JP5481273B2 - 窒化珪素・メリライト複合焼結体を用いた基板および部材 - Google Patents
窒化珪素・メリライト複合焼結体を用いた基板および部材 Download PDFInfo
- Publication number
- JP5481273B2 JP5481273B2 JP2010112131A JP2010112131A JP5481273B2 JP 5481273 B2 JP5481273 B2 JP 5481273B2 JP 2010112131 A JP2010112131 A JP 2010112131A JP 2010112131 A JP2010112131 A JP 2010112131A JP 5481273 B2 JP5481273 B2 JP 5481273B2
- Authority
- JP
- Japan
- Prior art keywords
- melilite
- silicon nitride
- mol
- sintered body
- crystal phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910001719 melilite Inorganic materials 0.000 title claims description 168
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 156
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 155
- 239000002131 composite material Substances 0.000 title claims description 97
- 239000000758 substrate Substances 0.000 title claims description 88
- 239000013078 crystal Substances 0.000 claims description 101
- 239000000654 additive Substances 0.000 claims description 31
- 230000000737 periodic effect Effects 0.000 claims description 29
- 230000000996 additive effect Effects 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000003351 stiffener Substances 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 229910052684 Cerium Inorganic materials 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 11
- 229910052746 lanthanum Inorganic materials 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910052712 strontium Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229910052791 calcium Inorganic materials 0.000 claims description 5
- 229910052749 magnesium Inorganic materials 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 description 113
- 238000010304 firing Methods 0.000 description 38
- 239000004065 semiconductor Substances 0.000 description 36
- 239000000523 sample Substances 0.000 description 35
- 238000005245 sintering Methods 0.000 description 21
- 235000012431 wafers Nutrition 0.000 description 20
- 229910052760 oxygen Inorganic materials 0.000 description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 18
- 239000001301 oxygen Substances 0.000 description 18
- 239000000919 ceramic Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 14
- 229910010293 ceramic material Inorganic materials 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 12
- 239000011521 glass Substances 0.000 description 12
- 238000007689 inspection Methods 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 11
- 230000008901 benefit Effects 0.000 description 11
- 229910052799 carbon Inorganic materials 0.000 description 11
- 230000007423 decrease Effects 0.000 description 11
- 238000000280 densification Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 10
- 238000002441 X-ray diffraction Methods 0.000 description 9
- 238000005452 bending Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 238000007731 hot pressing Methods 0.000 description 4
- 239000012299 nitrogen atmosphere Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- -1 W or Mo is used Chemical class 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000000930 thermomechanical effect Effects 0.000 description 3
