JP5478498B2 - シリコン／金属複合体マイクロメカニカル構成要素およびこれを製造する方法 - Google Patents

シリコン／金属複合体マイクロメカニカル構成要素およびこれを製造する方法 Download PDF

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JP5478498B2
JP5478498B2 JP2010533559A JP2010533559A JP5478498B2 JP 5478498 B2 JP5478498 B2 JP 5478498B2 JP 2010533559 A JP2010533559 A JP 2010533559A JP 2010533559 A JP2010533559 A JP 2010533559A JP 5478498 B2 JP5478498 B2 JP 5478498B2
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silicon
layer
metal
micromechanical component
substrate
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Japanese (ja)
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JP2011514846A (ja
Inventor
フィアッカブリーノ，ジャン−チャールズ
ヴェラルド，マルコ
コーヌス，ティエリー
ティーボー，ジャン−フィリップ
ピータース，ジャン−バーナード
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ニヴァロックス−ファー ソシエテ アノニム
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10—Electroplating with more than one layer of the same or of different metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0095—Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/08—Perforated or foraminous objects, e.g. sieves
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02—Toothed members; Worms
    • F16H55/06—Use of materials; Use of treatments of toothed members or worms to affect their intrinsic material properties
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G04B13/021—Wheels; Pinions; Spindles; Pivots elastic fitting with a spindle, axis or shaft
    • G04B13/022—Wheels; Pinions; Spindles; Pivots elastic fitting with a spindle, axis or shaft with parts made of hard material, e.g. silicon, diamond, sapphire, quartz and the like
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B19/00—Indicating the time by visual means
    • G04B19/04—Hands; Discs with a single mark or the like
    • G04B19/042—Construction and manufacture of the hands; arrangements for increasing reading accuracy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/035—Microgears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0197—Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/19—Gearing
    • Y10T74/1987—Rotary bodies

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
JP2010533559A 2007-11-16 2008-11-12 シリコン／金属複合体マイクロメカニカル構成要素およびこれを製造する方法 Active JP5478498B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07120883.9 2007-11-16
EP07120883A EP2060534A1 (fr) 2007-11-16 2007-11-16 Pièce de micromécanique composite silicium - métal et son procédé de fabrication
PCT/EP2008/065347 WO2009062943A1 (fr) 2007-11-16 2008-11-12 Pièce de micromécanique composite silicium-métal et son procédé de fabrication

Publications (2)

Publication Number Publication Date
JP2011514846A JP2011514846A (ja) 2011-05-12
JP5478498B2 true JP5478498B2 (ja) 2014-04-23

Family

ID=39420509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010533559A Active JP5478498B2 (ja) 2007-11-16 2008-11-12 シリコン／金属複合体マイクロメカニカル構成要素およびこれを製造する方法

Country Status (10)

Country Link
US (2) US8486279B2 (fr)
EP (2) EP2060534A1 (fr)
JP (1) JP5478498B2 (fr)
KR (1) KR20100084527A (fr)
CN (1) CN101861281B (fr)
AT (1) ATE511494T1 (fr)
HK (1) HK1144190A1 (fr)
RU (1) RU2474532C2 (fr)
TW (1) TWI436939B (fr)
WO (1) WO2009062943A1 (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2230207A1 (fr) * 2009-03-13 2010-09-22 Nivarox-FAR S.A. Moule pour galvanoplastie et son procédé de fabrication
EP2230206B1 (fr) * 2009-03-13 2013-07-17 Nivarox-FAR S.A. Moule pour galvanoplastie et son procédé de fabrication
EP2263971A1 (fr) 2009-06-09 2010-12-22 Nivarox-FAR S.A. Pièce de micromécanique composite et son procédé de fabrication
EP2309342A1 (fr) 2009-10-07 2011-04-13 Nivarox-FAR S.A. Mobile monté fou en matériau micro-usinable et son procédé de fabrication
CH702156B1 (fr) * 2009-11-13 2017-08-31 Nivarox Far Sa Résonateur balancier-spiral pour une pièce d'horlogerie.
DE102010004269B4 (de) 2010-01-09 2018-06-28 Micromotion Gmbh Verzahnungspaarung und Getriebe, insbesondere Exzentergetriebe, Umlaufrädergetriebe oder Spannungswellengetriebe
EP2405300A1 (fr) * 2010-07-09 2012-01-11 Mimotec S.A. Méthode de fabrication de pièces métalliques multi niveaux par un procédé du type LIGA et pièces obtenues par la méthode
EP2484629B1 (fr) * 2011-02-03 2013-06-26 Nivarox-FAR S.A. Pièce de micromécanique complexe ajourée
EP2484628A1 (fr) * 2011-02-03 2012-08-08 Nivarox-FAR S.A. Pièce de micromécanique à faible ruguosité de surface
CN102167282A (zh) * 2011-04-07 2011-08-31 天津海鸥表业集团有限公司 一种硅与金属复合材料的微结构加工方法
CH705228A1 (fr) * 2011-07-06 2013-01-15 Suisse Electronique Microtech Pièce mécanique en composite silicium-métal et son procéde de fabrication.
EP2579104B1 (fr) * 2011-10-07 2014-06-25 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Procédé de réalisation d'une pièce d'horlogerie composite
CH705724B9 (fr) 2011-11-03 2016-05-13 Sigatec Sa Pièce de micromécanique, notamment pour l'horlogerie.
JP6345493B2 (ja) * 2014-02-25 2018-06-20 シチズン時計株式会社 ひげぜんまい
EP2937311B1 (fr) * 2014-04-25 2019-08-21 Rolex Sa Procédé de fabrication d'un composant horloger renforcé, composant horloger et pièce d'horlogerie correspondants
CH709729A2 (fr) 2014-06-03 2015-12-15 Swatch Group Res & Dev Ltd Pièce d'habillage à base de verre photostructurable.
EP2952979B1 (fr) * 2014-06-03 2017-03-01 Nivarox-FAR S.A. Composant horloger à base de verre photostructurable
CN105402363B (zh) * 2014-09-09 2019-07-23 精工电子有限公司 机械部件、机芯、钟表以及机械部件的制造方法
WO2016093354A1 (fr) * 2014-12-12 2016-06-16 シチズンホールディングス株式会社 Composant d'horloge, et procédé de fabrication de celle-ci
EP3035125B1 (fr) * 2014-12-19 2018-01-10 Rolex Sa Procédé de fabrication d'un composant horloger multi-niveaux
EP3034461B1 (fr) 2014-12-19 2020-07-01 Rolex Sa Fabrication d'un composant horloger multi-niveaux
EP3181515A1 (fr) 2015-12-15 2017-06-21 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Piece d'horlogerie composite et son procede de fabrication
EP3202708B1 (fr) * 2016-02-03 2023-05-03 Rolex Sa Procédé de fabrication d'un composant horloger hybride
EP3220208A1 (fr) * 2016-03-14 2017-09-20 Nivarox-FAR S.A. Composant d'affichage d'horlogerie economique
EP3249474B1 (fr) * 2016-05-26 2019-03-13 ETA SA Manufacture Horlogère Suisse Aiguille d'affichage analogique
EP3266738B1 (fr) * 2016-07-06 2019-03-06 The Swatch Group Research and Development Ltd. Procédé de fabrication d'une pièce d'horlogerie dotée d'un élément d'habillage multi-niveaux
EP3764167A1 (fr) * 2019-07-10 2021-01-13 Patek Philippe SA Genève Procede d'obtention d'un composant horloger dont la surface est au moins partiellement revêtue d'une couche coloree
EP3839625A1 (fr) * 2019-12-18 2021-06-23 Nivarox-FAR S.A. Procede de fabrication d'un composant horloger et composant obtenu selon ce procede

