation apparatus which evaluates the quality of a thin film type solar cell, Comprising: Light is irradiated to the several photovoltaic cell arrayed along the light-receiving surface and connected in series. A first light irradiating unit that brings the plurality of solar cells into a conductive state; a second light irradiating unit that sequentially irradiates light to a plurality of measurement positions on the plurality of solar cells; and the plurality of measurements. An electrical measurement unit that measures at least one of voltage and current generated in the plurality of solar cells when light is irradiated to each of the positions, and a refractive index, an extinction coefficient, and a film thickness at the plurality of measurement positions. , An optical measurement unit that acquires a plurality of types of measurement values corresponding to at least two of the light absorption coefficient and the surface roughness by an optical method in a non-contact manner with the plurality of solar cells, and the plurality of measurement positions The multiple types of measured values in A measurement value distribution having the most correlation with the electrical property distribution by comparing a plurality of types of measurement value distributions with an electrical property distribution that is an electrical property at the plurality of measurement positions acquired by the electrical measurement unit. A type specifying unit for specifying the type .

Invention of Claim 2 is a solar cell evaluation apparatus of Claim 1 , Comprising: The said optical measurement part is a spectroscopic ellipsometer.

According to a third aspect of the invention, a solar cell evaluation device according to claim 1 or 2, wherein the first light irradiation part irradiates the linear light along said plurality of solar cells.

Invention of Claim 4 is a solar cell evaluation apparatus in any one of Claim 1 thru | or 3 , Comprising: These solar cells are 2nd wavelength by irradiation of the light of 1st wavelength. A first power generation layer that generates power more efficiently than light and a second power generation layer that generates power more efficiently than light of the first wavelength by irradiation with light of the second wavelength; The second light irradiation unit irradiates the plurality of measurement positions individually with the light with the first wavelength and the light with the second wavelength.

Invention of Claim 5 is a solar cell evaluation method which evaluates the quality of a thin film type solar cell, Comprising: Light is irradiated to the several photovoltaic cell arrayed along the light-receiving surface and connected in series A step of bringing the plurality of solar cells into a conductive state, and b) while the step a) is being performed, the light is further sequentially sequentially supplied to a plurality of measurement positions on the plurality of solar cells. An electrical characteristic by measuring at least one of voltage and current generated in the plurality of solar cells in synchronization with irradiation of light to the plurality of measurement positions in step c) and b) A step of obtaining a distribution; and d) a plurality of types of measurement values corresponding to at least two of a refractive index, an extinction coefficient, a film thickness, a light absorption coefficient, and a surface roughness at the plurality of measurement positions by an optical technique. The non-contact with the plurality of solar cells Obtaining a plurality of types of measured value distributions by acquiring in step e), and e) comparing the plurality of types of measured value distributions with the electrical property distributions to obtain the most correlation with the electrical property distributions. And a step of identifying the type of the measured value distribution.

According to the present invention, it is possible to improve the yield by estimating the cause of the deterioration of the electrical characteristics of the solar cell in the manufacturing process. In addition, it is possible to identify a plurality of types of measurement values that affect the electrical characteristics. In invention of Claim 4 , quality evaluation in each electric power generation layer of a photovoltaic cell can be performed.

It is a figure which shows a solar cell evaluation apparatus. It is sectional drawing of a photovoltaic cell. It is a figure which shows the structure of a solar cell evaluation apparatus. It is a figure which shows a 1st light irradiation part and a 2nd light irradiation part. It is a figure which shows the structure of a control part. It is a figure which shows the flow of operation | movement of a solar cell evaluation apparatus. It is a top view of a solar cell. It is a figure which shows electrical property distribution. It is a figure which shows measured value distribution. It is a figure which shows other measured value distribution. It is a figure which shows other measured value distribution. It is a figure which shows the other example of a 2nd light irradiation part.

  FIG. 1 is a diagram showing a solar cell evaluation apparatus 1 according to an embodiment of the present invention. The solar cell evaluation apparatus 1 is used to evaluate the quality of a silicon thin film solar cell 9 (hereinafter simply referred to as “solar cell 9”). In the solar cell 9, a plurality of strip-shaped solar cells 91 are arranged along a light receiving surface 92 perpendicular to the Z direction in FIG. 1. The plurality of solar battery cells 91 are connected in series with each other, and the output voltage of the solar battery 9 is the sum of the output voltages of the solar battery cells 91. In the solar cell 9, a current is generated due to recombination of electrons and holes between the solar cells 91. Therefore, the magnitude of the current is almost equal to the magnitude of the current generated in the solar cell 91 having the lowest power generation efficiency. It will be the same.

