JP5491108B2 - Solution applicator - Google Patents

Description

  The present invention relates to a solution coating apparatus.

  When a conventional solution coating apparatus manufactures a display device such as a liquid crystal display device, an organic EL (Electro Luminescence) display device, an electron emission display device, and a plasma display device, or a semiconductor device, for example, a color filter is formed. Alternatively, it is used when a functional thin film such as an alignment film or a resist is formed on a substrate such as a glass substrate or a semiconductor wafer.

  As described in Patent Document 1, the solution coating apparatus has a mounting table for transporting a substrate as an object to be coated, and a plurality of coating heads are disposed above the mounting table in the substrate transport direction. It is arrange | positioned along the direction substantially orthogonal to. Thereby, the solution discharged from the nozzles of the plurality of coating heads is applied to the upper surface of the substrate to be transported at a predetermined interval in a direction crossing the transport direction.

  In the solution coating apparatus, a camera as a detecting means for detecting the discharge state of the solution discharged from the nozzle of the coating head at a stage before the solution is discharged onto the substrate on the mounting table using the coating head as described above. It has. The presence / absence of discharge of the solution discharged from the nozzle of the coating head, the discharge direction, the discharge direction, the discharge position, and the like are confirmed in advance by a camera, thereby improving the application quality of the solution to the substrate.

JP2008-264608

  In the conventional solution coating apparatus, in order to improve the productivity, when the substrate is supplied to the mounting table moved to the side of the discharge area by the coating head, the coating head is directed toward the lower liquid tank. The solution is discharged, and the discharge state is detected by a camera.

  For this reason, when a camera picks up an image of the solution discharged from the nozzle in the discharge area of the coating head and dropping toward the liquid tank, for example, the substrate is supplied onto the mounting table on the side of the discharge area and pulled. There is a possibility that the dripping state may be disturbed as the wind reaches the solution being dripped and soars the solution, and the detection accuracy of the solution discharge state by the camera is impaired.

  An object of the present invention is to detect a discharge state of a solution discharged from a nozzle of a coating head with high accuracy without being affected by a wind in a solution coating apparatus.

The present invention relates to a solution coating apparatus for discharging a solution from a nozzle provided in a coating head and coating the substrate on a substrate.
With a detection means for detecting the discharge state of the solution discharged from the nozzle of the coating head,
Provided with windshield means for preventing the entry of wind into the discharge area of the solution discharged from the nozzle of the coating head ,
The windshield means comprises a shutter, and the shutter is switched between a standby position and a windshield work position for the discharge area of the coating head .

According to the present invention , the discharge state of the solution discharged from the nozzle of the coating head can be detected with high accuracy without the influence of wind.

FIG. 1 is a front view showing a solution coating apparatus. FIG. 2 is a plan view showing the solution coating apparatus. FIG. 3 is a side view showing the solution coating apparatus. FIG. 4 is a cross-sectional view showing the coating head. FIG. 5 is an enlarged front view of a main part showing an example of detection of a solution discharge state. FIG. 6 is an enlarged front view of a main part showing another detection example of the solution discharge state.

  The solution coating apparatus 10 shown in FIGS. 1 to 3 has a base 11 disposed horizontally, and guide members 12 extending along the longitudinal direction (X direction) extend at both ends in the width direction (Y direction) of the upper surface of the base 11. Be present. On the upper surfaces of both guide members 12, a mounting table 13 for the substrate 1 is supported by slidably engaging receiving members 14 provided on both sides of the lower surface in the width direction. The receiving member 14 is movable in the X direction along the guide member 12.

  The guide member 12 is provided with a stator (not shown), the receiving member 14 is provided with a mover (not shown), and a linear motor (not shown) serving as a driving means for the mounting table 13 with the stator and the mover. (Illustrated) is formed.

  For example, a glass substrate 1 used in a liquid crystal display device is supplied to the mounting table 13. The substrate 1 is held by suction on the mounting table 13 by means such as vacuum suction or electrostatic suction. Accordingly, the substrate 1 supplied to the mounting table 13 is moved in the direction of the arrow X by the mounting table 13.

  A gate-shaped support 16 is erected in the middle of the longitudinal direction of the base 11 so as to straddle the pair of guide members 12. A frame 17 is installed horizontally on the upper portion of the support 16.

