JP5478498B2 - シリコン/金属複合体マイクロメカニカル構成要素およびこれを製造する方法 - Google Patents

シリコン/金属複合体マイクロメカニカル構成要素およびこれを製造する方法 Download PDF

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JP5478498B2
JP5478498B2 JP2010533559A JP2010533559A JP5478498B2 JP 5478498 B2 JP5478498 B2 JP 5478498B2 JP 2010533559 A JP2010533559 A JP 2010533559A JP 2010533559 A JP2010533559 A JP 2010533559A JP 5478498 B2 JP5478498 B2 JP 5478498B2
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silicon
layer
metal
micromechanical component
substrate
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JP2011514846A (ja
Inventor
フィアッカブリーノ,ジャン−チャールズ
ヴェラルド,マルコ
コーヌス,ティエリー
ティーボー,ジャン−フィリップ
ピータース,ジャン−バーナード
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ニヴァロックス−ファー ソシエテ アノニム
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00Subject matter not provided for in other groups of this subclass
    • B81C99/0075Manufacture of substrate-free structures
    • B81C99/0095Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/08Perforated or foraminous objects, e.g. sieves
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H55/00Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02Toothed members; Worms
    • F16H55/06Use of materials; Use of treatments of toothed members or worms to affect their intrinsic material properties
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00Gearwork
    • G04B13/02Wheels; Pinions; Spindles; Pivots
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00Gearwork
    • G04B13/02Wheels; Pinions; Spindles; Pivots
    • G04B13/021Wheels; Pinions; Spindles; Pivots elastic fitting with a spindle, axis or shaft
    • G04B13/022Wheels; Pinions; Spindles; Pivots elastic fitting with a spindle, axis or shaft with parts made of hard material, e.g. silicon, diamond, sapphire, quartz and the like
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B19/00Indicating the time by visual means
    • G04B19/04Hands; Discs with a single mark or the like
    • G04B19/042Construction and manufacture of the hands; arrangements for increasing reading accuracy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/035Microgears
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0197Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00Machine element or mechanism
    • Y10T74/19Gearing
    • Y10T74/1987Rotary bodies

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
JP2010533559A 2007-11-16 2008-11-12 シリコン/金属複合体マイクロメカニカル構成要素およびこれを製造する方法 Active JP5478498B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07120883A EP2060534A1 (fr) 2007-11-16 2007-11-16 Pièce de micromécanique composite silicium - métal et son procédé de fabrication
EP07120883.9 2007-11-16
PCT/EP2008/065347 WO2009062943A1 (fr) 2007-11-16 2008-11-12 Pièce de micromécanique composite silicium-métal et son procédé de fabrication

Publications (2)

Publication Number Publication Date
JP2011514846A JP2011514846A (ja) 2011-05-12
JP5478498B2 true JP5478498B2 (ja) 2014-04-23

Family

ID=39420509

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JP2010533559A Active JP5478498B2 (ja) 2007-11-16 2008-11-12 シリコン/金属複合体マイクロメカニカル構成要素およびこれを製造する方法

Country Status (10)

Country Link
US (2) US8486279B2 (fr)
EP (2) EP2060534A1 (fr)
JP (1) JP5478498B2 (fr)
KR (1) KR20100084527A (fr)
CN (1) CN101861281B (fr)
AT (1) ATE511494T1 (fr)
HK (1) HK1144190A1 (fr)
RU (1) RU2474532C2 (fr)
TW (1) TWI436939B (fr)
WO (1) WO2009062943A1 (fr)

