JP2006159077A - Film forming apparatus, film forming method, droplet discharge apparatus and pallet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film forming apparatus in which the drying of a film forming material applied respectively on each of a plurality of substrates placed on a pallet is prevented. <P>SOLUTION: Each substrate carried by a belt conveyer BC driven by a driving apparatus 116 based on a signal from a control unit 114 is cleaned in a cleaning apparatus 102 and each surface thereof is modified in a surface treatment apparatus 104. After the droplet of an oriented film material is discharged to a flushing area through a droplet discharge head of a droplet discharge apparatus 106 to carry out flushing, the oriented film material is applied on each of a plurality of the substrates. The pallet is carried from the droplet discharge apparatus 106 to a drying apparatus 108 through an air tight space 118 filled with a solvent atmosphere formed by the vaporization of the the oriented film material in the flushing area. After the oriented film material is preliminarily dried in the drying apparatus 108, the substrate is fired in a firing apparatus 110 to form the oriented film. The oriented film is rubbed in a rubbing apparatus 112. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a film forming apparatus for forming a film having a uniform film thickness, a film forming method, a droplet discharge apparatus, and a pallet used for forming a film having a uniform film thickness.

  Conventionally, methods such as a flexographic printing method and a spin coating method have been used as a method for forming a thin film, for example, an alignment film, on a substrate. For example, a method of forming an alignment film by applying an alignment film material on a substrate by a printing method (flexographic printing method), allowing the alignment film material applied on the substrate to stand for a certain period of time and then smoothing, followed by baking or the like. (See, for example, Patent Document 1).

  Here, since the alignment film material applied on the substrate is dried from the outside, there is a problem in that drying unevenness occurs on the outside and inside of the substrate surface by performing smoothing. Therefore, in the method described in Patent Document 1 described above, the substrate coated with the alignment film material is allowed to stand for a predetermined time in the processing chamber filled with the solvent atmosphere, thereby preventing the alignment film material from drying and smoothing. ing.

JP 2001-305544 A

  By the way, as a method for forming an alignment film or the like having high uniformity with high accuracy, a droplet discharge device using an inkjet technique is used. When a thin film, for example, an alignment film, is formed using a droplet discharge device that applies this inkjet technology, the droplets are evenly applied on the substrate, so smoothing is achieved using the flexographic printing method. There is no need to provide a process for performing the above.

  On the other hand, in general, a highly volatile solvent is used for the ink containing the alignment film material, so that drying starts immediately after being applied. In order to improve productivity, a process of placing a plurality of substrates on a pallet and applying an alignment film material in units of pallets is performed. In such a case, that is, when an ink including an alignment film material is applied to a plurality of substrates, for example, in a substrate that has already been applied with ink among a plurality of substrates, the ink is applied to another substrate. During this time, the applied ink dries and drying unevenness occurs, resulting in a problem that a film having a uniform film thickness cannot be formed.

  An object of the present invention is to provide a film forming apparatus, a film forming method, a droplet discharge apparatus, and a pallet for preventing drying of the film forming material during a period in which the film forming material is applied to each of a plurality of substrates placed on the pallet. Is to provide.

  The film forming apparatus according to the present invention includes a droplet discharge apparatus having a droplet discharge head that discharges a film forming material that forms a predetermined film on a substrate placed on a pallet, and the droplet discharge apparatus A film forming apparatus comprising: a drying device that dries the film forming material applied on a substrate; and a transport device that connects the droplet discharge device and the drying device and transports the pallet. The droplet discharge device discharges droplets of the film forming material from the droplet discharge head onto the pallet when applying the film forming material to the substrate placed on the pallet. Flushing is performed on the formed flushing area.

  According to this film forming apparatus, when the film forming material is applied to the substrate placed on the pallet in the droplet discharge apparatus, the film forming material droplets are applied to the flushing area formed on the pallet. Flushing is performed by discharging. Accordingly, the film forming material discharged to the flushing area formed on the pallet evaporates, so that a solvent atmosphere of the film forming material is formed on the top of the placed substrate. Therefore, for example, the substrate can be prevented from naturally drying during conveyance, and the film forming material applied on the substrate can be reliably dried uniformly.

  Further, in the film forming apparatus according to the present invention, a plurality of the substrates are placed on the pallet, and the droplet discharge device is configured to apply the film forming material to the plurality of substrates in the pallet or before Thereafter, flushing is performed by discharging droplets of the film forming material to the flushing area.

  According to this film forming apparatus, flushing is performed before or after the film forming material is applied to the plurality of substrates placed on the pallet. Accordingly, among the plurality of substrates placed on the pallet, the film forming material on the substrate already coated with the film forming material is naturally dried while the film forming material is applied to the other substrate. This can be prevented appropriately.

