JP5481545B2 - 角速度検出装置 - Google Patents

角速度検出装置 Download PDF

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Publication number
JP5481545B2
JP5481545B2 JP2012220218A JP2012220218A JP5481545B2 JP 5481545 B2 JP5481545 B2 JP 5481545B2 JP 2012220218 A JP2012220218 A JP 2012220218A JP 2012220218 A JP2012220218 A JP 2012220218A JP 5481545 B2 JP5481545 B2 JP 5481545B2
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Japan
Prior art keywords
excitation
fixed end
beams
angular velocity
detection device
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Japanese (ja)
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JP2013029522A5 (enExample
JP2013029522A (ja
Inventor
希元 鄭
康 後藤
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Hitachi Ltd
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Hitachi Ltd
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JP2012220218A 2012-10-02 2012-10-02 角速度検出装置 Expired - Fee Related JP5481545B2 (ja)

Priority Applications (1)

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JP2012220218A JP5481545B2 (ja) 2012-10-02 2012-10-02 角速度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012220218A JP5481545B2 (ja) 2012-10-02 2012-10-02 角速度検出装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007164975A Division JP5105968B2 (ja) 2007-06-22 2007-06-22 角速度検出装置

Related Child Applications (1)

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JP2014027305A Division JP5816707B2 (ja) 2014-02-17 2014-02-17 角速度検出装置

Publications (3)

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JP2013029522A JP2013029522A (ja) 2013-02-07
JP2013029522A5 JP2013029522A5 (enExample) 2013-10-31
JP5481545B2 true JP5481545B2 (ja) 2014-04-23

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ID=47786653

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JP2012220218A Expired - Fee Related JP5481545B2 (ja) 2012-10-02 2012-10-02 角速度検出装置

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5105968B2 (ja) 2007-06-22 2012-12-26 株式会社日立製作所 角速度検出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2732467B1 (fr) * 1995-02-10 1999-09-17 Bosch Gmbh Robert Capteur d'acceleration et procede de fabrication d'un tel capteur
JPH1144541A (ja) * 1997-07-29 1999-02-16 Aisin Seiki Co Ltd 角速度センサ
KR100373484B1 (ko) * 2000-01-27 2003-02-25 국방과학연구소 진동형 마이크로자이로스코프
FR2860865B1 (fr) * 2003-10-10 2006-01-20 Thales Sa Gyrometre micromecanique infertiel a diapason

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JP2013029522A (ja) 2013-02-07

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