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052772 Samarium Inorganic materials 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 238000009694 cold isostatic pressing Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000000075 oxide glass Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052695 Americium Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910052685 Curium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910052766 Lawrencium Inorganic materials 0.000 description 1
- 229910052764 Mendelevium Inorganic materials 0.000 description 1
- 229910052781 Neptunium Inorganic materials 0.000 description 1
- 229910052778 Plutonium Inorganic materials 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910004283 SiO 4 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910021472 group 8 element Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910052705 radium Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- QVOIJBIQBYRBCF-UHFFFAOYSA-H yttrium(3+);tricarbonate Chemical compound [Y+3].[Y+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O QVOIJBIQBYRBCF-UHFFFAOYSA-H 0.000 description 1
- GONBZNBMLOZYAM-UHFFFAOYSA-K yttrium(3+);triformate Chemical compound [Y+3].[O-]C=O.[O-]C=O.[O-]C=O GONBZNBMLOZYAM-UHFFFAOYSA-K 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/597—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon oxynitride, e.g. SIALONS
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3213—Strontium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3229—Cerium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3873—Silicon nitrides, e.g. silicon carbonitride, silicon oxynitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5445—Particle size related information expressed by the size of the particles or aggregates thereof submicron sized, i.e. from 0,1 to 1 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/85—Intergranular or grain boundary phases
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
Description
前記窒化珪素・メリライト複合焼結体の切断面における前記メリライト結晶相の占める割合が、20面積%以上であることを特徴とする基板。
前記窒化珪素・メリライト複合焼結体の切断面における前記メリライト結晶相の占める割合が、20面積%以上であることを特徴とする部材。
50≦[b/(a+b)]×100≦98
を満足していることが好ましい。この場合、焼結体は、2〜6ppm/Kの範囲の任意の平均熱膨張係数(23〜150℃)を有することができる。
平均粒径0.7μmの窒化珪素(Si3N4)粉末、平均粒径1.2μmのイットリア(Y2O3)粉末、SrCO3粉末、La2O3粉末、CeO2粉末およびAl2O3粉末を用い、得られた混合粉末とエタノールを、ボールミル容器中に投入し混合した後、加熱乾燥し、造粒した。なお、Srは酸化物(SrO)の形で投入すると製作工程中に水分で水酸化物(Sr(OH)2等)になりやすいので、炭酸塩(SrCO3等)等の形で投入する。なお、表の酸化物表記は、炭酸塩で加えたものを酸化物に換算したものである。
[理論密度比]
JIS R1634に準拠して、かさ密度を測定し、理論密度(例えばイットリア(Y2O3)粉末がすべてメリライト(Y2Si3O3N4(Me=Y))に変換され、残りの窒化珪素はそのままで、その他添加物は各酸化物の状態で存在したと仮定して計算)に対する比率を算出した(例えばY2Si3O3N4の密度は4.25(g/cm3))。なお、理論密度比が95%以上であれば、JIS R1634における見掛密度とかさ密度の差はほとんどなかった。
焼結体に吸水処理(水中にて脱泡)を行った後、乾燥させ、次式により算出した。
吸水率(%)=[(W1−W2)/W2)]×100
(W1:吸水処理後の焼結体重量、W2:乾燥後の焼結体重量)
この吸水率測定は、JIS-R2205に準拠して測定しても良い。
[メリライト主ピーク強度比率]
焼結体を粉砕し、X線回折装置((株)リガク製 RU−200T または(株)リガク製 X線回折装置 RINT−TTRIII)により、粉末X線回折を行い、メリライト(Me2Si3O3N4)の主ピークの回折強度bおよびSi3N4の主ピークの回折強度aを求め、次式より算出した。X線回折は試料を粉末にするなどの方法を用いて、測定試料の結晶配向性を十分小さい状態にして(または結晶の配向性を小さくする測定方法にて)測定する。
メリライト主ピーク強度比率(%)=[b/(a+b)]×100
[X線回折条件]
RINT−TTRIIIでの測定条件は
モノクロメータ使用にて、ターゲットを銅として、
管電流300mA、管電圧50kV、
スキャンスピード4°/分、サンプリング幅0.02°
とした。
JIS R1618に準拠して、熱機械分析装置((株)リガク製 熱機械分析装置 8310シリーズ)を用いて、熱機械分析による測定にて23〜150℃の平均熱膨張係数を求めた。なお、本明細書では平均線膨張率と平均熱膨張係数とを同義として扱う。同様に線膨張率は熱膨張係数と表現しても良いとする。
[曲げ強度]
JIS R 1601に準拠して室温(23℃)で3点曲げ強さを測定した。
[ヤング率]
JIS R 1602に規定する超音波パルス法により室温(23℃)で測定した。