  Further, the film forming apparatus according to the present invention performs flushing by ejecting droplets of the film forming material to the flushing area after the droplet ejecting apparatus further performs a line feed or line break. Features.

  According to this film forming apparatus, flushing is further performed after line feed or line break. Therefore, it is possible to more reliably prevent the film forming material applied on the substrate from being naturally dried, and to reliably prevent nozzle clogging of the droplet discharge device.

  Further, the film forming apparatus according to the present invention includes a transport path in which the transport apparatus has a space for holding an atmosphere formed by the film forming material discharged to the flushing area, and the transport path includes the transport path. The pallet is transported from a droplet discharge device to the drying device.

  According to this film forming apparatus, a pallet on which a plurality of substrates are placed is dropped on a pallet placed through a conveyance path having a space for holding an atmosphere formed by a film forming material discharged to a flushing area formed on the pallet. It is transported from the discharge device to the drying device. Therefore, it is possible to reliably prevent the film forming material applied to the substrate from being dried while the pallet is conveyed from the droplet discharge device to the drying device.

  The film forming method according to the present invention includes: a coating step of applying the film forming material using a droplet discharge device that applies a film forming material for forming a predetermined film on a substrate; and the film formation in the coating step. In a film forming method including a transporting process of transporting a pallet on which the substrate on which a material has been applied is placed, and a drying process of drying the film forming material applied on the substrate transported in the transporting process, In the application step, when the film forming material is applied to the substrate placed on the pallet in the droplet discharge device, the film forming material is applied to the flushing area formed on the pallet. The method includes a step of performing flushing by discharging droplets.

  According to this film forming method, when the film forming material is applied to the substrate placed on the pallet, the film forming material droplets are discharged to the flushing area formed on the pallet to perform the flushing. ing. Accordingly, the film forming material discharged to the flushing area formed on the pallet is evaporated to form a solvent atmosphere of the film forming material. Therefore, for example, it is possible to prevent the substrate from being naturally dried during conveyance of the pallet, and to reliably dry the film forming material applied on the substrate.

  In the film forming method according to the present invention, a plurality of the substrates are placed on the pallet, and in the coating step, the film forming material is coated on the substrate placed on the pallet. After or before, a step of performing flushing by discharging droplets of the film forming material to the flushing area is included.

  According to this film forming method, flushing is performed before or after the film forming material is applied to the substrate. Therefore, among the plurality of substrates placed on the pallet, the film forming material on the substrate to which the film forming material has already been applied is naturally dried while the film forming material is being applied to another substrate. This can be prevented appropriately.

  Further, the film forming method according to the present invention further includes a step of performing flushing by discharging droplets of the film forming material to the flushing area after a line feed or line break in the coating step. It is characterized by.

  According to this film forming method, flushing is further performed after line feed or line break. Therefore, it is possible to more reliably prevent the film forming material applied on the substrate from being naturally dried, and to reliably prevent nozzle clogging of the droplet discharge device.

  Further, in the film forming method according to the present invention, in the transporting process, a plurality of the substrates are mounted via a space that holds an atmosphere formed by the film forming material discharged to the flushing area in the coating process. The placed pallet is transported.

  According to this film forming method, a plurality of substrates are mounted via a conveyance path having a space for holding a solvent atmosphere formed by evaporation of a film forming material discharged to a flushing area formed on a pallet. The pallet is being transported. Therefore, it is possible to reliably prevent the film forming material applied to the substrate from being dried in the pallet transport process.

  Further, the droplet discharge device according to the present invention applies a stage on which a pallet on which a substrate is placed and a film forming material for forming a predetermined film to the substrate on the pallet placed on the stage. A droplet discharge head for controlling the operation of the droplet discharge head, and a droplet from the droplet discharge head to a flushing area formed on the pallet based on the control by the control unit. And a flushing means for performing flushing by discharging the liquid.

  According to this droplet discharge device, droplets are discharged to the flushing area formed on the pallet to perform flushing. Therefore, it is not necessary for the droplet discharge device itself to include a flushing area or a means for collecting droplets discharged to the flushing area, and the structure of the droplet discharge device is simplified and the maintenance of the droplet discharge device is facilitated. At the same time, the droplet discharge device can be miniaturized. Further, the droplets discharged to the flushing area formed on the pallet are evaporated, so that a solvent atmosphere of the film forming material is formed on the pallet. Therefore, for example, it is possible to appropriately prevent the already-applied film forming material from being dried during the process of applying the film forming material.

  Further, the liquid droplet ejection apparatus is configured such that when the control unit applies the film forming material to the substrate, the flushing unit ejects a liquid droplet to the flushing area and performs flushing. The operation of the ejection head is controlled.