  FIG. 2 is a cross-sectional view of the solar battery cell 91. However, the thickness is highlighted. The solar cell 91 is a tandem type in which two power generation layers are stacked, and a first power generation layer (hereinafter, referred to as “top cell 911”) mainly composed of hydrogenated amorphous silicon is formed on the upper portion and a minute portion on the lower portion. It has a second power generation layer (hereinafter referred to as “bottom cell 912”) mainly composed of crystalline silicon. A transparent electrode 913 and a glass substrate 914 are positioned above the top cell 911, and a back electrode 915 is positioned below the bottom cell 912.

  The top cell 911 has a pin structure, and an intrinsic semiconductor layer 9113 is formed between the p-type semiconductor layer 9111 and the n-type semiconductor layer 9112. Also in the bottom cell 912, an intrinsic semiconductor layer 9123 is formed between the p-type semiconductor layer 9121 and the n-type semiconductor layer 9122, and the intrinsic semiconductor layer 9123 has an intrinsic semiconductor layer 9113 in the top cell 911. 5 to 10 times.

  In the top cell 911, the peak value of the absorption spectrum band is about 500 nm, and power generation is performed more efficiently when irradiated with visible light than when irradiated with infrared light. In the bottom cell 912, the peak value of the absorption spectrum band is approximately 850 nm, and power generation is performed more efficiently by irradiation with infrared light than when irradiation with visible light is performed. Further, the surface of each layer 9111 to 9113 of the top cell 911 and the surface of each layer 9121 to 9123 of the bottom cell 912 has a texture structure in which numerous undulations are formed, and the reflectance of incident light in the top cell 911 and the bottom cell 912 is reduced. To do. Due to the light confinement effect, sunlight is efficiently absorbed by the top cell 911 and the bottom cell 912. In FIG. 2, undulations are exaggerated.

  FIG. 3 is a block diagram showing the configuration of the solar cell evaluation apparatus 1. As shown in FIGS. 1 and 3, the solar cell evaluation apparatus 1 includes a first light irradiation unit 11 that is a line light source, a second light irradiation unit 12 that locally irradiates light to the solar cells 91, and a spectroscopic ellipsometer 13. , An electric measurement unit 14 that measures the voltage and current of the solar cell 9, a moving mechanism 15, and a control unit 16 (shown only in FIG. 3). As shown in FIG. 1, the moving mechanism 15 is arranged in a direction in which a plurality of solar cells 91 are arranged, and a Y-direction moving portion 151 that can move in the Y direction in FIG. An X-direction moving unit 152 that is movable in the X direction in FIG. 1 is provided. The X direction, the Y direction, and the Z direction are perpendicular to each other, and the Z direction corresponds to the vertical direction. The X direction moving unit 152 is provided on the Y direction moving unit 151, and the second light irradiation unit 12 and the spectroscopic ellipsometer 13 are fixed to the X direction moving unit 152. The Y-direction moving part 151 is provided with two rod-like support parts 153 extending in the (+ Y) direction, and both ends of the first light irradiation part 11 are connected to the tips of the two support parts 153.

  4 is a cross-sectional view of the first light irradiation unit 11 and the second light irradiation unit 12 taken along the YZ plane of FIG. 1, and illustration of other members of the solar cell evaluation device 1 is omitted. . In FIG. 4, the internal structure of the 1st light irradiation part 11 and the 2nd light irradiation part 12 is shown simplified, and illustration of a parallel oblique line is abbreviate | omitted. The first light irradiation unit 11 includes a plurality of light emitting diodes 112 and a lens unit 113 mounted on a substrate 111 extending in the X direction, and light from the plurality of light emitting diodes 112 is made uniform in the X direction, and the optical axis J1. Is irradiated in a line shape across all the solar battery cells 91.