  In the frame of the frame 17 of the support 16, a plurality of coating heads 20 that eject a solution (polyimide solution) that is a functional thin film, for example, an alignment film, in the form of dots by an ink jet method are shown in the arrow Y direction (FIG. 2). In this embodiment, for example, three coating heads 20 are arranged in two rows in a staggered manner.

  The coating head 20 includes a head body 21 as shown in FIG. The head main body 21 is formed in a cylindrical shape, and its lower surface opening is closed by a flexible plate 22. The flexible plate 22 is covered with a nozzle plate 23, and a plurality of liquid chambers 24 are formed between the nozzle plate 23 and the flexible plate 22.

  Each liquid chamber 24 communicates with a main pipe line 23A formed in the nozzle plate 23 via a branch pipe (not shown), and the solution is transferred from the main pipe line 23A via the branch pipe line to each liquid chamber 24. To be supplied. One end of the main line 23A is connected to a liquid supply hole 25 described later, and the other end is connected to a recovery hole 29 described later.

  The liquid supply hole 25 communicating with the liquid chamber 24 is formed at one longitudinal end of the head body 21. The solution for forming a functional thin film is supplied from the liquid supply hole 25 to the liquid chambers 24. Thereby, the inside of the liquid chamber 24 is filled with the solution.

  A plurality of nozzles 26 are formed in the nozzle plate 23 in a zigzag pattern along the Y direction, which is a direction orthogonal to the transport direction of the substrate 1. On the upper surface of the flexible plate 22, a plurality of piezoelectric elements 27 are provided as driving means so as to face the nozzles 26.

  Each piezoelectric element 27 is supplied with a driving voltage by a driving unit 28 provided in the head main body 21. As a result, the piezoelectric element 27 expands and contracts and partially deforms the flexible plate 22, so that the solution is ejected in the form of dots from the nozzle 26 positioned opposite the piezoelectric element 27, and below each coating head 20 in the X direction. Is supplied and applied to the upper surface of the substrate 1 on the mounting table 13 that is moved to Accordingly, a coating pattern in which dot-like solutions are arranged in a matrix is formed on the upper surface of the substrate 1. And this application | coating pattern adheres and it becomes one film | membrane because each dot-like solution flows and spreads wet.

  A recovery hole 29 communicating with the liquid chamber 24 is formed at the other longitudinal end of the head body 21. The solution supplied from the liquid supply hole 25 to the liquid chamber 24 can be recovered from the recovery hole 29. That is, each head 20 can not only discharge the solution supplied to the liquid chamber 24 from the nozzle 26 but also recover the solution from the recovery hole 29 through the liquid chamber 24.

  The solution coating apparatus 10 determines the ejection state (existence of ejection, ejection amount, ejection direction, ejection position, etc.) of the solution ejected from each nozzle 26 of each coating head 20 according to the ejection area of the solution ejected from each nozzle 26. In order to detect with high accuracy without the influence of wind generated around, the following configuration is provided.

  As shown in FIG. 5, the solution coating apparatus 10 includes a camera 30 as a detection unit that detects a discharge state of a solution discharged from each nozzle 26 of each coating head 20. In this embodiment, one camera 30 is used for each coating head 20, and all three cameras 30 are arranged on the outer surface of the frame 17 of the support 16. In the solution coating apparatus 10, guide members 31 extending in the vertical direction (Z direction) are respectively extended at three positions corresponding to the coating heads 20 on the outer surface of the frame body 17, and receiving members that support the cameras 30. 32 is slidably engaged with each guide member 31 and supported. The receiving member 32 is driven by a drive source (not shown) and is movable in the direction of arrow Z along the guide member 31.

  When each solution is applied to the substrate 1 by each application head 20, each camera 30 stands by at a standby position on the upper end side of the guide member 31 (solid line position in FIG. 1), and below the solution discharge region by each application head 20. The mounting table 13 and the substrate 1 on the mounting table 13 are movable in the X direction.