  According to this droplet discharge device, when the film forming material is applied to the substrate, the droplet is discharged to the flushing area formed on the pallet to perform the flushing. Accordingly, it is possible to appropriately prevent the ejection failure of the droplet ejection head and uniformly apply the film forming material with high accuracy.

  A pallet according to the present invention is a pallet used when a predetermined film is formed on a substrate using an ink jet type droplet discharge device, and includes a substrate mounting portion on which the substrate is mounted; And a flushing area used for flushing by the droplet discharge device.

  According to this pallet, the flushing area used for flushing by the droplet discharge device is provided. Therefore, when the film forming material discharged to the flushing area evaporates, a solvent atmosphere of the film forming material is formed on the upper part of the substrate placed on the pallet. Therefore, it is possible to appropriately prevent the film forming material applied on the substrate placed on the pallet from being naturally dried.

  The pallet according to the present invention is characterized in that the flushing area is formed at least on an outer peripheral portion of the substrate platform along the substrate platform. According to this pallet, it is possible to appropriately prevent the peripheral portion of the substrate from being dried more easily than the central portion of the substrate.

  The pallet according to the present invention is characterized in that a plurality of the substrates are placed on the substrate placing portion. According to this pallet, since a plurality of substrates are mounted on the substrate mounting portion, for example, by performing processing for forming a predetermined film on a small substrate in units of pallets, work efficiency can be improved appropriately. Can do.

  Hereinafter, a film forming apparatus according to an embodiment of the present invention will be described with reference to the drawings. In the following, a case where a liquid crystal display device is manufactured using the film forming apparatus according to the embodiment of the present invention will be described as an example.

  FIG. 1 is a diagram showing an example of the configuration of a film forming apparatus according to an embodiment of the present invention. As shown in FIG. 1, a film forming apparatus (liquid crystal display device production line) 100 includes a cleaning device 102, a surface treatment device 104, a droplet discharge device 106, a drying device 108, a baking device 110, and a rubbing used in each process. The apparatus 112 includes a belt conveyor BC that connects each apparatus, a driving apparatus 116 that drives the belt conveyor BC, and a control apparatus 114 that controls the entire liquid crystal display device production line 100. In addition, the cleaning device 102, the surface treatment device 104, the droplet discharge device 106, the drying device 108, the baking device 110, and the rubbing device 112 are arranged along the belt conveyor BC. Further, as shown in FIG. 1, a space (airtight space) 118 that maintains airtightness is formed between the droplet discharge device 106 and the drying device 108 by covering the belt conveyor BC with a predetermined member. ing.

  The control device 114 is connected to the cleaning device 102, the surface treatment device 104, the droplet discharge device 106, the drying device 108, the baking device 110, the rubbing device 112, and the driving device 116. The driving device 116 drives the belt conveyor BC based on a control signal from the control device 114, and a substrate of a liquid crystal display device (hereinafter simply referred to as “substrate”) placed on a pallet described later is referred to as a cleaning device 102. Then, it is conveyed to the surface treatment device 104, the droplet discharge device 106, the drying device 108, the baking device 110, and the rubbing device 112. In the cleaning apparatus 102, a process for cleaning the substrate is performed. In the surface treatment apparatus 104, a process for improving the lyophilicity (wetting property) of the substrate surface is performed (surface modification process). Is a process of applying an alignment film material on the substrate, that is, a process of discharging droplets containing the alignment film material on the substrate. Further, the drying apparatus 108 performs a process of temporarily drying the alignment film material, the baking apparatus 110 performs the process of baking the dried alignment film material, and the rubbing apparatus 112 performs the alignment film rubbing process. Is called.

  FIG. 2 is a diagram schematically showing the configuration of an ink jet type droplet discharge device 106 used as a droplet discharge device according to an embodiment of the present invention. The droplet discharge device 106 includes a base 31, a pallet moving unit 32, a head moving unit 33, a droplet discharge head 34, a liquid supply unit 35, a control device (control unit) 40, and the like. As shown in FIG. 2, the base 31 is provided with a pallet moving means 32 for moving the pallet 50 on which a plurality of substrates P are placed, and a head moving means 33 for moving the droplet discharge head 34.

  As shown in FIG. 2, the pallet moving means 32 has a guide rail 36 disposed on the base 31 along the Y-axis direction. The pallet moving means 32 is configured to move the slider 37 along the guide rail 36 by, for example, a linear motor (not shown). A stage 39 that holds a pallet 50 on which a plurality of substrates P are placed is fixed on the slider 37. The stage 39 has a known suction holding means (not shown), and the suction holding means is operated to suck and hold the pallet 50 on which the plurality of substrates P are placed on the stage 39. The pallet 50 on which the plurality of substrates P are placed is accurately positioned and held at a predetermined position on the stage 39 by, for example, positioning pins (not shown) of the stage 39.