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2137249C1 (ru) * 1998-03-31 1999-09-10 Санкт-Петербургский государственный электротехнический университет Способ изготовления микромеханических приборов
DE19817311B4 (de) * 1998-04-18 2007-03-22 Robert Bosch Gmbh Herstellungsverfahren für mikromechanisches Bauelement
US6887391B1 (en) * 2000-03-24 2005-05-03 Analog Devices, Inc. Fabrication and controlled release of structures using etch-stop trenches
DE10055421A1 (de) * 2000-11-09 2002-05-29 Bosch Gmbh Robert Verfahren zur Erzeugung einer mikromechanischen Struktur und mikromechanische Struktur
US6506620B1 (en) * 2000-11-27 2003-01-14 Microscan Systems Incorporated Process for manufacturing micromechanical and microoptomechanical structures with backside metalization
FR2852111B1 (fr) * 2003-03-05 2005-06-24 Univ Franche Comte Dispositif d'horloge utilisant la technologie mems
JP2006064575A (ja) * 2004-08-27 2006-03-09 Seiko Epson Corp 時計用部品、時計用組立部品、および時計
US7204737B2 (en) * 2004-09-23 2007-04-17 Temic Automotive Of North America, Inc. Hermetically sealed microdevice with getter shield
CH696475A5 (fr) * 2005-05-12 2007-06-29 Eta Sa Mft Horlogere Suisse Organe d'affichage analogique en matériau cristallin, pièce d'horlogerie pourvue d'un tel organe d'affichage et procédé pour sa fabrication.
EP1780612A1 (fr) * 2005-10-25 2007-05-02 ETA SA Manufacture Horlogère Suisse Dispositif d'affichage analogique comportant un entraînement par engrenages planétaires
TWI276805B (en) * 2005-11-10 2007-03-21 Mjc Probe Inc Probe of probe card and manufacturing method thereof
DE602006007807D1 (de) * 2006-04-07 2009-08-27 Eta Sa Mft Horlogere Suisse Mechanischer Wechsler zum Drehantreiben eines Rades aus einer einzelnen Richtung
JP5231769B2 (ja) * 2007-02-27 2013-07-10 セイコーインスツル株式会社 電鋳型、電鋳型の製造方法、時計用部品、および時計
CH714952B1 (fr) * 2007-05-08 2019-10-31 Patek Philippe Sa Geneve Composant horloger, son procédé de fabrication et application de ce procédé.

Also Published As

Publication number Publication date
EP2060534A1 (fr) 2009-05-20
EP2259997B2 (fr) 2015-09-30
US20100243603A1 (en) 2010-09-30
WO2009062943A1 (fr) 2009-05-22
RU2474532C2 (ru) 2013-02-10
RU2010124426A (ru) 2011-12-27
CN101861281A (zh) 2010-10-13
US8486279B2 (en) 2013-07-16
JP2011514846A (ja) 2011-05-12
ATE511494T1 (de) 2011-06-15
KR20100084527A (ko) 2010-07-26
HK1144190A1 (en) 2011-02-02
CN101861281B (zh) 2012-11-21
EP2259997A1 (fr) 2010-12-15
TWI436939B (zh) 2014-05-11
US20130279307A1 (en) 2013-10-24
TW200927640A (en) 2009-07-01
EP2259997B1 (fr) 2011-06-01

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