JP5502602B2 - 個々のセンサデバイスを処理する方法及び装置 - Google Patents
個々のセンサデバイスを処理する方法及び装置 Download PDFInfo
- Publication number
- JP5502602B2 JP5502602B2 JP2010128388A JP2010128388A JP5502602B2 JP 5502602 B2 JP5502602 B2 JP 5502602B2 JP 2010128388 A JP2010128388 A JP 2010128388A JP 2010128388 A JP2010128388 A JP 2010128388A JP 5502602 B2 JP5502602 B2 JP 5502602B2
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- JP
- Japan
- Prior art keywords
- test
- sensor devices
- several
- sensor
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000000034 method Methods 0.000 title claims description 20
- 238000012360 testing method Methods 0.000 claims description 112
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2218/00—Indexing scheme relating to details of testing or calibration
- G01D2218/10—Testing of sensors or measuring arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09007394.1 | 2009-06-04 | ||
| EP09007394A EP2259027B1 (en) | 2009-06-04 | 2009-06-04 | Method and apparatus for processing individual sensor devices |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010281820A JP2010281820A (ja) | 2010-12-16 |
| JP2010281820A5 JP2010281820A5 (enExample) | 2013-07-25 |
| JP5502602B2 true JP5502602B2 (ja) | 2014-05-28 |
Family
ID=41236439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010128388A Active JP5502602B2 (ja) | 2009-06-04 | 2010-06-04 | 個々のセンサデバイスを処理する方法及び装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8499609B2 (enExample) |
| EP (1) | EP2259027B1 (enExample) |
| JP (1) | JP5502602B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095143A (zh) * | 2019-06-04 | 2019-08-06 | 哈尔滨理工大学 | 一种槽型光电传感器的可靠性检测设备 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2418503B1 (en) | 2010-07-14 | 2013-07-03 | Sensirion AG | Needle head |
| JP5901226B2 (ja) * | 2011-10-27 | 2016-04-06 | 株式会社ディスコ | ユニット搬出入装置 |
| US9519007B2 (en) * | 2012-02-10 | 2016-12-13 | Asm Technology Singapore Pte Ltd | Handling system for testing electronic components |
| US9711392B2 (en) | 2012-07-25 | 2017-07-18 | Infineon Technologies Ag | Field emission devices and methods of making thereof |
| US9594111B2 (en) * | 2013-02-27 | 2017-03-14 | Infineon Technologies Ag | Turret handlers and methods of operations thereof |
| DE102013205133A1 (de) | 2013-03-22 | 2014-09-25 | Schaeffler Technologies Gmbh & Co. Kg | Motor für einen Direktantrieb eines Drehtisches |
| US10317382B2 (en) * | 2014-02-27 | 2019-06-11 | Life Safety Distribution Ag | Gas sensor packaging including structure to maintain devices in a state of readiness |
| US9606171B2 (en) * | 2015-01-28 | 2017-03-28 | Asm Technology Singapore Pte Ltd | High throughput test handler system |
| EP3106426B1 (en) | 2015-06-19 | 2019-11-06 | Invensense, Inc. | Pressure sensor |
| US20180188318A1 (en) * | 2016-12-30 | 2018-07-05 | Asm Technology Singapore Pte Ltd | Dual-feed test handling system |
| CN108318067B (zh) * | 2018-02-28 | 2024-02-02 | 广东万家乐燃气具有限公司 | 自动检测装置及质检系统 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3832882A (en) * | 1973-05-10 | 1974-09-03 | Us Navy | Humidity testing apparatus |
| US4177667A (en) * | 1978-03-03 | 1979-12-11 | The United States Of America As Represented By The Secretary Of The Navy | Quick response humidity chamber |
| US4647432A (en) * | 1982-11-30 | 1987-03-03 | Japan Tectron Instruments Corporation Tokuyama Soda Kabushiki Kaisha | Automatic analysis apparatus |
| US4590789A (en) * | 1984-08-31 | 1986-05-27 | Kunze Manfred C | Remote calibrator |
| US4733553A (en) * | 1986-08-25 | 1988-03-29 | Motorola Inc. | Method and apparatus for low pressure testing of a solid state pressure sensor |
| US4777716A (en) * | 1986-08-25 | 1988-10-18 | Motorola Inc. | Method for low pressure testing of a solid state pressure sensor |
| EP0265816B1 (en) * | 1986-10-28 | 1991-08-28 | Sumitomo Electric Industries Limited | Method of measuring semiconductor pressure sensor |
