JP2015184396A - lens array manufacturing apparatus and lens array manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lens array manufacturing apparatus in which contamination with foreign matter in liquid resin to become a lens is suppressed.SOLUTION: In a lens array manufacturing apparatus, forming means forms partition walls on a substrate, removing means removes foreign matter between the partition walls, and discharge coating means discharges or coats liquid resin to become a lens between the partition walls after the foreign matter is removed by the removing means.

Description

  The present invention relates to a lens array manufacturing apparatus and a lens array manufacturing method.

  In Patent Document 1, an object is to provide a lens manufacturing apparatus capable of manufacturing a lens having anisotropy in a predetermined direction, and a concavo-convex portion is formed by cutting a surface of a workpiece. Each of the unevenness forming means, the resin supply means for supplying the lens resin onto the surface of the workpiece, the resin curing means for curing the supplied lens resin, the unevenness forming means, the resin supply means, and the resin curing means Forming a concavo-convex portion extending in a predetermined direction, supplying a lens resin between adjacent concavo-convex portions, and curing the supplied lens resin. And a control means for driving and controlling the unevenness forming means, the resin supply means, the resin curing means, and the moving means.

  In Patent Document 2, it is an object to eliminate a soldering failure due to a foreign object, and a transfer conveyor for transferring a substrate on which chip components and resistance components are set, an automatic soldering device, and an unloading end of the transfer conveyor and automatic soldering. It is disclosed that an air nozzle having an air blowing hole is disposed below the sub conveyor, and the air blowing hole of the air nozzle is directed to the pattern surface of the substrate. Has been.

JP 2013-125044 A JP 05-308183 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide a lens array manufacturing apparatus and a lens array manufacturing method in which foreign matters are prevented from being mixed into a liquid resin serving as a lens.

The gist of the present invention for achieving the object lies in the inventions of the following items.
According to a first aspect of the present invention, there is provided a forming means for forming partition walls on a substrate, a removing means for removing foreign matter between the partition walls, and a liquid resin that becomes a lens between the partition walls after the foreign matter is removed by the removing means. An apparatus for manufacturing a lens array, comprising: a discharge application means for discharging or applying.

  According to a second aspect of the present invention, in the lens array manufacturing apparatus according to the first aspect, the removing unit, the forming unit, and the discharge coating unit are arranged in this order.

  The invention according to claim 3 is characterized in that the removing means further comprises a windproof means for removing foreign matter by wind and preventing the discharge applying means from wind by the removing means. This is a lens array manufacturing apparatus.

  According to a fourth aspect of the present invention, in the lens array manufacturing apparatus according to the third aspect, the windproof means is disposed between the forming means and the discharge application means.

  A fifth aspect of the present invention is the lens array manufacturing apparatus according to the first aspect, wherein the forming unit, the removing unit, and the discharge coating unit are arranged in this order.

  The invention according to claim 6 is characterized in that the removing means removes foreign matter by wind and is disposed between the removing means and the discharge applying means, and a windproof means for preventing the discharge applying means from being blown by the removing means. The lens array manufacturing apparatus according to claim 5, further comprising:

  A seventh aspect of the present invention is the lens array manufacturing apparatus according to any one of the third, fourth, and sixth aspects, wherein the windproof means is a planar wall or a wall surrounding the discharge application means.

  The lens array according to any one of claims 1 to 7, further comprising a second removing unit that removes foreign matter in a groove forming a partition wall by the forming unit. It is a manufacturing device.

  A ninth aspect of the present invention is the lens array manufacturing apparatus according to any one of the first to eighth aspects, comprising a plurality of the forming means, the removing means, and the discharge applying means.

  The invention according to claim 10 is the lens array manufacturing apparatus according to any one of claims 1 to 9, wherein the removing means removes foreign matter by blowing wind or sucking wind. is there.

  According to an eleventh aspect of the present invention, the distance between the substrate and the windproof means is not less than the height of the partition and not more than the lens height. The lens array manufacturing apparatus according to any one of Claims 8 to 10, which is dependent on these claims.

  According to a twelfth aspect of the present invention, a forming step of forming partition walls on the substrate, a removing step of removing foreign matter between the partition walls, and a liquid resin that becomes a lens between the partition walls after the foreign matter is removed by the removing step. A lens array manufacturing method comprising a discharge application step of discharging or applying.