  The head moving means 33 includes a pair of mounts 33a and 33a standing on the rear side of the base 31, and a travel path 33b provided on the mounts 33a and 33a. The travel path 33b is arranged in the X-axis direction. That is, they are arranged along a direction perpendicular to the Y-axis direction, which is the moving direction of the pallet 50 in the pallet moving means 32 described above. The travel path 33b is formed by a holding plate 33c passed between the gantry 33a and 33a and a pair of guide rails 33d and 33d provided on the holding plate 33c. The length of the guide rails 33d and 33d is as follows. A carriage 42 on which the droplet discharge head 34 is mounted is movably held in the direction. The carriage 42 is configured to run on the guide rails 33d and 33d by the operation of a linear motor (not shown) or the like, thereby moving the droplet discharge head 34 in the X-axis direction. The carriage 42 can move in the length direction of the guide rails 33d, 33d, that is, in the X-axis direction, for example, in units of 1 μm. Such movement is controlled by the control device 40.

  The droplet discharge head 34 is rotatably attached to the carriage 42 via an attachment portion 43. The mounting portion 43 is provided with a motor 44. The droplet discharge head 34 has a support shaft (not shown) connected to the motor 44, and the droplet discharge head 34 can rotate in the circumferential direction. Yes. Further, the motor 44 is also connected to the control device 40, and thereby the rotation of the droplet discharge head 34 in the circumferential direction is controlled by the control device 40.

  The droplet discharge head 34 has a substantially rectangular bottom shape, and is arranged in a rectangular shape with nozzles N (nozzle holes 18) aligned vertically and horizontally as shown in FIG. In addition, each nozzle N (nozzle hole 18) is provided with a piezoelectric element (not shown) independently, and the discharge operation and the like are performed independently.

  The liquid supply means 35 includes a liquid supply source (tank) 45 that supplies the alignment film material to the droplet discharge head 34 and a liquid supply tube 46 that supplies the liquid from the liquid supply source 45 to the droplet discharge head 34. It is configured. The control device 40 is configured by a computer or the like, and the position information of the droplet discharge head 34, that is, the position (X coordinate) of the droplet discharge head 34 on the guide rails 33d and 33d and the nozzles at that time. The position (X coordinate) is detected, and the detected position is stored. Further, based on the position of each nozzle stored in the control device 40, control is performed to cause each nozzle to perform a normal discharge operation, flushing, or the like.

  FIG. 4 is a view showing an example of a pallet according to the embodiment of the present invention. As shown in FIG. 4, the pallet 50 is provided with a substrate mounting part 52 for mounting a plurality of substrates P and a flushing area 54 used for flushing the droplet discharge device 106. As shown in FIG. 4, the flushing area 54 is formed on the outer periphery of the substrate platform 52 so as to surround the substrate platform 52. In the droplet discharge device 106, flushing is performed by discharging droplets to the flushing area 54. In the pallet 50, the alignment film material droplets discharged to the flushing area 54 evaporate to form a solvent atmosphere of the alignment film material on the substrate mounting portion 52.

  Here, the purpose of performing the flushing (discarding discharge) operation in the droplet discharge head of the droplet discharge apparatus is as follows. Droplet discharge heads, when the time from when the discharge of the droplet is suspended to when the discharge is restarted becomes long, the discharge direction of the droplet is disturbed, the discharge amount becomes too large, the discharge amount becomes too small, etc. This phenomenon tends to occur and the droplet discharge operation tends to become unstable. That is, the droplet discharge head has a tendency that immediately after the discharge of the droplet is started, the discharge state is not stable and the discharged droplet does not fly straight, the discharge amount is not stable. For this reason, after the discharge state is stabilized by the flushing of the droplet discharge head, the discharge is started to the discharge target such as the substrate. In other words, by performing flushing, it is possible to form a uniform film while stabilizing ejection, and as shown in FIG. 4, by using a pallet provided with a flushing area, the configuration of the droplet ejection device can also be improved. It is simplified.

  Next, a manufacturing process of a liquid crystal display device in a liquid crystal display device manufacturing line using the droplet discharge device according to the embodiment will be described with reference to a flowchart of FIG.

  First, the substrate P on which the alignment film is formed, for example, the substrate P on which the segment electrode is formed, is placed on the substrate mounting portion 52 of the pallet 50. For example, as shown in FIG. 4, a plurality of substrates P are arranged on the substrate platform 52 at a predetermined interval. The number of substrates P arranged on the substrate platform 52 can be arbitrarily changed based on, for example, the size of the substrate P, the processing capability of each device constituting the liquid crystal display device production line 100, and the like. .

