JP5490379B2 - 光ファイバ用の母材を気相成長プロセスによって製造する方法 - Google Patents
光ファイバ用の母材を気相成長プロセスによって製造する方法 Download PDFInfo
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- JP5490379B2 JP5490379B2 JP2008165433A JP2008165433A JP5490379B2 JP 5490379 B2 JP5490379 B2 JP 5490379B2 JP 2008165433 A JP2008165433 A JP 2008165433A JP 2008165433 A JP2008165433 A JP 2008165433A JP 5490379 B2 JP5490379 B2 JP 5490379B2
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- substrate tube
- hollow substrate
- deposition
- tube
- hollow
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-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Surface Treatment Of Glass (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Description
i)供給側および吐出側を有する中空ガラス石英基体管を設けるステップと、
ii)中空基体管の供給側を経由して中空基体管の内部に、ドープガラス形成ガスまたは非ドープガラス形成ガスを供給するステップと、
iii)中空基体管の内面上にガラス層を堆積させるために、中空基体管の内部に温度状態およびプラズマ状態を作り出すステップであって、その堆積が、それぞれが初期屈折率値および最終屈折率値を有し、かつ一定の期間中に中空基体管の内部上にいくつかのガラス層を堆積させることを含む、いくつかの別々の段階を含むと見なされることができ、プラズマが、中空基体管の長手方向軸に沿って、中空基体管の供給側に近い反転点と吐出側に近い反転点との間で往復して移動される、前記ステップと、場合によっては、
iv)ステップiii)後に得られた基体管を固結させて母材にするステップと
を含む方法に関する。
2 中空基体管
3 共振器
4 導波路
5 供給側
6 吐出側
7 内部
Claims (7)
- 光ファイバ用の母材を気相成長プロセスによって製造する方法にして、
i)供給側および吐出側を有する中空ガラス石英基体管を設けるステップと、
ii)中空基体管の供給側を経由して中空基体管の内部にドープガラス形成ガスまたは非ドープガラス形成ガスを供給するステップと、
iii)中空基体管の内面上にガラス層を堆積させるために、中空基体管の内部に温度およびプラズマ状態を作り出すステップであって、その堆積が、それぞれが初期屈折率値および最終屈折率値を有し、かつ一定の期間中に中空基体管の内部上にいくつかのガラス層を堆積させることを含む、いくつかの別々の段階を含むと見なされることができ、プラズマが、中空基体管の長手方向軸に沿って、中空基体管の供給側に近い反転点と吐出側に近
い反転点との間で往復して移動される、前記ステップと、場合によっては、
iv)ステップiii)後に得られた基体管を固結させて母材にするステップと
を含む方法であって、中空基体管の内面上へのガラス層の堆積が、中空基体管の供給側にエッチングガスを供給することを含む少なくとも1つの中間ステップを実施することによって、ステップiii)中に中断され、さらに中間ステップ中に、ドープガラス形成ガスまたは非ドープガラス形成ガスの供給が停止され、中間ステップ中、中空基体管の長手方向軸に沿ったプラズマの往復移動は継続され、中間ステップの終了後に、堆積プロセスの継続があり得ることを特徴とする、方法。 - フッ素含有エッチングガスが使用されることを特徴とする、請求項1に記載の方法。
- エッチングガスが、場合によっては酸素などのフラッシングガスの存在下で、CCl2F2、CF4、C2F6、SF6、F2、およびSO2F2からなる群、またはそれらの組合せから選択されることを特徴とする、請求項1または2に記載の方法。
- エッチングガスがC2F6とO2の組合せであることを特徴とする、請求項3に記載の方法。
- 中間ステップが、5−15分の期間にわたって実施されることを特徴とする、請求項1から4のいずれか一項に記載の方法。
- 基体管が、前記中間ステップ中に回転されることを特徴とする、請求項1から5のいずれか一項に記載の方法。
- 中間ステップが、ステップiii)において1つの堆積段階とその次の1つまたは複数の堆積段階との間に実施されることを特徴とする、請求項1から6のいずれか一項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1034059 | 2007-06-29 | ||
NL1034059A NL1034059C2 (nl) | 2007-06-29 | 2007-06-29 | Werkwijze voor het vervaardigen van een voorvorm voor optische vezels onder toepassing van een dampdepositieproces. |
Publications (2)
Publication Number | Publication Date |
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JP2009013053A JP2009013053A (ja) | 2009-01-22 |
JP5490379B2 true JP5490379B2 (ja) | 2014-05-14 |
Family
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JP2008165433A Active JP5490379B2 (ja) | 2007-06-29 | 2008-06-25 | 光ファイバ用の母材を気相成長プロセスによって製造する方法 |
Country Status (8)
Country | Link |
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US (1) | US8168267B2 (ja) |
EP (1) | EP2008978B1 (ja) |
JP (1) | JP5490379B2 (ja) |
CN (1) | CN101333067B (ja) |
AT (1) | ATE481365T1 (ja) |
BR (1) | BRPI0802237B1 (ja) |
DE (1) | DE602008002481D1 (ja) |
NL (1) | NL1034059C2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL2004546C2 (nl) * | 2010-04-13 | 2011-10-17 | Draka Comteq Bv | Inwendig dampdepositieproces. |
NL2004544C2 (nl) | 2010-04-13 | 2011-10-17 | Draka Comteq Bv | Inwendig dampdepositieproces. |