  According to the lens array manufacturing apparatus of the first aspect, it is possible to prevent foreign matters from being mixed into the liquid resin serving as the lens.

  According to the lens array manufacturing apparatus of the second aspect, the partition wall can be formed after removing the foreign matter.

  According to the lens array manufacturing apparatus of the third aspect, the discharge application unit can be prevented from being blown by the removing unit.

  According to the lens array manufacturing apparatus of the fourth aspect, the discharge application unit can be prevented from being blown by the removing unit.

  According to the lens array manufacturing apparatus of the fifth aspect, foreign matters can be removed after the partition walls are formed.

  According to the lens array manufacturing apparatus of the sixth aspect, the liquid resin can be discharged or applied after removing the foreign matter.

  According to the lens array manufacturing apparatus of the seventh aspect, the discharge application unit can be prevented from the wind by the removing unit.

  According to the lens array manufacturing apparatus of the eighth aspect, it is possible to remove foreign matters in the grooves forming the partition walls.

  According to the lens array manufacturing apparatus of the ninth aspect, a plurality of lenses can be generated.

  According to the lens array manufacturing apparatus of the tenth aspect, foreign matter can be removed by blowing wind or sucking wind.

  According to the lens array manufacturing apparatus of the eleventh aspect, the discharge applying means can be prevented from the wind by the removing means without destroying the partition wall by the wind preventing means.

  According to the lens array manufacturing method of the twelfth aspect, it is possible to suppress foreign matters from being mixed into the liquid resin to be a lens.

It is explanatory drawing which shows the example of arrangement | positioning of each structure in 1st Embodiment. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 2nd Embodiment. It is explanatory drawing which shows the example of the lens for determining the distance between a board | substrate and a wind barrier. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 3rd Embodiment. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 4th Embodiment. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 5th Embodiment. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 6th Embodiment. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 7th Embodiment. It is explanatory drawing which shows the example of arrangement | positioning of each structure in 8th Embodiment. It is explanatory drawing which shows the example of the method of forming a partition and manufacturing a lens array. It is explanatory drawing which shows the example of curvature control.

First, before explaining the present embodiment, a technique that is a premise thereof will be described. This description is intended to facilitate understanding of the present embodiment.
A lens array is an optical system in which a plurality of element lenses (lens elements) that form an erect image or an inverted image are arranged in parallel, and the images are overlapped to form a single continuous image as a whole. It includes lenticular lenses, cylindrical lenses, etc. with lenses arranged. For example, a three-dimensional image (also referred to as 3D) can be expressed, and a plurality of images can be displayed (also referred to as changing) by changing the line of sight.
As a manufacturing method of the lens array, there is a partition pinning method. The partition pinning method and lens width and curvature control by the partition pinning method will be described with reference to FIGS. 10 and 11.
FIG. 10 is an explanatory diagram showing an example of a method of manufacturing a lens array by forming partition walls (principle of partition pinning method). Here, in order to simplify the description, a partition wall is formed with one blade 110 on the substrate 100 (for example, a resin substrate), and the resin is dropped with one resin dropping device 1440.
As illustrated in FIG. 10A1, the substrate 100 is scanned with the blade 110 to form a groove 1032 (a groove 1032 is cut into the substrate 100), and partition walls 1032a are formed at both ends of the groove 1032. A partition wall 1032b is formed. The example of FIG. 10A2 shows a cross section of a scene in which the blade 110 has cut into the substrate 100. FIG.
Next, as illustrated in FIG. 10B, the blade 110 is moved by a distance of a pitch 1430, and incisions are made (groove 1034, groove 1036) to form partition walls 1034a, 1034b, 1036a, 1036b, and the like. The pitch 1430 is a distance between the partition walls and is a lens width. That is, the lens width is controlled by controlling the pitch 1430.
As illustrated in FIG. 10C, between the partition walls (for example, between the partition walls 1032b and 1034a), UV curable resin 1062 and the like are ejected (ejection) by the resin dropping device 1440. Curvature is controlled by the amount of resin discharged. Examples of the liquid resin include NOA65 (manufactured by Norland Products), which is a UV (Ultra Violet radiation) curable resin. The UV curable resin is a synthetic resin that chemically changes from a liquid to a solid in response to light energy of ultraviolet rays. Moreover, the polymer (thermoplastic resin) melted by heat may be used.
As illustrated in FIG. 10D, the lens is formed by curing the discharged or applied liquid resin as in the example of FIG. Specifically, if it is a UV curable resin, it is cured by UV light irradiation of a UV light source 1190. In the case of using a hot-melted thermoplastic resin, it is cured by cooling. Of course, the liquid resin is transparent in a cured state.
FIG. 11 is an explanatory diagram showing an example of curvature control (pinning effect by a bent surface). As shown in the example of FIG. 11A, the contact angle of the liquid interface of the liquid (such as the UV curable resin 1062) on the flat plate-like surface (substrate 100) is defined as θ. As shown in the example of FIG. 11B, when there is liquid at a plate-like corner (angle α formed with a plane), the liquid cannot move until “contact angle> θ + α” is satisfied by pitch control. Therefore, as the role of the partition wall apex portion of the substrate 100, the contact angle can be any angle from θ to θ + α, and the curvature can be controlled by the amount of droplets (for example, “J. F. Oliver et. al, J. Colloids and interface Sci, 59, 568 (1977) ").
That is, in this partition wall pinning method, the partition wall is formed by scratching the substrate with a sharp blade, and the flow of the fluid resin is suppressed by the pinning effect of the partition wall. Therefore, the lens pitch can be defined by forming the partition walls with a desired lens pitch. Furthermore, a lens having a desired shape can be formed by discharging a fluid resin between the partition walls. The curvature (focal length) of the lens is controlled by the volume of the fluid resin to be discharged.