  Next, the board | substrate arrange | positioned at the board | substrate mounting part 52 of the pallet 50 is wash | cleaned (refer step S10 and FIG. 5). That is, the pallet 50 transported by the belt conveyor BC is taken into the cleaning device 102, and each of the substrates P placed on the substrate placement part 52 of the pallet 50 is cleaned using an alkaline detergent, pure water or the like. Then, a process of drying at a predetermined temperature and time, for example, 80 to 90 ° C. for 5 to 10 minutes is performed. The cleaned and dried substrate P is placed on the pallet 50 and conveyed to the surface treatment device 104 by the belt conveyor BC.

  Next, a process (surface modification process) for improving lyophilicity (wetability) is performed on the surface of the substrate cleaned in step S10 (step S11). That is, the pallet 50 conveyed to the surface treatment apparatus 104 by the belt conveyor BC is taken into the surface treatment apparatus 104. Then, each of the plurality of substrates P placed on the pallet 50 is subjected to a process for improving the lyophilicity of the surface of the substrate P. For example, when a device that generates ozone by ultraviolet rays (UV) is used as the surface treatment device 104, UV ozone treatment that removes water repellent components and organic components on the substrate surface by ozone generated by ultraviolet rays is performed. Apply. In the case where a corona generating device is used as the surface treatment device 104, the lyophilicity (wetting property) of the substrate P is improved by performing a corona discharge treatment for removing the water repellent component and the organic component on the substrate surface. .

  Next, an alignment film material is applied on the substrate that has been subjected to the treatment for improving the lyophilicity (wetting property) in step S11 (step S12). That is, first, the pallet 50 conveyed to the droplet discharge device 106 by the belt conveyor BC is placed on the stage 39 and taken into the droplet discharge device 106. In the droplet discharge device 106, the alignment film material accommodated in the liquid supply source 45 is discharged through the droplet discharge head 34 based on the control by the control device 40, and the alignment film material is applied onto the substrate P. To do.

Here, in the droplet discharge device 106, when applying the alignment film material to the substrate P placed on the substrate placement portion 52 of the pallet 50, first, based on the control by the control device 40, the pallet 50. Flushing is performed by discharging droplets of the alignment film material to the flushing area 54 formed in the first through the droplet discharge head 34. That is, the alignment film material in the droplet discharge device 106 is P ₁₂ , P ₁₂ in order from the substrate P ₁₁ arranged on the upper left side of the substrate mounting portion 52 of the pallet 50 in the drawing, as indicated by arrows in FIG. _13, along the direction of P ₁₄ to the arrow applied on the substrate P in each row. Therefore, before applying the alignment film material to the substrates P ₁₁ to P ₁₄ arranged in one row, first, the liquid is put into the flushing area 54 (the flushing area 54 formed in the vicinity of the substrate P ₁₁ ). Flushing is performed by discharging droplets of the alignment film material through the droplet discharge head 34. Next, after the alignment film material is applied to the substrates P ₁₁ to P ₁₄ and before a line feed is made, the liquid is discharged to the flushing area 54 formed in the vicinity of the substrate P ₁₄ via the droplet discharge head 34. Drop the droplet and flush again.

  Next, based on the control by the control device 40, the droplet moving head 34 is moved by the head moving unit 33 to a position corresponding to the substrate P arranged in the row adjacent to the row in which the substrates P 11 to P 14 are arranged. Move and do a line break. At this time, before the droplets of the alignment film material are discharged onto the substrate P arranged in the row, first, the droplets of the alignment film material are discharged to the flushing area 54 based on the control by the control device 40. I do. Then, the alignment film material is applied to each of the substrates P arranged in the row, the alignment film material is applied to the last substrate P in the row, and then a droplet of the alignment film material is applied to the flushing area 54. Discharge and flush again. Thereafter, the droplet discharge head 34 is moved to a position corresponding to the next row, a line feed is performed, and the same processing as described above is repeated, whereby the substrate placed on the substrate placement portion 52 of the pallet 50. An alignment film material is applied to each P. In the droplet discharge device 106, the alignment film material is applied for each row, but the alignment film material may be applied for each column. In that case, flushing is performed before and after the rearrangement before applying the alignment film material to the first substrate and after each application.

