JP5414523B2 - 内部円錐回折に基づく光学装置 - Google Patents

内部円錐回折に基づく光学装置 Download PDF

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JP5414523B2
JP5414523B2 JP2009532913A JP2009532913A JP5414523B2 JP 5414523 B2 JP5414523 B2 JP 5414523B2 JP 2009532913 A JP2009532913 A JP 2009532913A JP 2009532913 A JP2009532913 A JP 2009532913A JP 5414523 B2 JP5414523 B2 JP 5414523B2
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light
optical
biaxial crystal
circular
polarization
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JP2010507125A (ja
JP2010507125A5 (enExample
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シラート，ガブリエル，ワイ．
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バイオアキシアル エスエーエス
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/08—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of polarising materials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Polarising Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Head (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2009532913A 2006-10-20 2007-10-19 内部円錐回折に基づく光学装置 Active JP5414523B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US86221406P 2006-10-20 2006-10-20
US60/862,214 2006-10-20
PCT/IB2007/004201 WO2008047245A2 (en) 2006-10-20 2007-10-19 Optical devices based on internal conical diffraction

Publications (3)

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JP2010507125A JP2010507125A (ja) 2010-03-04
JP2010507125A5 JP2010507125A5 (enExample) 2010-12-02
JP5414523B2 true JP5414523B2 (ja) 2014-02-12

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JP2009532913A Active JP5414523B2 (ja) 2006-10-20 2007-10-19 内部円錐回折に基づく光学装置