  However, since this lens manufacturing method uses the surface tension of the fluid resin, if there is foreign matter (hereinafter referred to as dust) adsorbed on the substrate surface, the lens shape is distorted and scattered, resulting in optical characteristics. Will deteriorate. In addition, depending on the size of the dust and the position of the substrate surface, the fluid resin may get over the partition wall and hinder the pinning effect. Such dust may be suspended in the air, or may be generated from a substrate or a lens array manufacturing apparatus. In any case, in order to increase the reliability of the lens array to be manufactured, it is desirable to avoid the adhesion of dust to the substrate.

Hereinafter, examples of various preferred embodiments for realizing the present invention will be described with reference to the drawings.
In the embodiment described below, a blade 110 that forms a partition wall on a substrate 100, a resin discharge nozzle 130 that discharges a liquid resin, and an air blow 120 that removes dust are arranged close to each other (integrated). In the above-described partition wall pinning method, the liquid resin is discharged after the partition wall is formed on the entire surface of the substrate 100. However, the partition wall is formed by integrating the blade 110, the resin discharge nozzle 130, and the air blow 120. Then, the liquid resin is discharged.

<First Embodiment>
As shown in the example of FIG. 1, the lens array manufacturing apparatus according to the first embodiment removes foreign matter between a blade 110 that is an example of a forming unit that forms a partition on a substrate and a partition formed by the forming unit. An air blow 120, which is an example of a removal unit to be removed, and a resin discharge nozzle 130, which is an example of a discharge application unit that discharges or applies a liquid resin serving as a lens between the partition walls after foreign matter is removed by the removal unit. ing. Further, a forming step for forming a partition wall on the substrate 100 is performed by the blade 110, a removing step for removing foreign matter between the partition walls is performed by the air blow 120, and the foreign matter is removed by the removing step by the resin discharge nozzle 130. Thereafter, a discharge application step of discharging or applying a liquid resin to be a lens between the partition walls is performed.

The blade 110 and the resin discharge nozzle 130 perform the same processing as that in the partition pinning method described above.
The air blow 120 removes dust from the substrate 100 (particularly, between the partition walls where the lens is formed) by blowing air. Further, a device for collecting (attaching or sucking) dust scattered by blowing may be added.
FIG. 1 is an explanatory diagram illustrating an arrangement example of each component in the first embodiment. The example of FIG. 1A is a view of the positional relationship of the substrate 100, the blade 110, and the air blow 120 as viewed from the front. The air blow 120 is disposed next to the blade 110 (next to the front view) so as to blow away dust existing between the partition walls formed on the substrate 100.
The example of FIG. 1B is a view of the positional relationship of the substrate 100, the resin discharge nozzle 130, the blade 110, and the air blow 120 as viewed from the side, and the moving direction 180 moves the substrate 100 from right to left. Is the case. Therefore, the partition is formed from left to right. Instead of moving the substrate 100, the integrated resin discharge nozzle 130, blade 110, and air blow 120 may be moved in a direction opposite to the moving direction 180, or both may be moved in directions opposite to each other. Also good. That is, as long as the lens is formed by the resin discharge nozzle 130 after the dust is removed by the air blow 120, the moving main body and the moving direction are not limited. The same applies to the following embodiments.
When viewed from the side, the air blow 120, the blade 110, and the resin discharge nozzle 130 are arranged in this order. In order to reduce the influence of the wind on the liquid resin discharged or applied by the resin discharge nozzle 130, the air blow 120 (particularly the blowout port) and the resin discharge nozzle 130 (particularly the resin outlet) are arranged in a separated state. Yes.
Furthermore, it is desirable to direct the blowing direction of the air blow 120 forward (a direction away from the discharge nozzle).