  Here, in the pallet 50, a flushing area 54 is formed along the substrate platform 52 as shown in FIGS. 4 and 6. Accordingly, the alignment film material discharged to the flushing area 54 spreads in the flushing area 54, so that the alignment film material is applied to the outer peripheral portion of the substrate mounting portion 52. Further, the alignment film material in the flushing area 54 evaporates, thereby forming an atmosphere of the alignment film material with a solvent. That is, the alignment film material is applied to each of the substrates P arranged on the substrate mounting portion 52 of the pallet 50 in a solvent atmosphere of the alignment film material formed by evaporation of the alignment film material in the flushing area 54. Is done. The substrate P coated with the alignment film material is transferred from the stage 39 to the belt conveyor BC, and is conveyed through the airtight space 118 to the drying device 108 via the belt conveyor BC. In addition, the airtight space 118 is filled with a solvent atmosphere formed by evaporation of the alignment film material in the flushing area 54. That is, since the alignment film material in the flushing area 54 evaporates even while the pallet 50 is conveyed via the belt conveyor BC, the evaporated alignment is contained in the airtight space 118 where the airtightness is maintained. The solvent atmosphere of the film material is filled, and the alignment film material is prevented from drying during conveyance.

  Next, a process of temporarily drying the alignment film material applied to the substrate is performed (step S13). That is, the pallet 50 conveyed to the drying device 108 in the airtight space 118 by the belt conveyor BC is taken in, and the plurality of substrates P placed on the pallet 50 are temporarily dried at 60 to 100 ° C., for example. In addition, after the applied alignment film material is temporarily dried, the pallet 50 on which the plurality of substrates P are placed is transferred to the belt conveyor BC and is conveyed to the baking apparatus 110 by the belt conveyor BC.

  Next, a process of baking the alignment film material that has been temporarily dried is performed (step S14). That is, the pallet 50 conveyed to the baking apparatus 110 by the belt conveyor BC is taken into the baking apparatus 110, and the plurality of substrates P placed on the pallet 50 are baked at 180 to 250 ° C., for example. In addition, after baking is performed and the alignment film is formed, the pallet 50 on which the plurality of substrates P are placed is moved to the belt conveyor BC and is conveyed to the rubbing device 112 by the belt conveyor BC.

  Next, a process of rubbing the alignment film formed on the substrate is performed (step S15). That is, the pallet 50 conveyed to the rubbing device 112 by the belt conveyor BC is taken into the rubbing device 112, and the alignment film formed on the substrate P placed on the pallet 50 is used, for example, with cloth. A rubbing process is performed by rubbing. After the rubbing process is performed on the alignment film, the pallet 50 on which the plurality of substrates P are placed is moved to the belt conveyor BC and is stored in a substrate storage cassette (not shown) by the belt conveyor BC. Further, the substrate P accommodated in a substrate accommodation cassette or the like (not shown) is bonded to another substrate on which a color filter, a black matrix, an overcoat film, a common electrode, and an alignment film are formed in an assembly apparatus (not shown). A liquid crystal display device is manufactured by injecting liquid crystal between the substrate P and another substrate.

  Next, an electronic apparatus equipped with a liquid crystal display device manufactured using the film forming apparatus according to the embodiment of the present invention will be described. FIG. 7 is a perspective view showing an example of an electronic apparatus equipped with a liquid crystal display device manufactured using the film forming apparatus according to the embodiment of the present invention.

  FIG. 7A is a diagram illustrating an example of a mobile phone equipped with a liquid crystal display device. As shown in FIG. 7A, a liquid crystal display device 141 manufactured using the film forming apparatus according to the embodiment of the present invention is mounted as a display screen of the mobile phone 140. FIG. 7B is a diagram illustrating an example of a portable information terminal processing device (for example, a portable word processor or a portable personal computer) equipped with a liquid crystal display device. As shown in FIG. 7B, the information processing apparatus 150 includes a liquid crystal manufactured using the information processing apparatus main body 151, an input unit 152 including a keyboard and the like, and the film forming apparatus according to the embodiment of the present invention. A display device 153 is provided. Further, FIG. 7C is a diagram showing an example of a timepiece equipped with a liquid crystal display device. As shown in FIG. 7C, a liquid crystal display device 161 manufactured using the film forming apparatus according to the embodiment of the present invention is mounted as a display screen of the timepiece 160.

  According to the film forming apparatus according to the embodiment of the present invention, when the alignment film material is applied to the plurality of substrates placed on the pallet in the droplet discharge device, the substrate is arranged in one row. After the alignment film material is applied, flushing is performed by discharging droplets of the alignment film material to the flushing area formed on the pallet before and after the line feed. Therefore, a solvent atmosphere is formed on the pallet on which the plurality of substrates are placed, that is, the alignment film material discharged to the flushing area is evaporated on the plurality of substrates. Therefore, even when a plurality of substrates are placed on the pallet, it is possible to prevent drying of the applied alignment film material on the substrate on which the alignment film material has already been applied. Thus, the alignment film can be efficiently formed.

