JP5385054B2 - 放熱材料及びその製造方法 - Google Patents
放熱材料及びその製造方法 Download PDFInfo
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- JP5385054B2 JP5385054B2 JP2009195354A JP2009195354A JP5385054B2 JP 5385054 B2 JP5385054 B2 JP 5385054B2 JP 2009195354 A JP2009195354 A JP 2009195354A JP 2009195354 A JP2009195354 A JP 2009195354A JP 5385054 B2 JP5385054 B2 JP 5385054B2
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- heat dissipation
- concavo
- dissipation material
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- 239000000463 material Substances 0.000 title claims description 49
- 230000017525 heat dissipation Effects 0.000 title claims description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000758 substrate Substances 0.000 claims description 55
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 18
- 238000001020 plasma etching Methods 0.000 claims description 17
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 206010027339 Menstruation irregular Diseases 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 230000001788 irregular Effects 0.000 claims description 4
- 230000000737 periodic effect Effects 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 3
- 229910002804 graphite Inorganic materials 0.000 description 20
- 239000010439 graphite Substances 0.000 description 20
- 230000005855 radiation Effects 0.000 description 14
- 239000002041 carbon nanotube Substances 0.000 description 13
- 229910021393 carbon nanotube Inorganic materials 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 10
- 229910003460 diamond Inorganic materials 0.000 description 9
- 239000010432 diamond Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000005457 Black-body radiation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/14—Solid materials, e.g. powdery or granular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Organic Chemistry (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Carbon And Carbon Compounds (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Description
RFパワー:100-1000W
圧力:133-13300Pa (1-100Torr)
水素流量:5-500sccm
エッチング時間:1-100分
1)放熱材料は10cm×10cmであるが、図3(B)に示すように多孔質構造なため大きな比表面積を有し、ここでは表面積が0.2m2とする。この場合、表面温度300℃において、放射率Iは98%(つまり、反射率Rは2%)とする。
2)発熱部品としてパワーコンバータの雰囲気温度を100℃、熱対流はほとんどないものとする。
3)発熱部品としてのパワーコンバータのパワーを5kWとしてエネルギー変換効率を98%とすると、パワーコンバータは100Wの熱を発生する。この場合、放熱材料による熱放射量はシュテファン・ボルツマンの放射則に従う。つまり、放熱材料の総熱放射量Sは、
S = (Ts4 - Ta4)・A・I・σ
但し、Tsは放熱材料の表面の絶対温度(K)、
Taは雰囲気の絶対温度(K)、
Aは放熱材料の表面積(m2)、
Iは放熱材料の放射率、
σはシュテファン・ボルツマン定数で5.67×10-8W/(m2・K4)
で表わせる。従って、
S = ((300+273.15)4 - (100+273.15)4)×0.2×0.98×5.67×10-8
= 98.388W
このように、発熱部材としての5kWのパワーコンバータから発生した100Wの熱の98%を本発明に係る放熱材料を用いて散逸させることができる。
201:ナノ凹凸構造加工ステップ
Claims (13)
- 表面にナノメートルのオーダの第1の凹凸構造を形成した炭素系基板を具備し、
前記第1の凹凸構造のサイズより大きい不規則的周期の第2の凹凸構造を前記炭素系基板に形成した放熱材料。 - 前記第2の凹凸構造のサイズがサブミクロンのオーダ以上である請求項1に記載の放熱材料。
- 前記第2の凹凸構造が前記炭素系基板の表面に設けられた複数の凹みである請求項1に記載の放熱材料。
- 前記第2の凹凸構造が前記炭素系基板の表面に設けられた剣山構造である請求項1に記載の放熱材料。
- 炭素系基板の表面をナノメートルのオーダの第1の凹凸構造に加工する第1の凹凸構造加工工程と、
該第1の凹凸構造加工工程の前に、前記第1の凹凸構造のサイズより大きい不規則的周期の第2の凹凸構造を前記炭素系基板の表面に加工する第2の凹凸構造加工工程と
を具備する放熱材料の製造方法。 - 前記第2の凹凸構造のサイズがサブミクロンのオーダ以上である請求項5に記載の放熱材料の製造方法。
- 前記第1の凹凸構造加工工程がプラズマエッチング工程である請求項5に記載の放熱材料の製造方法。
- 前記第2の凹凸構造が前記炭素系基板の表面に設けられた複数の凹みである請求項5に記載の放熱材料の製造方法。
- 前記第2の凹凸構造加工工程が、
前記不規則的周期のパターンを有するフォトレジスト層を形成するフォトリソグラフィ工程と、
該フォトレジスト層を用いて前記炭素系基板の表面に前記凹みを形成するエッチング工程と、
該凹みの形成後に前記フォトレジスト層を除去する工程と
を具備する請求項8に記載の放熱材料の製造方法。 - 前記第2の凹凸構造が前記炭素系基板の表面に設けられた剣山構造である請求項5に記載の放熱材料の製造方法。
- 前記第2の凹凸構造加工工程が、機械的ルーリングエンジン切削工程を具備する請求項10に記載の放熱材料の製造方法。
- 前記第2の凹凸構造加工工程が機械的表面研磨工程を具備する請求項5に記載の放熱材料の製造方法。
- 前記第2の凹凸構造加工工程がレーザ照射工程を具備する請求項5に記載の放熱材料の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009195354A JP5385054B2 (ja) | 2009-08-26 | 2009-08-26 | 放熱材料及びその製造方法 |