<Second Embodiment>
FIG. 2 is an explanatory diagram illustrating an arrangement example of each component in the second embodiment. In addition, the same code | symbol is attached | subjected to the site | part of the same kind as 1st Embodiment, and the overlapping description is abbreviate | omitted (hereinafter the same).
The example of FIG. 2A is a view of the positional relationship of the substrate 100, the blade 110, the air blow 120, and the wind barrier 240 as viewed from the front. The example of FIG.2 (b) is the figure which looked at the positional relationship of the board | substrate 100, the resin discharge nozzle 130, the wind barrier 240, the blade 110, and the air blow 120 from the side surface. When viewed from the side, the air blow 120, the blade 110, the wind barrier 240, and the resin discharge nozzle 130 are arranged in this order. That is, the wind barrier 240 is disposed between the blade 110 and the resin discharge nozzle 130. The wind barrier 240 prevents the resin discharge nozzle 130 from being blown by the air blow 120. That is, the wind barrier 240 is provided to block the air flow so that the position of the liquid resin discharged or applied from the resin discharge nozzle 130 is not affected by the air blow 120.

Here, the wind barrier 240 is a planar wall.
The distance between the substrate 100 and the wind barrier 240 is preferably not less than the height of the partition and not more than the lens height. A gap 290 from the top of the partition wall to the lower side of the wind barrier 240 shown in the example of FIG. FIG. 3 is an explanatory diagram illustrating an example of a lens for determining the distance between the substrate 100 and the wind barrier 240. A groove 340 and a groove 342 are formed by the blade 110, and a partition 340a and a partition 340b, and a partition 342a and a partition 342b are formed on both sides thereof. Then, a liquid resin is discharged or applied between the partition wall 340b and the partition wall 342a to form the lens 300. A sag 310 indicates the distance from the substrate 100 to the apex of the lens 300. The lens size 320 is a distance from the vertex of the partition wall 340b (partition wall 342b) to the vertex of the lens 300. The gap 290 preferably has a lens size of 320 or less.
Further, the width of the wind barrier 240 (the width in FIG. 2A) is desirably a length equal to or shorter than the groove interval. This is because if the distance between the substrate 100 and the wind barrier 240 is equal to or smaller than the lens height, the adjacent lens may be destroyed if it is longer than the groove interval.

<Third Embodiment>
FIG. 4 is an explanatory diagram illustrating an arrangement example of each component in the third embodiment. The example shown in FIG. 4 is obtained by reversing the positional relationship between the blade 110 and the air blow 120 in the example shown in FIG.
The example of FIG. 4A is a view of the positional relationship of the substrate 100, the blade 110, and the air blow 120 as seen from the front.
The example of FIG. 4B is a view of the positional relationship of the substrate 100, the resin discharge nozzle 130, the air blow 120, and the blade 110 as viewed from the side, and the moving direction 180 moves the substrate 100 from right to left. Is the case. When viewed from the side, the blade 110, the air blow 120, and the resin discharge nozzle 130 are arranged in this order. In order to remove dust generated by the blade 110, an air blow 120 is disposed behind the blade 110.

<Fourth embodiment>
FIG. 5 is an explanatory diagram illustrating an arrangement example of each component according to the fourth embodiment. The example shown in FIG. 5 is obtained by reversing the positional relationship between the blade 110 and the air blow 120 in the example shown in FIG. Further, a wind barrier 240 is disposed between the resin discharge nozzle 130 and the air blow 120 in the example shown in FIG.
The example of FIG. 5A is a view of the positional relationship between the substrate 100, the blade 110, the air blow 120, and the wind barrier 240 as viewed from the front. The example of FIG. 5B is a view of the positional relationship among the substrate 100, the resin discharge nozzle 130, the wind barrier 240, the air blow 120, and the blade 110 viewed from the side. When viewed from the side, the blade 110, the air blow 120, the wind barrier 240, and the resin discharge nozzle 130 are arranged in this order. That is, the wind barrier 240 is disposed between the air blow 120 and the resin discharge nozzle 130. The wind barrier 240 prevents the resin discharge nozzle 130 from being blown by the air blow 120. That is, the wind barrier 240 is provided to block the air flow so that the position of the liquid resin discharged or applied from the resin discharge nozzle 130 is not affected by the air blow 120.

