JP5486608B2 - 絶縁性構造及びその製造方法 - Google Patents
絶縁性構造及びその製造方法 Download PDFInfo
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- JP5486608B2 JP5486608B2 JP2011540337A JP2011540337A JP5486608B2 JP 5486608 B2 JP5486608 B2 JP 5486608B2 JP 2011540337 A JP2011540337 A JP 2011540337A JP 2011540337 A JP2011540337 A JP 2011540337A JP 5486608 B2 JP5486608 B2 JP 5486608B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000919 ceramic Substances 0.000 claims description 66
- 229910052751 metal Inorganic materials 0.000 claims description 43
- 239000002184 metal Substances 0.000 claims description 43
- 239000011347 resin Substances 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 25
- 239000002245 particle Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 239000011888 foil Substances 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 5
- 239000000443 aerosol Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 239000002470 thermal conductor Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 244000126211 Hericium coralloides Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/142—Metallic substrates having insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
2 金属基材
3 絶縁層
31 セラミック相
32 樹脂相
4 回路層
Claims (12)
- 金属基材と、
前記金属基材上に形成された絶縁層と、
前記絶縁層上に形成された金属層とを備えた絶縁性熱伝導構造において、
前記絶縁層は、セラミック相と、樹脂相とを備え、
前記セラミック相は、溝により隔てられた複数のパターンに分かれて形成され、
当該溝の中に前記樹脂相が形成されたことを特徴とする絶縁性熱伝導構造。 - 請求項1において、
前記セラミック相は、粒子衝突成膜法により形成されたことを特徴とする絶縁性熱伝導構造。 - 請求項1において、
前記セラミック相のセラミックは粒子状であり、当該粒子の一部が前記金属基板及び前記金属層に埋没していることを特徴とする絶縁性熱伝導構造。 - 請求項1において、
前記セラミック相は、前記溝の外側で前記金属層に直接接続されていることを特徴とする絶縁性熱伝導構造。 - 請求項1において、
前記金属層は、粒子衝突成膜法または金属箔プレス法により形成されたことを特徴とする絶縁性熱伝導構造。 - 請求項1において、
前記金属層の最下部は、前記セラミック相の最上部よりも下にあることを特徴とする絶縁性熱伝導構造。 - 金属基材上に、粒子衝突成膜法によりセラミック相を形成する工程と、
前記セラミック相の間に樹脂相を形成する工程と、
前記セラミック相及び樹脂相上に金属層を形成する工程とを含み、
前記セラミック相は、溝により隔てられた複数のパターンに分かれて形成され、
当該溝の中に前記樹脂相が形成されることを特徴とする絶縁性熱伝導構造の製造方法。 - 請求項7において、
前記セラミック相のセラミックは粒子状であり、当該粒子の一部が、前記金属基板及び前記金属層に埋没していることを特徴とする絶縁性熱伝導構造の製造方法。 - 請求項7において、
前記セラミック相は、マスクパターンを用いて形成されることにより、当該セラミック
ス中に前記溝を有することを特徴とする絶縁性熱伝導構造の製造方法。 - 請求項7において、
前記樹脂相を形成する工程後、前記金属層を形成する工程前に、
前記セラミック相上であり前記溝の外側にある樹脂相を除去する工程を含むことを特徴
とする絶縁性熱伝導構造の製造方法。 - 請求項7において、
前記金属層は、粒子衝突成膜法または金属箔プレス法により形成されることを特徴とする絶縁性熱伝導構造の製造方法。 - 請求項7において、
前記金属層の最下部は、前記セラミック相の最上部よりも下にあることを特徴とする絶縁性熱伝導構造の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2009/006063 WO2011058607A1 (ja) | 2009-11-13 | 2009-11-13 | 絶縁性構造及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011058607A1 JPWO2011058607A1 (ja) | 2013-03-28 |
JP5486608B2 true JP5486608B2 (ja) | 2014-05-07 |
Family
ID=43991287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011540337A Expired - Fee Related JP5486608B2 (ja) | 2009-11-13 | 2009-11-13 | 絶縁性構造及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2500936A4 (ja) |
JP (1) | JP5486608B2 (ja) |
WO (1) | WO2011058607A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105229785B (zh) * | 2013-04-24 | 2018-01-16 | 富士电机株式会社 | 功率半导体模块及其制造方法、电力变换器 |
EP3422401B1 (en) * | 2016-02-26 | 2023-11-15 | National Institute of Advanced Industrial Science and Technology | Heat dissipating substrate |
JP7147313B2 (ja) * | 2018-07-18 | 2022-10-05 | 三菱マテリアル株式会社 | 金属ベース基板 |
JP7143659B2 (ja) * | 2018-07-18 | 2022-09-29 | 三菱マテリアル株式会社 | 金属ベース基板 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0955461A (ja) * | 1995-08-11 | 1997-02-25 | Siemens Ag | 2つの加工物間の熱伝導性かつ電気絶縁性の結合装置およびその製造方法 |
JP2006179856A (ja) * | 2004-11-25 | 2006-07-06 | Fuji Electric Holdings Co Ltd | 絶縁基板および半導体装置 |
JP2008300606A (ja) * | 2007-05-31 | 2008-12-11 | Sumitomo Electric Ind Ltd | 放熱構造体およびその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2619443A (en) * | 1948-04-08 | 1952-11-25 | Sprague Electric Co | Method of making electrical condensers |
EP0042693B1 (en) * | 1980-06-21 | 1985-03-27 | LUCAS INDUSTRIES public limited company | Semi-conductor power device assembly and method of manufacture thereof |
JP2006248074A (ja) * | 2005-03-11 | 2006-09-21 | Tdk Corp | 高誘電率複合基板、高誘電率複合シートおよびこれらの製造方法 |
JP2006278558A (ja) | 2005-03-28 | 2006-10-12 | Mitsubishi Materials Corp | 絶縁伝熱構造体及びパワーモジュール用基板 |
-
2009
- 2009-11-13 WO PCT/JP2009/006063 patent/WO2011058607A1/ja active Application Filing
- 2009-11-13 EP EP09851241.1A patent/EP2500936A4/en not_active Withdrawn
- 2009-11-13 JP JP2011540337A patent/JP5486608B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0955461A (ja) * | 1995-08-11 | 1997-02-25 | Siemens Ag | 2つの加工物間の熱伝導性かつ電気絶縁性の結合装置およびその製造方法 |
JP2006179856A (ja) * | 2004-11-25 | 2006-07-06 | Fuji Electric Holdings Co Ltd | 絶縁基板および半導体装置 |
JP2008300606A (ja) * | 2007-05-31 | 2008-12-11 | Sumitomo Electric Ind Ltd | 放熱構造体およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2011058607A1 (ja) | 2013-03-28 |
EP2500936A4 (en) | 2016-01-13 |
WO2011058607A1 (ja) | 2011-05-19 |
EP2500936A1 (en) | 2012-09-19 |
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