JP5497553B2 - 微粒子の皮膜形成方法及びその装置 - Google Patents

微粒子の皮膜形成方法及びその装置 Download PDF

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Publication number
JP5497553B2
JP5497553B2 JP2010146862A JP2010146862A JP5497553B2 JP 5497553 B2 JP5497553 B2 JP 5497553B2 JP 2010146862 A JP2010146862 A JP 2010146862A JP 2010146862 A JP2010146862 A JP 2010146862A JP 5497553 B2 JP5497553 B2 JP 5497553B2
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Prior art keywords
fine particles
rotating disk
film
processing container
angle
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Japanese (ja)
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JP2012007230A5 (enExample
JP2012007230A (ja
Inventor
知士 北見
克彦 福井
晶子 米田
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Nippon Pillar Packing Co Ltd
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Nippon Pillar Packing Co Ltd
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JP2010146862A 2010-06-28 2010-06-28 微粒子の皮膜形成方法及びその装置 Expired - Fee Related JP5497553B2 (ja)

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JP2010146862A JP5497553B2 (ja) 2010-06-28 2010-06-28 微粒子の皮膜形成方法及びその装置

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JP2010146862A JP5497553B2 (ja) 2010-06-28 2010-06-28 微粒子の皮膜形成方法及びその装置

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JP2012007230A JP2012007230A (ja) 2012-01-12
JP2012007230A5 JP2012007230A5 (enExample) 2013-01-24
JP5497553B2 true JP5497553B2 (ja) 2014-05-21

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JP2010146862A Expired - Fee Related JP5497553B2 (ja) 2010-06-28 2010-06-28 微粒子の皮膜形成方法及びその装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6301053B2 (ja) * 2012-08-29 2018-03-28 日立化成株式会社 ドラムスパッタ装置
WO2023162503A1 (ja) * 2022-02-22 2023-08-31 芝浦機械株式会社 表面処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0187065U (enExample) * 1987-11-30 1989-06-08
JPH0823069B2 (ja) * 1992-06-25 1996-03-06 双葉電子工業株式会社 粉体攪拌器
JP3456562B2 (ja) * 1996-11-11 2003-10-14 株式会社安川電機 固体潤滑膜の製造方法およびその装置
JPH10204613A (ja) * 1997-01-21 1998-08-04 Shibafu Eng Kk 複合粉末製造装置
JP2007204784A (ja) * 2006-01-31 2007-08-16 Bridgestone Corp 粒子コーティング方法及び粒子コーティング装置

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