JP5458028B2 - Multi-wiring board - Google Patents

Multi-wiring board Download PDF

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JP5458028B2
JP5458028B2 JP2011008339A JP2011008339A JP5458028B2 JP 5458028 B2 JP5458028 B2 JP 5458028B2 JP 2011008339 A JP2011008339 A JP 2011008339A JP 2011008339 A JP2011008339 A JP 2011008339A JP 5458028 B2 JP5458028 B2 JP 5458028B2
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plating
wiring board
electrode
tie bar
ear
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JP2012151255A (en
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信治 前原
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Niterra Co Ltd
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NGK Spark Plug Co Ltd
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Description

本発明は、複数の配線基板が縦横に配列されており、該配線基板ごとの表面、裏面、あるいはキャビティの底面に形成された導体部分に金属メッキが比較的均一に被覆された多数個取り配線基板に関する。   In the present invention, a plurality of wiring boards in which a plurality of wiring boards are arranged vertically and horizontally, and a metal plating is relatively uniformly coated on a conductor portion formed on the front surface, the back surface, or the bottom surface of each cavity of each wiring board. Regarding the substrate.

多数個取り配線基板は、複数の配線基板を縦横に配列してなる製品領域と、該製品領域の周囲に位置する矩形枠状の耳部とからなり、該耳部において対向する一対の耳辺の外側面には、上記配線基板ごとの表面に露出して形成されたパッドなどの導体部分に、例えば、NiメッキおよびAuメッキを順次被覆するためのメッキ用電極が複数個ずつ形成されている。該メッキ用電極と、製品領域の最外側に位置する配線基板の導体部分との間は、上記耳部の表面あるいは内部に形成された平面視が矩形枠状のメッキ用タイバーを介して、導通可能とされている。そして、上記メッキ用電極ごとの凹面にメッキ用の棒状電極を挿入して接触させた状態で、所定のメッキ液槽に順次浸漬することによって、上記Auメッキなどを各導体部分に被覆している。   The multi-cavity wiring board is composed of a product area in which a plurality of wiring boards are arranged vertically and horizontally, and a rectangular frame-shaped ear part positioned around the product area, and a pair of ear edges facing each other at the ear part. A plurality of plating electrodes for sequentially covering, for example, Ni plating and Au plating are formed on a conductor portion such as a pad exposed on the surface of each wiring board on the outer surface of each of the wiring boards. . Between the electrode for plating and the conductor portion of the wiring board located on the outermost side of the product area, the surface formed on the surface of the ear part or inside is electrically connected through a rectangular frame-shaped plating tie bar. It is possible. Each conductor portion is covered with the Au plating or the like by sequentially immersing it in a predetermined plating bath in a state where a rod electrode for plating is inserted into contact with the concave surface for each electrode for plating. .

ところで、前記メッキ用電極が形成された耳部の耳辺と、前記製品領域の最外側に位置する配線基板の導体部分ごとから接続配線が延びた耳辺とが互いに直交して隣接する形態の場合、該2つの耳辺が直角に連接するコーナ部に位置する前記メッキ用タイバーには、メッキ用電流が過剰に流れ易くなる。
そのため、前記コーナ部付近のメッキ用タイバーの表面には、Auなどのメッキ被膜が比較的厚めに被覆される反面、製品領域内の特に中心部付近に位置する配線基板の導体部分には、メッキ被膜が比較的薄く被覆され易くなるため、製品領域内の位置ごとに配線基板によって、メッキ被膜の厚みが不均一になる、という問題があった。かかる問題を解決するため、矩形枠状を呈する耳部のうち、該耳部のコーナ部ごとの領域に位置するメッキ用タイバーの幅を、他の直線部に位置するメッキ用タイバーの幅よりも広くした多数個取り配線基板が提案されている(例えば、特許文献1参照)。
By the way, the ear side of the ear part where the electrode for plating is formed and the ear side where the connection wiring extends from each conductor part of the wiring board located on the outermost side of the product region are adjacent to each other at right angles. In this case, the plating current is likely to flow excessively in the plating tie bar located at the corner portion where the two ear sides are connected at right angles.
Therefore, the surface of the plating tie bar near the corner is coated with a relatively thick plating film such as Au, while the conductor portion of the wiring board located near the center in the product area is plated. Since the coating becomes relatively thin and easy to coat, there is a problem that the thickness of the plating coating becomes non-uniform depending on the wiring board at each position in the product region. In order to solve such a problem, among the ears having a rectangular frame shape, the width of the plating tie bar located in the region for each corner part of the ear part is made larger than the width of the plating tie bar located in the other straight part. A wide multi-cavity wiring board has been proposed (see, for example, Patent Document 1).

しかし、特許文献1の多数個取り配線基板では、メッキ用電極が形成された耳部の耳辺と、製品領域の最外側に位置する配線基板の導体部分ごとから接続配線が延びた耳辺とが共通している形態の多数個取り配線基板には、適用し難い。しかも、メッキ用電極の比較的近くに位置する製品領域の最外側の配線基板に比べて、比較的離れた製品領域の中央側に位置する配線基板までの導通抵抗が大きくならざるを得ない。その結果、最外側の配線基板の導体部分に被覆される金属メッキ被膜の厚みが、中央側の配線基板の導体部分に被覆される金属メッキ被膜の厚みよりも厚くなって、メッキ被膜にバラツキが生じ、引いては、個片化された複数の配線基板の間において、品質が不安定になる、という問題があった。   However, in the multi-cavity wiring board of Patent Document 1, the ear edge of the ear portion where the electrode for plating is formed, and the ear edge where the connection wiring extends from each conductor portion of the wiring board located on the outermost side of the product area, However, it is difficult to apply to a multi-piece wiring board having a common form. In addition, the conduction resistance to the wiring board located at the center of the product area relatively far away must be larger than that of the outermost wiring board in the product area located relatively close to the plating electrode. As a result, the thickness of the metal plating film coated on the conductor part of the outermost wiring board becomes thicker than the thickness of the metal plating film coated on the conductor part of the central wiring board, and the plating film varies. As a result, there is a problem that the quality becomes unstable among the plurality of wiring boards separated into individual pieces.

特開2006−100546号公報(第1〜11頁、図1)Japanese Patent Laid-Open No. 2006-1000054 (pages 1 to 11, FIG. 1)

本発明は、縦横に複数の配線基板が配列された製品領域と、メッキ用電極が外側面に形成された耳部とを併有し、上記製品領域内のどの位置における配線基板であっても、その表面に位置する導体部分に被覆された金属メッキ被膜の厚みが均一な多数個取り配線基板を提供する、ことを課題とする。   The present invention has both a product region in which a plurality of wiring boards are arranged vertically and horizontally and an ear portion on which an electrode for plating is formed on the outer surface, and is a wiring substrate at any position in the product region. An object of the present invention is to provide a multi-piece wiring board in which the thickness of the metal plating film coated on the conductor portion located on the surface thereof is uniform.

課題を解決するための手段および発明の効果Means for Solving the Problems and Effects of the Invention

本発明は、前記課題を解決するため、前記形態の多数個取り配線基板において、メッキ用タイバーの幅をメッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって広くする、ことに着想して成されたものである。
即ち、本発明の多数個取り配線基板(請求項1)は、複数の絶縁層を積層してなり、厚み方向に沿った平面視で矩形を呈する複数の配線基板を縦横に沿って配列した製品領域と、上記同様に絶縁層を積層してなり、上記製品領域の外周に沿って位置し且つ平面視が矩形枠状である耳部と、該耳部の外側面に形成したメッキ用電極と、上記耳部に形成され、上記メッキ用電極と、上記製品領域内の最外側に位置する複数の配線基板の導体部分から延びた接続配線ごと、との間を導通するメッキ用タイバーとを含み、該メッキ用タイバーの幅は、上記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって広くなっている、ことを特徴とする。
In order to solve the above problems, the present invention provides a multi-cavity wiring board of the above-described form, wherein the width of the plating tie bar is increased from a position close to the plating electrode to a position away from the plating electrode. Inspired by the idea.
That is, the multi-cavity wiring board of the present invention (Claim 1) is a product in which a plurality of insulating layers are laminated, and a plurality of wiring boards having a rectangular shape in a plan view along the thickness direction are arranged along the length and breadth. A region, an insulating layer laminated in the same manner as described above, an ear portion that is located along the outer periphery of the product region and has a rectangular frame shape in plan view, and a plating electrode formed on the outer surface of the ear portion; A plating tie bar formed between the ears and electrically connected between the electrode for plating and connection wires extending from conductor portions of a plurality of wiring boards located on the outermost side in the product region. The width of the plating tie bar is wider from a position close to the plating electrode toward a position away from the plating electrode.