  When detecting the ejection state of the solution ejected from each nozzle 26 of each coating head 20, the mounting table 13 is moved to the substrate entry / exit position outside (side) the solution ejection region by each coating head 20 (FIG. 1). , Each camera 30 is positioned at the detection work position on the lower end side of the guide member 31 (position in FIG. 5). When the mounting table 13 is positioned at the substrate loading / unloading position, the solution-coated substrate 1 on the mounting table 13 is unloaded from the mounting table 13 and the substrate 1 to which the solution is applied next is supplied to the mounting table 13. . Each camera 30 has a visual field range in which the solution discharged from each nozzle 26 of the corresponding application head 20 can be imaged at a time when positioned at the detection work position.

  Note that a solution discharge by the camera 30 is applied to one end of the mounting table 13 in the X direction, which is close to the support 16 and each coating head 20 of the mounting table 13 positioned at the substrate loading / unloading position. In order to detect the state, a liquid tank 33 for receiving a solution discharged from each nozzle 26 of each coating head 20 is provided via an attachment member 34. That is, the liquid tank 33 is positioned directly below the coating head 20 with the mounting table 13 positioned at the substrate loading / unloading position.

  As shown in FIG. 5, the solution coating apparatus 10 is configured to prevent wind from entering a discharge region of a solution discharged from each nozzle 26 of each coating head 20 for detection of a solution discharge state by the camera 30. 40.

  The windshield means 40 is provided between the mounting table 13 positioned at the substrate entry / exit position and the solution ejection area by each coating head 20. The windshield means 40 is configured so that the substrate 1 unloaded from the mounting table 13 positioned at the substrate loading / unloading position or the substrate 1 supplied to the mounting table 13 is loaded when the substrates 1 are unloaded or supplied. The wind that is generated around the liquid is prevented from entering the solution discharge area.

  The windshield means 40 is a shutter (provided at the tip of the piston rod 41A of the air cylinder 41 fixed to the outer surface of the frame 17 of the support 16 opposite to the outer surface on which the guide member 31 for the camera 30 is provided). (Shielding plate) 42. The shutter 42 is moved up and down by the air cylinder 41, and the standby position (chain line position in FIG. 5) where the piston rod 41A of the air cylinder 41 is contracted and the coating head 20 of each coating head 20 where the piston rod 41A of the air cylinder 41 is extended. Switch setting to the windshield work position for the solution discharge area (in the present embodiment, the mounting table 13 positioned at the substrate loading / unloading position and the solution discharge area by each coating head 20 are mutually blocked). Is done. The shutter 42 allows its tip to enter between the mounting table 13 and the liquid tank 33 at the windshield work position. The shutter 42 has a length that can prevent the ingress of wind over the entire ejection area along the arrangement direction of the three coating heads 20 of the present embodiment.

  Accordingly, in the solution coating apparatus 10, the mounting table 13 and the mounting table 13 are set with each camera 30 positioned at the standby position and the windshield means 40 positioned at the standby position (solid line position in FIG. 1). The upper substrate 1 is moved in the X direction below the solution discharge region by each coating head 20, and the solution discharged from each nozzle 26 of each coating head 20 is applied to the substrate 1. When the application of the solution to the substrate 1 on the mounting table 13 is completed, the mounting table 13 and the substrate 1 on the mounting table 13 are moved to the substrate loading / unloading position outside the solution discharge area by each coating head 20.

  Subsequently, while each camera 30 is positioned at the detection work position and the windshield means 40 is positioned at the windshield work position (the position in FIG. 5), the solution-coated substrate 1 on the placement table 13 is placed on the placement table 13. The substrate 1 to be unloaded and then coated with the solution is supplied to the mounting table 13. At the same time, the solution is discharged from each nozzle 26 of each coating head 20 toward the liquid tank 33, and the discharge state of the solution from each coating head 20 is imaged by each camera 30 at the detection work position. By performing image processing on an imaging result of each camera 30 by an image processing device (not shown), the discharge state of the solution discharged from each nozzle 26 of each coating head 20 (the presence / absence of the solution, the discharge amount, the discharge direction, the discharge position, etc.) ) Detected.

  In addition, based on the discharge state of the solution discharged from each nozzle 26 of each coating head 20 detected from the imaging result of each camera 30, the discharge amount of the solution discharged from each nozzle 26 of each coating head 20 is mutually different. The voltage applied to the piezoelectric element of each nozzle 26 can be adjusted so as to be uniform.