<Fifth embodiment>
FIG. 6 is an explanatory diagram illustrating an arrangement example of each component according to the fifth embodiment. In the example shown in FIG. 6, the wind barrier 240 in the example shown in FIG. The wind barrier 640 is a wall having a shape surrounding the resin discharge nozzle 130. Examples of this shape include a rectangular shape, a shape in which one side of the rectangle is missing (a U-shape), a cylindrical shape, and an arc shape as shown in the example of FIG. The effect of wind is reduced compared to the planar shape.
The example of FIG. 6A is a view of the positional relationship of the substrate 100, the blade 110, the air blow 120, and the wind barrier 640 as seen from the front. The example of FIG. 6B is a view of the positional relationship among the substrate 100, the resin discharge nozzle 130, the wind barrier 640, the air blow 120, and the blade 110 viewed from the side. When viewed from the side, the blade 110, the air blow 120, the wind barrier 640, and the resin discharge nozzle 130 are arranged in this order. That is, the wind barrier 640 is disposed between the air blow 120 and the resin discharge nozzle 130. The wind barrier 640 prevents the resin discharge nozzle 130 from being blown by the air blow 120. That is, the wind barrier 640 is provided to block the air flow so that the position of the liquid resin discharged or applied from the resin discharge nozzle 130 is not affected by the air blow 120. The example of FIG. 6C is a view of the positional relationship among the resin discharge nozzle 130, the wind barrier 640, the air blow 120, and the blade 110 as viewed from above. The wind barrier 640 has a shape surrounding the resin discharge nozzle 130, and forms a wall at least with the air blow 120. The air blow 120 is disposed above the blade 110 mainly to remove dust between the partition walls, and the resin discharge nozzle 130 and the air blow 120 are disposed between the partition walls, so that they are disposed in a straight line. Has been.
Of course, the wind barrier 240 in the example shown in FIG.

<Sixth Embodiment>
FIG. 7 is an explanatory diagram illustrating an arrangement example of each component in the sixth embodiment. The example shown in FIG. 7 is obtained by adding an air blow 720 to the example shown in FIG. That is, the air blow 720 removes foreign matter in the groove forming the partition wall by the blade 110. Not only between the partition walls but also foreign matters in the grooves are targeted for removal. In addition, the air blow 720 may be disposed in front of the blade 110 instead of after the blade 110, or two air blows 720 may be disposed both in front of and behind the blade 110.
Needless to say, in the example shown in FIGS. 1 to 5, the air blow 720 may be arranged at the rear of the blade 110, at the front, or at both the front and the rear.

<Seventh embodiment>
FIG. 8 is an explanatory diagram showing an arrangement example of each component in the seventh embodiment. The example shown in FIG. 8 is obtained by making the examples shown in FIGS. 2 and 5 into a plurality (multihead, array). That is, there are a plurality of blades 110 (blade 810a and the like in the example of FIG. 8), an air blow 120 (air blow nozzle 820a and the like in the example of FIG. 8), a resin discharge nozzle 130, and one wind barrier 840.
Note that the width of the wind barrier 840 in the seventh embodiment is set so that the width B of the wind barrier 840 is equal to or smaller than the lens width that can be produced in one scan (B ≦ NΛ), as in the case of the single head described above.
The width B of the wind barrier 840 is preferably the same as the groove interval between both ends of the multi-head (the groove interval generated by the blade 810a and the blade 810d in the example of FIG. 8) (B = NΛ). If it is larger than this, it will come into contact with the adjacent lens already created. In the above equation, the groove period is Λ, the number of resin nozzles is N, and the width of the wind barrier is B.
Of course, a plurality of examples shown in FIGS. 1 and 4 may be used. Further, a plurality of examples shown in FIGS. 6 and 7 may be provided. In this case, a plurality of wind barriers 640 are also provided.