これによれば、前記メッキ用電極と、前記製品領域内の最外側に位置する複数の配線基板の導体部分から延びた接続配線ごと、との間を導通する前記メッキ用タイバーは、上記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって幅が広くなるように前記耳部に形成されている。その結果、メッキ用電極からの電流が直ちに該電極に近接する配線基板に過剰に流れにくくなるので、メッキ用電極の比較的近くに位置する製品領域の最外側の配線基板と、メッキ用電極から比較的離れた製品領域の中央側に位置する配線基板との間において、導通経路の長短に伴う導通抵抗の差を抑制ないし低減できる。
従って、メッキ用電極、メッキ用タイバー、および接続配線を介してメッキ電流が、製品領域のどの位置における配線基板に対しても、比較的均一に流されているので、該配線基板ごとの表面などに位置する導体部分に厚みが近似した金属メッキ被膜の被覆された多数個取り配線基板となっている。
According to this, the plating tie bar that conducts between the electrode for plating and the connection wiring extending from the conductor portions of the plurality of wiring boards located on the outermost side in the product region is the plating plate. The ear portion is formed so that the width increases from a position close to the electrode toward a position away from the plating electrode. As a result, the current from the plating electrode does not immediately flow excessively to the wiring board close to the electrode, so that the outermost wiring board in the product area located relatively close to the plating electrode and the plating electrode A difference in conduction resistance due to the length of the conduction path can be suppressed or reduced with respect to the wiring board located on the center side of the relatively distant product region.
Accordingly, since the plating current flows relatively uniformly to the wiring board at any position in the product area through the plating electrode, the plating tie bar, and the connection wiring, the surface of each wiring board, etc. This is a multi-piece wiring board in which the conductor portion located at is covered with a metal plating film whose thickness is approximate.

尚、前記絶縁層は、アルミナなどの高温焼成セラミックの層、またはガラス−セラミック層を含む低温焼成セラミックの層、あるいは樹脂層である。
また、前記製品領域は、複数の配線基板を縦横に直接隣接させた形態と、複数の配線基板を絶縁層を介して縦横に配列させた形態との双方を含んでいる。
更に、前記メッキ用タイバーは、複数のセラミック層などが積層されてなる前記耳部の表面、裏面、あるいは複数のセラミック層などの層間に形成されている。
また、前記メッキ用タイバーと、前記製品領域内の最外側に位置する配線基板ごとの導体部分との間は、専用の前記接続導体によって、個別に接続されていると共に、前記製品領域内で隣接する配線基板ごとの導体部同士の間も、同様な中継導体で接続されている。
更に、配線基板の導体部分とは、内部配線層、表面または裏面の接続端子(パッド)、キャビティ底面のパッド、スルーホール導体、あるいはキャビティを囲む表面の封止用導体枠などである。
また、前記製品領域と耳部との間、および製品領域内で隣接する配線基板同士の間には、仮想の切断予定面が位置しているか、あるいは該切断予定面に沿った分割溝が表面および裏面の少なくとも一方に形成されている。
更に、前記耳辺は、矩形枠状の耳部を構成する何れか1つの辺を指す。
The insulating layer is a high-temperature fired ceramic layer such as alumina, a low-temperature fired ceramic layer including a glass-ceramic layer, or a resin layer.
The product region includes both a form in which a plurality of wiring boards are directly adjacent to each other vertically and horizontally and a form in which a plurality of wiring boards are arranged vertically and horizontally through an insulating layer.
Furthermore, the plating tie bar is formed between the front and back surfaces of the ear portion formed by laminating a plurality of ceramic layers and the like, or between a plurality of ceramic layers.
Further, the plating tie bar and the conductor portion of each wiring board located on the outermost side in the product area are individually connected by the dedicated connection conductor and are adjacent in the product area. The conductor portions of each wiring board to be connected are also connected by a similar relay conductor.
Furthermore, the conductor portion of the wiring board is an internal wiring layer, a connection terminal (pad) on the front or back surface, a pad on the bottom surface of the cavity, a through-hole conductor, or a sealing conductor frame on the surface surrounding the cavity.
Further, between the product region and the ear portion, and between adjacent wiring boards in the product region, a virtual planned cutting surface is located, or a dividing groove along the planned cutting surface is a surface. And at least one of the back surfaces.
Furthermore, the said ear | edge side points out any one side which comprises the ear | edge part of a rectangular frame shape.

また、本発明には、前記メッキ用タイバーの幅は、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、漸次的に広くなっているか、または段階的に広くなっている、多数個取り配線基板(請求項2)も含まれる。
これによれば、前記メッキ用タイバーの幅が、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、漸次的または段階的に広くなるように前記耳部に形成されている。その結果、製品領域のどの位置における配線基板に対しても、比較的均一なメッキ電流が流れるので、配線基板ごとの導体部分に厚みが近似した金属メッキ被膜の被覆された多数個取り配線基板となっている。しかも、セラミック層などからなる複数の絶縁層を積層してなる前記耳部の表面、裏面、あるいは内部の絶縁層間に、製造工程において導電性ペーストを、例えば、テーパ状のように漸次的に幅が変化するか、例えば、階段状のように段階的に幅が変化するパターンで印刷することで、工数を大きく増やしたり、複雑にすることなく、容易に前記メッキ用タイバーを形成することができる。
尚、前記「漸次的」とは、メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、例えば、テーパ状のパターンで幅が広くなることを指している。また、前記「段階的」とは、例えば、複数段の階段形状のパターンで幅が広くなることを指している。
In the present invention, the width of the plating tie bar is gradually increased from a position close to the plating electrode to a position away from the plating electrode, or is gradually increased. A multi-piece wiring board (claim 2) is also included.
According to this, the width of the plating tie bar is formed in the ear portion so as to gradually or stepwise widen from a position close to the plating electrode to a position away from the plating electrode. ing. As a result, since a relatively uniform plating current flows to the wiring board at any position in the product area, a multi-piece wiring board coated with a metal plating film whose thickness is approximate to the conductor portion of each wiring board and It has become. In addition, a conductive paste is gradually formed in the manufacturing process, for example, in a taper shape, between the front surface, the back surface, or the internal insulating layer of the ear portion formed by laminating a plurality of insulating layers made of a ceramic layer or the like. The tie bar for plating can be easily formed without greatly increasing the number of steps or making it complicated, for example, by printing with a pattern in which the width changes stepwise like a stepped shape. .
The term “gradual” means that the width increases in a tapered pattern, for example, from a position close to the plating electrode to a position away from the plating electrode. In addition, the “stepwise” means that the width is widened by, for example, a stepped pattern of a plurality of steps.

更に、本発明には、前記メッキ用電極は、前記耳部の外側面に複数個が形成され、隣接する2つのメッキ用電極の間を接続する前記メッキ用タイバーの幅は、各メッキ用電極に近接する位置で最も狭く、且つ各メッキ用電極から最も離れた位置で最も広い、多数個取り配線基板(請求項3)も含まれる。
これによれば、製品領域において、前記隣接する2つのメッキ用電極の何れかに比較的接近する外周側の配線基板と、何れのメッキ用電極からも比較的離れている配線基板とのどちらであっても、導通経路の長短に伴う導通抵抗の差が小さいので、該配線基板ごとの導体部分に厚みが近似した金属メッキ被膜の被覆された多数個取り配線基板となっている。
Further, according to the present invention, a plurality of the plating electrodes are formed on the outer surface of the ear portion, and the width of the plating tie bar connecting between the two adjacent plating electrodes is set to each plating electrode. Also included is a multi-wiring board (Claim 3) that is narrowest at a position close to, and widest at a position farthest from each electrode for plating.
According to this, in the product area, either the outer peripheral wiring board that is relatively close to one of the two adjacent plating electrodes or the wiring board that is relatively far from any of the plating electrodes. Even in such a case, since the difference in conduction resistance due to the length of the conduction path is small, the wiring board is a multi-piece wiring board in which the conductor portion of each wiring board is coated with a metal plating film whose thickness is approximate.

また、本発明には、前記耳部のうち、少なくとも平面視で対向する一対の耳辺ごとに複数のメッキ用電極が形成され、耳辺ごとで隣接する2つのメッキ用電極の間を接続する前記メッキ用タイバーの幅は、各メッキ用電極に近接する位置で最も狭く、且つ各メッキ用電極から最も離れた位置で最も広い、多数個取り配線基板(請求項4)も含まれる。
これによれば、製品領域を挟んで対向する一対の耳辺ごとに複数のメッキ用電極が形成され、各耳辺で隣接する2つのメッキ用電極の間を接続する前記メッキ用タイバーの幅が、各メッキ用電極に近接する位置で最も狭くされ、且つ各メッキ用電極から最も離れた位置で最も広くなっている。その結果、製品領域におけるどの位置の配線基板に対しても、比較的均一なメッキ電流が流されているので、配線基板ごとの導体部分に厚みが近似した金属メッキ被膜の被覆された多数個取り配線基板となっている。
Further, in the present invention, a plurality of plating electrodes are formed for each pair of ear sides facing each other in plan view, and two adjacent plating electrodes are connected for each ear side. The width of the tie bar for plating includes the multi-piece wiring board (Claim 4) that is narrowest at a position close to each plating electrode and widest at a position farthest from each plating electrode.
According to this, a plurality of plating electrodes are formed for each pair of ear sides facing each other across the product region, and the width of the plating tie bar connecting between two adjacent plating electrodes at each ear side is It is narrowest at a position close to each plating electrode, and is widest at a position farthest from each plating electrode. As a result, since a relatively uniform plating current is applied to the wiring board at any position in the product area, a large number of conductors on each wiring board covered with a metal plating film whose thickness is approximated. It is a wiring board.