  The second light irradiation unit 12 includes a white light source unit 121 and a chopper 122, and the white light source unit 121 emits light having a wavelength band of about 350 nm to 750 nm. The chopper 122 includes a light shielding unit 1221 having a plurality of openings 1221a and a driving unit 1222 that rotates the light shielding unit 1221. When the second light irradiation unit 12 is driven, the light from the white light source unit 121 passes through the opening 1221a at regular intervals by the rotation of the light shielding unit 1221. Thereby, the pulse light of a fixed period is irradiated to the photovoltaic cell 91 along the optical axis J2.

  As shown in FIG. 1, the spectroscopic ellipsometer 13 includes an illumination unit 131 and a light receiving unit 132, and is irradiated with polarized white light from the illumination unit 131 toward the solar cell 9. The reflected light is received. The light receiving unit 132 includes an analyzer that receives reflected light and a spectroscope that acquires the spectral intensity of the reflected light. The rotational position of the analyzer and the spectral intensity of the reflected light acquired by the spectroscope are shown in FIG. Is output to the control unit 16 shown in FIG. In the control unit 16, the phase difference between the p-polarized component and the s-polarized component and the reflection amplitude ratio angle are obtained as the polarization states of the light having a plurality of wavelengths.

  Furthermore, a model having the same structure as that of the solar battery cell 91 is set, and the theoretical phase difference and reflection amplitude ratio angle in the model are closest to the phase difference and reflection amplitude ratio angle obtained by the control unit 16. In this way, the thickness, refractive index, and extinction coefficient of each layer of the top cell and bottom cell of the model and the transparent electrode are fitted within a predetermined numerical range. Thereby, the film thickness, refractive index, and extinction coefficient are determined.

  For each of the layers 9111 to 9113 of the top cell 911 shown in FIG. 2, a dielectric function is obtained from the refractive index and the extinction coefficient, and a light absorption coefficient and an optical band gap are obtained based on the dielectric function. Note that the light absorption coefficient and the optical band gap are indexes when the top cell 911 absorbs the sunlight spectrum. The dielectric function is similarly obtained for each of the layers 9121 to 9123 of the bottom cell 912, and the light absorption coefficient, the optical band gap, and the crystallinity are obtained based on the dielectric function. In the transparent electrode 913, a light absorption coefficient, an optical band gap, a resistance value, and a surface roughness are obtained based on a dielectric function. In the following description, the refractive index, extinction coefficient, film thickness, light absorption coefficient, optical band gap, crystallinity, and surface roughness are referred to as “measured values” without distinction. The “measured value” here refers to a measured value acquired by an optical method, and does not include an electrical characteristic described later acquired by the electrical measuring unit 14. In the solar cell evaluation apparatus 1, by using the spectroscopic ellipsometer 13, a plurality of types of measurement values that affect the power generation efficiency of the solar cell 9 are obtained with high accuracy.

  As shown in FIG. 3, the electrical measurement unit 14 includes a lock-in amplifier 141 that measures the short-circuit current of the solar cell 9 and a voltmeter 142 that measures the open circuit voltage. In the present embodiment, it is assumed that only the short-circuit current is measured by the lock-in amplifier 141.

  FIG. 5 is a diagram illustrating a configuration of the control unit 16. The control unit 16 includes a storage unit 161, a display unit 162, and a type specifying unit 163. In the storage unit 161, a large number of short-circuit currents (accurately, the same values hereinafter) acquired by the electrical measurement unit 14 of FIG. 3 are stored as electrical characteristic distributions 21, and a plurality of types acquired by the spectroscopic ellipsometer 13 Are stored as a plurality of types of measurement value distributions 22. The type specifying unit 163 can be omitted.

  FIG. 6 is a diagram showing a flow of operations of the solar cell evaluation apparatus 1. However, step S20 may be performed by an operator, and when the type specifying unit 163 is provided in the control unit 16, it may be performed by calculation processing of the type specifying unit 163 as described later.

  FIG. 7 is a plan view of the solar cell 9. When measurement is performed on the solar cell 9, first, the first light irradiation unit 11 illustrated in FIG. 1 is in the X direction, that is, a plurality of solar cells 91, as indicated by a two-dot chain line in FIG. 7. All of these are irradiated with line-shaped light along their series connection direction, and the region irradiated with light (hereinafter referred to as “line irradiation region 81”) becomes conductive (step S11). The intensity of light emitted from the first light irradiation unit 11 is low, and the solar cell 9 generates power slightly (that is, the solar cell 9 is lightly conductive).