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US (1) US8514685B2 (enExample)
EP (1) EP2084488B1 (enExample)
JP (1) JP5414523B2 (enExample)
WO (2) WO2008047245A2 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2211343A1 (en) * 2009-01-27 2010-07-28 Thomson Licensing High data density optical recording medium
EP2565697B1 (en) * 2010-04-26 2020-07-01 Nikon Corporation Structural illumination microscope device
FR2966258B1 (fr) 2010-10-15 2013-05-03 Bioaxial Système de microscopie de superresolution de fluorescence et méthode pour des applications biologiques
KR101243269B1 (ko) 2010-12-22 2013-03-13 한국기계연구원 레이저 가공 시스템 및 이를 이용한 레이저 가공 방법
GB201121514D0 (en) 2011-12-14 2012-01-25 Univ Dundee Improvements in and relating to three dimensional stimulated emission depletion microscopy
FR2989472B1 (fr) 2012-04-13 2015-09-25 Bioaxial Procede et dispositif optique
JP6335160B2 (ja) * 2012-04-13 2018-05-30 バイオアキシアル エスエーエス 光学測定方法および光学測定装置
RU2642169C2 (ru) * 2012-12-21 2018-01-24 Пирелли Тайр С.П.А. Способ и устройство для контроля над шинами или соответствующими полуфабрикатами в производственной линии
GB2514993B (en) * 2013-03-22 2016-03-30 Lamda Guard Technologies Ltd Optical diode
WO2016092161A1 (fr) 2014-12-09 2016-06-16 Bioaxial Sas Procédé et dispositif de mesure optique
US10921255B2 (en) 2014-12-09 2021-02-16 Bioaxial Sas Optical measuring device and process
US10153838B1 (en) * 2016-12-28 2018-12-11 Facebook, Inc. Quad tracker with birefringent optics
JP7062882B2 (ja) * 2017-04-28 2022-05-09 富士通オプティカルコンポーネンツ株式会社 波長モニタ装置、光源装置及び光モジュール
JP2020533563A (ja) 2017-08-30 2020-11-19 バイオアキシアル エスエーエス 特異分布と深層学習とに基づく超解像計測法
CN110487212B (zh) * 2019-08-02 2021-04-16 中北大学 一种基于涡旋光螺旋相位相移干涉检测物体面型装置
US20210042909A1 (en) * 2019-08-07 2021-02-11 Kimball Electronics Indiana, Inc. Imaging system for surface inspection
GB202008691D0 (en) * 2020-06-09 2020-07-22 Ams Int Ag Ambient light sensing
CN113655625B (zh) * 2021-09-03 2023-09-05 西华大学 一种具有抗大气湍流能力的光束的装置
CN114136894B (zh) * 2021-11-28 2022-10-21 中国人民解放军国防科技大学 一种基于涡旋波片的偏振检测系统的误差校准方法及装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE552939A (enExample) * 1948-01-07
US4461543A (en) * 1982-03-26 1984-07-24 Sperry Corporation Electro optic switch
US4502762A (en) * 1982-11-12 1985-03-05 Northern Telecom Limited Dual wavelength optical system
FR2641091B1 (enExample) * 1988-12-27 1991-04-19 France Etat
JP2546388B2 (ja) * 1989-08-31 1996-10-23 日本電気株式会社 半導体レーザ装置の発振周波数安定化装置
US5315433A (en) * 1991-02-28 1994-05-24 Fuji Photo Film Co., Ltd. Optical wavelength converting apparatus
JPH06147986A (ja) * 1992-11-12 1994-05-27 Sadao Nakai 複屈折分布測定方法
US5694385A (en) * 1993-09-24 1997-12-02 Ricoh Comany, Ltd. Optical pickup apparatus
US5694382A (en) * 1994-04-05 1997-12-02 Hewlett-Packard Company Blank sector detection for optical disk drive
JPH07294739A (ja) * 1994-04-28 1995-11-10 Olympus Optical Co Ltd 偏光分離素子
JP3162254B2 (ja) * 1995-01-17 2001-04-25 三菱電機株式会社 レーザ加工装置
US5796701A (en) * 1995-06-23 1998-08-18 Sony Corporation Optical pickup and opto-magnetic signal reproducing apparatus
US5912748A (en) * 1996-07-23 1999-06-15 Chorum Technologies Inc. Switchable wavelength router
US6266313B1 (en) * 1996-12-20 2001-07-24 Pioneer Electronic Corporation Optical pickup for recording or reproducing system
US6909500B2 (en) * 2001-03-26 2005-06-21 Candela Instruments Method of detecting and classifying scratches, particles and pits on thin film disks or wafers
JPH11110811A (ja) * 1997-10-06 1999-04-23 Fujitsu Ltd 光学的情報記憶装置
US6134009A (en) * 1997-11-07 2000-10-17 Lucid, Inc. Imaging system using polarization effects to enhance image quality
US6704340B2 (en) * 2001-01-29 2004-03-09 Cymer, Inc. Lithography laser system with in-place alignment tool
US7034938B1 (en) * 2002-02-04 2006-04-25 The United States Of America As Represented By The Secretary Of The Air Force Non-scanning computed tomography imaging spectrophotometer
WO2005015141A1 (en) * 2003-07-08 2005-02-17 Marine Biological Laboratory Instantaneous polarization measurement system and method
WO2005117001A1 (ja) * 2004-05-27 2005-12-08 Konica Minolta Opto, Inc. 対物光学系、光ピックアップ装置、及び光ディスクドライブ装置
US7456962B2 (en) * 2005-02-07 2008-11-25 Meadowlark Optics, Inc. Conical refraction polarimeter
US7541600B2 (en) * 2005-07-15 2009-06-02 The Regents Of The University Of California Lithographic and measurement techniques using the optical properties of biaxial crystals
WO2007013648A1 (ja) * 2005-07-26 2007-02-01 National University Corporation Hokkaido University 光渦発生装置、微小物体操作装置、天体探査装置および偏光渦変換素子

Also Published As

Publication number Publication date
JP2010507125A (ja) 2010-03-04
WO2008051497A2 (en) 2008-05-02
EP2084488A2 (en) 2009-08-05
WO2008051497A3 (en) 2008-06-12
EP2084488B1 (en) 2017-03-22
WO2008047245A2 (en) 2008-04-24
US8514685B2 (en) 2013-08-20
EP2084488A4 (en) 2009-10-21
WO2008047245A3 (en) 2009-04-23
US20090168613A1 (en) 2009-07-02

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