JP5381149B2 - 振動片および振動子 - Google Patents

振動片および振動子 Download PDF

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Publication number
JP5381149B2
JP5381149B2 JP2009037387A JP2009037387A JP5381149B2 JP 5381149 B2 JP5381149 B2 JP 5381149B2 JP 2009037387 A JP2009037387 A JP 2009037387A JP 2009037387 A JP2009037387 A JP 2009037387A JP 5381149 B2 JP5381149 B2 JP 5381149B2
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Japan
Prior art keywords
vibrating
connecting portion
arm
vibrating arm
arms
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Expired - Fee Related
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JP2009037387A
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English (en)
Japanese (ja)
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JP2010193331A5 (enrdf_load_stackoverflow
JP2010193331A (ja
Inventor
昌宏 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to JP2009037387A priority Critical patent/JP5381149B2/ja
Publication of JP2010193331A publication Critical patent/JP2010193331A/ja
Publication of JP2010193331A5 publication Critical patent/JP2010193331A5/ja
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Publication of JP5381149B2 publication Critical patent/JP5381149B2/ja
Expired - Fee Related legal-status Critical Current
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009037387A 2009-02-20 2009-02-20 振動片および振動子 Expired - Fee Related JP5381149B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009037387A JP5381149B2 (ja) 2009-02-20 2009-02-20 振動片および振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009037387A JP5381149B2 (ja) 2009-02-20 2009-02-20 振動片および振動子

Publications (3)

Publication Number Publication Date
JP2010193331A JP2010193331A (ja) 2010-09-02
JP2010193331A5 JP2010193331A5 (enrdf_load_stackoverflow) 2012-03-15
JP5381149B2 true JP5381149B2 (ja) 2014-01-08

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ID=42818863

Family Applications (1)

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JP2009037387A Expired - Fee Related JP5381149B2 (ja) 2009-02-20 2009-02-20 振動片および振動子

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JP (1) JP5381149B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5685962B2 (ja) * 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP2014165573A (ja) 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123788A (enrdf_load_stackoverflow) * 1973-03-30 1974-11-27
JPS5472695A (en) * 1977-11-21 1979-06-11 Citizen Watch Co Ltd Thin plate piezoelectric oscillator
JPS5853215A (ja) * 1981-09-25 1983-03-29 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JP2001196891A (ja) * 2000-01-07 2001-07-19 Citizen Watch Co Ltd 振動子
JP4715652B2 (ja) * 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片
JP5059387B2 (ja) * 2006-11-29 2012-10-24 日本電波工業株式会社 音叉型圧電振動片、圧電デバイスおよび音叉型圧電振動片の製造方法
JP2008224627A (ja) * 2007-03-15 2008-09-25 Sony Corp 角速度センサ、角速度センサの製造方法及び電子機器
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器

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Publication number Publication date
JP2010193331A (ja) 2010-09-02

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