3mm×4mm×10mmの形状に切断した焼結体の4mm×10mmの表面に鏡面加工を施した後、その表面をSEM(日本電子(株)製 JSM−6460LA)にて観察し、さらにEPMA(日本電子(株)製 JXA−8500F)を用いて二次電子像、反射電子像の観察、及びWDS(波長分散型X線分光器)ビームスキャンマッピングを行い、その表面における窒化珪素結晶相、メリライト結晶相、並びに、粒界相(ガラス相及び窒化珪素とメリライト以外の結晶相(表中、「その他」と記載))の面積比を求めた。また、これらの面積比は気孔を除いた部分を総面積(100(面積%))とみなして算出している。なお、必要に応じて(ガラス相や窒化珪素とメリライト以外の結晶相が多く、前記機器による観察だけでは面積比を求めることが困難である場合等)、STEM(走査型透過電子顕微鏡)((株)日立ハイテクノロジーズ製HD−2000)及びEDS(エネルギー分散型X線分析装置)(EDAX製Genesis)を用いた。また、場合により、鏡面加工面にエッチング処理を行い、このエッチング面をSEM等で観察して面積比を求めた。
13…メリライト結晶相
15…粒界相
20,30,40…プローブカード
100、200、400、500…回路基板
300…ヒーター基板
Claims (14)
- 窒化珪素結晶相と、メリライト結晶相(Me2Si3O3N4、Meは、メリライトを形成する金属元素であって、La,Ce,Prを除く周期表IIIa族元素)と、粒界相とを有する窒化珪素・メリライト複合焼結体を材料とした基板であって、
前記窒化珪素・メリライト複合焼結体の切断面における前記メリライト結晶相の占める割合が、20面積%以上であり、
前記切断面における前記メリライト結晶相の占める割合と、前記切断面における前記窒化珪素結晶相の占める割合との和が、80面積%以上であり、
SiをSi 3 N 4 換算で41〜83モル%、Meを酸化物換算で13〜50モル%、含有し、
平均熱膨張係数(23〜150℃)が2〜6ppm/Kであること、
を特徴とする基板。 - 前記窒化珪素・メリライト複合焼結体の吸水率が1.5%以下である請求項1に記載の基板。
- ヤング率が200GPa以上である請求項1または2に記載の基板。
- Siを、Si3N4換算で41〜79モル%、
Meを、酸化物換算で13〜46モル%、
添加物として、周期表IIa族元素を、酸化物換算で5〜20モル%、
含有する請求項1ないし3のいずれかに記載の基板。 - 添加物として、Mg、Ca、およびSrの少なくとも1種が添加される請求項4に記載の基板。
- Siを、Si3N4換算で45〜83モル%、
Meを、酸化物換算で15〜49モル%、
添加物として、La、Ce、およびPrの少なくとも1種を、酸化物換算で0.3〜12モル%、
含有する請求項1ないし3のいずれかに記載の基板。 - 添加物として、Al、Si、周期表IVa族元素、周期表Va族元素、および周期表VIa族元素からなる群より選択される少なくとも1種の元素がさらに添加される請求項4ないし6のいずれかに記載の基板。
- Alを、酸化物換算で0.5〜10モル%含有する請求項7に記載の基板。
- Meが、周期表IIIa族元素である請求項1ないし8のいずれかに記載の基板。
- 内部または表面に発熱体を備える請求項1ないし9のいずれかに記載の基板。
- 電子部品が配置される請求項1ないし9のいずれかに記載の基板。
- 電子部品が実装される回路基板に取り付けられるとともに、窒化珪素結晶相とメリライト結晶相(Me2Si3O3N4、Meはメリライトを形成する金属元素)と粒界相とを有する窒化珪素・メリライト複合焼結体を材料とした部材であって、
前記窒化珪素・メリライト複合焼結体の切断面における前記メリライト結晶相の占める割合が、20面積%以上であり、
前記切断面における前記メリライト結晶相の占める割合と、前記切断面における前記窒化珪素結晶相の占める割合との和が、80面積%以上であり、
SiをSi 3 N 4 換算で41〜83モル%、Meを酸化物換算で13〜50モル%、含有し、
平均熱膨張係数(23〜150℃)が2〜6ppm/Kであること、
を特徴とする部材。 - 回路基板に取り付けられるスティフナーである請求項12に記載の部材。
- 回路基板に取り付けられ、電子部品を内部に収納するためのキャップである請求項12に記載の部材。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010112131A JP5481273B2 (ja) | 2010-05-14 | 2010-05-14 | 窒化珪素・メリライト複合焼結体を用いた基板および部材 |
EP10250942.9A EP2386532B1 (en) | 2010-05-14 | 2010-05-18 | Silicon nitride-melilite composite sintered body and substrate, member, device, and probe card utilizing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010112131A JP5481273B2 (ja) | 2010-05-14 | 2010-05-14 | 窒化珪素・メリライト複合焼結体を用いた基板および部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011241098A JP2011241098A (ja) | 2011-12-01 |
JP5481273B2 true JP5481273B2 (ja) | 2014-04-23 |
Family
ID=42272563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010112131A Active JP5481273B2 (ja) | 2010-05-14 | 2010-05-14 | 窒化珪素・メリライト複合焼結体を用いた基板および部材 |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2386532B1 (ja) |
JP (1) | JP5481273B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104507304B (zh) * | 2013-01-31 | 2015-12-30 | 京瓷株式会社 | 钓线用引导构件、具备该钓线用引导构件的钓线用引导件以及钓竿 |
US10996241B2 (en) * | 2016-10-31 | 2021-05-04 | Kyocera Corporation | Probe card board, probe card, and inspection apparatus |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0627029B2 (ja) * | 1984-12-28 | 1994-04-13 | 京セラ株式会社 | 窒化珪素質焼結体及びその製造法 |
US5114888A (en) * | 1989-11-21 | 1992-05-19 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered body and method for producing same |
