JP5486379B2 - 面形状計測装置 - Google Patents

面形状計測装置 Download PDF

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Publication number
JP5486379B2
JP5486379B2 JP2010083402A JP2010083402A JP5486379B2 JP 5486379 B2 JP5486379 B2 JP 5486379B2 JP 2010083402 A JP2010083402 A JP 2010083402A JP 2010083402 A JP2010083402 A JP 2010083402A JP 5486379 B2 JP5486379 B2 JP 5486379B2
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JP
Japan
Prior art keywords
reference point
measuring
test surface
shape
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010083402A
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English (en)
Japanese (ja)
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JP2011095241A (ja
JP2011095241A5 (enExample
Inventor
隆一 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010083402A priority Critical patent/JP5486379B2/ja
Priority to US12/891,736 priority patent/US8411280B2/en
Priority to EP10180680A priority patent/EP2306144A1/en
Publication of JP2011095241A publication Critical patent/JP2011095241A/ja
Publication of JP2011095241A5 publication Critical patent/JP2011095241A5/ja
Application granted granted Critical
Publication of JP5486379B2 publication Critical patent/JP5486379B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010083402A 2009-10-01 2010-03-31 面形状計測装置 Expired - Fee Related JP5486379B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010083402A JP5486379B2 (ja) 2009-10-01 2010-03-31 面形状計測装置
US12/891,736 US8411280B2 (en) 2009-10-01 2010-09-27 Surface shape measurement apparatus
EP10180680A EP2306144A1 (en) 2009-10-01 2010-09-28 Surface shape measurement apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009229993 2009-10-01
JP2009229993 2009-10-01
JP2010083402A JP5486379B2 (ja) 2009-10-01 2010-03-31 面形状計測装置

Publications (3)

Publication Number Publication Date
JP2011095241A JP2011095241A (ja) 2011-05-12
JP2011095241A5 JP2011095241A5 (enExample) 2013-05-09
JP5486379B2 true JP5486379B2 (ja) 2014-05-07

Family

ID=43303950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010083402A Expired - Fee Related JP5486379B2 (ja) 2009-10-01 2010-03-31 面形状計測装置

Country Status (3)

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US (1) US8411280B2 (enExample)
EP (1) EP2306144A1 (enExample)
JP (1) JP5486379B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5430472B2 (ja) * 2009-10-01 2014-02-26 キヤノン株式会社 面形状計測装置
DE102011011065B4 (de) * 2011-02-11 2013-04-04 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
WO2012140285A1 (es) * 2011-04-15 2012-10-18 Albiasa Collector Trough, S.L. Procedimiento para comprobar la geometría de captadores solares cilíndro-parabólicos y sistema para llevar a cabo dicho procedimiento
US8526012B1 (en) 2012-04-17 2013-09-03 Laser Design, Inc. Noncontact scanning system
DE102014007203A1 (de) * 2014-05-19 2015-11-19 Luphos Gmbh Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts
DE102014007201B4 (de) * 2014-05-19 2016-03-10 Luphos Gmbh Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts
CN105783790A (zh) * 2016-05-09 2016-07-20 常州机电职业技术学院 导轨间垂直度的测量工装及测量方法
JP6513846B2 (ja) * 2017-06-06 2019-05-15 株式会社日立製作所 距離測定装置、及び立体形状測定装置。
CN107339941A (zh) * 2017-07-21 2017-11-10 复旦大学 一种基于双频激光干涉原理的精确位移监测系统
JP7353644B2 (ja) * 2020-01-08 2023-10-02 株式会社Xtia 光学スキャナ装置の校正方法、光学スキャナ装置及び光学式三次元形状測定装置
CN114894116B (zh) * 2022-04-08 2024-02-23 苏州瀚华智造智能技术有限公司 一种测量数据融合方法及非接触式测量设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3836564A1 (de) * 1988-10-27 1990-05-03 Zeiss Carl Fa Verfahren zur pruefung von optischen elementen
US5003166A (en) 1989-11-07 1991-03-26 Massachusetts Institute Of Technology Multidimensional range mapping with pattern projection and cross correlation
JP2764630B2 (ja) 1990-03-20 1998-06-11 横河電機株式会社 アブソリュート測長器
JPH08226814A (ja) * 1995-02-22 1996-09-03 Fuji Xerox Co Ltd 形状測定方法及びその装置
US5625454A (en) 1995-05-24 1997-04-29 Industrial Technology Research Institute Interferometric method for optically testing an object with an aspherical surface
JP3474448B2 (ja) 1998-09-01 2003-12-08 株式会社リコー 座標軸直角度誤差の校正方法及び三次元形状測定装置
JP2002116010A (ja) * 2000-10-04 2002-04-19 Ricoh Co Ltd 三次元形状測定方法及び装置
JP2002148025A (ja) * 2000-11-09 2002-05-22 Ricoh Co Ltd ３次元形状測定装置
US6771375B2 (en) 2001-06-20 2004-08-03 Zygo Corporation Apparatus and method for measuring aspherical optical surfaces and wavefronts
US6972849B2 (en) 2001-07-09 2005-12-06 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
US6714307B2 (en) * 2001-10-16 2004-03-30 Zygo Corporation Measurement of complex surface shapes using a spherical wavefront
GB0322115D0 (en) * 2003-09-22 2003-10-22 Renishaw Plc Method of error compensation
CN1950669A (zh) 2004-05-10 2007-04-18 皇家飞利浦电子股份有限公司 光学精密测量装置和方法
US8224066B2 (en) 2007-05-29 2012-07-17 Gerd Haeusler Method and microscopy device for the deflectometric detection of local gradients and the three-dimensional shape of an object
KR100956853B1 (ko) 2008-04-04 2010-05-11 선문대학교 산학협력단 3차원 형상의 고속 형상측정장치 및 방법

Also Published As

Publication number Publication date
JP2011095241A (ja) 2011-05-12
EP2306144A1 (en) 2011-04-06
US8411280B2 (en) 2013-04-02
US20110080593A1 (en) 2011-04-07

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