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EP2230207A1 (fr) * 2009-03-13 2010-09-22 Nivarox-FAR S.A. Moule pour galvanoplastie et son procédé de fabrication
EP2230206B1 (fr) 2009-03-13 2013-07-17 Nivarox-FAR S.A. Moule pour galvanoplastie et son procédé de fabrication
EP2263971A1 (fr) 2009-06-09 2010-12-22 Nivarox-FAR S.A. Pièce de micromécanique composite et son procédé de fabrication
EP2309342A1 (fr) * 2009-10-07 2011-04-13 Nivarox-FAR S.A. Mobile monté fou en matériau micro-usinable et son procédé de fabrication
CH702156B1 (fr) * 2009-11-13 2017-08-31 Nivarox Far Sa Résonateur balancier-spiral pour une pièce d'horlogerie.
DE102010004269B4 (de) 2010-01-09 2018-06-28 Micromotion Gmbh Verzahnungspaarung und Getriebe, insbesondere Exzentergetriebe, Umlaufrädergetriebe oder Spannungswellengetriebe
EP2405300A1 (fr) * 2010-07-09 2012-01-11 Mimotec S.A. Méthode de fabrication de pièces métalliques multi niveaux par un procédé du type LIGA et pièces obtenues par la méthode
EP2484628A1 (fr) * 2011-02-03 2012-08-08 Nivarox-FAR S.A. Pièce de micromécanique à faible ruguosité de surface
EP2484629B1 (fr) * 2011-02-03 2013-06-26 Nivarox-FAR S.A. Pièce de micromécanique complexe ajourée
CN102167282A (zh) * 2011-04-07 2011-08-31 天津海鸥表业集团有限公司 一种硅与金属复合材料的微结构加工方法
CH705228A1 (fr) * 2011-07-06 2013-01-15 Suisse Electronique Microtech Pièce mécanique en composite silicium-métal et son procéde de fabrication.
EP2579104B1 (fr) * 2011-10-07 2014-06-25 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Procédé de réalisation d'une pièce d'horlogerie composite
CH705724B9 (fr) 2011-11-03 2016-05-13 Sigatec Sa Pièce de micromécanique, notamment pour l'horlogerie.
JP6345493B2 (ja) * 2014-02-25 2018-06-20 シチズン時計株式会社 ひげぜんまい
EP2937311B1 (fr) * 2014-04-25 2019-08-21 Rolex Sa Procédé de fabrication d'un composant horloger renforcé, composant horloger et pièce d'horlogerie correspondants
CH709729A2 (fr) * 2014-06-03 2015-12-15 Swatch Group Res & Dev Ltd Pièce d'habillage à base de verre photostructurable.
EP2952979B1 (fr) * 2014-06-03 2017-03-01 Nivarox-FAR S.A. Composant horloger à base de verre photostructurable
CN105402363B (zh) * 2014-09-09 2019-07-23 精工电子有限公司 机械部件、机芯、钟表以及机械部件的制造方法
JP6560250B2 (ja) 2014-12-12 2019-08-14 シチズン時計株式会社 時計部品および時計部品の製造方法
EP3035125B1 (fr) 2014-12-19 2018-01-10 Rolex Sa Procédé de fabrication d'un composant horloger multi-niveaux
EP3034461B1 (fr) 2014-12-19 2020-07-01 Rolex Sa Fabrication d'un composant horloger multi-niveaux
EP3181515A1 (fr) 2015-12-15 2017-06-21 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Piece d'horlogerie composite et son procede de fabrication
EP3202708B1 (fr) 2016-02-03 2023-05-03 Rolex Sa Procédé de fabrication d'un composant horloger hybride
CH712210B1 (fr) * 2016-03-14 2020-02-14 Nivarox Sa Procédé de fabrication d'un composant d'affichage d'horlogerie.
EP3249474B1 (fr) 2016-05-26 2019-03-13 ETA SA Manufacture Horlogère Suisse Aiguille d'affichage analogique
EP3266738B1 (fr) * 2016-07-06 2019-03-06 The Swatch Group Research and Development Ltd. Procédé de fabrication d'une pièce d'horlogerie dotée d'un élément d'habillage multi-niveaux
EP3764167A1 (fr) * 2019-07-10 2021-01-13 Patek Philippe SA Genève Procede d'obtention d'un composant horloger dont la surface est au moins partiellement revêtue d'une couche coloree
EP3839625A1 (fr) * 2019-12-18 2021-06-23 Nivarox-FAR S.A. Procede de fabrication d'un composant horloger et composant obtenu selon ce procede

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DE19817311B4 (de) * 1998-04-18 2007-03-22 Robert Bosch Gmbh Herstellungsverfahren für mikromechanisches Bauelement
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JP5231769B2 (ja) * 2007-02-27 2013-07-10 セイコーインスツル株式会社 電鋳型、電鋳型の製造方法、時計用部品、および時計
CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.

Also Published As

Publication number Publication date
US20130279307A1 (en) 2013-10-24
TW200927640A (en) 2009-07-01
US20100243603A1 (en) 2010-09-30
TWI436939B (zh) 2014-05-11
ATE511494T1 (de) 2011-06-15
CN101861281A (zh) 2010-10-13
RU2010124426A (ru) 2011-12-27
EP2060534A1 (fr) 2009-05-20
EP2259997B1 (fr) 2011-06-01
CN101861281B (zh) 2012-11-21
KR20100084527A (ko) 2010-07-26
EP2259997A1 (fr) 2010-12-15
EP2259997B2 (fr) 2015-09-30
US8486279B2 (en) 2013-07-16
HK1144190A1 (en) 2011-02-02
RU2474532C2 (ru) 2013-02-10
WO2009062943A1 (fr) 2009-05-22
JP2011514846A (ja) 2011-05-12

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