  Next, the 2nd light irradiation part 12 of FIG. 1 repeatedly irradiates a pulsed light to the position which overlaps with the line irradiation area | region 81 of the photovoltaic cell 91 located in the lowest side in FIG. 7 (step S12). In FIG. 7, the outline of the light irradiated to the position is indicated by a circle. Hereinafter, the position overlapping the line irradiation region 81 of each solar battery cell 91 is referred to as “measurement position 82”. The 2nd light irradiation part 12 plays the role as pseudo sunlight which irradiates the high intensity | strength light to the photovoltaic cell 91, and in a line irradiation area | region 81, a big electric current is in the lowest measurement position 82 of FIG. Occur.

  As shown in FIG. 3, the lock-in amplifier 141 receives a signal indicating ON / OFF of the pulsed light as a reference signal from the chopper 122, and the short-circuit current of the solar cell 9 is highly sensitive in synchronization with the irradiation of the pulsed light. (Step S13).

  When the measurement of the short-circuit current is completed, the spectroscopic ellipsometer 13 shown in FIG. 1 irradiates the deflected light from the illumination unit 131 toward the measurement position 82 of the solar cell 91 located on the lowermost side in FIG. The light reflected from the light is received by the light receiving unit 132. 3 obtains a plurality of types of measurement values in each layer of the top cell 911 and the bottom cell 912 shown in FIG. 2 based on the phase difference and reflection amplitude ratio angle of the reflected light acquired by the light receiving unit 132. (Step S14). While step S14 is performed, the light irradiation by the first light irradiation unit 11 is stopped as necessary.

  Next, the X-direction moving unit 152 shown in FIG. 1 slightly moves the second light irradiation unit 12 and the spectroscopic ellipsometer 13 in the (−X) direction while keeping the relative position constant (step S15, S16). And when the 2nd light irradiation part 12 is located on the measurement position 82 of the photovoltaic cell 91 located in the 2nd from the bottom of FIG. 7, similarly to the above-mentioned operation | movement, it will be in the measurement position 82 by the 2nd light irradiation part 12. Pulse light is irradiated and the short-circuit current of the solar cell 9 is measured by the lock-in amplifier 141 (see FIG. 3) (steps S12 and S13). Further, the spectroscopic ellipsometer 13 measures various measured values at the measurement position 82 (step S14). In the following description, the short-circuit current generated in the solar cell 9 when the measurement position 82 is irradiated with light from the second light irradiation unit 12 is expressed as “short-circuit current corresponding to the measurement position 82”.

  In the solar cell evaluation device 1, while the light irradiation by the first light irradiation unit 11 is continued, the second light irradiation unit 12 and the spectroscopic ellipsometer 13 are directed toward the solar cell 9 in the (−X) direction. The movement is relatively repeated (steps S15 and S16), and a short-circuit current and a plurality of types of measurement values corresponding to each of the plurality of measurement positions 82 are acquired (steps S12 to S14).

  When the measurement corresponding to all the measurement positions 82 on the line irradiation area 81 is completed (step S15), it is confirmed whether or not to change the position of the line irradiation area 81 (step S17). When changing the position of the line irradiation region 81, the first light irradiation unit 11, the second light irradiation unit 12, and the spectroscopic ellipsometer 13 shown in FIG. 1 are moved in the Y direction by the Y direction moving unit 151 (step S18). . Due to the movement of the first light irradiation unit 11, the line irradiation region 81 in FIG. 7 slightly moves in the (+ Y) direction. Then, the measurement of the short-circuit current using the second light irradiation unit 12 and the acquisition of a plurality of types of measurement values by the spectroscopic ellipsometer 13 are sequentially performed on the plurality of measurement positions 82 (steps S12 to S16).

  When the line irradiation area 81 is changed and measurement is repeated a plurality of times (steps S12 to S18), the line irradiation area 81 eventually moves to the right end in FIG. 7 of the solar cell 9, and the last line irradiation area 81 is reached. When the measurement operation for is completed, the measurement operation for the solar cell 9 is completed.

  As shown in FIG. 5, in the control unit 16, short-circuit currents at a plurality of measurement positions 82 are acquired as electrical characteristic distributions, and measurement values at a plurality of measurement positions 82 are acquired as measurement value distributions for each type of measurement values. (Step S19). The electrical characteristic distribution and various measured value distributions are displayed on the display unit 162.