DE19859119B4 (de) * | 1997-12-22 | 2010-06-02 | Kyocera Corp. | Leiterplatte mit sehr guter Wärmeabstrahlung, Verfahren zu ihrer Herstellung und ihre Verwendung |
JP2001019556A (ja) * | 1999-07-08 | 2001-01-23 | Denki Kagaku Kogyo Kk | 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板 |
JP2002257853A (ja) * | 2001-02-27 | 2002-09-11 | Ibiden Co Ltd | プローブカード |
JP2002128567A (ja) * | 2001-09-14 | 2002-05-09 | Ngk Spark Plug Co Ltd | 窒化珪素質焼結体及びその製造方法 |
JP4716855B2 (ja) * | 2005-11-08 | 2011-07-06 | 日本特殊陶業株式会社 | サイアロン製切削工具及びこれを備えた工具 |
JP5120857B2 (ja) * | 2008-05-16 | 2013-01-16 | 独立行政法人産業技術総合研究所 | 高熱伝導・低誘電損失の高周波用緻密質誘電体材料、その製造方法及び部材 |
JP5481137B2 (ja) * | 2008-11-21 | 2014-04-23 | 日本特殊陶業株式会社 | 窒化珪素・メリライト複合焼結体 |
EP2546216B1 (en) * | 2010-03-09 | 2016-08-03 | Kyocera Corporation | Ceramic sintered compact, circuit board using the same, electronic device and thermoelectric conversion module |
-
2010
- 2010-05-14 JP JP2010112131A patent/JP5481273B2/ja active Active
- 2010-05-18 EP EP10250942.9A patent/EP2386532B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2386532A3 (en) | 2012-10-03 |
EP2386532A2 (en) | 2011-11-16 |
JP2011241098A (ja) | 2011-12-01 |
EP2386532B1 (en) | 2017-03-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6591455B2 (ja) | 高熱伝導性窒化珪素焼結体、それを用いた窒化珪素基板および窒化珪素回路基板並びに半導体装置 | |
JP5934069B2 (ja) | 積層構造体、半導体製造装置用部材及び積層構造体の製造方法 | |
US9938444B2 (en) | Method for producing silicon nitride substrate | |
JP4424659B2 (ja) | 窒化アルミニウム質材料および半導体製造装置用部材 | |
US20130285336A1 (en) | Alumina sintered body, member including the same, and semiconductor manufacturing apparatus | |
US11897817B2 (en) | Ceramic sintered body and substrate for semiconductor device | |
JP5481137B2 (ja) | 窒化珪素・メリライト複合焼結体 | |
JPWO2019235593A1 (ja) | 板状の窒化ケイ素質焼結体およびその製造方法 | |
JP5481273B2 (ja) | 窒化珪素・メリライト複合焼結体を用いた基板および部材 | |
US20210246072A1 (en) | Ceramic sintered body and substrate for semiconductor devices | |
JP4384101B2 (ja) | 窒化けい素セラミックス基板およびそれを用いた窒化けい素セラミックス回路基板 | |
JP7148613B2 (ja) | アルミナ質磁器およびセラミックヒータ | |
JP4615873B2 (ja) | 窒化アルミニウム焼結体及びその製造方法 | |
Hassan et al. | Enhanced mechanical properties of aluminum nitride-yttria ceramics through grain refinement by pressure assisted two-step sintering | |
JP2018070436A (ja) | 窒化ケイ素焼結体の製造方法 | |
JPH11100274A (ja) | 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板 | |
JP2003226580A (ja) | 窒化アルミニウム質セラミックスおよび半導体製造用部材 | |
JP2742600B2 (ja) | 窒化アルミニウム質焼結体およびその製造方法 | |
WO2024070470A1 (ja) | 窒化珪素焼結体、耐摩耗性部材、半導体装置用基板、及び窒化珪素焼結体の製造方法 | |
JP5188085B2 (ja) | 窒化アルミニウム耐食性部材及び半導体製造装置用部材 | |
JP4221006B2 (ja) | 窒化けい素セラミックス回路基板 | |
JPH11100273A (ja) | 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板 | |
Suzuki et al. | Low-temperature sintering of mullite with alumina and solution derived yttria | |
JP2011190163A (ja) | 窒化アルミニウム焼結体加工物の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130425 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130822 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130827 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131025 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140121 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140217 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5481273 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |