JP5430472B2 - 面形状計測装置 - Google Patents

面形状計測装置 Download PDF

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Publication number
JP5430472B2
JP5430472B2 JP2010083399A JP2010083399A JP5430472B2 JP 5430472 B2 JP5430472 B2 JP 5430472B2 JP 2010083399 A JP2010083399 A JP 2010083399A JP 2010083399 A JP2010083399 A JP 2010083399A JP 5430472 B2 JP5430472 B2 JP 5430472B2
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JP
Japan
Prior art keywords
point
measuring
reference point
measurement
test surface
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Expired - Fee Related
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JP2010083399A
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English (en)
Japanese (ja)
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JP2011095239A (ja
JP2011095239A5 (enExample
Inventor
隆一 佐藤
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010083399A priority Critical patent/JP5430472B2/ja
Priority to US12/891,648 priority patent/US8514407B2/en
Priority to EP10180668A priority patent/EP2306142A1/en
Publication of JP2011095239A publication Critical patent/JP2011095239A/ja
Publication of JP2011095239A5 publication Critical patent/JP2011095239A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2010083399A 2009-10-01 2010-03-31 面形状計測装置 Expired - Fee Related JP5430472B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010083399A JP5430472B2 (ja) 2009-10-01 2010-03-31 面形状計測装置
US12/891,648 US8514407B2 (en) 2009-10-01 2010-09-27 Surface shape measurement apparatus
EP10180668A EP2306142A1 (en) 2009-10-01 2010-09-28 Surface shape measurement apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009229993 2009-10-01
JP2009229993 2009-10-01
JP2010083399A JP5430472B2 (ja) 2009-10-01 2010-03-31 面形状計測装置

Publications (3)

Publication Number Publication Date
JP2011095239A JP2011095239A (ja) 2011-05-12
JP2011095239A5 JP2011095239A5 (enExample) 2013-05-16
JP5430472B2 true JP5430472B2 (ja) 2014-02-26

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Family Applications (1)

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JP2010083399A Expired - Fee Related JP5430472B2 (ja) 2009-10-01 2010-03-31 面形状計測装置

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US (1) US8514407B2 (enExample)
EP (1) EP2306142A1 (enExample)
JP (1) JP5430472B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5430473B2 (ja) * 2009-10-01 2014-02-26 キヤノン株式会社 面形状計測装置
US8526012B1 (en) 2012-04-17 2013-09-03 Laser Design, Inc. Noncontact scanning system
TWI457541B (zh) 2012-12-24 2014-10-21 Ind Tech Res Inst 物件表面之傾斜角的偵測方法、補償方法及其系統
DE102017202651A1 (de) * 2017-02-20 2018-08-23 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Kalibrierung mittels projizierter Muster mit virtueller Ebene
KR101968916B1 (ko) * 2017-03-21 2019-04-15 한국표준과학연구원 반사면 프로파일 측정 방법 및 장치
CN112146611B (zh) * 2019-06-28 2021-11-19 合肥欣奕华智能机器有限公司 一种检测头平行度的校准装置、校准方法及基板检测装置
CN110567686B (zh) * 2019-10-11 2024-03-29 淮阴师范学院 大口径光学反射望远镜的镜面品质检测装置及检测方法
CN111189389B (zh) * 2020-01-08 2021-07-23 逸美德科技股份有限公司 棱线损坏程度的检测方法及其装置
CN113758458B (zh) * 2021-08-31 2022-08-19 南京茂莱光学科技股份有限公司 一种复曲面镜的面形测量方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3836564A1 (de) * 1988-10-27 1990-05-03 Zeiss Carl Fa Verfahren zur pruefung von optischen elementen
US5003166A (en) * 1989-11-07 1991-03-26 Massachusetts Institute Of Technology Multidimensional range mapping with pattern projection and cross correlation
JP2764630B2 (ja) 1990-03-20 1998-06-11 横河電機株式会社 アブソリュート測長器
US5625454A (en) * 1995-05-24 1997-04-29 Industrial Technology Research Institute Interferometric method for optically testing an object with an aspherical surface
JP3501605B2 (ja) * 1996-12-27 2004-03-02 キヤノン株式会社 干渉計及び形状測定装置
JPH11257945A (ja) * 1998-03-11 1999-09-24 Ricoh Co Ltd プローブ式形状測定装置及び形状測定方法
JP3474448B2 (ja) 1998-09-01 2003-12-08 株式会社リコー 座標軸直角度誤差の校正方法及び三次元形状測定装置
JP2002116010A (ja) * 2000-10-04 2002-04-19 Ricoh Co Ltd 三次元形状測定方法及び装置
JP2002148025A (ja) * 2000-11-09 2002-05-22 Ricoh Co Ltd ３次元形状測定装置
US6771375B2 (en) 2001-06-20 2004-08-03 Zygo Corporation Apparatus and method for measuring aspherical optical surfaces and wavefronts
US6972849B2 (en) 2001-07-09 2005-12-06 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
US6714307B2 (en) * 2001-10-16 2004-03-30 Zygo Corporation Measurement of complex surface shapes using a spherical wavefront
CN1950669A (zh) * 2004-05-10 2007-04-18 皇家飞利浦电子股份有限公司 光学精密测量装置和方法
JP4730836B2 (ja) * 2005-09-15 2011-07-20 Ｊｆｅスチール株式会社 面歪の測定装置及び方法
US8224066B2 (en) * 2007-05-29 2012-07-17 Gerd Haeusler Method and microscopy device for the deflectometric detection of local gradients and the three-dimensional shape of an object
KR100956853B1 (ko) * 2008-04-04 2010-05-11 선문대학교 산학협력단 3차원 형상의 고속 형상측정장치 및 방법
JP5430473B2 (ja) * 2009-10-01 2014-02-26 キヤノン株式会社 面形状計測装置
JP5486379B2 (ja) * 2009-10-01 2014-05-07 キヤノン株式会社 面形状計測装置

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Publication number Publication date
JP2011095239A (ja) 2011-05-12
US20110080592A1 (en) 2011-04-07
US8514407B2 (en) 2013-08-20
EP2306142A1 (en) 2011-04-06

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