  FIG. 8 is a diagram illustrating an electrical characteristic distribution 71 of a short-circuit current, and one rectangular region 711 (hereinafter referred to as “pixel 711”) corresponds to one measurement position 82. Each pixel 711 in FIG. 8 is shown in multiple gradations according to the magnitude of the short-circuit current due to the irradiation of the pulse light to the corresponding measurement position 82. 9 to 11 are diagrams illustrating measurement value distributions 72 to 74 corresponding to three types of measurement values. Similarly to FIG. 8, each pixel 711 has multiple gradations according to the magnitude of the measurement values. It shows.

  Comparing the electrical characteristic distribution 71 of FIG. 8 with the measured value distributions 72 to 74 of FIGS. 9 to 11, the measured value distribution 73 of FIG. It is similar to the distribution, and it can be seen that the measured value distribution 73 has the most correlation with the electrical characteristic distribution 71. Thus, when the operator looks at the display unit 162, the type of the measured value distribution that most affects the short-circuit current is specified (step S20).

  When step S20 is executed by the type specifying unit 163 in FIG. 3, the electrical characteristic distribution 71 and the measured value distributions 72 to 74 do not need to be displayed as images, but are handled as multivalued image data. In this case, the type specifying unit 163 shown in FIG. 5 specifies the type of the measured value distribution most correlated with the electrical characteristic distribution by a pixel comparison method in which the values of the corresponding pixels are compared.

  As a specific example, first, the value of the short circuit current of the electrical characteristic distribution 71 is normalized to a value of 0 to 1 with reference to the maximum value and the minimum value, and similarly, the measurement values of the measurement value distributions 72 to 74 are also 0. Normalized to a value of ~ 1. Next, a difference image indicating an absolute difference value between the electrical characteristic distribution 71 and each measurement value distribution at the same measurement position 82 is obtained. Then, the measured value distribution corresponding to the difference image having the smallest sum of the pixel values is identified as having the most correlation with the electrical characteristic distribution 71. As a method for obtaining the correlation as a numerical value, various mathematical correlation value calculation methods may be used.

  In the control unit 16, the measurement value distribution may be corrected as appropriate according to the type of the measurement value. For example, a measurement value distribution that can be compared with the electrical characteristic distribution 71 may be created by inverting the magnitude of the measurement value.

  As described above, the solar cell evaluation apparatus 1 can acquire the relationship between the short-circuit current at the time of light irradiation at the plurality of measurement positions 82 and various measured values that are optically acquired. Evaluation and structural evaluation can be performed simultaneously. As a result, it is possible to estimate the cause of the quality deterioration of the solar cell 9. The cause of the quality deterioration is fed back to the manufacturing process, and the yield in manufacturing the solar cell 9 is improved.

  In the solar cell evaluation apparatus 1, by using the first light irradiation unit 11 that is a line light source, even a large-sized solar cell 9 can be easily compared with a case where light is irradiated to the entire solar cell 9. A conduction state can be obtained. Since the 1st light irradiation part 11, the 2nd light irradiation part 12, and the spectroscopic ellipsometer 13 move on the solar cell 9 in the state fixed to the moving mechanism 15, it is solar rather than the case where the large sized solar cell 9 is moved. The structure of the battery evaluation apparatus 1 is simplified.

  In the solar cell evaluation apparatus 1, by using the spectroscopic ellipsometer 13, a plurality of types of measurement value distributions can be acquired almost simultaneously. This makes it possible to use a so-called combinatorial method that easily compares the electrical characteristic distribution 71 with a large number of measured value distributions, and efficiently specifies the types of measured values related to the electrical characteristics.

  In solar cell evaluation apparatus 1, voltmeter 142 may be used instead of lock-in amplifier 141. The voltmeter 142 measures the open voltage of the solar cell 9 in synchronization with the irradiation of the light to the measurement position 82 by the second light irradiation unit 12, and the control unit 16 has a plurality of open voltages and a plurality of measurement positions 82. An electrical characteristic distribution indicating the relationship is obtained. Further, the relationship between the current and the voltage may be measured, and the curve factor corresponding to the plurality of measurement positions 82 may be acquired as the electrical characteristic distribution. As described above, the solar cell evaluation apparatus 1 may acquire various electric characteristics as the electric characteristic distribution.