  In addition, according to the film forming apparatus according to the embodiment of the present invention, an airtight space is formed between the droplet discharge device and the drying device by covering the belt conveyor with a predetermined member. The space is filled with the solvent atmosphere of the alignment film material. Therefore, it is possible to prevent the substrate placed on the pallet from being dried while the pallet on which the plurality of substrates are placed is transported from the droplet discharge device to the drying device. For this reason, the film thickness of the alignment film becomes non-uniform based on the drying unevenness, that is, the alignment film material in the outer peripheral part of the substrate is dried, so that the alignment film material in the central part of the substrate moves to the outer peripheral part. In addition, it is possible to appropriately prevent the occurrence of smearing in which the thickness of the central portion is thin and the thickness of the outer peripheral portion is thick.

  Further, according to the droplet discharge device according to the above-described embodiment, the flushing is performed by discharging droplets of the alignment film material to the flushing area formed on the pallet on which a plurality of substrates are placed. Therefore, it is not necessary for the droplet discharge device to include a flushing area or a droplet collection means for collecting droplets ejected by flushing. Therefore, the structure of the droplet discharge device can be simplified, and the droplet discharge device can be easily downsized by reducing the number of constituent members of the droplet discharge device.

  Further, according to the droplet discharge device according to the above-described embodiment, before applying the alignment film material to the substrate, the alignment film material is discharged to the flushing area formed on the pallet to perform the flushing. ing. Accordingly, the alignment film material discharged to the flushing area evaporates to form a solvent atmosphere of the alignment film material, so that it is possible to appropriately prevent the nozzle of the droplet discharge head from drying. Therefore, ejection defects due to nozzle clogging or the like can be reduced, and an appropriate amount of alignment film material can be accurately applied to each substrate.

  Moreover, according to the pallet which concerns on the above-mentioned embodiment, the board | substrate mounting part and the flushing area which mount a some board | substrate are provided. That is, before the droplet discharge device applies the alignment film material to the substrate, the droplets of the alignment film material are discharged to the flushing area formed on the pallet to perform flushing, and the alignment film material discharged to the flushing area is By evaporation, a solvent atmosphere of the alignment film material is formed. Therefore, even when the alignment film material is applied in order to each of the plurality of substrates placed on the substrate placement portion, the alignment film is applied to all the substrates on the substrate on which the alignment film material has already been applied. It is possible to appropriately prevent the applied alignment film material from being dried before the material is applied. As a result, a plurality of substrates can be processed in batches in units of pallets, and an alignment film can be efficiently formed using a droplet discharge device, thereby improving work efficiency appropriately. it can.

  The liquid crystal display device according to the above-described embodiment is manufactured using the film forming apparatus according to the above-described embodiment. That is, since an alignment film having a uniform thickness formed by preventing the occurrence of drying unevenness is provided, the occurrence of display defects due to a non-uniform film thickness or the like is reduced. Accordingly, the manufacturing cost of the liquid crystal display device can be reduced and the liquid crystal display device can be efficiently manufactured.

  Moreover, according to the electronic device according to the above-described embodiment, since the liquid crystal display device manufactured using the film forming apparatus according to the above-described embodiment is mounted, the yield of the electronic device can be improved. In addition, since the electronic device can be efficiently produced, the manufacturing cost of the electronic device itself can be reduced, and the price of the electronic device can be reduced.

  In addition, according to the film forming method of the present invention, a plurality of substrates are placed on a pallet, the alignment film material is discharged to the flushing area formed on the pallet, and after flushing, the alignment film material is applied to the substrate. It is applied. Accordingly, it is possible to process a plurality of substrates in a pallet unit, and it is possible to perform flushing by discharging droplets to a flushing area formed on the pallet, so that work can be performed efficiently. That is, since the flushing and the process of applying the alignment film material can be performed as a series of processes, work efficiency can be improved appropriately.

In the pallet according to the above-described embodiment, the flushing area is formed on the outer peripheral portion of the substrate mounting portion. However, the formation position of the flushing area is not limited to the outer peripheral portion of the substrate mounting portion. . For example, as shown in FIG. 8, a flushing area is provided to flush a row of a substrate for each line feed, and a flushing area along a row of substrates may not be provided. Further, for example, the most since the first alignment layer material substrate is easily driest coated, in addition to the flushing area shown in FIG. 6, further flushing area is provided so as to surround the substrate P ₁₁ shown in FIG. 6 It may be. In other words, the flushing area is formed in any position and in any shape as long as it can efficiently prevent drying based on the degree of drying depending on the viscosity of the ink containing the alignment film material, the type of solvent, and the like. May be.

  In the pallet according to the above-described embodiment, a plurality of substrates are placed on the substrate platform, but a single substrate may be placed on the substrate platform. Further, in the film forming apparatus according to the above-described embodiment, an airtight space is formed between the droplet discharge device and the drying device, but the alignment film material discharged to the flushing area formed on the pallet is The space need not be an airtight space as long as it can maintain a solvent atmosphere formed by evaporation.