更に、本発明には、前記メッキ用タイバーの厚みは、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって厚くなっている、多数個取り配線基板(請求項5)も含まれる。
これによれば、メッキ用タイバーは、メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、幅と共に厚みも増大しているので、製品領域におけるどの位置の配線基板であっても、メッキ用電極との導通経路の長短に伴う導通抵抗の差を一層低減している。従って、配線基板ごとの導体部分に厚みが近似した金属メッキ被膜の被覆された多数個取り配線基板となっている。しかも、耳部の表・裏面の幅寸法を抑制できのため、多数個取り配線基板の小型化も可能となる
Further, according to the present invention, the multi-cavity wiring board has a thickness of the plating tie bar that increases from a position close to the plating electrode toward a position away from the plating electrode. Is also included.
According to this, since the plating tie bar increases in thickness and thickness from a position close to the plating electrode to a position away from the plating electrode, it can be located at any position in the product area. However, the difference in conduction resistance due to the length of the conduction path with the plating electrode is further reduced. Therefore, the wiring board is a multi-piece wiring board in which the conductor portion of each wiring board is coated with a metal plating film whose thickness is approximate. Moreover, since the width of the front and back surfaces of the ears can be suppressed, it is possible to reduce the size of the multi-piece wiring board.

加えて、本発明には、前記メッキ用タイバーの厚みは、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、漸次的に広くなっているか、または段階的に厚くなっている、多数個取り配線基板(請求項6)も含まれる。
これによれば、メッキ用タイバーは、メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、幅と共に厚みも漸次的または段階的に増大しているので、製品領域におけるどの位置の配線基板であっても、メッキ用電極との導通経路の長短に伴う導通抵抗の差を一層確実に低減することが可能となる。
尚、前記メッキ用タイバーにおいて、該タイバーの幅と共に厚みも大となる部分には、耳部の表面または裏面から外側に突出する形態、あるいは該耳部の内部に食い込む形態とが含まれる。
In addition, according to the present invention, the thickness of the plating tie bar gradually increases or gradually increases from a position close to the plating electrode toward a position away from the plating electrode. A multi-piece wiring board (Claim 6) is also included.
According to this, since the plating tie bar gradually or stepwisely increases in width and thickness from a position close to the plating electrode to a position away from the plating electrode, Even in the position of the wiring board, the difference in conduction resistance due to the length of the conduction path with the plating electrode can be more reliably reduced.
In the plating tie bar, the portion where the thickness increases with the width of the tie bar includes a form protruding outward from the front or back surface of the ear part or a form biting into the inside of the ear part.

本発明による一形態の多数個取り配線基板を示す平面図。The top view which shows the multi-piece wiring board of one form by this invention. 図1中のX−X線の矢視に沿った垂直断面図。FIG. 2 is a vertical sectional view taken along line XX in FIG. 1. 図2中のY−Y線の矢視に沿った水平断面図。The horizontal sectional view along the arrow of the YY line in FIG. 本発明による異なる形態の多数個取り配線基板を示す平面図。The top view which shows the multi-cavity wiring board of a different form by this invention. 図4中のZ−Z線の矢視に沿った垂直断面図。FIG. 5 is a vertical sectional view taken along the line ZZ in FIG. 4. 図5中で左側に示す部分の拡大断面図。The expanded sectional view of the part shown on the left side in FIG. 上記多数個取り配線基板の応用形態を示す部分平面図。The partial top view which shows the application form of the said multi-piece wiring board. 前記多数個取り配線基板の変形形態を示す部分平面図。The partial top view which shows the deformation | transformation form of the said multi-piece wiring board. 上記多数個取り配線基板の応用形態を示す部分平面図。The partial top view which shows the application form of the said multi-piece wiring board. 別異な形態の多数個取り配線基板を示す部分平面図。The partial top view which shows the multi-cavity wiring board of another form. 図10中のU−U線の矢視に沿った垂直断面図。FIG. 11 is a vertical sectional view taken along the line U-U in FIG. 10. 別なる形態の多数個取り配線基板を示す部分平面図。The partial top view which shows the multi-piece wiring board of another form. 図12中のV−V線の矢視に沿った垂直断面図。FIG. 13 is a vertical sectional view taken along the line VV in FIG.

以下において、本発明を実施するための形態について説明する。
図1は、本発明による一形態の多数個取り配線基板1aを示す平面図、図2は、図1中のX−X線の矢視に沿った垂直断面図、図3は、図2中のY−Y線の矢視に沿った水平断面図である。
多数個取り配線基板1aは、図1〜図3に示すように、表面2および裏面3を有し且つ2層(複数)のセラミック層(絶縁層)s1,s2を積層してなり、厚み方向に沿った平面視で長方形(矩形)を呈する複数の配線基板pを縦横に沿って配列した製品領域Paと、上記と同じセラミック層s1,s2を積層してなり、上記製品領域Paの外周に沿って位置し且つ平面視が矩形枠状の耳部5と、該耳部5のうち、図1,図3で左右一対の耳辺5の外側面4に一対(複数)ずつ形成したメッキ用電極6と、を含んでいる。該メッキ用電極6は、耳部5の外側面4に設けた平面視がほぼ半円形の凹部7の内壁面に沿ったほぼ半円筒体である。
尚、上記表面2および裏面3は、製品領域Paと耳部5とに共通している。
また、上記セラミック層s1,s2は、例えば、アルミナを主成分としている。
更に、図1,図3中の破線は、仮想の切断予定面cfを示している。
Hereinafter, modes for carrying out the present invention will be described.
FIG. 1 is a plan view showing a multi-piece wiring board 1a according to an embodiment of the present invention, FIG. 2 is a vertical sectional view taken along line XX in FIG. 1, and FIG. It is a horizontal sectional view in alignment with the arrow of the YY line.
As shown in FIGS. 1 to 3, the multi-piece wiring board 1 a has a front surface 2 and a back surface 3, and is formed by laminating two (plural) ceramic layers (insulating layers) s <b> 1 and s <b> 2. A product region Pa in which a plurality of wiring boards p exhibiting a rectangle (rectangle) in a plan view along the vertical direction and the ceramic layers s1 and s2 as described above are stacked, and is formed on the outer periphery of the product region Pa. A pair of (a plurality of) ears 5 that are positioned along the rectangular frame shape in plan view and are formed on the outer surfaces 4 of the pair of left and right ear sides 5 in FIGS. 1 and 3. And an electrode 6. The plating electrode 6 is a substantially semi-cylindrical body along the inner wall surface of the concave portion 7 provided on the outer side surface 4 of the ear portion 5 in a plan view.
The front surface 2 and the back surface 3 are common to the product region Pa and the ear portion 5.
The ceramic layers s1 and s2 contain, for example, alumina as a main component.
Furthermore, the broken line in FIG. 1, FIG. 3 has shown the virtual cutting plan surface cf.

図1,図2に示すように、製品領域Paの表面2には、縦横に隣接する4個の配線基板pの各隅部に跨り且つ平面視が比較的大きな正方形の表面導体10と、製品領域Paの最外側に沿って隣接する2個の配線基板pの各隅部に跨り且つ平面視が長方形の表面導体11と、製品領域Paの四隅に位置する配線基板pの各外隅部に形成され且つした平面視が比較的小さな正方形の表面導体12と、が形成されている。即ち、追って切断予定面cfに沿って個片化された際に、得られる配線基板pごとの表面2の四隅には、追って4個のパッドが個別に形成される。
図2,図3に示すように、前記セラミック層s1,s2間の耳部5のうち、左右一対の長辺の耳辺5には、メッキ用タイバー15が対向して形成され、上下一つの短辺の耳辺5には、接続用タイバー18が対向して形成されている。上記メッキ用タイバー15は、接続線14を介してメッキ用電極6の中央部と接続し且つ該メッキ用電極6に近接する位置16から、上記メッキ用電極6より最も離れた位置17に向かって、幅がテーパ状(漸次的)15tに広くなるように形成されている。上下に隣接するメッキ用電極6,6間に位置するメッキ用タイバー15においても、各メッキ用電極6から最も離れた位置17に向かって漸次的に広くなっている。一方、左右の上記メッキ用タイバー15の上・下端の位置17,17間を接続する上下の各接続用タイバー18は、幅が一定の帯状を呈している。
As shown in FIGS. 1 and 2, the surface 2 of the product region Pa includes a square surface conductor 10 that straddles the corners of four wiring boards p adjacent vertically and horizontally and has a relatively large plan view, and a product. A surface conductor 11 having a rectangular shape in plan view, straddling each corner of two wiring boards p adjacent to each other along the outermost side of the area Pa, and each outer corner of the wiring board p positioned at the four corners of the product area Pa. The formed surface conductors 12 having a square shape that is relatively small in plan view are formed. That is, when separated into pieces along the scheduled cutting plane cf, four pads are individually formed at the four corners of the surface 2 of each wiring board p obtained.
As shown in FIGS. 2 and 3, among the ear portions 5 between the ceramic layers s <b> 1 and s <b> 2, a pair of left and right long side ear sides 5 are formed with facing plating tie bars 15, and one upper and lower side. A tie bar 18 for connection is formed to face the short edge 5. The plating tie bar 15 is connected to the central portion of the plating electrode 6 through the connection line 14 and moves from a position 16 close to the plating electrode 6 to a position 17 farthest from the plating electrode 6. , The width is formed to be tapered (gradually) 15t. The plating tie bar 15 located between the upper and lower adjacent plating electrodes 6 and 6 is also gradually widened toward the position 17 farthest from each plating electrode 6. On the other hand, the upper and lower connecting tie bars 18 that connect the upper and lower positions 17, 17 of the left and right plating tie bars 15 have a band shape with a constant width.

図2,図3に示すように、前記セラミック層s1,s2間には、耳部5の内周側と製品領域Paの最外側に沿って配列された複数の配線基板pの外隅、あるいは、製品領域Pa内で隣接する4個の配線基板pの各隅部に跨って形成された平面視がほぼ正方形の配線部(導体部分)8と、該配線部8,8同士間を接続する平面視がクランク形状の連絡配線9と、最外側の配線部8と前記メッキ用タイバー15とを接続する接続導体9jとが形成されている。上記配線部8ごとの中心部には、前記セラミック層s1,s2を厚み方向に貫通するスルーホールhが位置しており、該スルーホールhの内壁面に沿って円筒形状のスルーホール導体tdが形成されている。該スルーホール導体tdを介して、各配線部8と前記表面導体10,11,12とが導通可能されている。図2に示すように、セラミック層s2側の裏面3には、前記表面導体10〜12と同様な複数の裏面導体19が形成されている。該裏面導体19も、上記スルーホール導体tdを介して、各配線部8および前記表面導体10〜12と個別に導通可能されている。   As shown in FIGS. 2 and 3, between the ceramic layers s1 and s2, the outer corners of a plurality of wiring boards p arranged along the inner peripheral side of the ear portion 5 and the outermost side of the product region Pa, or The wiring portion (conductor portion) 8 formed in a plan view extending over each corner of the four wiring substrates p adjacent in the product region Pa is connected to the wiring portions 8 and 8 having a substantially square shape. A connecting wire 9 having a crank shape in plan view and a connecting conductor 9j for connecting the outermost wiring portion 8 and the plating tie bar 15 are formed. A through hole h penetrating the ceramic layers s1 and s2 in the thickness direction is located at the center of each wiring part 8, and a cylindrical through hole conductor td is formed along the inner wall surface of the through hole h. Is formed. Each wiring portion 8 and the surface conductors 10, 11, and 12 can be electrically connected to each other through the through-hole conductor td. As shown in FIG. 2, a plurality of back surface conductors 19 similar to the surface conductors 10 to 12 are formed on the back surface 3 on the ceramic layer s2 side. The back conductor 19 is also individually conductive with each wiring portion 8 and the front conductors 10 to 12 through the through-hole conductor td.

即ち、追って切断予定面cfに沿って個片化した際の配線基板pごとのセラミック層s1,s2間には、四隅付近に電気的に独立した4個の配線部が配設され、これらの配線部は四隅の外側面に露出する凹溝導体を介して、表面2側のパッドや裏面3側の裏面導体と導通される。
尚、前記メッキ用電極6、配線部8、連絡配線9、接続導体9j、表面導体10〜12、メッキ用タイバー15、接続用タイバー18、裏面導体19、スルーホール導体tdは、例えば、WあるいはMoからなる。
また、前記メッキ用タイバー15は、追って前記セラミック層s2となるグリーンシートの表面に、W粉末などを含む導電性ペーストを、前記パターンに倣って印刷した後、常法により積層・焼成することで、容易に形成されたものである。
That is, four electrically independent wiring portions are disposed near the four corners between the ceramic layers s1 and s2 for each wiring board p when separated into pieces along the planned cutting plane cf. The wiring portion is electrically connected to the pad on the front surface 2 side and the back surface conductor on the back surface 3 side through the recessed groove conductors exposed on the outer surfaces of the four corners.
The plating electrode 6, the wiring portion 8, the connection wiring 9, the connection conductor 9 j, the front conductors 10 to 12, the plating tie bar 15, the connection tie bar 18, the back conductor 19, and the through-hole conductor td are, for example, W or It consists of Mo.
In addition, the plating tie bar 15 is obtained by printing a conductive paste containing W powder or the like on the surface of the green sheet to be the ceramic layer s2 later according to the pattern, and then laminating and baking the paste by a conventional method. It is easily formed.

以上のような多数個取り配線基板1aによれば、セラミック層s1,s2間の耳部5において、左右一対の耳辺5に対向して形成された一対のメッキ用タイバー15の幅は、前記一対のメッキ用電極6に近接する位置16から該メッキ用電極6から離れた位置17に向かって、テーパ状(漸次的)15tに広くなっている。その結果、メッキ用電極6の比較的近くに位置する製品領域Paの最外側の配線基板pと、メッキ用電極6から比較的離れた製品領域Paの中央側に位置する配線基板pとの間においても、導通経路の長短に伴う導通抵抗の差が小さくされている。従って、メッキ用電極6、メッキ用タイバー15、接続配線9j、および接続線9を介してメッキ電流が、製品領域Paのどの位置における配線基板pに対しても、比較的均一に流されるため、配線基板pごとの表・裏面導体10〜12,19にNiメッキ被膜やAuメッキ被膜が近似した厚みで被覆した多数個取り配線基板1aとされている。   According to the multi-piece wiring board 1a as described above, the width of the pair of plating tie bars 15 formed facing the pair of left and right ear sides 5 in the ear portion 5 between the ceramic layers s1 and s2 is as described above. From a position 16 close to the pair of plating electrodes 6 toward a position 17 away from the plating electrode 6, the width is gradually increased in a tapered shape (gradually) 15t. As a result, between the outermost wiring board p of the product area Pa located relatively close to the plating electrode 6 and the wiring board p located on the center side of the product area Pa relatively far from the plating electrode 6. The difference in conduction resistance due to the length of the conduction path is also reduced. Therefore, since the plating current flows relatively uniformly to the wiring board p at any position in the product area Pa through the plating electrode 6, the plating tie bar 15, the connection wiring 9j, and the connection line 9, The front and back conductors 10 to 12 and 19 for each wiring board p are formed as a multi-piece wiring board 1a in which a Ni plating film or an Au plating film is coated with an approximate thickness.

図4は、異なる形態の多数個取り配線基板1bを示す平面図、図5は、図4中のZ−Z線の矢視に沿った垂直断面図、図6は、図5中で左側に示す部分の拡大断面図である。
多数個取り配線基板1bは、図4〜図6に示すように、表面2および裏面3を有し且つ3層のセラミック層s1〜s3を積層してなり、厚み方向に沿った平面視で長方形を呈する複数の配線基板pを互いに離隔しつつ縦横に沿って配列した製品領域Paと、上記と同じセラミック層s1〜s3を積層してなり、上記製品領域Paの外周に沿って位置し且つ平面視が矩形枠状の耳部5と、該耳部5のうち、図4で左右一対の耳辺5の外側面4に一対ずつ形成した前記同様のメッキ用電極6と、を含んでいる。
尚、セラミック層s1〜s3も、例えばアルミナを主成分としている。
4 is a plan view showing a multi-piece wiring board 1b of a different form, FIG. 5 is a vertical sectional view taken along the line ZZ in FIG. 4, and FIG. 6 is on the left side in FIG. It is an expanded sectional view of the part shown.
As shown in FIGS. 4 to 6, the multi-piece wiring board 1 b has a front surface 2 and a back surface 3, and is formed by laminating three ceramic layers s <b> 1 to s <b> 3, and is rectangular in plan view along the thickness direction. A product region Pa in which a plurality of wiring boards p exhibiting the above are arranged along the vertical and horizontal directions while being spaced apart from each other, and the same ceramic layers s1 to s3 as described above are laminated, and are located along the outer periphery of the product region Pa and are planar. The ear part 5 has a rectangular frame shape, and the same electrode 6 for plating formed on the outer surface 4 of the pair of left and right ear sides 5 in FIG.
The ceramic layers s1 to s3 are also mainly composed of alumina, for example.

図4に示すように、前記セラミック層s1の表面2の耳部5のうち、左右一対の長辺の耳辺5には、メッキ用タイバー25が対向して形成され、上下一つの短辺の耳辺5には、接続用タイバー28が対向して形成されている。上記メッキ用タイバー25は、接続線14を介してメッキ用電極6の中央部と接続し且つ該メッキ用電極6に近接する位置26から、上記メッキ用電極6から最も離れた位置27に向かって、幅が階段状(段階的)25sに広くなるように形成されている。上下に隣接するメッキ用電極6,6間に位置するメッキ用タイバー25においても、各メッキ用電極6から最も離れた位置27に向かって段階的に広くなっている。一方、左右の上記メッキ用タイバー25の上・下端の位置27,27間を接続する上下の各接続用タイバー28は、幅が一定の帯状を呈している。   As shown in FIG. 4, a plating tie bar 25 is formed on the pair of left and right long sides 5 of the ears 5 on the surface 2 of the ceramic layer s1 so as to face each other. A tie bar for connection 28 is formed on the ear side 5 so as to face the ear side 5. The plating tie bar 25 is connected to the central portion of the plating electrode 6 via the connection line 14 and moves from a position 26 close to the plating electrode 6 to a position 27 farthest from the plating electrode 6. , The width is formed to be stepped (stepwise) 25s. Also in the plating tie bar 25 located between the upper and lower adjacent plating electrodes 6, 6, the width is gradually increased toward the position 27 farthest from each plating electrode 6. On the other hand, the upper and lower connecting tie bars 28 that connect the upper and lower positions 27, 27 of the left and right plating tie bars 25 have a band shape with a constant width.

図4〜図6に示すように、製品領域Pa内において、互いに離れて縦横に配列された複数の配線基板pは、表面2に開口し且つ平面視が長方形を呈するキャビティ23を有し、該キャビティ23の周囲を囲むセラミック層s1の表面2に沿って平面視が長方形の封止用の導体枠(導体部分)20が個別に形成されている。左右に隣接する配線基板p,pの導体枠20,20間は、接続線21を介して接続され、製品領域Paの最外側に位置する配線基板pごとの導体枠20は、接続導体22を介して左右のメッキ用タイバー25と個別に接続されている。
個々の配線基板pにおいて、キャビティ23の底面に露出する最下層のセラミック層s3の表面には、一対の接続端子24が形成され、該接続端子24は、図6に示すように、セラミック層s3の裏面3に形成された一対の裏面導体29と、該セラミック層s3を貫通するスルーホール導体tdを介して個別に導通可能とされている。更に、配線基板pごとにおける一対の裏面導体29は、セラミック層s1〜s3を貫通するスルーホール導体tdを介して、表面2側の導体枠20と個別に導通可能とされている。
As shown in FIG. 4 to FIG. 6, in the product region Pa, the plurality of wiring boards p arranged vertically and horizontally apart from each other have a cavity 23 that opens on the surface 2 and has a rectangular shape in plan view. A conductor frame (conductor portion) 20 for sealing having a rectangular plan view is individually formed along the surface 2 of the ceramic layer s1 surrounding the cavity 23. The conductor frames 20 and 20 of the wiring boards p and p adjacent to each other on the left and right are connected via a connection line 21, and the conductor frame 20 for each wiring board p located on the outermost side of the product area Pa includes a connection conductor 22. Via the left and right tie bars 25 for plating.
In each wiring board p, a pair of connection terminals 24 are formed on the surface of the lowermost ceramic layer s3 exposed on the bottom surface of the cavity 23, and the connection terminals 24 are connected to the ceramic layer s3 as shown in FIG. The pair of back surface conductors 29 formed on the back surface 3 and the through-hole conductors td penetrating the ceramic layer s3 can be individually conducted. Further, the pair of back surface conductors 29 for each wiring board p can be individually conducted to the conductor frame 20 on the front surface 2 side through through-hole conductors td penetrating the ceramic layers s1 to s3.

即ち、図4〜図6に示すように、左右の耳辺5に位置するメッキ用電極6は、接続線14、メッキ用タイバー25、接続導体22、および接続線21を介して、配線基板pごとの導体枠20と導通可能され、個々の配線基板pでは、長短2種類のスルーホール導体tdを介して、導体枠20と一対の接続端子24とが個別に導通可能とされている。
尚、図5,図6中の破線で示す切断予定面cfは、平面視で個々の配線基板pにおける導体枠20における四辺の外側辺に沿っている。
また、前記導体枠20、配線線21、接続配線22、接続端子24、メッキ用タイバー25、接続用タイバー28、裏面導体29、スルーホール導体tdは、例えば、WあるいはMoからなる。
更に、前記メッキ用タイバー25は、追って前記セラミック層s1となるグリーンシートの表面に、W粉末などを含む導電性ペーストを、前記パターンに倣って印刷した後、常法により積層・焼成することで、容易に形成されている。
加えて、切断予定面cfに沿って個片化された後の配線基板pにおいて、導体枠20は、キャビティ23の開口部を閉塞する金属製の蓋板とのロウ付けに活用され、且つ一対の接続端子23を含む回路におけるアースを兼ねるものでもある。
That is, as shown in FIGS. 4 to 6, the plating electrode 6 located on the left and right ear sides 5 is connected to the wiring board p via the connection line 14, the plating tie bar 25, the connection conductor 22, and the connection line 21. Each conductor frame 20 can be electrically connected to each other, and in each wiring board p, the conductor frame 20 and the pair of connection terminals 24 can be individually electrically connected through two types of long and short through-hole conductors td.
5 and 6, the planned cutting plane cf is shown along the outer sides of the four sides of the conductor frame 20 in each wiring board p in plan view.
The conductor frame 20, the wiring line 21, the connection wiring 22, the connection terminal 24, the plating tie bar 25, the connection tie bar 28, the back conductor 29, and the through-hole conductor td are made of, for example, W or Mo.
Further, the plating tie bar 25 is obtained by printing a conductive paste containing W powder or the like on the surface of the green sheet, which will be the ceramic layer s1 later, according to the pattern, and then laminating and firing by a conventional method. Easy to form.
In addition, in the wiring board p after being separated into pieces along the planned cutting plane cf, the conductor frame 20 is used for brazing with a metal lid plate that closes the opening of the cavity 23, and a pair It also serves as a ground in the circuit including the connection terminal 23.

以上のような多数個取り配線基板1bによれば、セラミック層s1の表面2における左右一対の耳辺(耳部)5に対向して形成された一対のメッキ用タイバー25の幅は、前記一対のメッキ用電極6に近接する位置26から該メッキ用電極6より離れた位置27に向かって、階段状(段階的)25sに広くなっている。その結果、メッキ用電極6の比較的近くに位置する製品領域Paの外周側の配線基板pと、メッキ用電極6から比較的離れた製品領域Paの中央側に位置する配線基板pとの間においても、導通経路の長短に伴う導通抵抗の差が抑制されている。
従って、メッキ用電極6、メッキ用タイバー25、接続配線22、および接続線21を介してメッキ電流が、製品領域Paのどの位置における配線基板pに対しても、比較的均一に流されるため、配線基板pごとの導体枠20、接続端子24、裏面導体29の表面に、Niメッキ被膜やAuメッキ被膜が近似した厚みで被覆した多数個取り配線基板1bとされている。
According to the multi-piece wiring board 1b as described above, the width of the pair of plating tie bars 25 formed facing the pair of left and right ear sides (ear portions) 5 on the surface 2 of the ceramic layer s1 is the above-mentioned pair. From the position 26 close to the plating electrode 6 toward the position 27 far from the plating electrode 6, a stepped (stepwise) 25 s is widened. As a result, between the wiring board p on the outer peripheral side of the product area Pa located relatively close to the plating electrode 6 and the wiring board p located on the center side of the product area Pa relatively far from the plating electrode 6. Also, the difference in conduction resistance due to the length of the conduction path is suppressed.
Accordingly, the plating current is caused to flow relatively uniformly to the wiring board p at any position in the product area Pa via the plating electrode 6, the plating tie bar 25, the connection wiring 22, and the connection line 21. A multi-piece wiring board 1b is obtained in which the surface of the conductor frame 20, the connection terminal 24, and the back conductor 29 for each wiring board p is coated with a Ni plating film or an Au plating film with an approximate thickness.

図7は、前記配線基板1bの応用形態である多数個取り配線基板1cを示す部分平面図である。
多数個取り配線基板1cは、図7に示すように、前記導体枠20、接続端子24、キャビティ23などを含む複数の配線基板pを縦横に配列した前記同様の製品領域Paと、その外側に位置する前記同様の耳部5とを備えている。該多数個取り配線基板1cが前記配線基板1bと相違するのは、左右の耳辺(耳部)5の表面2に形成されたメッキ用タイバー25が、該耳辺5の外側面4に設けたメッキ用電極6の中央部と直に接続し且つ該メッキ用電極6に近接する位置26から、上記メッキ用電極6より最も離れた位置27に向かって、幅がテーパ状(漸次的)25tに広くなるように形成されていることである。
また、上下の耳辺5の表面2に、上記位置27に隣接する位置の幅が狭く且つ各耳辺5の中央部に向かって幅がテーパ状(漸次的)28tに広くなったメッキ用タイバー28bが形成されていること、および図7の縦方向に沿って、上記メッキ用タイバー28bと、製品領域Pa内の外周側に位置する配線基板pごとの導体枠20との間を接続する接続配線22j、および縦方向に隣接する配線基板pごとの導体枠20,20間を接続する接続線21iとを更に形成したことも、前記配線基板1bとの相違点である。
FIG. 7 is a partial plan view showing a multi-piece wiring board 1c which is an applied form of the wiring board 1b.
As shown in FIG. 7, the multi-piece wiring board 1 c includes the same product region Pa in which a plurality of wiring boards p including the conductor frame 20, the connection terminals 24, the cavities 23, and the like are arranged vertically and horizontally, and the outside thereof. And the same ear portion 5 as described above. The multi-cavity wiring board 1 c is different from the wiring board 1 b in that plating tie bars 25 formed on the surface 2 of the left and right ear sides (ear portions) 5 are provided on the outer surface 4 of the ear side 5. The width is tapered (gradually) 25 t from a position 26 that is directly connected to the central portion of the plating electrode 6 and close to the plating electrode 6 to a position 27 farthest from the plating electrode 6. It is formed so as to be wide.
Further, a plating tie bar in which the width of the position adjacent to the position 27 is narrow on the surface 2 of the upper and lower ear edges 5 and the width is gradually increased toward the center of each ear edge 5 (gradually) 28t. 28b is formed, and connection is provided between the plating tie bar 28b and the conductor frame 20 for each wiring board p located on the outer peripheral side in the product area Pa along the vertical direction of FIG. Another difference from the wiring board 1b is that a wiring 22j and a connection line 21i for connecting the conductor frames 20 and 20 for each wiring board p adjacent in the vertical direction are further formed.

以上のような多数個取り配線基板1cによれば、左右一対のメッキ用タイバー25によって、前記配線基板1bと同様な効果が得られるのに加え、上下一対のメッキ用タイバー28b、縦方向に沿った接続配線22j、および接続線21iが更に併設されることで、表面2における複数の配線基板pごとの導体枠20を縦方向に沿った経路においても、各メッキ用電極6との距離の差を、製品領域Pa内のどの位置であっても、一層低減ないし抑制して均一化することができる。従って、各メッキ用電極6に給電されたメッキ電流が、製品領域Paのどの位置における配線基板pに対しても、比較的均一に流されるため、配線基板pごとの導体枠20などの表面にNiおよびAuメッキ皮膜を一層均一な厚みで被覆した多数個取り配線基板1cとすることができる。
尚、前記多数個取り配線基板1bにおいても、前記接続用タイバー28に替えて、メッキ用タイバー28bあるいは段階的に幅が変化するメッキ用タイバーを設け、更に前記接続配線22jおよび接続線21iを追加した形態としても良い。
また、前記多数個取り配線基板1aにおいても、前記接続用タイバー18に替えて、メッキ用タイバー28bあるいは段階的に幅が変化するメッキ用タイバーを設け、更に縦方向に沿った接続配線および接続線を追加した形態としても良い。
更に、前記多数個取り配線基板1a,1bの接続用タイバー18,28と配線基板pごとの間に、縦方向に沿った接続配線(22j)および接続線(21i)を追加した形態としても良い。
According to the multi-piece wiring board 1c as described above, the pair of left and right plating tie bars 25 provides the same effect as the wiring board 1b, and the pair of upper and lower plating tie bars 28b extends along the vertical direction. The connection wiring 22j and the connection line 21i are additionally provided, so that the distance from each plating electrode 6 is different also in the path along the longitudinal direction of the conductor frame 20 for each of the plurality of wiring boards p on the surface 2. Can be reduced or suppressed evenly at any position in the product area Pa. Accordingly, since the plating current supplied to each plating electrode 6 flows relatively uniformly to the wiring board p at any position in the product region Pa, the surface of the conductor frame 20 or the like for each wiring board p is applied. A multi-cavity wiring board 1c in which Ni and Au plating films are coated with a more uniform thickness can be obtained.
In the multi-piece wiring board 1b, instead of the connection tie bar 28, a plating tie bar 28b or a plating tie bar whose width changes stepwise is provided, and the connection wiring 22j and the connection line 21i are added. It is good also as the form which did.
Also in the multi-piece wiring board 1a, instead of the connection tie bar 18, a plating tie bar 28b or a plating tie bar whose width changes stepwise is provided, and further, connection wiring and connection lines along the vertical direction are provided. It is good also as a form which added.
Further, a connection wiring (22j) and a connection line (21i) along the vertical direction may be added between the connection tie bars 18 and 28 of the multi-piece wiring boards 1a and 1b and the wiring board p. .

図8は、前記多数個取り配線基板1aの変形形態1dを示す部分平面図である。
多数個取り配線基板1dは、図8に示すように、前記セラミック層s1,s2間における左右一対の耳辺5に、メッキ用電極6に近接する位置16から該メッキ用電極6より離れた位置17に向かって、階段状(段階的)15sに広くなっているメッキ用タイバー15を個別に形成したものであり、前記多数個取り配線基板1aと同様な効果を奏することが可能である。
図9は、前記多数個取り配線基板1dの応用形態1eを示す部分平面図である。
多数個取り配線基板1eは、図9に示すように、幅が階段状(段階的)15sに変化する左右一対の前記メッキ用タイバー15に加え、上下の耳辺5に、前記位置17に隣接する位置の幅が狭く且つ各耳辺5の中央部に向かって幅が階段状(段階的)18sに広くなるメッキ用タイバー18bが形成されると共に、および図9の縦方向に沿って、上記メッキ用タイバー18bと、製品領域Pa内の外周側に位置する配線基板pごとの配線部8との間を接続する接続配線9k、および縦方向に隣接する配線基板pごとの配線部8,8間を接続する接続線9iを更に追加して形成している。
FIG. 8 is a partial plan view showing a modified embodiment 1d of the multi-piece wiring board 1a.
As shown in FIG. 8, the multi-piece wiring board 1 d is positioned at a distance from the plating electrode 6 from a position 16 close to the plating electrode 6 on the pair of left and right ear edges 5 between the ceramic layers s 1 and s 2. The plating tie bars 15 that are widened stepwise (stepwise) 15 s are formed individually, and the same effects as those of the multi-cavity wiring board 1 a can be obtained.
FIG. 9 is a partial plan view showing an application form 1e of the multi-piece wiring board 1d.
As shown in FIG. 9, in addition to the pair of left and right plating tie bars 15 whose width changes stepwise (stepwise) 15s, the multi-piece wiring board 1e is adjacent to the upper and lower ear sides 5 and the position 17. A tie bar 18b for plating is formed in which the width of the position to be narrowed and the width is increased stepwise (stepwise) 18s toward the center of each ear edge 5 and along the vertical direction of FIG. Connection wiring 9k connecting between the plating tie bar 18b and the wiring portion 8 for each wiring board p located on the outer peripheral side in the product area Pa, and wiring portions 8 and 8 for each wiring board p adjacent in the vertical direction A connection line 9i is further added to connect them.

以上のような多数個取り配線基板1eによれば、前記多数個取り配線基板1a,1dによる効果に加え、上下一対のメッキ用タイバー18b、縦方向に沿った接続配線9k、および接続線9iが更に併設されることで、複数の配線基板pごとの配線部8,8の縦方向に沿った経路においても、各メッキ用電極6との距離の差を、製品領域Pa内のどの位置であっても、一層低減ないし抑制して均一化することができる。従って、各メッキ用電極6に給電されたメッキ電流が、製品領域Paのどの位置における配線基板pに対しても、比較的均一に流されているため、配線基板pごとの導体部8などの表面にNiメッキ皮膜およびAuメッキ皮膜を一層均一な厚みで被覆した多数個取り配線基板1eとなっている。
尚、前記多数個取り配線基板1aにおいても、前記接続用タイバー18に替えて、メッキ用タイバー18bあるいは漸次的に幅が変化するメッキ用タイバーを設け、更に縦方向に沿った接続配線および接続線を追加した形態としても良い。
According to the multi-piece wiring board 1e as described above, in addition to the effects of the multi-piece wiring boards 1a and 1d, there are a pair of upper and lower plating tie bars 18b, a connection wiring 9k along the vertical direction, and a connection line 9i. In addition, the difference in distance from each plating electrode 6 can be determined at any position in the product area Pa in the path along the vertical direction of the wiring portions 8 and 8 for each of the plurality of wiring boards p. However, it can be further reduced or suppressed and uniformized. Accordingly, since the plating current supplied to each plating electrode 6 flows relatively uniformly with respect to the wiring board p at any position in the product region Pa, the conductor portion 8 for each wiring board p, etc. A multi-cavity wiring board 1e is formed by coating the surface with a Ni plating film and an Au plating film with a more uniform thickness.
In the multi-piece wiring board 1a, instead of the connection tie bar 18, a plating tie bar 18b or a plating tie bar whose width gradually changes is provided, and further, connection wiring and connection lines along the vertical direction are provided. It is good also as a form which added.