US12/868,758 US20110052871A1 (en) | 2009-08-26 | 2010-08-26 | Heat dissipating material including carbon substrate with nanometer-order uneven structure and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2009195354A JP5385054B2 (ja) | 2009-08-26 | 2009-08-26 | 放熱材料及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2011049281A JP2011049281A (ja) | 2011-03-10 |
JP5385054B2 true JP5385054B2 (ja) | 2014-01-08 |
Family
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JP2009195354A Expired - Fee Related JP5385054B2 (ja) | 2009-08-26 | 2009-08-26 | 放熱材料及びその製造方法 |
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JP (1) | JP5385054B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5634805B2 (ja) * | 2010-09-07 | 2014-12-03 | スタンレー電気株式会社 | 金属含浸炭素系基板、これを含む放熱材料及び金属含浸炭素系基板の製造方法 |
EP2634817A4 (en) * | 2010-10-29 | 2017-06-07 | Stanley Electric Co., Ltd. | Power generation device, thermal power generation method and solar power generation method |
JP2013069547A (ja) * | 2011-09-22 | 2013-04-18 | Stanley Electric Co Ltd | 放熱基板及びその製造方法並びにその放熱基板を用いた光半導体装置 |
GB2519253A (en) * | 2012-08-06 | 2015-04-15 | Victor A Rivas | Nano-machined materials using femtosecond pulse-laser technologies for increased surface area and heat-power dissipation |
JP2014036187A (ja) * | 2012-08-10 | 2014-02-24 | Stanley Electric Co Ltd | 放熱構造及びこの放熱構造が設けられた発熱素子装置 |
US9349804B2 (en) | 2013-02-12 | 2016-05-24 | Infineon Technologies Ag | Composite wafer for bonding and encapsulating an SiC-based functional layer |
US20150136303A1 (en) * | 2013-05-28 | 2015-05-21 | Hugetemp Energy Ltd. | Method for manufacturing compound heat sink |
JP7232257B2 (ja) * | 2018-09-27 | 2023-03-02 | 株式会社カネカ | 異方性グラファイトおよび異方性グラファイト複合体 |
Family Cites Families (12)
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US3961104A (en) * | 1973-06-11 | 1976-06-01 | John Ernest Tanner | Internal cylindrical bearing surfaces |
US4973068A (en) * | 1988-03-15 | 1990-11-27 | University Of New Mexico | Differential surface roughness dynamic seals and bearings |
US4834400A (en) * | 1988-03-15 | 1989-05-30 | University Of New Mexico | Differential surface roughness dynamic seals and bearings |
JP3827245B2 (ja) * | 1995-11-21 | 2006-09-27 | 株式会社ジェイテクト | 機械部品 |
JPH10312778A (ja) * | 1997-05-14 | 1998-11-24 | Matsushita Electric Ind Co Ltd | 炭素材料からなる熱放射体、その製造方法およびその放射体を備えた熱放射光源 |
JP4238416B2 (ja) * | 1999-05-27 | 2009-03-18 | 宇部興産株式会社 | 多孔質炭化膜およびその製造方法 |
JP2001278608A (ja) * | 2000-03-31 | 2001-10-10 | Matsushita Electric Ind Co Ltd | 熱放射体の製造方法 |
US7011134B2 (en) * | 2000-10-13 | 2006-03-14 | Chien-Min Sung | Casting method for producing surface acoustic wave devices |
JP3934405B2 (ja) * | 2001-01-18 | 2007-06-20 | 大成ラミネーター株式会社 | グラファイトシートおよびグラファイトシートを用いた放熱装置 |
US20050088823A1 (en) * | 2003-10-22 | 2005-04-28 | Kabadi Ashok N. | Variable density graphite foam heat sink |
US20060257711A1 (en) * | 2005-05-12 | 2006-11-16 | Elhamid Mahmoud H A | Electrically conductive fluid distribution plate for fuel cells |
WO2010151886A2 (en) * | 2009-06-26 | 2010-12-29 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Nano-architectured carbon structures and methods for fabricating same |
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2009
- 2009-08-26 JP JP2009195354A patent/JP5385054B2/ja not_active Expired - Fee Related
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2010
- 2010-08-26 US US12/868,758 patent/US20110052871A1/en not_active Abandoned
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Publication number | Publication date |
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JP2011049281A (ja) | 2011-03-10 |
US20110052871A1 (en) | 2011-03-03 |
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