  FIG. 12 is a diagram illustrating another example of the second light irradiation unit. The second light irradiation unit 12a is provided with a wavelength selection unit 123 including a visible light transmission filter 124a and an infrared light transmission filter 124b. The visible light transmission filter 124a and the infrared light transmission filter 124b are fitted into the opening of the disk part 1231. The disk part 1231 is rotated by a switching part 1232 such as a motor. Thereby, one of the visible light transmission filter 124 a and the infrared light transmission filter 124 b is positioned on the optical path of the light emitted from the white light source unit 121. The other structure of the solar cell evaluation device 1 is the same as that of FIG. 1, and the operation of the solar cell evaluation device 1 is almost the same as that of the solar cell evaluation device 1 of FIG. 1 except for the operation related to the second light irradiation unit 12a. It is the same.

  When the solar cell 9 is irradiated with light by the second light irradiation unit 12a, first, the disk unit 1231 is rotated by the switching unit 1232 of the wavelength selection unit 123, and the visible light transmission filter 124a is arranged on the optical path. Is done. Next, of the light from the white light source unit 121, visible light that has passed through the visible light transmission filter 124 a is converted into pulsed light having a constant period by the chopper 122. In the solar battery cell 91 shown in FIG. 2, the top cell 911 generates power more efficiently than the bottom cell 912 by irradiation with visible light, and a short-circuit current mainly generated in the top cell 911 is generated in the lock-in amplifier 141 shown in FIG. Measured.

  Next, the disk portion 1231 is rotated by the switching portion 1232 so that the infrared light transmission filter 124b is positioned on the optical path, and the infrared light transmitted through the infrared light transmission filter 124b is converted into pulsed light having a constant period by the chopper 122. Is done. The bottom cell 912 generates power more efficiently than the top cell 911 by irradiation with infrared light, and a short-circuit current generated mainly in the bottom cell 912 is measured by the lock-in amplifier 141.

  Thus, in the 2nd light irradiation part 12a, the top cell 911 is irradiated by individually irradiating the solar cell 9 with the visible light which is the light of the 1st wavelength, and the infrared light which is the light of the 2nd wavelength. In addition, the bottom cell 912 can be selectively generated. In the control unit 16, electric characteristic distributions of the top cell 911 and the bottom cell 912 are created, and each electric characteristic distribution is compared with a plurality of types of measurement value distributions by the operator or the type specifying unit 163, thereby A measured value distribution that is most correlated with the characteristic distribution is identified.

  In the solar cell evaluation apparatus 1, the quality evaluation of the top cell 911 and the bottom cell 912 can be performed individually. When the short circuit current is reduced in each of the top cell 911 and the bottom cell 912, the measurement value that causes the short circuit current to decrease Can be specified. As a result, an improvement in yield in manufacturing the solar cell 9 is realized. Even when the second light irradiation unit 12a is used, an electrical characteristic other than the short-circuit current may be used.

As mentioned above, although embodiment of this invention was described , the said embodiment can be variously changed. In the solar cell evaluation apparatus 1, an optical measurement unit other than the spectroscopic ellipsometer 13 may be used as long as the measurement is performed in a non-contact manner with the solar cell 9 using an optical technique. For example, an interference film thickness meter or a laser microscope that measures surface roughness may be used, or a plurality of types of optical measurement units may be used in combination. In the solar cell evaluation apparatus 1, measured values of refractive index, extinction coefficient, film thickness, light absorption coefficient, and surface roughness at a plurality of measurement positions 82 (measured values of other names substantially corresponding to these measured values). Measurement of at least two of these and identifying the type of measurement value distribution that is most correlated with the electrical property distribution, the possibility of identifying the cause of the degradation of electrical properties is greatly increased. To increase. In the solar cell evaluation apparatus 1, only one of the five types of measurement values may be measured. Even in this case, whether or not the acquired measurement value affects the electrical characteristics is determined. It can be judged to some extent, and can be used to identify the cause of the deterioration of electrical characteristics. In other words, the solar cell evaluation apparatus 1 measures at least one of the measured values.

  The structure of the 1st light irradiation part 11 may be changed variously, for example, the linear illumination light may be radiate | emitted from the optical fiber arranged in linear form.