NL2006962C2 (nl) | 2011-06-17 | 2012-12-18 | Draka Comteq Bv | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
NL2007831C2 (en) * | 2011-11-21 | 2013-05-23 | Draka Comteq Bv | Apparatus and method for carrying out a pcvd deposition process. |
NL2009962C2 (en) * | 2012-12-11 | 2014-06-12 | Draka Comteq Bv | Method for activating an inner surface of a hollow glass substrate tube for the manufacturing of an optical fiber preform. |
US9002162B2 (en) * | 2013-03-15 | 2015-04-07 | Ofs Fitel, Llc | Large core multimode optical fibers |
NL2010724C2 (en) | 2013-04-26 | 2014-10-29 | Draka Comteq Bv | A pcvd method for manufacturing a primary preform for optical fibers. |
NL2011077C2 (en) | 2013-07-01 | 2015-01-05 | Draka Comteq Bv | A method for manufacturing a precursor for a primary preform for optical fibres by means of an internal plasma chemical vapour deposition (pcvd) process. |
NL2012857B1 (en) * | 2014-05-22 | 2016-03-07 | Draka Comteq Bv | Apparatus and method for carrying out a plasma deposition process. |
NL2015162B1 (en) * | 2015-07-13 | 2017-02-01 | Draka Comteq Bv | Method for activating an inner surface of a substrate tube for the manufacturing of an optical fiber preform. |
NL2015161B1 (en) * | 2015-07-13 | 2017-02-01 | Draka Comteq Bv | A method for preparing a primary preform by etching and collapsing a deposited tube. |
NL1041529B1 (en) * | 2015-10-16 | 2017-05-02 | Draka Comteq Bv | A method for etching a primary preform and the etched primary preform thus obtained. |
DE102018132338B3 (de) * | 2018-12-14 | 2019-11-21 | Leibniz-Institut für Photonische Technologien e. V. | Partikelfreies verfahren zur signifikanten reduzierung der oberflächenrauhigkeit von rohren, kapillaren und hohlfasern aus kieselglas oder hoch kieselhaltigen gläsern und optischen gläsern sowie zur reinigung von kavitätenoberflächen von rohren, kapillaren und hohlfasen aus kieselglas oder hoch kieselglashaltigen optischen gläsern |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8201453A (nl) * | 1982-04-06 | 1983-11-01 | Philips Nv | Werkwijze voor de vervaardiging van optische vezels. |
US4630890A (en) * | 1983-06-22 | 1986-12-23 | At&T Bell Laboratories | Exposed core optical fibers, and method of making same |
FI78891C (fi) * | 1987-09-11 | 1989-10-10 | Nokia Oy Ab | Anordning foer avlaegsnande av pulverformigt material som samlas i den roerformiga bakdelen vid tillverkning av en optisk fibers aemne. |
FI83944C (fi) | 1989-05-19 | 1991-09-25 | Rautaruukki Oy | Stoedben till en paohaengsvagn. |
CN2284105Y (zh) * | 1996-11-08 | 1998-06-17 | 蒙里声 | 环状尖端脉冲等离子体除尘器 |
US6105396A (en) * | 1998-07-14 | 2000-08-22 | Lucent Technologies Inc. | Method of making a large MCVD single mode fiber preform by varying internal pressure to control preform straightness |
DE19852704A1 (de) * | 1998-11-16 | 2000-05-18 | Heraeus Quarzglas | Verfahren zur Herstellung einer Vorform für eine optische Faser und für die Durchführung des Verfahrens geeignetes Substratrohr |
US6718800B2 (en) * | 1999-03-08 | 2004-04-13 | Fitel Usa Corp. | Method of collapsing a tube for an optical fiber preform |
CN1277888A (zh) * | 2000-06-02 | 2000-12-27 | 黄立维 | 一种有机废气的净化方法 |
CA2355819A1 (en) * | 2000-08-28 | 2002-02-28 | Sumitomo Electric Industries, Ltd. | Optical fiber, method of making optical fiber preform, and method of making optical fiber |