図10は、前記配線基板1cの応用形態である多数個取り配線基板1fを示す部分平面図、図11は、図10中のU−U線の矢視に沿った垂直断面図である。
多数個取り配線基板1fは、図10に示すように、前記導体枠20、接続端子24、キャビティ23などを含む複数の配線基板pを縦横に配列した前記同様の製品領域Paと、その外側に位置する前記同様の耳部5とを備え、対向する一対の耳辺5には、メッキ用タイバー25の幅が、該耳辺5の外側面4に設けたメッキ用電極6の中央部と接続線14を介して接続し且つ該メッキ用電極6に近接する位置26から、上記メッキ用電極6より最も離れた位置27に向かって、テーパ状(漸次的)25tに広くなるように形成されている。
更に、多数個取り配線基板1fでは、図11に示すように、メッキ用タイバー25の厚みが、前記メッキ用電極6に近接する位置26から、該メッキ用電極6より最も離れた位置27vに向かって、テーパ状(漸次的)25tvに外向きに厚くされている。また、隣接する一対のメッキ用電極6,6間においても、メッキ用タイバー25の厚みが、前記メッキ用電極6に近接する位置26から、各メッキ用電極6より最も離れた位置27vに向かって、テーパ状(漸次的)25tvに厚くなっている。
FIG. 10 is a partial plan view showing a multi-piece wiring board 1f which is an application form of the wiring board 1c, and FIG. 11 is a vertical sectional view taken along the line U-U in FIG.
As shown in FIG. 10, the multi-cavity wiring substrate 1f includes the same product region Pa in which a plurality of wiring substrates p including the conductor frame 20, the connection terminals 24, the cavities 23, and the like are arranged vertically and horizontally, and the outside thereof. And a pair of opposing ear sides 5 having a width of a plating tie bar 25 connected to the central portion of the plating electrode 6 provided on the outer side surface 4 of the ear side 5. It is formed so as to increase in a taper shape (gradually) 25t from a position 26 connected via the wire 14 and close to the plating electrode 6 toward a position 27 farthest from the plating electrode 6. Yes.
Further, in the multi-piece wiring board 1f, as shown in FIG. 11, the thickness of the plating tie bar 25 is changed from the position 26 close to the plating electrode 6 to the position 27v farthest from the plating electrode 6. Thus, the thickness is increased outwardly in a tapered shape (gradually) 25 tv. Also, between the pair of adjacent plating electrodes 6, 6, the thickness of the plating tie bar 25 is from the position 26 close to the plating electrode 6 toward the position 27 v farthest from each plating electrode 6. The taper shape (gradual) is increased to 25 tv.

図12は、前記配線基板1bの応用形態である多数個取り配線基板1gを示す部分平面図、図13は、図12中のV−V線の矢視に沿った垂直断面図である。
多数個取り配線基板1gは、図12に示すように、前記同様の製品領域Paと耳部5とを備え、対向する一対の耳辺5には、メッキ用タイバー25の幅が、該耳辺5の外側面4に設けたメッキ用電極6の中央部と接続線14を介して接続し且つ該メッキ用電極6に近接する位置26から、上記メッキ用電極6より最も離れた位置27に向かって、階段状(段階的)25sに広くなるように形成されている。更に、多数個取り配線基板1gでは、図12に示すように、メッキ用タイバー25の厚みが、前記メッキ用電極6に近接する位置26から、該メッキ用電極6より最も離れた位置27vに向かって、階段状(段階的)25svに外向きに厚くされている。また、隣接する一対のメッキ用電極6,6間においても、メッキ用タイバー25の厚みが、前記メッキ用電極6に近接する位置26から、各メッキ用電極6より最も離れた位置27vに向かって、階段状(段階的)25svに厚くなっている。尚、前記メッキ用タイバー25の幅と厚みとは、前記位置26,27間の同じ位置で段階的に広くなり且つ厚くしたが、幅と厚みとの変化が前記同様であれば、前記位置26,27間の異なる位置で変化させても良い。
FIG. 12 is a partial plan view showing a multi-piece wiring board 1g which is an applied form of the wiring board 1b, and FIG. 13 is a vertical sectional view taken along the line VV in FIG.
As shown in FIG. 12, the multi-piece wiring board 1g includes the same product region Pa and the ear portion 5 as described above, and the width of the plating tie bar 25 is equal to the width of the pair of opposite ear sides 5. 5 from a position 26 that is connected to the central portion of the plating electrode 6 provided on the outer surface 4 via the connecting line 14 and is close to the plating electrode 6, to a position 27 that is farthest from the plating electrode 6. Thus, it is formed so as to widen in a stepped (stepwise) 25 s. Further, in the multi-piece wiring board 1g, as shown in FIG. 12, the thickness of the plating tie bar 25 is changed from the position 26 close to the plating electrode 6 to the position 27v farthest from the plating electrode 6. Thus, the thickness is increased outward in a stepped (stepwise) 25 sv manner. Also, between the pair of adjacent plating electrodes 6, 6, the thickness of the plating tie bar 25 is from the position 26 close to the plating electrode 6 toward the position 27 v farthest from each plating electrode 6. The stepped (stepwise) thickness is 25 sv. The width and thickness of the plating tie bar 25 are gradually increased and thickened at the same position between the positions 26 and 27. However, if the change in width and thickness is the same as the above, the position 26 , 27 may be changed at different positions.

以上のような多数個取り配線基板1f,1gによれば、メッキ用タイバー25の厚みを、前記位置26,27間において幅の拡がる変化と同様に変化させたので、製品領域Pa内のどの位置の配線基板pであっても、各メッキ用電極6との距離の差を、一層均一化することができる。従って、各メッキ用電極6に給電されたメッキ電流が、どの位置における配線基板pに対しても、比較的均一に流されるので、配線基板pごとの導体枠20などの表面にNiおよびAuメッキ皮膜を一層均一な厚みで被覆した多数個取り配線基板1f,1gとなっている。
尚、配線基板1f,1gにおけるメッキ用タイバー25の厚みは、セラミック層s1の内部に向かって漸次的または段階的に厚くなるような形態にしても良い。
また、前記多数個取り配線基板1a,1d,1eについても、前記メッキ用タイバー15の厚みを、前記位置16,17間において幅の拡がる変化と同様に変化させることで、製品領域Pa内のどの位置の配線基板pであっても、各メッキ用電極6との距離の差を、一層均一化することが可能である。
According to the multi-piece wiring boards 1f and 1g as described above, the thickness of the plating tie bar 25 is changed in the same manner as the change in which the width increases between the positions 26 and 27. Even with this wiring board p, the difference in distance from each plating electrode 6 can be made more uniform. Accordingly, since the plating current supplied to each plating electrode 6 flows relatively uniformly to the wiring board p at any position, Ni and Au plating is applied to the surface of the conductor frame 20 and the like for each wiring board p. The multi-cavity wiring boards 1f and 1g are coated with a more uniform thickness.
Note that the thickness of the plating tie bar 25 on the wiring boards 1f and 1g may be gradually or gradually increased toward the inside of the ceramic layer s1.
Also, with respect to the multi-piece wiring boards 1a, 1d, and 1e, by changing the thickness of the plating tie bar 15 in the same manner as the change in width between the positions 16 and 17, Even in the position of the wiring board p, the difference in distance from each plating electrode 6 can be made more uniform.