According to the present embodiment, the following operational effects can be obtained.
(a) A windshield unit that includes a camera 30 that detects the discharge state of the solution discharged from the nozzle 26 of the coating head 20 and prevents the wind from entering the discharge region of the solution discharged from the nozzle 26 of the coating head 20. 40. Therefore, when the camera 30 images the solution discharged from the nozzle 26 in the solution discharge area of the coating head 20 and being dropped toward the liquid tank 33, the wind is prevented from entering the discharge area. Does not disturb the dripping state of the solution as it soars, and does not impair the detection accuracy of the solution discharge state by the camera 30. The discharge state of the solution discharged from the nozzle 26 of the coating head 20 can be detected with high accuracy without the influence of wind.

  (b) A windshield means 40 is provided between the ejection area of the coating head 20 and the mounting table 13. Accordingly, it is possible to prevent the wind generated by the substrate 1 being supplied onto the mounting table 13 positioned on the side of the discharge area of the coating head 20 from entering the discharge area. Thereby, simultaneously with the supply of the substrate 1 to the mounting table 13, the discharge state of the solution discharged from the nozzle 26 of the coating head 20 is detected with high accuracy by the camera 30 of the above (a), and the coating device 10 is produced. Can be improved.

  (c) The shutter 42 as the windshield means 40 can block the entry of wind into the solution discharge area of the coating head 20 and reliably prevent the wind from entering.

  A windshield means 50 shown in FIG. 6 is an alternative to the windshield means 40 described above, and includes an air blowing device 51 provided in the frame 17 of the support 16. The air blowing device 51 is a gas (nitrogen gas or dry air) discharged from the slit hole of the slit nozzle 52 and prevents air from entering the discharge region of the solution discharged from each nozzle 26 of each coating head 20.

  The air blowing device 51 of the windshield means 50 is also provided between the mounting table 13 positioned at the substrate loading / unloading position and the solution discharge area by each coating head 20. Thereby, the air blowing device 51 is configured so that the substrate 1 carried out from the placement table 13 positioned at the substrate loading / unloading position or the substrate 1 supplied to the placement table 13 is taken out when the substrates 1 are carried out or supplied. A strong back wind is exerted against the wind generated around the mounting table 13 to prevent the wind from entering the discharge area.

  The slit nozzle 52 of the air blowing device 51 has a length that can prevent the ingress of wind over the entire discharge area along the arrangement direction of the three coating heads 20 of the present embodiment. At this time, the air blowing device 51 may be composed of a single slit nozzle 52 integrated with the entire area of the three coating heads 20, or a length corresponding to the length of one coating head 20. Three slit nozzles 52 may be arranged side by side.

  According to this modified example, the strong wind blown by the air blowing device 51 as the windshield means 50 cancels out the wind entering the discharge area of the coating head 20 and can reliably prevent the wind from entering.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and even if there is a design change or the like without departing from the gist of the present invention. It is included in the present invention.

  The present invention can accurately detect the discharge state of a solution discharged from a nozzle of a coating head in a solution coating apparatus without the influence of wind.

DESCRIPTION OF SYMBOLS 1 Substrate 10 Solution application apparatus 13 Placement table 20 Application head 26 Nozzle 30 Camera (detection means)
40 Windshield 42 Shutter 50 Windshield 51 Air Blowing Device

Claims (3)

In a solution coating apparatus that discharges a solution from a nozzle provided in a coating head and applies the solution to a substrate,
With a detection means for detecting the discharge state of the solution discharged from the nozzle of the coating head,
Provided with windshield means for preventing the entry of wind into the discharge area of the solution discharged from the nozzle of the coating head ,
The solution coating apparatus according to claim 1, wherein the windshield means comprises a shutter, and the shutter is switched between a standby position and a windshield work position with respect to a discharge area of the coating head . A mounting table to which the substrate is supplied;
The solution coating apparatus according to claim 1, wherein the windshield means is provided between a discharge area of the coating head and the mounting table. The shutter, when applying the solution on the substrate is set in the standby position, when detecting the discharge state by said detecting means according to claim 1, characterized in that it is set to the windshield working position Solution applicator.

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