JP3775234B2 (ja) * | 2001-03-29 | 2006-05-17 | 住友電気工業株式会社 | 光ファイバ母材の製造方法 |
JP2003012338A (ja) * | 2001-06-29 | 2003-01-15 | Sumitomo Electric Ind Ltd | Mcvd法を用いた光ファイバ母材の製造方法 |
WO2003052173A1 (en) * | 2001-12-14 | 2003-06-26 | Corning Incorporated | Two step etching process for an optical fiber preform |
US7169440B2 (en) * | 2002-04-16 | 2007-01-30 | Tokyo Electron Limited | Method for removing photoresist and etch residues |
US6988380B2 (en) * | 2002-08-15 | 2006-01-24 | Ceramoptec Industries, Inc. | Method of silica optical fiber preform production |
BR0306293A (pt) * | 2002-09-03 | 2004-09-28 | Lg Cable Ltd | Método para colapso de preforma de fibra ótica oca e método de produção de preforma de fibra ótica oca |
US20060230793A1 (en) * | 2002-11-07 | 2006-10-19 | Choon-Keun Hong | Method for manufacturing an optical fiber preform by mcvd |
US20040107734A1 (en) * | 2002-12-04 | 2004-06-10 | Paresh Kenkare | Systems and methods for fabricating optical fiber preforms |
NL1023438C2 (nl) | 2003-05-15 | 2004-11-22 | Draka Fibre Technology Bv | Werkwijze ter vervaardiging van een optische vezel, voorvorm en een optische vezel. |
NL1025155C2 (nl) * | 2003-12-30 | 2005-07-04 | Draka Fibre Technology Bv | Inrichting voor het uitvoeren van PCVD, alsmede werkwijze voor het vervaardigen van een voorvorm. |
JP4552599B2 (ja) * | 2004-10-29 | 2010-09-29 | 住友電気工業株式会社 | 光ファイバ母材の製造方法 |
KR100774952B1 (ko) | 2005-04-14 | 2007-11-09 | 엘지전자 주식회사 | 플라즈마 디스플레이 장치, 플라즈마 디스플레이 패널 및그의 제조방법 |
JP2006248824A (ja) * | 2005-03-09 | 2006-09-21 | Sumitomo Electric Ind Ltd | ガラスの製造方法及びガラスの製造装置 |
JP2007084362A (ja) * | 2005-09-20 | 2007-04-05 | Sumitomo Electric Ind Ltd | 光ファイバー母材の製造方法 |
ES2370869T3 (es) * | 2005-10-27 | 2011-12-23 | Sterlite Technologies Limited | Método de producción de una preforma de fibras ópticas. |
NL1030749C2 (nl) * | 2005-12-22 | 2007-06-25 | Draka Comteq Bv | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
US8020410B2 (en) * | 2007-11-15 | 2011-09-20 | Corning Incorporated | Methods for making optical fiber preforms and microstructured optical fibers |
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2007
- 2007-06-29 NL NL1034059A patent/NL1034059C2/nl active Search and Examination
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2008
- 2008-06-19 AT AT08011104T patent/ATE481365T1/de not_active IP Right Cessation
- 2008-06-19 DE DE602008002481T patent/DE602008002481D1/de active Active
- 2008-06-19 EP EP08011104A patent/EP2008978B1/en active Active
- 2008-06-25 JP JP2008165433A patent/JP5490379B2/ja active Active
- 2008-06-27 CN CN2008101273547A patent/CN101333067B/zh active Active
- 2008-06-27 US US12/147,535 patent/US8168267B2/en active Active
- 2008-06-27 BR BRPI0802237-2A patent/BRPI0802237B1/pt active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN101333067A (zh) | 2008-12-31 |
CN101333067B (zh) | 2013-10-23 |
ATE481365T1 (de) | 2010-10-15 |
EP2008978B1 (en) | 2010-09-15 |
BRPI0802237A2 (pt) | 2009-02-25 |
US20090004404A1 (en) | 2009-01-01 |
DE602008002481D1 (de) | 2010-10-28 |
US8168267B2 (en) | 2012-05-01 |
NL1034059C2 (nl) | 2008-12-30 |
JP2009013053A (ja) | 2009-01-22 |
EP2008978A1 (en) | 2008-12-31 |
BRPI0802237B1 (pt) | 2018-06-26 |
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