| US4973241A (en) * | 1987-12-23 | 1990-11-27 | Liquid Container Corporation | Apparatus for in-mold labeling of a blow molded article |
| US5248672A (en) * | 1990-11-01 | 1993-09-28 | The Regents Of The University Of Michigan | Polysubstituted benzimidazole nucleosides as antiviral agents |
| US5285690A (en) * | 1992-01-24 | 1994-02-15 | The Foxboro Company | Pressure sensor having a laminated substrate |
| US5345170A (en) * | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US5267467A (en) | 1992-07-27 | 1993-12-07 | Ford Motor Company | Mass air flow sensor two temperature production line test apparatus |
| US5642056A (en) * | 1993-12-22 | 1997-06-24 | Tokyo Electron Limited | Probe apparatus for correcting the probe card posture before testing |
| JPH10160597A (ja) | 1996-11-28 | 1998-06-19 | Fenwall Controls Of Japan Ltd | 温度検出装置及びその校正装置 |
| US5848122A (en) * | 1997-03-25 | 1998-12-08 | Advanced Technology Materials, Inc. | Apparatus for rapid in-situ X-ray stress measurement during thermal cycling of semiconductor wafers |
| US5963027A (en) * | 1997-06-06 | 1999-10-05 | Cascade Microtech, Inc. | Probe station having environment control chambers with orthogonally flexible lateral wall assembly |
| WO1999004276A1 (en) | 1997-07-15 | 1999-01-28 | Wentworth Laboratories, Inc. | Probe station with emi shielding |
| WO1999046572A1 (en) * | 1998-03-11 | 1999-09-16 | True Technology, Inc. | Method and apparatus for detection of leaks in hermetic packages |
| US6085576A (en) * | 1998-03-20 | 2000-07-11 | Cyrano Sciences, Inc. | Handheld sensing apparatus |
| US6134941A (en) * | 1998-03-23 | 2000-10-24 | Motorola, Inc. | Method of testing sensors and apparatus therefor |
| US6286363B1 (en) * | 1998-04-02 | 2001-09-11 | Reliance Electric Technologies, Llc | Integrated multi-element lubrication sensor and health lubricant assessment system |
| US6867535B1 (en) * | 1999-11-05 | 2005-03-15 | Sensant Corporation | Method of and apparatus for wafer-scale packaging of surface microfabricated transducers |
| WO2001040784A2 (de) * | 1999-11-30 | 2001-06-07 | Sensirion Ag | Sensor in einem gehäuse |
| ATE310950T1 (de) * | 1999-12-08 | 2005-12-15 | Sensirion Ag | Kapazitiver sensor |
| DE10000133C2 (de) * | 2000-01-04 | 2003-06-26 | Karl Suss Dresden Gmbh | Prober für Drucksensoren |
| US6359253B1 (en) | 2000-07-12 | 2002-03-19 | Advanced Micro Devices, Inc. | Unit-in-tray pocket checker |
| DE10047194C1 (de) * | 2000-09-23 | 2002-03-07 | Bosch Gmbh Robert | Vorrichtung und Verfahren zur Prüfung eines Brandmelders |
| EP1397656B1 (de) | 2001-06-11 | 2009-05-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und vorrichtung zum testen oder kalibrieren eines drucksensors an einem wafer |
| JP2003168707A (ja) * | 2001-11-30 | 2003-06-13 | Tokyo Electron Ltd | プローブ装置 |
| US7046025B2 (en) * | 2002-10-02 | 2006-05-16 | Suss Microtec Testsystems Gmbh | Test apparatus for testing substrates at low temperatures |
| EP1628132B1 (en) * | 2004-08-17 | 2015-01-07 | Sensirion Holding AG | Method and device for calibrating sensors |
| EP1864102A2 (en) * | 2005-02-28 | 2007-12-12 | Advanced Technology Materials, Inc. | Apparatus and process for leak-testing and qualification of fluid dispensing vessels |
-
2009
- 2009-06-04 EP EP09007394A patent/EP2259027B1/en active Active
-
2010
- 2010-04-13 US US12/798,890 patent/US8499609B2/en active Active
- 2010-06-04 JP JP2010128388A patent/JP5502602B2/ja active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095143A (zh) * | 2019-06-04 | 2019-08-06 | 哈尔滨理工大学 | 一种槽型光电传感器的可靠性检测设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8499609B2 (en) | 2013-08-06 |
| EP2259027B1 (en) | 2012-12-05 |
| EP2259027A1 (en) | 2010-12-08 |
| JP2010281820A (ja) | 2010-12-16 |
| US20100310343A1 (en) | 2010-12-09 |
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