JP5462369B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- JP5462369B2 JP5462369B2 JP2012533040A JP2012533040A JP5462369B2 JP 5462369 B2 JP5462369 B2 JP 5462369B2 JP 2012533040 A JP2012533040 A JP 2012533040A JP 2012533040 A JP2012533040 A JP 2012533040A JP 5462369 B2 JP5462369 B2 JP 5462369B2
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- 238000005192 partition Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 12
- 230000009471 action Effects 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 9
- 238000009832 plasma treatment Methods 0.000 claims description 2
- 229910000859 α-Fe Inorganic materials 0.000 claims description 2
- 230000005672 electromagnetic field Effects 0.000 description 24
- 239000007789 gas Substances 0.000 description 24
- 230000006698 induction Effects 0.000 description 23
- 239000000758 substrate Substances 0.000 description 19
- 239000010408 film Substances 0.000 description 11
- 239000004020 conductor Substances 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 238000009616 inductively coupled plasma Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/32119—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Description
a) 内部でプラズマ処理を行うための、内面が周囲の壁の内面と70〜120°の内角で交わる線である略直交稜線で囲われているアンテナ配置壁を有する密閉容器と、
b) 前記アンテナ配置壁の内面と外面の間に設けられた、内面側に開口を有する空洞から成るアンテナ配置部と、
c) 前記アンテナ配置部内に配置された高周波アンテナと、
d) 前記アンテナ配置壁の内面全体を覆う誘電体製の板であって、前記開口を1枚の該板のみで覆う仕切板と、
を備えることを特徴とする。
11…真空容器
111…内部空間
112、114…上壁
1121、1141…内面
1122、1142…外面
113…略直交稜線
12…基体保持部
131…ガス導入口
132…ガス排出口
14、14A、14B…アンテナ配置部(空洞)
141…アンテナ配置部(空洞)の壁面
15、15A…仕切板
115…段差
16…蓋
161…真空排気口
162…フィードスルー
163…不活性ガス導入口
164…不活性ガス排出口
17…ガスシール
18…高周波アンテナ
181…作用部
182…直線部
19…磁性体部材
21…誘電体部材
22…隙間
S…基体
Claims (12)
- a) 内部でプラズマ処理を行うための、内面が周囲の壁の内面と70〜120°の内角で交わる線である略直交稜線で囲われているアンテナ配置壁を有する密閉容器と、
b) 前記アンテナ配置壁の内面と外面の間に設けられた、内面側に開口を有する空洞から成るアンテナ配置部と、
c) 前記アンテナ配置部内に配置された高周波アンテナと、
d) 前記アンテナ配置壁の内面全体を覆う誘電体製の板であって、前記開口を1枚の該板のみで覆う仕切板と、
を備えることを特徴とするプラズマ処理装置。 - 前記空洞が前記外面側に開口を有し、該外面側開口が蓋で密閉されていることを特徴とする請求項1に記載のプラズマ処理装置。
- 前記高周波アンテナが前記蓋に取り付けられていることを特徴とする請求項2に記載のプラズマ処理装置。
- 前記アンテナ配置部が密閉されていることを特徴とする請求項1〜3のいずれかに記載のプラズマ処理装置。
- 前記アンテナ配置部内が真空であることを特徴とする請求項4に記載のプラズマ処理装置。
- 前記アンテナ配置部内が不活性ガスで満たされていることを特徴とする請求項4に記載のプラズマ処理装置。
- 前記アンテナ配置部内に誘電体部材が充填されていることを特徴とする請求項1〜6のいずれかに記載のプラズマ処理装置。
- 前記アンテナ配置部が同一の壁に複数設けられていることを特徴とする請求項1〜7のいずれかに記載のプラズマ処理装置。
- 前記高周波アンテナがU字形の高周波アンテナであって、該U字形の高周波アンテナの平行する2本の直線部を接続する部分である作用部と該作用部に流れる電流に垂直な方向における前記空洞の壁の間の距離が30mm以上であることを特徴とする請求項1〜8のいずれかに記載のプラズマ処理装置。
- 前記アンテナ配置部内において、前記高周波アンテナの作用部の周囲を、前記内面側を除いて磁性体部材で覆っていることを特徴とする請求項9に記載のプラズマ処理装置。
- 前記空洞が、前記外面側から前記内面側に向かって幅が広くなるように形成されていることを特徴とする請求項1〜10のいずれかに記載のプラズマ処理装置。
- 前記磁性体部材の材料がフェライトであることを特徴とする請求項11に記載のプラズマ処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012533040A JP5462369B2 (ja) | 2010-09-10 | 2011-09-09 | プラズマ処理装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010203739 | 2010-09-10 | ||
