JP5461261B2 - 電力測定装置の信頼性の評価方法 - Google Patents

電力測定装置の信頼性の評価方法 Download PDF

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Publication number
JP5461261B2
JP5461261B2 JP2010065652A JP2010065652A JP5461261B2 JP 5461261 B2 JP5461261 B2 JP 5461261B2 JP 2010065652 A JP2010065652 A JP 2010065652A JP 2010065652 A JP2010065652 A JP 2010065652A JP 5461261 B2 JP5461261 B2 JP 5461261B2
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power
power measurement
range
uncertainty
impedance
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JP2010065652A
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Japanese (ja)
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JP2011196901A (ja
JP2011196901A5 (enExample
Inventor
良平 田中
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Daihen Corp
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Daihen Corp
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Priority to JP2010065652A priority Critical patent/JP5461261B2/ja
Priority to US13/046,988 priority patent/US9372248B2/en
Publication of JP2011196901A publication Critical patent/JP2011196901A/ja
Publication of JP2011196901A5 publication Critical patent/JP2011196901A5/ja
Application granted granted Critical
Publication of JP5461261B2 publication Critical patent/JP5461261B2/ja
Priority to US15/172,572 priority patent/US20160282440A1/en
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/01—Arrangements for measuring electric power or power factor in circuits having distributed constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/04—Testing or calibrating of apparatus covered by the other groups of this subclass of instruments for measuring time integral of power or current
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/06—Arrangements for measuring electric power or power factor by measuring current and voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Plasma Technology (AREA)
JP2010065652A 2010-03-23 2010-03-23 電力測定装置の信頼性の評価方法 Expired - Fee Related JP5461261B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010065652A JP5461261B2 (ja) 2010-03-23 2010-03-23 電力測定装置の信頼性の評価方法
US13/046,988 US9372248B2 (en) 2010-03-23 2011-03-14 Method for evaluating reliability of electrical power measuring device
US15/172,572 US20160282440A1 (en) 2010-03-23 2016-06-03 Method for evaluating reliability of electrical power measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010065652A JP5461261B2 (ja) 2010-03-23 2010-03-23 電力測定装置の信頼性の評価方法

Publications (3)

Publication Number Publication Date
JP2011196901A JP2011196901A (ja) 2011-10-06
JP2011196901A5 JP2011196901A5 (enExample) 2013-03-14
JP5461261B2 true JP5461261B2 (ja) 2014-04-02

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JP2010065652A Expired - Fee Related JP5461261B2 (ja) 2010-03-23 2010-03-23 電力測定装置の信頼性の評価方法

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US (2) US9372248B2 (enExample)
JP (1) JP5461261B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102082140B1 (ko) * 2015-02-11 2020-02-27 엘에스산전 주식회사 Hvdc 시스템에서 전력 값 측정 방법
CN106597083B (zh) * 2016-11-11 2018-12-14 国网湖南省电力公司电力科学研究院 一种并联无功补偿装置节电量测量不确定度评定方法
KR102003942B1 (ko) * 2017-11-07 2019-07-25 한국원자력연구원 정합 장치를 포함하는 플라즈마 발생 장치 및 임피던스 정합 방법
CN112748388A (zh) * 2019-10-29 2021-05-04 国网宁夏电力有限公司电力科学研究院 一种智能电表的测试系统及测试方法
CN111025211B (zh) * 2019-11-27 2022-11-18 中国电力科学研究院有限公司 一种宽频电压标准测量装置的量值溯源方法及系统
CN115389999B (zh) * 2021-05-24 2025-02-14 上海正泰智能科技有限公司 判断计量设备是否计量失准的方法、配电系统和配电设备
CN117999631A (zh) * 2021-09-17 2024-05-07 朗姆研究公司 用于直接驱动式射频功率供应源的参考盒
JP2024534990A (ja) 2021-09-17 2024-09-26 ラム リサーチ コーポレーション ダイレクトドライブ無線周波電源に対するコイルの対称的結合
US12272524B2 (en) * 2022-09-19 2025-04-08 Applied Materials, Inc. Wideband variable impedance load for high volume manufacturing qualification and on-site diagnostics
KR102801594B1 (ko) * 2023-02-06 2025-04-25 한국핵융합에너지연구원 플라즈마장치의 전류/전압/전력 측정모듈 및 그를 가지는 플라즈마장치

Family Cites Families (15)

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US2891221A (en) * 1955-02-24 1959-06-16 Bird Electronic Corp Standing wave indicator
US4927266A (en) * 1987-03-30 1990-05-22 Anritsu Corporation Optical signal generating apparatus and optical power meter calibrating system using the same
JPH0572311A (ja) * 1991-09-12 1993-03-26 Yokogawa Electric Corp 電力計の校正方法
GB2392250B (en) * 2001-06-25 2004-11-10 Invensys Sys Inc Sensor fusion using self evaluating process sensors
US6815942B2 (en) * 2001-09-25 2004-11-09 Landis+Gyr, Inc. Self-calibrating electricity meter
US20030213559A1 (en) * 2002-05-20 2003-11-20 Applied Science And Technology, Inc. Stabilization of electronegative plasmas with feedback control of RF generator systems
DE102004006550B4 (de) * 2004-02-10 2013-08-29 Siemens Aktiengesellschaft Verfahren zur Kontrolle eines Hochfrequenz-Leistungsverstärkers, Hochfrequenzeinrichtung, Hochfrequenz-Kontrolleinrichtung und Magnetresonanztomographiesystem
WO2007058910A2 (en) * 2005-11-10 2007-05-24 Kathleen Lowe Melde Apparatus and method of selecting components for a reconfigurable impedance match circuit
JP4648179B2 (ja) * 2005-12-14 2011-03-09 株式会社ダイヘン 高周波測定装置
US7489145B2 (en) * 2005-12-14 2009-02-10 Daihen Corporation Plasma processing system
US7339366B2 (en) * 2006-06-27 2008-03-04 Analog Devices, Inc. Directional coupler for a accurate power detection
DE102007006225A1 (de) * 2007-02-08 2008-08-14 Hüttinger Elektronik Gmbh + Co. Kg Richtkoppler
JP2009230174A (ja) * 2008-03-19 2009-10-08 National Institute Of Advanced Industrial & Technology 検査用計測システムおよび方法
WO2009149731A1 (de) * 2008-06-13 2009-12-17 Siemens Aktiengesellschaft Manipulationsgeschützte erfassung einer stromeinspeisemenge
JP5169844B2 (ja) * 2009-01-06 2013-03-27 三菱電機株式会社 方向性結合器

Also Published As

Publication number Publication date
JP2011196901A (ja) 2011-10-06
US9372248B2 (en) 2016-06-21
US20160282440A1 (en) 2016-09-29
US20110238360A1 (en) 2011-09-29

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