<Eighth Embodiment>
FIG. 9 is an explanatory diagram illustrating an arrangement example of each component according to the eighth embodiment. In the eighth embodiment, the air nozzle 120 of the fourth embodiment shown in the example of FIG. The air blow 120 in other embodiments (first to third embodiments, fifth to seventh embodiments) may be the suction nozzle 920. The suction nozzle 920 removes dust from the substrate 100 (particularly between the partition walls) by sucking wind. Since dust scattering can be reduced as compared with the air blow 120, it is easy to collect dust.
As a method for removing dust, in addition to (A) blow by air blow 120 and (B) suction by suction nozzle 920, the following method may be adopted.
(C) Adhesion removal using a brush or an adhesive sheet may be used. Dust with strong adhesion that cannot be removed by air blow 120 and suction nozzle 920 is removed. For example, a roller-like adhesive tape is used. The adhesive sheet or the like can also be used for collecting (collecting dust) dust scattered by blowing with the air blow 120.
(D) Electrostatic removal (ionizer) may be used. The electrostatic adhesion force between the dust and the substrate 100 is reduced. In combination with the blow by the air blow 120 and the suction by the suction nozzle 920, dust is easily removed.
Also, a combination of (A) and (C), a combination of (A) and (D), a combination of (A) and (C) and (D), a combination of (B) and (C), (B) and A combination of (D), a combination of (B), (C), and (D), or a combination of (C) and (D) may be used.

  In the above-described embodiment, the example in which the resin discharge nozzle 130, the blade 110, the air blow 120 (suction nozzle 920), or the wind barrier 240 are disposed close to each other has been described, but the UV light source 1190 that is an exposure apparatus is further included. May be arranged close to each other.

  The above-described embodiments are a part of the embodiments of the present invention. However, the present invention is not limited to this, and various modifications can be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Board | substrate 110 ... Blade 120 ... Air blow 130 ... Resin discharge nozzle 180 ... Movement direction 240 ... Wind barrier 290 ... Gap 300 ... Lens 310 ... Sag 320 ... Lens size 340 ... Groove 340a ... Partition 340b ... Partition 640 ... Wind barrier 720 ... Air blow 810 ... Blade 820 ... Air blow nozzle 840 ... Wind barrier 920 ... Suction nozzle 1190 ... UV light source

Claims (12)

Forming means for forming partition walls on the substrate;
Removing means for removing foreign matter between the partition walls;
An apparatus for manufacturing a lens array, comprising: a discharge application unit that discharges or applies a liquid resin to be a lens between the partition walls after foreign substances are removed by the removal unit. The lens array manufacturing apparatus according to claim 1, wherein the removing unit, the forming unit, and the discharge coating unit are arranged in this order. The removing means removes foreign matter by wind,
The lens array manufacturing apparatus according to claim 1, further comprising a windproof unit that prevents the discharge application unit from being blown by the removing unit. The lens array manufacturing apparatus according to claim 3, wherein the windproof unit is disposed between the forming unit and the discharge application unit. The lens array manufacturing apparatus according to claim 1, wherein the forming unit, the removing unit, and the discharge coating unit are arranged in this order. The removing means removes foreign matter by wind,
6. The lens array manufacturing apparatus according to claim 5, further comprising a windproof unit that is disposed between the removing unit and the discharge applying unit and prevents the discharge applying unit from being blown by the removing unit. The lens array manufacturing apparatus according to claim 3, 4 or 6, wherein the windproof means is a planar wall or a wall surrounding the discharge application means. The lens array manufacturing apparatus according to any one of claims 1 to 7, further comprising: a second removing unit that removes foreign matter in a groove forming a partition wall by the forming unit. The lens array manufacturing apparatus according to claim 1, further comprising a plurality of the forming unit, the removing unit, and the discharge applying unit. The lens array manufacturing apparatus according to any one of claims 1 to 9, wherein the removing unit removes foreign matter by blowing wind or sucking wind. The distance between the substrate and the windproof means is not less than the height of the partition and not more than the lens height. The claims 3, 4, 6, 7 and dependent on these claims The lens array manufacturing apparatus according to any one of claims 8 to 10. Forming a partition on the substrate;
A removal step of removing foreign matter between the partition walls;
A lens array manufacturing method comprising: a discharge application step of discharging or applying a liquid resin to be a lens between the partition walls after foreign substances are removed by the removal step.

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