JP2010203739 | 2010-09-10 | ||
PCT/JP2011/070581 WO2012033191A1 (ja) | 2010-09-10 | 2011-09-09 | プラズマ処理装置 |
JP2012533040A JP5462369B2 (ja) | 2010-09-10 | 2011-09-09 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012033191A1 JPWO2012033191A1 (ja) | 2014-01-20 |
JP5462369B2 true JP5462369B2 (ja) | 2014-04-02 |
Family
ID=45810787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012533040A Active JP5462369B2 (ja) | 2010-09-10 | 2011-09-09 | プラズマ処理装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20130220548A1 (ja) |
EP (1) | EP2615889A4 (ja) |
JP (1) | JP5462369B2 (ja) |
KR (1) | KR101570277B1 (ja) |
CN (1) | CN103202105B (ja) |
TW (1) | TWI559819B (ja) |
WO (1) | WO2012033191A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2012032596A1 (ja) * | 2010-09-06 | 2012-03-15 | 株式会社イー・エム・ディー | プラズマ処理装置 |
JP6101535B2 (ja) * | 2013-03-27 | 2017-03-22 | 株式会社Screenホールディングス | プラズマ処理装置 |
JP2015037110A (ja) * | 2013-08-13 | 2015-02-23 | 株式会社ディスコ | プラズマエッチング装置 |
JP6373707B2 (ja) * | 2014-09-30 | 2018-08-15 | 株式会社Screenホールディングス | プラズマ処理装置 |
US9741584B1 (en) * | 2016-05-05 | 2017-08-22 | Lam Research Corporation | Densification of dielectric film using inductively coupled high density plasma |
JP6708887B2 (ja) * | 2018-09-25 | 2020-06-10 | 株式会社プラズマイオンアシスト | プラズマ処理装置、アンテナ導体又は/及び導電性部材の製造方法 |
US11515122B2 (en) * | 2019-03-19 | 2022-11-29 | Tokyo Electron Limited | System and methods for VHF plasma processing |
US10879582B1 (en) | 2019-08-12 | 2020-12-29 | Rockwell Collins, Inc. | Dielectric reinforced formed metal antenna |
JP7286477B2 (ja) * | 2019-08-27 | 2023-06-05 | 東レエンジニアリング株式会社 | 薄膜形成装置 |
EP3813092A1 (en) * | 2019-10-23 | 2021-04-28 | EMD Corporation | Plasma source |
JP7488464B2 (ja) | 2020-07-27 | 2024-05-22 | 日新電機株式会社 | プラズマ処理装置 |
JP2024017373A (ja) * | 2022-07-27 | 2024-02-08 | 日新電機株式会社 | プラズマ処理装置 |
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2011
- 2011-09-09 JP JP2012533040A patent/JP5462369B2/ja active Active
- 2011-09-09 WO PCT/JP2011/070581 patent/WO2012033191A1/ja active Application Filing
- 2011-09-09 CN CN201180042545.3A patent/CN103202105B/zh active Active
- 2011-09-09 EP EP11823665.2A patent/EP2615889A4/en not_active Withdrawn
- 2011-09-09 TW TW100132538A patent/TWI559819B/zh active
- 2011-09-09 US US13/821,822 patent/US20130220548A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
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WO2012033191A1 (ja) | 2012-03-15 |
JPWO2012033191A1 (ja) | 2014-01-20 |
EP2615889A1 (en) | 2013-07-17 |
TW201223344A (en) | 2012-06-01 |
KR101570277B1 (ko) | 2015-11-18 |
TWI559819B (zh) | 2016-11-21 |
EP2615889A4 (en) | 2015-11-18 |
CN103202105A (zh) | 2013-07-10 |
CN103202105B (zh) | 2015-11-25 |
US20130220548A1 (en) | 2013-08-29 |
KR20130056900A (ko) | 2013-05-30 |
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