  In the film forming apparatus according to the above-described embodiment, the case where the alignment film of the liquid crystal display device is formed has been described as an example. However, the film forming apparatus may be used in other cases. For example, it may be used when discharging a resist, an overcoat, or the like, or may be used when forming a color filter, an organic EL display, or the like.

It is a figure which shows an example of the liquid crystal display device manufacturing line which concerns on embodiment. 1 is a schematic view of an ink jet type ejection device according to an embodiment. It is the schematic of the nozzle which concerns on embodiment. It is a figure which shows an example of the pallet which concerns on embodiment. It is a flowchart which manufactures the liquid crystal display device which concerns on embodiment. It is a figure for demonstrating the process which apply | coats the alignment film material which concerns on embodiment. It is a perspective view of the electronic device carrying the liquid crystal display device which concerns on embodiment. It is a figure which shows another example of the pallet which concerns on this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 50 ... Pallet, 52 ... Substrate mounting part, 54 ... Flushing area, 100 ... Film formation apparatus (liquid crystal display device production line), 102 ... Cleaning apparatus, 104 ... Surface treatment apparatus, 106 ... Droplet discharge apparatus, 108 ... Drying 110, baking device, 112 ... rubbing device, 114 ... control device, 116 ... driving device, 118 ... airtight space.

Claims (13)

A droplet discharge apparatus having a droplet discharge head for discharging a film forming material for forming a predetermined film on a substrate placed on a pallet;
A drying device for drying the film forming material applied on the substrate by the droplet discharge device;
A film forming apparatus comprising: a transport device that connects between the droplet discharge device and the drying device and transports the pallet;
The droplet discharge device includes:
When the film forming material is applied to the substrate placed on the pallet, a droplet of the film forming material is discharged from the droplet discharge head to the flushing area formed on the pallet. A film forming apparatus characterized by performing flushing. A plurality of the substrates are placed on the pallet,
The droplet discharge device includes:
2. The flushing is performed by discharging droplets of the film forming material to the flushing area before or after applying the film forming material to a plurality of the substrates in the pallet. Film forming apparatus. The droplet discharge device includes:
3. The film forming apparatus according to claim 2, further comprising performing flushing by discharging droplets of the film forming material to the flushing area after a line feed or line break. The transfer device
A transport path having a space for holding an atmosphere formed by the film forming material discharged to the flushing area, and transporting the pallet from the droplet discharge device to the drying device via the transport path. The film forming apparatus according to any one of claims 1 to 3, wherein the film forming apparatus is characterized. An application step of applying the film forming material using a droplet discharge device for applying a film forming material for forming a predetermined film on the substrate;
A transporting process for transporting a pallet on which the substrate on which the film forming material has been applied in the coating process;
In a film forming method including a drying step of drying the film forming material applied on the substrate transferred in the transfer step,
The coating process includes
In the droplet discharge device, when the film forming material is applied to the substrate placed on the pallet, the droplet of the film forming material is discharged to a flushing area formed on the pallet. A film forming method comprising a step of performing flushing. A plurality of the substrates are placed on the pallet,
In the application step,
After or before applying the film forming material to the substrate placed on the pallet, including a step of performing flushing by discharging droplets of the film forming material to the flushing area. 6. The film forming method according to claim 5, wherein: In the application step,
The film forming method according to claim 6, further comprising a step of performing flushing by discharging a droplet of the film forming material to the flushing area after a line feed or line break. In the transport process,
6. The pallet on which a plurality of the substrates are placed is transported through a space that holds an atmosphere formed by the film forming material discharged to the flushing area in the coating step. The film forming method according to claim 7. A stage for placing a pallet on which a substrate is placed;
A droplet discharge head for applying a film forming material for forming a predetermined film on a substrate on the pallet placed on the stage;
Control means for controlling the operation of the droplet discharge head;
And a flushing unit that performs flushing by ejecting droplets from the droplet ejection head to a flushing area formed on the pallet based on the control by the control unit. apparatus. The control means includes
The operation of the droplet discharge head is controlled such that when the film forming material is applied to the substrate, the flushing unit discharges droplets to the flushing area to perform flushing. Item 10. A droplet discharge device according to Item 9. A pallet used when a predetermined film is formed on a substrate using an ink jet type droplet discharge device,
A substrate mounting portion for mounting the substrate;
And a flushing area used for flushing by the droplet discharge device. The flushing area is
The pallet according to claim 11, wherein the pallet is formed at least on an outer peripheral portion of the substrate platform along the substrate platform. The pallet according to claim 11 or 12, wherein a plurality of the substrates are mounted on the substrate mounting portion.

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