  In the said embodiment, it replaces with the 1st light irradiation part 11, and the irradiation part which irradiates light to the whole surface of the solar cell 9 may be utilized. In this case, for example, the second light irradiation unit 12 and the spectroscopic ellipsometer 13 may move intermittently in the arrangement direction of the solar cells 91 while moving in the direction in which the solar cells 91 extend. In the above embodiment, after the short-circuit current corresponding to the plurality of measurement positions 82 is measured and the electrical characteristic distribution is acquired, the plurality of types of measurement values may be measured and the plurality of types of measurement value distributions may be acquired. . Moreover, the process of acquiring a measured value distribution may be performed before the process of acquiring an electrical characteristic distribution.

  In the 2nd light irradiation part 12, it replaces with the white light source part 121, and multiple types of light emitting diodes and laser diodes which radiate | emit the light of a some wavelength band may be utilized. The solar cell evaluation device 1 may be used for a solar cell having only one layer or three or more power generation layers. If the solar cell evaluation device 1 is a thin-film solar cell, a dye-sensitized solar cell, a CIGS solar cell, etc. It may be used for a compound semiconductor type.

DESCRIPTION OF SYMBOLS 1 Solar cell evaluation apparatus 9 Solar cell 11 1st light irradiation part 12 2nd light irradiation part 13 Spectroscopic ellipsometer 14 Electrical measurement part 15 Movement mechanism 71 Electrical property distribution 72-74 Measurement value distribution 82 Measurement position 91 Solar cell 92 Light-receiving surface 163 Type specific part 911 Top cell 912 Bottom cell

Claims (5)

A solar cell evaluation apparatus for evaluating the quality of a thin film solar cell,
A first light irradiation unit arranged along the light receiving surface and irradiating light to the plurality of solar cells connected in series to bring the plurality of solar cells into a conductive state;
A second light irradiating section for sequentially irradiating light locally to a plurality of measurement positions on the plurality of solar cells;
An electrical measurement unit that measures at least one of voltage and current generated in the plurality of solar cells when light is irradiated to each of the plurality of measurement positions;
A plurality of types of measurement values corresponding to at least two of refractive index, extinction coefficient, film thickness, light absorption coefficient, and surface roughness at the plurality of measurement positions are optically measured with the plurality of solar cells. An optical measurement unit that is acquired in a non-contact manner;
By comparing a plurality of types of measurement value distributions that are the plurality of types of measurement values at the plurality of measurement positions, and an electrical property distribution that is an electrical characteristic at the plurality of measurement positions acquired by the electrical measurement unit, A type identifying unit that identifies the type of the measured value distribution most correlated with the electrical characteristic distribution;
A solar cell evaluation apparatus comprising: It is a solar cell evaluation apparatus of Claim 1 , Comprising:
The solar cell evaluation apparatus, wherein the optical measurement unit is a spectroscopic ellipsometer. The solar cell evaluation apparatus according to claim 1 or 2 ,
The solar cell evaluation apparatus, wherein the first light irradiation unit irradiates line-shaped light along the plurality of solar cells. It is a solar cell evaluation apparatus in any one of Claims 1 thru | or 3 , Comprising:
The plurality of solar cells have a first power generation layer that generates power more efficiently than light of the second wavelength by irradiation with light of the first wavelength, and the first power generation layer by irradiation of light of the second wavelength. A second power generation layer that generates power more efficiently than light of a wavelength,
The solar light evaluation apparatus, wherein the second light irradiation unit individually irradiates the plurality of measurement positions with light of the first wavelength and light of the second wavelength. A solar cell evaluation method for evaluating the quality of a thin film solar cell,
a) irradiating light to a plurality of solar cells arranged in series along the light receiving surface and connected in series to bring the plurality of solar cells into a conductive state;
b) a step of sequentially irradiating the plurality of measurement positions on the plurality of solar cells locally with light while the step a) is performed;
c) A step of acquiring an electrical characteristic distribution by measuring at least one of a voltage and a current generated in the plurality of solar cells in synchronization with light irradiation to the plurality of measurement positions in the step b). When,
d) A plurality of types of measured values corresponding to at least two of a refractive index, an extinction coefficient, a film thickness, a light absorption coefficient, and a surface roughness at the plurality of measurement positions by an optical method. And obtaining a plurality of types of measurement value distributions by obtaining them in a non-contact manner,
e) identifying the type of measurement value distribution most correlated with the electrical property distribution by comparing the plurality of types of measurement value distributions with the electrical property distribution;
A solar cell evaluation method comprising:

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