本発明は、以上において説明した各形態に限定されるものではない。
例えば、絶縁層は、前記アルミナ以外の高温焼成セラミック、あるいは低温焼成セラミックの一種であるガラス−セラミック、更には、エポキシなどの樹脂からなるものとしても良い。このうち、ガラス−セラミックやエポキシ系樹脂を用いた場合、前記メッキ用電極6、導体部8、メッキ用タイバー15,25、導体枠20などの導体は、Cu、Ag、Cu合金、あるいはAg合金が適用される。
また、前記メッキ用電極6は、耳部5の同じ耳辺5に1個のみ設けたり、あるいは3個以上を併設した形態としても良い。
更に、前記メッキ用電極6は、耳部5における四辺の耳辺5ごとに、1個以上を同数あるいは異なる数にして形成しても良い。かかる形態では、四辺の耳辺5ごとに、前記メッキ用タイバー15,25が配設される。
また、前記メッキ用タイバー15は、複数の絶縁層のうち、最上層の絶縁層の表面に配設しても良く、前記メッキ用タイバー25は、複数の絶縁層の間に配設しても良い。
The present invention is not limited to the embodiments described above.
For example, the insulating layer may be made of a high-temperature fired ceramic other than alumina, or a glass-ceramic which is a kind of low-temperature fired ceramic, and further a resin such as epoxy. Among these, when glass-ceramic or epoxy resin is used, conductors such as the electrode 6 for plating, the conductor portion 8, the tie bars 15 and 25 for plating, and the conductor frame 20 are Cu, Ag, Cu alloy, or Ag alloy. Applies.
Further, only one plating electrode 6 may be provided on the same edge 5 of the ear portion 5, or three or more may be provided side by side.
Furthermore, one or more of the plating electrodes 6 may be formed in the same number or different numbers for each of the four sides 5 of the ear 5. In this embodiment, the plating tie bars 15 and 25 are arranged for each of the four ear edges 5.
The plating tie bar 15 may be disposed on the surface of the uppermost insulating layer among the plurality of insulating layers, and the plating tie bar 25 may be disposed between the plurality of insulating layers. good.

更に、前記「漸次的」には、メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、曲線状に(カーブして)幅が拡がる形態も含まれる。
また、前記「段階的」には、メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、傾斜した複数の斜辺を介して幅が段階的に順次拡がる形態も含まれる。
更に、前記多数個取り配線基板1a〜1gにおいて、製品領域Paと耳部5との境界や、配線基板p,p間の境界に破線で示す仮想の切断予定面cfを配置した形態では、かかる切断予定面cfに沿ってシンター(剪断)加工することで、各配線基板pが個片化される。
加えて、前記多数個取り配線基板1a〜1gにおいて、前記切断予定面cfに替えて、表面2に開口する断面ほぼV字形の分割溝を形成したり、表面2と裏面3との双方に断面ほぼV字形の分割溝を一対対称に形成し、該分割溝に沿って曲げ加工することで、各配線基板pを個片化するようにしても良い。
Further, the “gradual” includes a form in which the width increases in a curved shape (curved) from a position close to the plating electrode to a position away from the plating electrode.
In addition, the “stepwise” includes a form in which the width gradually increases stepwise through a plurality of inclined sides from a position close to the plating electrode to a position away from the plating electrode.
Furthermore, in the multi-cavity wiring boards 1a to 1g, in the form in which a virtual cutting planned surface cf indicated by a broken line is arranged at the boundary between the product region Pa and the ear portion 5 or the boundary between the wiring boards p and p, Each wiring board p is separated into pieces by carrying out a sinter (shearing) process along the scheduled cutting surface cf.
In addition, in the multi-piece wiring boards 1a to 1g, instead of the planned cutting surface cf, a substantially V-shaped dividing groove opened on the front surface 2 is formed, or both the front surface 2 and the back surface 3 are cross-sectioned. A pair of substantially V-shaped dividing grooves may be formed symmetrically, and each wiring board p may be singulated by bending along the dividing grooves.

縦横に複数の配線基板が配列された製品領域と、メッキ用電極が外側面に形成された耳部とを併有し、上記製品領域内のどの位置における配線基板でも、導体部分に被覆された金属メッキ被膜の厚みが均一な多数個取り配線基板を確実に提供することができる。   A product region in which a plurality of wiring boards are arranged vertically and horizontally and an ear portion on which an electrode for plating is formed on the outer surface are combined, and the wiring board at any position in the product region is covered with a conductor portion. A multi-piece wiring board with a uniform thickness of the metal plating film can be provided reliably.

1a〜1g……………………多数個取り配線基板
5………………………………耳部/耳辺
6………………………………メッキ用電極
8………………………………配線部(導体部分)
9j,9i,22,22j…接続配線
15,25……………………メッキ用タイバー
16,26……………………メッキ用電極に近接する位置
17,27……………………メッキ用電極から離れた位置
20……………………………導体枠(導体部分)
Pa……………………………製品領域
p………………………………配線基板
s1〜s3……………………セラミック層(絶縁層)
15t,25t,25tv…テーパ状(漸次的)
15s,25s,25sv…階段状(段階的)
1a to 1g …………………… Multiple wiring board 5 ……………………………… Ear part / ear side 6 ……………………………… Plating electrode 8 ……………………………… Wiring part (conductor part)
9j, 9i, 22, 22j ... Connection wiring 15, 25 ............ Plating tie bar 16, 26 ........................... Positions close to the plating electrode 17, 27 ......... ......... position away from the electrode for plating 20 ……………………………… Conductor frame (conductor part)
Pa ………………………… Product area p ……………………………… Wiring board s1 to s3 …………………… Ceramic layer (insulating layer)
15t, 25t, 25tv ... tapered (gradual)
15s, 25s, 25sv ... stepped (stepwise)

Claims (6)

複数の絶縁層を積層してなり、厚み方向に沿った平面視で矩形を呈する複数の配線基板を縦横に沿って配列した製品領域と、
上記同様に絶縁層を積層してなり、上記製品領域の外周に沿って位置し且つ平面視が矩形枠状である耳部と、
上記耳部の外側面に形成したメッキ用電極と、
上記耳部に形成され、上記メッキ用電極と、上記製品領域内の最外側に位置する複数の配線基板の導体部分から延びた接続配線ごと、との間を導通するメッキ用タイバーとを含み、
上記メッキ用タイバーの幅は、上記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって広くなっている、
ことを特徴とする多数個取り配線基板。
A product region in which a plurality of insulating layers are stacked, and a plurality of wiring boards that are rectangular in a plan view along the thickness direction are arranged along the length and breadth,
In the same manner as described above, an insulating layer is laminated, and an ear portion that is located along the outer periphery of the product region and has a rectangular frame shape in plan view;
A plating electrode formed on the outer surface of the ear,
A plating tie bar formed between the ears and electrically connected between the electrode for plating and the connection wires extending from the conductor portions of the plurality of wiring boards located on the outermost side in the product region;
The width of the plating tie bar is increased from a position close to the plating electrode toward a position away from the plating electrode.
A multi-piece wiring board characterized by that.
前記メッキ用タイバーの幅は、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、漸次的に広くなっているか、または段階的に広くなっている、
ことを特徴とする請求項1に記載の多数個取り配線基板。
The width of the plating tie bar is gradually increased from a position close to the plating electrode to a position away from the plating electrode, or is gradually increased.
The multi-piece wiring board according to claim 1, wherein:
前記メッキ用電極は、前記耳部の外側面に複数個が形成され、隣接する2つのメッキ用電極の間を接続する前記メッキ用タイバーの幅は、各メッキ用電極に近接する位置で最も狭く、且つ各メッキ用電極から最も離れた位置で最も広い、
ことを特徴とする請求項1または2に記載の多数個取り配線基板。
A plurality of the plating electrodes are formed on the outer surface of the ear portion, and the width of the plating tie bar connecting between two adjacent plating electrodes is the narrowest at a position close to each plating electrode. And widest at the position farthest from each plating electrode,
The multi-piece wiring board according to claim 1, wherein the multi-piece wiring board is provided.
前記耳部のうち、少なくとも平面視で対向する一対の耳辺ごとに複数のメッキ用電極が形成され、耳辺ごとで隣接する2つのメッキ用電極の間を接続する前記メッキ用タイバーの幅は、各メッキ用電極に近接する位置で最も狭く、且つ各メッキ用電極から最も離れた位置で最も広い、
ことを特徴とする請求項1乃至3の何れか一項に記載の多数個取り配線基板。
Among the ear portions, a plurality of plating electrodes are formed for each pair of ear sides facing each other at least in plan view, and the width of the plating tie bar connecting between two adjacent plating electrodes for each ear side is: , Narrowest at a position close to each plating electrode, and widest at a position farthest from each plating electrode,
The multi-piece wiring board according to claim 1, wherein the wiring board is a multi-piece wiring board.
前記メッキ用タイバーの厚みは、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって厚くなっている、
ことを特徴とする請求項1乃至4の何れか一項に記載の多数個取り配線基板。
The thickness of the plating tie bar is increased from a position close to the plating electrode toward a position away from the plating electrode.
The multi-piece wiring board according to any one of claims 1 to 4, wherein the wiring board is a multi-piece wiring board.
前記メッキ用タイバーの厚みは、前記メッキ用電極に近接する位置から該メッキ用電極から離れた位置に向かって、漸次的に広くなっているか、または段階的に厚くなっている、
ことを特徴とする請求項請求項5に記載の多数個取り配線基板。
The thickness of the plating tie bar is gradually increased from a position close to the plating electrode to a position away from the plating electrode, or is gradually increased.
The multi-piece wiring board according to claim 5, wherein the wiring board is a multi-piece wiring board.
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